CN103197519B - Offset plate adjusting device - Google Patents
Offset plate adjusting device Download PDFInfo
- Publication number
- CN103197519B CN103197519B CN201210005087.2A CN201210005087A CN103197519B CN 103197519 B CN103197519 B CN 103197519B CN 201210005087 A CN201210005087 A CN 201210005087A CN 103197519 B CN103197519 B CN 103197519B
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- Prior art keywords
- connecting rod
- panel
- offset flat
- rotating machine
- electric rotating
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Abstract
The invention discloses an offset plate adjusting device arranged on a focusing and leveling main frame plate and used for adjusting the angle of an offset plate. The device comprises a planar connection rod mechanism and a rotation motor, the rotation motor is fixedly arranged on the focusing and leveling main frame plate, the offset plate is movably connected with the focusing and leveling main frame plate, and the rotation motor drives the offset plate to rotate through the planar connection rod mechanism. The offset plate adjusting device adopts the planar connection rod mechanism and the rotation motor to realize the angle of the offset plate, and the rotation precision of the offset plate can be adjusted through adjusting the lengths of all rod members of the planar connection rod mechanism, so the precision requirement of the rotation motor is reduced, the making cost is reduced, and the reliability of the device is improved.
Description
Technical field
The present invention relates to adjusting gear, particularly relate to a kind of adjusting gear of offset flat-panel.
Background technology
What be day by day tending towards that precise treatment and yield-power require along with semiconductor technology improves constantly, and the accuracy of semiconductor manufacturing facility constantly promotes, and accordingly, requires also to improve constantly to the accuracy of the detecting instrument of product.In projection lithography system, in order to carry out high-precision detection to the surface of silicon chip, need height and the inclination information of focusing and leveling systematic survey silicon chip upper surface.
In the measuring process of focusing and leveling system, after projection objective focal plane is drifted about, if do not carry out rectification building-out to its position of focal plane, the measurement point center of focusing and leveling can be made not overlap with projection objective exposure field, cause measuring error.In this case in order to rectification building-out, adopt and add an offset flat-panel in the optical path, and by realizing the calibration and compensation of focusing plane position excursion to the adjustment of the offset flat-panel anglec of rotation.At present the structure of the adjusting gear of two kinds of offset flat-panels commonly used as depicted in figs. 1 and 2:
As shown in Figure 1, electric rotating machine 102 directly drives offset flat-panel 101 to rotate.The weak point of this adjusting gear is, because offset flat-panel 101 is directly driven by electric rotating machine 102 to rotate, this kind of mode directly causes current general motor cannot meet the running accuracy of adjustment needed for offset flat-panel.
As shown in Figure 2, offset flat-panel 201 is connected with lever 202, one end of lever 202 is erected at cam 203 top, and the other end of lever 202 is connected with spring 205, drives lever 202 to move by stepper motor (not shown) driving cam 203 around camshaft 204 rotation.Because camshaft 204 is change to the distance at cam 203 edge, therefore, when cam 203 rotates 180 ° around camshaft 204, the position of lever 202 and offset flat-panel 201 moves to dotted line position from the solid line position Fig. 2, thus reaches the object utilizing the rotation of cam 203 to control the rotation angle of offset flat-panel 201.The weak point of this adjusting gear is that cam cutting is complicated, and manufacturing cost is too high.
Publication number is that the Chinese invention patent of CN201611424U improves for the structure of Fig. 2 disclosed in the 20 days October in 2010, its structure as shown in Figure 3, the cam that this device adopts the cylinder 303 with wedge surface 306 to replace in Fig. 2, thus reduce processing and manufacturing difficulty, but this device is still higher to the accuracy requirement of electric rotating machine.
Therefore, a kind of adjusting gear that effectively can reduce the offset flat-panel of the accuracy requirement to electric rotating machine how is provided to be those skilled in the art's technical matterss urgently to be resolved hurrily.
Summary of the invention
The object of the present invention is to provide the adjusting gear of offset flat-panel, effectively can reduce the accuracy requirement to electric rotating machine, can manufacturing cost be reduced, can also reliability be improved.
