CN103197519A - Offset plate adjusting device - Google Patents
Offset plate adjusting device Download PDFInfo
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- CN103197519A CN103197519A CN2012100050872A CN201210005087A CN103197519A CN 103197519 A CN103197519 A CN 103197519A CN 2012100050872 A CN2012100050872 A CN 2012100050872A CN 201210005087 A CN201210005087 A CN 201210005087A CN 103197519 A CN103197519 A CN 103197519A
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- connecting rod
- biasing
- dull
- stereotyped
- rotating machine
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Abstract
The invention discloses an offset plate adjusting device arranged on a focusing and leveling main frame plate and used for adjusting the angle of an offset plate. The device comprises a planar connection rod mechanism and a rotation motor, the rotation motor is fixedly arranged on the focusing and leveling main frame plate, the offset plate is movably connected with the focusing and leveling main frame plate, and the rotation motor drives the offset plate to rotate through the planar connection rod mechanism. The offset plate adjusting device adopts the planar connection rod mechanism and the rotation motor to realize the angle of the offset plate, and the rotation precision of the offset plate can be adjusted through adjusting the lengths of all rod members of the planar connection rod mechanism, so the precision requirement of the rotation motor is reduced, the making cost is reduced, and the reliability of the device is improved.
Description
Technical field
The present invention relates to adjusting gear, relate in particular to a kind of dull and stereotyped adjusting gear of setovering.
Background technology
Along with improving constantly that semiconductor technology is tending towards day by day that precise treatment and yield-power require, the accuracy of semiconductor manufacturing facility constantly promotes, and is corresponding, and the accuracy of the detecting instrument of product is required also to improve constantly.In projection lithography system, carry out high-precision test for the surface to silicon chip, need height and the inclination information of focusing and leveling systematic survey silicon chip upper surface.
In the measuring process of focusing and leveling system, after the projection objective focal plane drifts about, if rectification building-out is not carried out in its position of focal plane, the measurement point center of focusing and leveling is not overlapped with projection objective exposure visual field, cause measuring error.In this case for rectification building-out, adopt that to add a biasing in light path dull and stereotyped, and realize correction and compensation to the focal plane position excursion by the adjustment to the dull and stereotyped anglec of rotation of setovering.The structure of the adjusting gears of two kinds of biasing flat boards use at present is as depicted in figs. 1 and 2:
As shown in Figure 1, electric rotating machine 102 directly drives dull and stereotyped 101 rotations of biasing.The weak point of this adjusting gear is that because biasing dull and stereotyped 101 is directly to be driven by electric rotating machine 102 to rotate, this kind mode directly causes present general motor can't satisfy the dull and stereotyped required running accuracy of adjustment biasing.
As shown in Figure 2, biasing dull and stereotyped 201 is connected with lever 202, one end of lever 202 is erected at cam 203 tops, and the other end of lever 202 is connected with spring 205, drives lever 202 by stepper motor (not shown) driving cam 203 around camshaft 204 rotations and moves.Because camshaft 204 changes to the distance at cam 203 edges, therefore, when cam 203 during around camshaft 204 Rotate 180s °, the solid line position of position from Fig. 2 of lever 202 and biasing dull and stereotyped 201 moves to dotted line position, thereby reaches the purpose of the rotation angle of the rotation control biasing dull and stereotyped 201 that utilizes cam 203.The weak point of this adjusting gear is the cam processed complex, and manufacturing cost is too high.
The Chinese invention patent that disclosed publication number was CN201611424U on October 20th, 2010 improves at the structure of Fig. 2, its structure as shown in Figure 3, this device adopts the cam among the cylinder 303 replacement Fig. 2 with wedge surface 306, thereby reduced the processing and manufacturing difficulty, but this device to the accuracy requirement of electric rotating machine still than higher.
Therefore, how providing a kind of adjusting gear that can effectively reduce the biasing flat board of the accuracy requirement of electric rotating machine is the technical matters that those skilled in the art need to be resolved hurrily.
Summary of the invention
The object of the present invention is to provide the dull and stereotyped adjusting gear of biasing, can effectively reduce the accuracy requirement to electric rotating machine, can reduce manufacturing cost, can also improve reliability.
To achieve the above object, the present invention adopts following technical scheme:
A kind of dull and stereotyped adjusting gear of setovering, be located at and be used for adjusting the dull and stereotyped angle of biasing on the focusing and leveling main frame plate, comprise planar linkage mechanism and electric rotating machine, described electric rotating machine is fixedly set on the focusing and leveling main frame plate, dull and stereotyped and the described focusing and leveling main frame plate of described biasing flexibly connects, and described electric rotating machine drives the dull and stereotyped rotation of described biasing through described planar linkage mechanism.
