CN109482991A - A kind of compound jet micro-nano processing method and processing unit (plant) - Google Patents
A kind of compound jet micro-nano processing method and processing unit (plant) Download PDFInfo
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- CN109482991A CN109482991A CN201910014040.4A CN201910014040A CN109482991A CN 109482991 A CN109482991 A CN 109482991A CN 201910014040 A CN201910014040 A CN 201910014040A CN 109482991 A CN109482991 A CN 109482991A
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- wire electrode
- electrolyte
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- fixing sleeve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/14—Making holes
- B23H9/16—Making holes using an electrolytic jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The invention discloses a kind of compound jet micro-nano processing method and processing unit (plant)s.The upper end of wire electrode is fixed, lower end passes through nozzle and forms projecting end；Electrolyte is added in nano-polishing particle, when electrolyte is sprayed by nozzle at high speeds, wire electrode projecting end is straightened and carries out radial position constraint to wire electrode by electrolyte jet stream；By the cathode of the upper termination narrow spaces burst of pulses electrolysis power of wire electrode, workpiece anode connects the anode of narrow spaces burst of pulses electrolysis power；Electrolysis is generated between wire electrode projecting end and workpiece Anode machining surface, nano-polishing particle carries out polishing action to workpiece Anode machining surface under electrolyte drive, the Compound Machining to workpiece Anode machining surface is realized, until the microstructure features needed for obtaining.The processing method and processing unit (plant) can effectively improve the locality of electrochemical micromachining, effectively inhibit dispersion corrosion phenomenon and improve mass transport process, can be realized the microstructure features highly-efficient processing of high-precision, great surface quality, high-aspect-ratio.
Description
Technical field
The invention belongs to technical field of micro and nano fabrication, and in particular to a kind of compound jet micro-nano processing method and processing dress
It sets.
Background technique
The microstructure features such as micropore, microflute high-tech arms equipment, aerospace equipment, automobile manufacture, medical instrument,
The fields such as smart machine, which suffer from, to be widely applied, and mainly has fine electric spark for the processing method of microstructure features at present
Processing technology, Micro-cutting Technology, laser processing technology, electrochemical Machining Technology etc..Wherein, electrochemical Machining Technology is a kind of
Anodic dissolution atom level removal metal material processing method, whether there is or not re cast layer, without tool loss, without heat affecting
Advantages such as area, high in machining efficiency and surface quality be good, therefore have great potentiality, scientific research and in terms of all
There is very more applications.
There are mainly two types of the electrochemical Machining Technologies for being directed to microstructure features both at home and abroad at present.
One kind be known as electrochemical micromachining, mainly using preparation micro tool electrode to workpiece carry out electrolysis punching or
It is electrolysed Milling Process, and power supply generally uses the pulse power of high frequency, improves the locality and precision of processing, therefore can add
The microstructure features that even several microns of tens microns of Chinese musical scale cun.But with the increase of working depth, mass transfer effect is reduced, electricity
It is difficult to solve product discharge, therefore the depth-to-width ratio of its machining feature is typically small, and still have certain dispersion corrosion phenomenon,
The locality of processing also needs further to be promoted.In addition, the preparation of micro tool electrode occupies longer time, also affect
The processing efficiency of electrochemical micromachining entirety.
Another kind is commonly referred to collectively as jet stream Electrolyzed Processing, the high speed electrolytic liquid for mainly using metal or glass atomizer to spray
Beam carries out electrochemical corrosion processing to workpiece, applies the high direct voltage of 100V or more between cathode and anode.There is processing efficiency
The advantages such as high, at low cost, adaptable to workpiece shapes, can also process the higher feature of depth-to-width ratio.But its machining feature
The size-constrained bore in nozzle size, it is not easy to realize tens microns even several microns feature processing, in addition its
Processing locality, machining accuracy and surface quality are relatively low.In order to improve the surface quality of jet stream Electrolyzed Processing, there is research
Abrasive material is added in personnel in the electrolytic solution, also realizes polishing action to workpiece surface while Electrolyzed Processing, makes surface quality
It improves.
Currently, it is also necessary to further increase processing quality, solve the high-precisions of microstructure features, high table such as micropore, microflute
Face quality, high-aspect-ratio and highly-efficient processing problem.