To achieve the above object, the present invention adopts following technical scheme:
A kind of adjusting gear of offset flat-panel, be located on focusing and leveling main frame plate for adjusting the angle of offset flat-panel, comprise planar linkage mechanism and electric rotating machine, described electric rotating machine is fixedly installed on focusing and leveling main frame plate, described offset flat-panel is flexibly connected with described focusing and leveling main frame plate, and described electric rotating machine drives described offset flat-panel to rotate through described planar linkage mechanism.
Described planar linkage mechanism comprises first connecting rod, second connecting rod and third connecting rod, the two ends of described second connecting rod are flexibly connected with one end of described first connecting rod and one end of described third connecting rod respectively, the other end of described first connecting rod is fixedly connected with the turning axle of described electric rotating machine, and the other end of described third connecting rod is fixedly connected with described offset flat-panel.
Described first connecting rod, second connecting rod, third connecting rod and focusing and leveling main frame plate are formed closes vector polygon.
The corner of described electric rotating machine is
the corner of described second connecting rod is
the corresponding corner of described offset flat-panel is
the bar length of described first connecting rod, second connecting rod and third connecting rod is l respectively
1, l
2and l
3, the spacing of the fixed connection point between the turning axle of described first connecting rod and described electric rotating machine and the fixed connection point between described third connecting rod and described offset flat-panel is l
4, the corresponding corner of described offset flat-panel
meet formula
coefficient in formula
One end of described third connecting rod is fixedly connected with the side of described offset flat-panel, and described third connecting rod and described offset flat-panel are parallel to each other and center line overlaps.
The two ends of described second connecting rod respectively with one end of described first connecting rod and one end of described third connecting rod hinged.
Described offset flat-panel is flexibly connected with described focusing and leveling main frame plate the middle part that position is positioned at described offset flat-panel.
The adjusting gear employing planar linkage mechanism of offset flat-panel of the present invention and electric rotating machine realize the Angle ambiguity to offset flat-panel, on the one hand, owing to can be adjusted the running accuracy of offset flat-panel by the length of each rod member of adjustment planar linkage mechanism, therefore, the accuracy requirement to electric rotating machine can be reduced; On the other hand, because the kind of drive of the present invention have employed planar linkage mechanism, and the manufacturing process of connecting rod in planar linkage mechanism is fairly simple, therefore can reduce manufacturing cost; Again on the one hand, owing to invention removes the use to spring, therefore, can contribute to improving reliability.
Accompanying drawing explanation
The adjusting gear of offset flat-panel of the present invention is provided by following embodiment and accompanying drawing.
Fig. 1 is a kind of schematic diagram of adjusting gear of traditional offset flat-panel;
Fig. 2 is the schematic diagram of the adjusting gear of another kind of traditional offset flat-panel;
Fig. 3 is the modified node method schematic diagram of the adjusting gear of the traditional offset flat-panel shown in Fig. 2;
Fig. 4 is the structural representation of adjusting gear one embodiment of offset flat-panel of the present invention;
Fig. 5 is the schematic diagram under the concrete size of appointment of adjusting gear one embodiment of offset flat-panel of the present invention;
In figure, the turning axle of 101-offset flat-panel, 102-electric rotating machine, 201-offset flat-panel, 202-lever, 203-cam, 204 camshafts, 205-spring, 303-cylinder, 306-wedge surface, 401-offset flat-panel, 402-electric rotating machine, 403-first connecting rod, 404-second connecting rod, 405-third connecting rod, fixed connection point between D1-first connecting rod and the turning axle of electric rotating machine, the pin joint of D2-first connecting rod and second connecting rod, the pin joint of D3-second connecting rod and third connecting rod, the fixed connection point between D4-third connecting rod and described offset flat-panel
Embodiment
Be described in further detail to the adjusting gear of offset flat-panel of the present invention below.