Described planar linkage mechanism comprises first connecting rod, second connecting rod and third connecting rod, the two ends of described second connecting rod flexibly connect with an end of described first connecting rod and an end of described third connecting rod respectively, the other end of described first connecting rod is fixedlyed connected with the turning axle of described electric rotating machine, and the other end of described third connecting rod is fixedlyed connected with described biasing is dull and stereotyped.
Described first connecting rod, second connecting rod, third connecting rod and focusing and leveling main frame plate constitute the sealing vector polygon.
The corner of described electric rotating machine is
The corner of described second connecting rod is
The dull and stereotyped corresponding corner of described biasing is
The bar length of described first connecting rod, second connecting rod and third connecting rod is respectively l
1, l
2And l
3, distance is l between the fixed connection point between the fixed connection point between the turning axle of described first connecting rod and described electric rotating machine and described third connecting rod and the described biasing flat board
4, the dull and stereotyped corresponding corner of described biasing
Satisfy formula
Coefficient in the formula
One end of described third connecting rod is fixedlyed connected with the side of described biasing flat board, and described third connecting rod and described biasing flat board are parallel to each other and central lines.
The two ends of described second connecting rod are hinged with an end of an end of described first connecting rod and described third connecting rod respectively.
The dull and stereotyped flexible connection position with described focusing and leveling main frame plate of described biasing is positioned at the dull and stereotyped middle part of described biasing.
The dull and stereotyped adjusting gear of biasing of the present invention adopts planar linkage mechanism and electric rotating machine to realize the dull and stereotyped angle of setovering is controlled, on the one hand, owing to can adjust the dull and stereotyped running accuracy of biasing by the length of adjusting each rod member of planar linkage mechanism, therefore, can reduce accuracy requirement to electric rotating machine; On the other hand, because the kind of drive of the present invention has adopted planar linkage mechanism, and the manufacturing process of the connecting rod in the planar linkage mechanism is fairly simple, therefore can reduce manufacturing cost; Again on the one hand, because the present invention has removed the use to spring, therefore, can help to improve reliability.
Description of drawings
The dull and stereotyped adjusting gear of biasing of the present invention is provided by following embodiment and accompanying drawing.
Fig. 1 is a kind of synoptic diagram of adjusting gear of traditional biasing flat board;
Fig. 2 is the synoptic diagram of the adjusting gear of the traditional biasing flat board of another kind;
Fig. 3 is the improvement structural representation of the adjusting gear of traditional biasing flat board shown in Figure 2;
Fig. 4 is the setover structural representation of dull and stereotyped adjusting gear one embodiment of the present invention;
Fig. 5 is setover synoptic diagram under the concrete size of appointment of dull and stereotyped adjusting gear one embodiment of the present invention;
Among the figure, fixed connection point between the turning axle of turning axle, 403-first connecting rod, 404-second connecting rod, 405-third connecting rod, D1-first connecting rod and the electric rotating machine of 101-biasing flat board, 102-electric rotating machine, 201-biasing flat board, 202-lever, 203-cam, 204 camshafts, 205-spring, 303-cylinder, 306-wedge surface, 401-biasing flat board, 402-electric rotating machine, the pin joint of D2-first connecting rod and second connecting rod, the pin joint of D3-second connecting rod and third connecting rod, the fixed connection point between D4-third connecting rod and the described biasing flat board
Embodiment
Below will be described in further detail the dull and stereotyped adjusting gear of biasing of the present invention.
Below with reference to accompanying drawings the present invention is described in more detail, has wherein represented the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, the confusion because they can make the present invention owing to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example according to relevant system or relevant commercial restriction, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.
For purpose of the present invention, feature are become apparent, below in conjunction with accompanying drawing the specific embodiment of the present invention is further described.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of the aid illustration embodiment of the invention lucidly.
See also Fig. 4, the setover structural representation of dull and stereotyped adjusting gear one embodiment of the present invention of being shown in Figure 4.The dull and stereotyped adjusting gear of this biasing, be located at focusing and leveling main frame plate (not signal among Fig. 4) and go up the angle that is used for adjusting biasing dull and stereotyped 401, comprise planar linkage mechanism and electric rotating machine (not signal among Fig. 4), described electric rotating machine is fixedly set on the focusing and leveling main frame plate, dull and stereotyped and the described focusing and leveling main frame plate of described biasing flexibly connects, and described electric rotating machine drives dull and stereotyped 401 rotations of described biasing through described planar linkage mechanism.Described planar linkage mechanism comprises first connecting rod 403, second connecting rod 404 and third connecting rod 405, the two ends of described second connecting rod 404 flexibly connect with an end of described first connecting rod 403 and an end of described third connecting rod 405 respectively, the other end of described first connecting rod 403 is fixedlyed connected with the turning axle of described electric rotating machine 402, and the other end of described third connecting rod 405 is fixedlyed connected with described biasing dull and stereotyped 401.In the present embodiment, the two ends of described second connecting rod 404 are hinged with an end of an end of described first connecting rod 403 and described third connecting rod 405 respectively.