Summary of the invention
A technical problem to be solved by this invention is to provide a kind of compound jet micro-nano processing method, and the present invention is wanted
Another technical problem solved is to provide a kind of compound jet micro-nano technology device.
Compound jet micro-nano processing method of the invention the following steps are included:
A. the upper end of wire electrode is fixed, the lower end of wire electrode passes through nozzle and certain length that overhangs out, and it is outstanding to form wire electrode
Stretch end；
B. electrolyte is added in nano-polishing particle, electrolyte is wrapped in wire electrode surface, and electrolyte is sprayed by nozzle at high speeds
When, wire electrode projecting end is straightened and carries out radial position constraint to wire electrode by electrolyte jet stream；
C. by the cathode of the upper termination narrow spaces burst of pulses electrolysis power of wire electrode, workpiece anode connects narrow spaces burst of pulses electrolysis electricity
The anode in source；
D. there are processing between workpiece anode, wire electrode projecting end and workpiece Anode machining surface for machine tool chief axis drive nozzle
Gap, electrolyte jet stream spray to workpiece Anode machining surface, and electricity is generated between wire electrode projecting end and workpiece Anode machining surface
Solution effect, nano-polishing particle carry out polishing action, electrolysis and throwing to workpiece Anode machining surface under electrolyte drive
Light action realizes the Compound Machining to workpiece Anode machining surface jointly, until micro- needed for obtaining on workpiece Anode machining surface
Structure feature.
Compound jet micro-nano technology device of the invention, its main feature is that: the processing unit (plant) includes the compound spray of multiple constraint
Head, workpiece anode and narrow spaces burst of pulses electrolysis power；
The multiple constraint composite spray jet head includes upper cover plate, rubber stopper, locking nut, wire electrode, cavity, nozzle, O-ring and spray
Mouth fixing sleeve；
The cavity is the entity that there is cavity in inside, and the end face being equipped with upper cover plate, the company of being provided on end face are arranged at the top of cavity
Hole is connect, cavity is threadedly coupled by connecting hole with upper cover plate；The side wall of cavity is provided with electrolyte entrance hole, the bottom centre of cavity
It is provided with elongated electrolyte outlet runner；The central axis of cavity is equipped with fixing sleeve, and the central axis of fixing sleeve is provided with and rubber
The equipped consent of rubber plug, the part that fixing sleeve extends upward end face is upper fixing sleeve, and upper fixing sleeve side wall is provided with symmetrical U-shaped
Slot, locking nut lock rubber stopper by the external screw thread of upper fixing sleeve, and the part that fixing sleeve is located at cavity is lower fixing sleeve, lower solid
Surely the lower end surface covered has the gap with cavity bottom；Wire electrode passes through upper cover plate outside the device and is inserted into rubber stopper, then from electrolyte
Outlet flow is pierced by cavity through nozzle；Nozzle is mounted on the outlet end of electrolyte outlet runner, nozzle and electricity by clearance fit
It solves and is sealed between liquid outlet flow by O-ring, the part that nozzle stretches out cavity is pressed on the bottom of cavity by nozzle fixing sleeve
Portion；
The anode of the narrow spaces burst of pulses electrolysis power is connected to workpiece anode, the cathode of narrow spaces burst of pulses electrolysis power
It is connected to wire electrode；The wire electrode of outsourcing electrolyte acts on the surface of workpiece anode, Electrolyzed Processing workpiece anode；
The rubber stopper, locking nut, consent, electrolyte outlet runner, nozzle and nozzle fixing sleeve are coaxial.
Installation threaded hole is provided at the top of the upper cover plate, device is connected on machine tool chief axis by installing threaded hole.
The rubber stopper is truncated cone-shaped.
The rubber stopper includes symmetrical two and half truncated cone-shaped, is provided in the mating surface of two and half truncated cone-shapeds elongated shallow
Slot.Wire electrode is embedded in elongated shallow slot.
The end face of the lateral wall insulation of the wire electrode, wire electrode is on-insulated, and the integral diameter of wire electrode is less than or equal to 100
μm.The end face of the lateral wall insulation of wire electrode, wire electrode keeps good electric conductivity, can constrain electric field, guarantees electrolysis
It occurs mainly between the end face of wire electrode and workpiece anode, improves the locality of Electrolyzed Processing, the diameter of wire electrode is less than etc.