Below with reference to accompanying drawings the present invention is described in more detail, which show the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, a large amount of implementation detail must be made to realize the specific objective of developer, such as, according to regarding system or the restriction about business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
For making object of the present invention, feature becomes apparent, and is further described the specific embodiment of the present invention below in conjunction with accompanying drawing.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
Referring to Fig. 4, is the structural representation of adjusting gear one embodiment of offset flat-panel of the present invention shown in Fig. 4.The adjusting gear of this offset flat-panel, be located on focusing and leveling main frame plate (not illustrating in Fig. 4) for adjusting the angle of offset flat-panel 401, comprise planar linkage mechanism and electric rotating machine (not illustrating in Fig. 4), described electric rotating machine is fixedly installed on focusing and leveling main frame plate, described offset flat-panel is flexibly connected with described focusing and leveling main frame plate, and described electric rotating machine drives described offset flat-panel 401 to rotate through described planar linkage mechanism.Described planar linkage mechanism comprises first connecting rod 403, second connecting rod 404 and third connecting rod 405, the two ends of described second connecting rod 404 are flexibly connected with one end of described first connecting rod 403 and one end of described third connecting rod 405 respectively, the other end of described first connecting rod 403 is fixedly connected with the turning axle 402 of described electric rotating machine, and the other end of described third connecting rod 405 is fixedly connected with described offset flat-panel 401.In the present embodiment, the two ends of described second connecting rod 404 respectively with one end of described first connecting rod 403 and one end of described third connecting rod 405 hinged.
In the present embodiment, the other end of described third connecting rod 405 is fixedly connected with the side of described offset flat-panel 401, and described third connecting rod 405 and described offset flat-panel 401 are parallel to each other and center line overlaps.Described offset flat-panel 401 is flexibly connected with described focusing and leveling main frame plate the middle part that position is positioned at described offset flat-panel 401.
Described first connecting rod 403, second connecting rod 404, third connecting rod 405 and focusing and leveling main frame plate are formed closes vector polygon.Be 1 by calculating the degree of freedom of this mechanism known, there is the movement locus having and determine, its mode of motion and principle analysis as follows:
Please continue to refer to Fig. 4, the corner of described electric rotating machine is made to be
the corner of described second connecting rod 404 is
the corresponding corner of described offset flat-panel 401 is
fixed connection point between described first connecting rod 403 and the turning axle 402 of described electric rotating machine is D1, the pin joint of described first connecting rod 403 and second connecting rod 404 is D2, the pin joint of described second connecting rod 404 and third connecting rod 405 is D3, and the fixed connection point between described third connecting rod 405 and described offset flat-panel 401 is D4; The bar length of described first connecting rod 403, second connecting rod 404 and third connecting rod 405 is l respectively
1, l
2and l
3, the spacing of the fixed connection point D1 between described first connecting rod 403 and the turning axle 402 of described electric rotating machine and the fixed connection point D4 between described third connecting rod 405 and described offset flat-panel 401 is l
4.
Known l
1, l
2, l
3, l
4with the corner of electric rotating machine be
the corner of offset flat-panel 401 need be determined
Please continue to refer to Fig. 4, four-bar linkage D1D2D3D4 is regarded as one and close vector polygon, if with L
1, L
2, L
3, L
4represent the vector of each component respectively, then the closed vector equation of this mechanism is
L
1+L
2＝L
3+L
4
Be expressed as with plural form
Regulation angle
(comprise
) should measuring just counterclockwise with X-axis, launch by Euler's formula
Should be equal respectively by the real part of equation and imaginary part, namely
Cancellation
after
Coefficient in formula
Solve thus
In above formula
have two values, illustrate and meeting under identical bar elongate member, there are two kinds of assembling schemes in this mechanism, is "-" number before radical sign
value is applicable to the assembling of illustrated mechanism D1D2D3D4 position, is "+" number before radical sign
value is applicable to the assembling of illustrated mechanism D1D2D3 ' D4 position.
The running accuracy of offset flat-panel 401 is different because of the difference of each bar length, as shown in Figure 5, as the long l of bar
1=10, l
2=80, l
3=150, l
4=184.8, known by calculating, l
1when A point rotating 360 degrees, l
3rotation angle around D point is 8 degree, and as can be seen here, under the effect of the adjusting gear of this offset flat-panel, the running accuracy of offset flat-panel improves 45 times compared with electric rotating machine Direct driver.