In the present embodiment, the other end of described third connecting rod 405 is fixedlyed connected with the side of described biasing dull and stereotyped 401, and described third connecting rod 405 and described biasing dull and stereotyped 401 is parallel to each other and central lines.The flexible connection position of described biasing dull and stereotyped 401 and described focusing and leveling main frame plate is positioned at the middle part of described biasing dull and stereotyped 401.
Described first connecting rod 403, second connecting rod 404, third connecting rod 405 and focusing and leveling main frame plate constitute the sealing vector polygon.The degree of freedom of this mechanism is 1 by calculating as can be known, has definite movement locus is arranged, and its mode of motion and principle analysis are as follows:
Please continue to consult Fig. 4, make the corner of described electric rotating machine be
The corner of described second connecting rod 404 is
The corresponding corner of described biasing dull and stereotyped 401 is
Fixed connection point between the turning axle 402 of described first connecting rod 403 and described electric rotating machine is D1, the pin joint of described first connecting rod 403 and second connecting rod 404 is D2, the pin joint of described second connecting rod 404 and third connecting rod 405 is D3, and the fixed connection point between described third connecting rod 405 and the described biasing dull and stereotyped 401 is D4; The bar length of described first connecting rod 403, second connecting rod 404 and third connecting rod 405 is respectively l
1, l
2And l
3, distance is l between the fixed connection point D4 between the fixed connection point D1 between the turning axle 402 of described first connecting rod 403 and described electric rotating machine and described third connecting rod 405 and the described biasing dull and stereotyped 401
4
Known l
1, l
2, l
3, l
4With the corner of electric rotating machine be
Need to determine the corner of biasing dull and stereotyped 401
Please continue to consult Fig. 4, regard four-bar linkage D1D2D3D4 as a sealing vector polygon, if with L
1, L
2, L
3, L
4The vector of representing each member respectively, then the sealing vector equation of this mechanism is
L
1+L
2＝L
3+L
4
Be expressed as with plural form
The regulation angle
(comprise
) should counterclockwise measure with the forward of X-axis, launch by Euler's formula
Real part and imaginary part by equation should equate respectively, namely
Cancellation
After
Coefficient in the formula
Solve thus
In the following formula
Two values being arranged, illustrate and satisfying under the identical bar elongate member that there are two kinds of assembling schemes in this mechanism, is "-" number before the radical sign
Value is applicable to the assembling of illustrated mechanism D1D2D3D4 position, is "+" number before the radical sign
Value is applicable to the assembling of illustrated mechanism D1D2D3 ' D4 position.
The running accuracy of biasing dull and stereotyped 401 is different because of the long difference of each bar, as shown in Figure 5, and as the long l of bar
1=10, l
2=80, l
3=150, l
4=184.8, by calculating as can be known l
1When the A point revolves three-sixth turn, l
3The rotation angle of ordering around D is 8 degree, this shows, under the effect of the dull and stereotyped adjusting gear of this biasing, compares the dull and stereotyped running accuracy of biasing with the direct driving of electric rotating machine and has improved 45 times.
Therefore, the dull and stereotyped adjusting gear of biasing of the present invention adopts planar linkage mechanism and electric rotating machine to realize the dull and stereotyped angle of setovering is controlled, on the one hand, owing to can adjust the dull and stereotyped running accuracy of biasing by the length of adjusting each rod member of planar linkage mechanism, therefore, can reduce accuracy requirement to electric rotating machine; On the other hand, because the kind of drive of the present invention has adopted planar linkage mechanism, and the manufacturing process of the connecting rod in the planar linkage mechanism is fairly simple, therefore can reduce manufacturing cost; Again on the one hand, because the present invention has removed the use to spring, therefore, can help to improve reliability.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (7)
1. dull and stereotyped adjusting gear of setovering, be located at and be used for adjusting the dull and stereotyped angle of biasing on the focusing and leveling main frame plate, it is characterized in that, comprise planar linkage mechanism and electric rotating machine, described electric rotating machine is fixedly set on the focusing and leveling main frame plate, dull and stereotyped and the described focusing and leveling main frame plate of described biasing flexibly connects, and described electric rotating machine drives the dull and stereotyped rotation of described biasing through described planar linkage mechanism.
2. the dull and stereotyped adjusting gear of biasing according to claim 1, it is characterized in that, described planar linkage mechanism comprises first connecting rod, second connecting rod and third connecting rod, the two ends of described second connecting rod flexibly connect with an end of described first connecting rod and an end of described third connecting rod respectively, the other end of described first connecting rod is fixedlyed connected with the turning axle of described electric rotating machine, and the other end of described third connecting rod is fixedlyed connected with described biasing is dull and stereotyped.