In 100 μm, it is conducive to process lesser microstructure features.
The pulse frequency of the narrow spaces burst of pulses electrolysis power is more than or equal to 100kHz, and pulse width is less than or equal to
100ns.The locality and precision of processing can be significantly improved, is conducive to process lesser microstructure features.
Compound jet micro-nano processing method of the invention and processing unit (plant) use high speed electrolytic liquid beam to carry out diameter to wire electrode
To position constraint, conducive to the locality for improving electrochemical micromachining；Electric field is constrained using the wire electrode of lateral wall insulation, energy
The electrolysis for enough forming tiny area further increases processing locality；Using narrow spaces burst of pulses electrolysis power to electrolysis ablation
Process is constrained, and is effectively inhibited dispersion corrosion and is improved mass transport process；Using nano-polishing particle to the table of microstructure features
Face carries out polishing constraint, forms the finished surface of high quality.Compound jet micro-nano processing method of the invention and processing unit (plant) are real
The microstructure features processing for having showed high-precision, great surface quality, high-aspect-ratio, has the advantages that high efficiency and manufacturing cost are low.
Detailed description of the invention
Fig. 1 is compound jet micro-nano technology apparatus structure schematic diagram of the invention；
Fig. 2 is the longitudinal profile schematic diagram of the multiple constraint composite spray jet head in compound jet micro-nano technology device of the invention；
Fig. 3 is the cavity body structure schematic diagram in compound jet micro-nano technology device of the invention；
Fig. 4 is the rubber plug structure schematic diagram in compound jet micro-nano technology device of the invention；
In figure, 10. multiple constraint composite spray jet head, 20. workpiece anode, 30. narrow spaces burst of pulses electrolysis power, 11. upper cover plate 12.
15. cavity of rubber stopper 13. locking nut, 14. wire electrode, 16. nozzle 17.O type 18. nozzle fixing sleeves 121. of circle are elongated
151. electrolyte entrance hole of shallow slot, 152. connecting hole, 153. consent, 154. electrolyte outlet runner 155.U shape slot.
Specific embodiment
The present invention will be described in detail with reference to the accompanying drawings and examples.
Embodiment 1
As shown in Figure 1, compound jet micro-nano technology device of the invention includes multiple constraint composite spray jet head 10, workpiece anode 20 and narrow
Pulsewidth burst of pulses electrolysis power 30；
As shown in Figure 2,3, the multiple constraint composite spray jet head 10 includes upper cover plate 11, rubber stopper 12, locking nut 13, wire electrode
14, cavity 15, nozzle 16, O-ring 17 and nozzle fixing sleeve 18；
The cavity 15 is that inside has the entity of cavity, and the end face being equipped with upper cover plate 11 arranged at the top of cavity 15, on end face
It is provided with connecting hole 152, cavity 15 is threadedly coupled by connecting hole 152 with upper cover plate 11；The side wall of cavity 15 is provided with electrolyte and enters
Oral pore 151, the bottom centre of cavity 15 are provided with elongated electrolyte outlet runner 154；The central axis of cavity 15 is equipped with solid
Fixed set, the central axis of fixing sleeve are provided with the consent 153 being equipped with rubber stopper 12, and the part that fixing sleeve extends upward end face is
Upper fixing sleeve, upper fixing sleeve side wall are provided with symmetrical U-lag 155, and locking nut 13 locks rubber by the external screw thread of upper fixing sleeve
Rubber plug 12, the part that fixing sleeve is located at cavity is lower fixing sleeve, and the lower end surface of lower fixing sleeve has the gap with cavity bottom；Wire electrode
14 pass through upper cover plate 11 outside device is inserted into rubber stopper 12, then is pierced by cavity 15 from electrolyte outlet runner 154 through nozzle 16；
Nozzle 16 is mounted on the outlet end of electrolyte outlet runner 154 by clearance fit, nozzle 16 and electrolyte outlet runner 154 it
Between sealed by O-ring 17, the part that nozzle 16 stretches out cavity 15 is pressed on the bottom of cavity 15 by nozzle fixing sleeve 18；
The anode of the narrow spaces burst of pulses electrolysis power 30 is connected to workpiece anode 20, narrow spaces burst of pulses electrolysis power 30
Cathode be connected to wire electrode 14；The wire electrode 14 of outsourcing electrolyte acts on the surface of workpiece anode 20, Electrolyzed Processing workpiece
Anode 20；
Rubber stopper 12, locking nut 13, consent 153, electrolyte outlet runner 154, nozzle 16 and the nozzle fixing sleeve 18
Coaxially.