Therefore, the adjusting gear employing planar linkage mechanism of offset flat-panel of the present invention and electric rotating machine realize the Angle ambiguity to offset flat-panel, on the one hand, owing to can be adjusted the running accuracy of offset flat-panel by the length of each rod member of adjustment planar linkage mechanism, therefore, the accuracy requirement to electric rotating machine can be reduced; On the other hand, because the kind of drive of the present invention have employed planar linkage mechanism, and the manufacturing process of connecting rod in planar linkage mechanism is fairly simple, therefore can reduce manufacturing cost; Again on the one hand, owing to invention removes the use to spring, therefore, can contribute to improving reliability.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (5)
1. the adjusting gear of an offset flat-panel, be located on focusing and leveling main frame plate for adjusting the angle of offset flat-panel, it is characterized in that, comprise planar linkage mechanism and electric rotating machine, described electric rotating machine is fixedly installed on focusing and leveling main frame plate, described offset flat-panel is flexibly connected with described focusing and leveling main frame plate, and described electric rotating machine drives described offset flat-panel to rotate through described planar linkage mechanism; Described planar linkage mechanism comprises first connecting rod, second connecting rod and third connecting rod, the two ends of described second connecting rod are flexibly connected with one end of described first connecting rod and one end of described third connecting rod respectively, the other end of described first connecting rod is fixedly connected with the turning axle of described electric rotating machine, and the other end of described third connecting rod is fixedly connected with described offset flat-panel; Described first connecting rod, second connecting rod, third connecting rod and focusing and leveling main frame plate are formed closes vector polygon.
2. the adjusting gear of offset flat-panel according to claim 1, is characterized in that, the corner of described electric rotating machine is
the corner of described second connecting rod is
the corresponding corner of described offset flat-panel is
the bar length of described first connecting rod, second connecting rod and third connecting rod is l respectively
1, l
2and l
3, the spacing of the fixed connection point between the turning axle of described first connecting rod and described electric rotating machine and the fixed connection point between described third connecting rod and described offset flat-panel is l
4, the corresponding corner of described offset flat-panel
meet formula
coefficient in formula
3. the adjusting gear of offset flat-panel according to claim 1, is characterized in that, one end of described third connecting rod is fixedly connected with the side of described offset flat-panel, and described third connecting rod and described offset flat-panel are parallel to each other and center line overlaps.
4., according to the adjusting gear of the offset flat-panel described in claim 1, it is characterized in that, the two ends of described second connecting rod respectively with one end of described first connecting rod and one end of described third connecting rod hinged.
5. according to the adjusting gear of the offset flat-panel in Claims 1 to 4 described in any one, it is characterized in that, described offset flat-panel is flexibly connected with described focusing and leveling main frame plate the middle part that position is positioned at described offset flat-panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210005087.2A CN103197519B (en) | 2012-01-09 | 2012-01-09 | Offset plate adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210005087.2A CN103197519B (en) | 2012-01-09 | 2012-01-09 | Offset plate adjusting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103197519A CN103197519A (en) | 2013-07-10 |
| CN103197519B true CN103197519B (en) | 2015-02-11 |
Family
ID=48720187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210005087.2A Active CN103197519B (en) | 2012-01-09 | 2012-01-09 | Offset plate adjusting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103197519B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104718831B (en) * | 2015-03-18 | 2017-03-01 | 重庆理工大学 | Mountain farming machinery horizontal mechanism |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3204406B2 (en) * | 1991-10-30 | 2001-09-04 | 株式会社ニコン | Surface position detection method and apparatus, semiconductor exposure apparatus, and exposure method using the method |
| US5602399A (en) * | 1993-06-23 | 1997-02-11 | Nikon Corporation | Surface position detecting apparatus and method |
| US6765647B1 (en) * | 1998-11-18 | 2004-07-20 | Nikon Corporation | Exposure method and device |
| CN101899940B (en) * | 2009-05-26 | 2012-05-09 | 亨特道格拉斯建筑产品(中国)有限公司 | Louver transmission structure capable of rotating 180 degrees for architectural shading and curtain wall |
| CN201579489U (en) * | 2009-11-17 | 2010-09-15 | 王昆 | Automatic steel plate cutting robot |
| CN102129183B (en) * | 2010-01-19 | 2014-05-21 | 上海微电子装备有限公司 | Focusing and levelling measuring device |
| CN201611424U (en) * | 2010-02-05 | 2010-10-20 | 上海微电子装备有限公司 | Adjustor of offset plate |
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2012
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| CN103197519A (en) | 2013-07-10 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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