3. the dull and stereotyped adjusting gear of biasing according to claim 2 is characterized in that, described first connecting rod, second connecting rod, third connecting rod and focusing and leveling main frame plate constitute the sealing vector polygon.
4. the dull and stereotyped adjusting gear of biasing according to claim 3 is characterized in that the corner of described electric rotating machine is
The corner of described second connecting rod is
The dull and stereotyped corresponding corner of described biasing is
The bar length of described first connecting rod, second connecting rod and third connecting rod is respectively l
1, l
2And l
3, distance is l between the fixed connection point between the fixed connection point between the turning axle of described first connecting rod and described electric rotating machine and described third connecting rod and the described biasing flat board
4, the dull and stereotyped corresponding corner of described biasing
Satisfy formula
Coefficient in the formula
5. the dull and stereotyped adjusting gear of biasing according to claim 2 is characterized in that, an end of described third connecting rod is fixedlyed connected with the side of described biasing flat board, and described third connecting rod and described biasing flat board are parallel to each other and central lines.
6. according to the adjusting gear of the biasing flat board described in the claim 2, it is characterized in that the two ends of described second connecting rod are hinged with an end of an end of described first connecting rod and described third connecting rod respectively.
7. according to any dull and stereotyped adjusting gear of described biasing in the claim 1～6, it is characterized in that the dull and stereotyped flexible connection position with described focusing and leveling main frame plate of described biasing is positioned at the dull and stereotyped middle part of described biasing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210005087.2A CN103197519B (en) | 2012-01-09 | 2012-01-09 | Offset plate adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210005087.2A CN103197519B (en) | 2012-01-09 | 2012-01-09 | Offset plate adjusting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103197519A true CN103197519A (en) | 2013-07-10 |
| CN103197519B CN103197519B (en) | 2015-02-11 |
Family
ID=48720187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210005087.2A Active CN103197519B (en) | 2012-01-09 | 2012-01-09 | Offset plate adjusting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103197519B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104718831A (en) * | 2015-03-18 | 2015-06-24 | 重庆理工大学 | Mountain farming machinery horizontal mechanism |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5602399A (en) * | 1993-06-23 | 1997-02-11 | Nikon Corporation | Surface position detecting apparatus and method |
| JP3204406B2 (en) * | 1991-10-30 | 2001-09-04 | 株式会社ニコン | Surface position detection method and apparatus, semiconductor exposure apparatus, and exposure method using the method |
| US6765647B1 (en) * | 1998-11-18 | 2004-07-20 | Nikon Corporation | Exposure method and device |
| CN201579489U (en) * | 2009-11-17 | 2010-09-15 | 王昆 | Automatic steel plate cutting robot |
| CN201611424U (en) * | 2010-02-05 | 2010-10-20 | 上海微电子装备有限公司 | Adjustor of offset plate |
| CN101899940A (en) * | 2009-05-26 | 2010-12-01 | 亨特道格拉斯建筑产品(中国)有限公司 | Louver transmission structure capable of rotating 180 degrees for architectural shading and curtain wall |
| CN102129183A (en) * | 2010-01-19 | 2011-07-20 | 上海微电子装备有限公司 | Focusing and levelling measuring device |
-
2012
- 2012-01-09 CN CN201210005087.2A patent/CN103197519B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3204406B2 (en) * | 1991-10-30 | 2001-09-04 | 株式会社ニコン | Surface position detection method and apparatus, semiconductor exposure apparatus, and exposure method using the method |
| US5602399A (en) * | 1993-06-23 | 1997-02-11 | Nikon Corporation | Surface position detecting apparatus and method |
| US6765647B1 (en) * | 1998-11-18 | 2004-07-20 | Nikon Corporation | Exposure method and device |
| CN101899940A (en) * | 2009-05-26 | 2010-12-01 | 亨特道格拉斯建筑产品(中国)有限公司 | Louver transmission structure capable of rotating 180 degrees for architectural shading and curtain wall |
| CN201579489U (en) * | 2009-11-17 | 2010-09-15 | 王昆 | Automatic steel plate cutting robot |
| CN102129183A (en) * | 2010-01-19 | 2011-07-20 | 上海微电子装备有限公司 | Focusing and levelling measuring device |
| CN201611424U (en) * | 2010-02-05 | 2010-10-20 | 上海微电子装备有限公司 | Adjustor of offset plate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104718831A (en) * | 2015-03-18 | 2015-06-24 | 重庆理工大学 | Mountain farming machinery horizontal mechanism |
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| Publication number | Publication date |
|---|---|
| CN103197519B (en) | 2015-02-11 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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