The top of the upper cover plate 11 is provided with installation threaded hole, and device is connected to machine tool chief axis by installing threaded hole
On.
The rubber stopper 12 is truncated cone-shaped.
As shown in figure 4, the rubber stopper 12 includes symmetrical two and half truncated cone-shaped, in the mating surface of two and half truncated cone-shapeds
It is provided with elongated shallow slot 121.
The lateral wall insulation of the wire electrode 14, the end face of wire electrode 14 is on-insulated, and the integral diameter of wire electrode 14 is less than
Equal to 100 μm.
The pulse frequency of the narrow spaces burst of pulses electrolysis power 30 is more than or equal to 100kHz, and pulse width is less than or equal to
100ns。
The course of work of the present embodiment is as follows:
A. the upper end of wire electrode is fixed, the lower end of wire electrode passes through nozzle and certain length that overhangs out, and it is outstanding to form wire electrode
Stretch end；
B. electrolyte is added in nano-polishing particle, electrolyte is wrapped in wire electrode surface, and electrolyte is sprayed by nozzle at high speeds
When, wire electrode projecting end is straightened and carries out radial position constraint to wire electrode by electrolyte jet stream；
C. by the cathode of the upper termination narrow spaces burst of pulses electrolysis power of wire electrode, workpiece anode connects narrow spaces burst of pulses electrolysis electricity
The anode in source；
D. there are processing between workpiece anode, wire electrode projecting end and workpiece Anode machining surface for machine tool chief axis drive nozzle
Gap, electrolyte jet stream spray to workpiece Anode machining surface, and electricity is generated between wire electrode projecting end and workpiece Anode machining surface
Solution effect, nano-polishing particle carry out polishing action, electrolysis and throwing to workpiece Anode machining surface under electrolyte drive
Light action realizes the Compound Machining to workpiece Anode machining surface jointly, until micro- needed for obtaining on workpiece Anode machining surface
Structure feature.
Claims (7)
1. a kind of compound jet micro-nano processing method, it is characterised in that: the following steps are included:
A. the upper end of wire electrode is fixed, the lower end of wire electrode passes through nozzle and certain length that overhangs out, and it is outstanding to form wire electrode
Stretch end；
B. electrolyte is added in nano-polishing particle, electrolyte is wrapped in wire electrode surface, and electrolyte is sprayed by nozzle at high speeds
When, wire electrode projecting end is straightened and carries out radial position constraint to wire electrode by electrolyte jet stream；
C. by the cathode of the upper termination narrow spaces burst of pulses electrolysis power of wire electrode, workpiece anode connects narrow spaces burst of pulses electrolysis electricity
The anode in source；
D. there are processing between workpiece anode, wire electrode projecting end and workpiece Anode machining surface for machine tool chief axis drive nozzle
Gap, electrolyte jet stream spray to workpiece Anode machining surface, and electricity is generated between wire electrode projecting end and workpiece Anode machining surface
Solution effect, nano-polishing particle carry out polishing action, electrolysis and throwing to workpiece Anode machining surface under electrolyte drive
Light action realizes the Compound Machining to workpiece Anode machining surface jointly, until micro- needed for obtaining on workpiece Anode machining surface
Structure feature.
2. a kind of compound jet micro-nano technology device, it is characterised in that: the processing unit (plant) includes multiple constraint composite spray jet head
(10), workpiece anode (20) and narrow spaces burst of pulses electrolysis power (30)；
The multiple constraint composite spray jet head (10) includes upper cover plate (11), rubber stopper (12), locking nut (13), wire electrode
(14), cavity (15), nozzle (16), O-ring (17) and nozzle fixing sleeve (18)；
The cavity (15) is the entity that there is cavity in inside, and the end face being equipped with upper cover plate (11) is arranged at the top of cavity (15),
It is provided on end face connecting hole (152), cavity (15) is threadedly coupled by connecting hole (152) with upper cover plate (11)；Cavity (15)
Side wall is provided with electrolyte entrance hole (151), and the bottom centre of cavity (15) is provided with elongated electrolyte outlet runner (154)；Chamber
The central axis of body (15) is equipped with fixing sleeve, and the central axis of fixing sleeve is provided with the consent (153) being equipped with rubber stopper (12),
The part that fixing sleeve extends upward end face is upper fixing sleeve, and upper fixing sleeve side wall is provided with symmetrical U-lag (155), locking screw
Female (13) lock rubber stopper (12) by the external screw thread of upper fixing sleeve, and the part that fixing sleeve is located at cavity is lower fixing sleeve, lower solid
Surely the lower end surface covered has the gap with cavity bottom；Wire electrode (14) passes through upper cover plate (11) outside device and is inserted into rubber stopper
(12), cavity (15) then from electrolyte outlet runner (154) through nozzle (16) are pierced by；Nozzle (16) is mounted on by clearance fit
The outlet end of electrolyte outlet runner (154), it is close by O-ring (17) between nozzle (16) and electrolyte outlet runner (154)
Envelope, the part that nozzle (16) stretches out cavity (15) are pressed on the bottom of cavity (15) by nozzle fixing sleeve (18)；
The anode of the narrow spaces burst of pulses electrolysis power (30) is connected to workpiece anode (20), narrow spaces burst of pulses electrolysis electricity
The cathode in source (30) is connected to wire electrode (14)；The wire electrode (14) of outsourcing electrolyte acts on the surface of workpiece anode (20),
Electrolyzed Processing workpiece anode (20)；
Rubber stopper (12), locking nut (13), consent (153), electrolyte outlet runner (154), nozzle (16) and the spray
Mouth fixing sleeve (18) is coaxial.
3. compound jet micro-nano technology device according to claim 2, it is characterised in that: the top of the upper cover plate (11)
Portion is provided with installation threaded hole, and device is connected on machine tool chief axis by installing threaded hole.
4. compound jet micro-nano technology device according to claim 2, it is characterised in that: the rubber stopper (12) is circle
Platform shape.
5. compound jet micro-nano technology device according to claim 2, it is characterised in that: the rubber stopper (12) includes
Symmetrical two and half truncated cone-shaped is provided with elongated shallow slot (121) in the mating surface of two and half truncated cone-shapeds, and wire electrode (14) insertion is thin
In long shallow slot (121).
6. compound jet micro-nano technology device according to claim 1, it is characterised in that: the side of the wire electrode (14)
Wall insulation, the end face of wire electrode (14) is on-insulated, and the integral diameter of wire electrode (14) is less than or equal to 100 μm.
7. compound jet micro-nano technology device according to claim 1, it is characterised in that: the narrow spaces burst of pulses electricity
The pulse frequency for solving power supply (30) is more than or equal to 100kHz, and pulse width is less than or equal to 100ns.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111299727A (en) * | 2020-03-09 | 2020-06-19 | 中国工程物理研究院机械制造工艺研究所 | Axial flushing micro electrolytic machining device and machining method |
| CN111421476A (en) * | 2020-03-04 | 2020-07-17 | 兰州理工大学 | Photoelectricity concerted catalysis colloid jet nozzle |
| CN111421472A (en) * | 2020-03-04 | 2020-07-17 | 兰州理工大学 | Method for processing ultra-smooth surface by coupling photoelectric synergistic catalysis with colloid jet |
| CN111451622A (en) * | 2020-04-17 | 2020-07-28 | 西安交通大学 | Design method of repetition frequency X pinch load based on metal wire micro-nano processing technology |
| CN112658412A (en) * | 2020-11-18 | 2021-04-16 | 南京航空航天大学 | Ultrasonic-assisted electrochemical micro-nano machining method based on electrolyte constraint |
| CN113319386A (en) * | 2021-04-15 | 2021-08-31 | 青岛理工大学 | Processing method for improving surface quality of alloy component micro-area |
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| CN112658412A (en) * | 2020-11-18 | 2021-04-16 | 南京航空航天大学 | Ultrasonic-assisted electrochemical micro-nano machining method based on electrolyte constraint |
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| CN113319386A (en) * | 2021-04-15 | 2021-08-31 | 青岛理工大学 | Processing method for improving surface quality of alloy component micro-area |
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