CN102141507B - Installation debugging method of continuously variable slit mechanism - Google Patents
Installation debugging method of continuously variable slit mechanism Download PDFInfo
- Publication number
- CN102141507B CN102141507B CN 201010107047 CN201010107047A CN102141507B CN 102141507 B CN102141507 B CN 102141507B CN 201010107047 CN201010107047 CN 201010107047 CN 201010107047 A CN201010107047 A CN 201010107047A CN 102141507 B CN102141507 B CN 102141507B
- Authority
- CN
- China
- Prior art keywords
- msup
- mrow
- msub
- slit
- stepping motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000009434 installation Methods 0.000 title claims abstract description 16
- 238000006073 displacement reaction Methods 0.000 claims abstract description 22
- 238000005520 cutting process Methods 0.000 claims description 27
- 238000012937 correction Methods 0.000 claims description 14
- 238000013461 design Methods 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 7
- 230000001960 triggered effect Effects 0.000 claims description 7
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000012935 Averaging Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 3
- 101100129500 Caenorhabditis elegans max-2 gene Proteins 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000012951 Remeasurement Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/04—Slit arrangements slit adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0462—Slit arrangements
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Control Of Position Or Direction (AREA)
- Sewing Machines And Sewing (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention provides an installation debugging method of a continuously variable slit mechanism, and the method comprises the following steps: respectively installing first and second left slit slices and first and second right slit slices on first and second slide rods and splicing into zero slit; installing two displacement measuring instruments for measuring the horizontal displacement distances a1 and a2 of the first and second slide rods; and computing a corrected value e' by utilizing the following formulas, wherein the formulas are utilized to compute that a stepper motor is controlled to head n steps and the error of the obtained slit Tr' can be controlled at +/- 0.002mm. The continuously variable slit mechanism with a common accuracy grade can reach high accuracy after using the method provided by the invention.
Description
Technical Field
The invention relates to a method for installing and debugging a continuously variable slit mechanism in a spectrometer.
Background
In order to analyze and detect a substance in a spectrometer, spectra with different wavelengths need to be spatially spread by a grating to form a spectral band, and monochromatic light in a certain wavelength range needs to be intercepted and extracted by a slit. In the process, the accuracy of indexes such as the opening parallelism and symmetry of the slit, the opening and closing uniformity, the slit width and the resolution directly influences the spectral resolution and/or the spatial resolution of the spectrometer, so that the slit has a very important role in the spectrometer. The following are the slits commonly used at present: one is a fixed-width slit, and the slit has the characteristics of simple structure and low cost, but cannot meet the requirement of width adjustment; the other type is that a plurality of slits with fixed width are adopted, the slits are mutually switched according to the requirements in the use process, the defects of the slits are few in variable gear positions, and when the width of the slits is less than 0.1mm, the processing or assembling quality of the slit mechanism is difficult to guarantee.
Aiming at the defects of the two slit mechanisms, a slit mechanism is disclosed in a text of precision slit mechanism and automatic adjusting system design thereof of Zhang Fengshan and the like of the electro-mechanical engineering college of Qingdao university, and the slit mechanism is based on a flexible hinge principle and is designed to be composed of two parallel quadrilateral flexible hinges which can be processed on the same elastic material plate. The closed loop system composed of the single chip microcomputer, the stepping motor, the spiral pair, the conical ejector rod and the grating pair realizes the automatic adjustment of the slit width. Especially, the main grating and the indicating grating of the grating pair are respectively and directly arranged on the two quadrilateral flexible hinges, the output of the grating can directly reflect the change of the slit width, and the influence of the error of the mechanical part of the adjusting system on the slit width adjusting precision is effectively compensated. The main technical indexes are as follows: the adjustment range of the seam width is 0-2 mm, and the adjustment precision is +/-1 mu m. However, parts such as a quadrilateral flexible hinge, a conical ejector rod and the like in the slit system need high processing precision; meanwhile, a closed loop system is formed by adopting the grating, so that the cost of the slit system is high; in addition, the slit system is a single slit system.
In view of the above-mentioned drawbacks of the prior art, the present inventors have proposed an error elimination method with low requirements for the machining accuracy and the mounting accuracy of the continuously variable slit mechanism, which can avoid the above-mentioned various drawbacks and make it more practical.
Disclosure of Invention
The invention aims to solve the technical problem that the variable slit mechanism is high in cost due to high requirements on the processing precision and the installation precision of the continuous variable slit mechanism in the prior art.
In order to solve the technical problems, the invention adopts the following technical scheme:
the installation and debugging method of the continuously variable slit mechanism is used for eliminating the system error of the continuously variable slit mechanism. The continuous variable slit mechanism comprises a support, a first sliding rod and a second sliding rod which are arranged on the support, parallel to each other and can slide relative to the support, a swinging block, an eccentric wheel, a seam eliminating spring, a stepping motor, a first left seam piece, a first right seam piece, a second left seam piece and a second right seam piece. One end of the swing block is provided with a mounting hole positioned on the center line of the swing block and two long circular pin holes symmetrically arranged relative to the center line of the swing block, and the mounting hole and the two long circular pin holes are positioned on the same straight line. The support is fixedly provided with an installation shaft which is matched with the installation hole in a rotating mode, and the first sliding rod and the second sliding rod are respectively fixedly provided with a pin which is matched with the corresponding long circular pin hole in a working mode. And the other end of the swinging block is provided with a long groove which is symmetrical relative to the center line of the swinging block. Two ends of the seam eliminating spring are hung on the hanging nails on the back of the bracket, and the middle part of the seam eliminating spring bypasses the right side of one pin and the left side of the other pin. The spring force of the seam eliminating spring enables the pin to keep contact with the long circular pin hole on the swinging block; meanwhile, the eccentric shaft of the eccentric wheel keeps contact with the long groove of the swinging block. The output shaft of the stepping motor drives the eccentric wheel to rotate, and the eccentric shaft of the eccentric wheel extends into the long groove of the swinging block to work in a matched mode. The installation and debugging method of the continuously variable slit mechanism comprises the following steps:
s1, mounting a first left slit piece and a second left slit piece on the first sliding rod, adjusting the cutting edge of the first left slit piece and the cutting edge of the second left slit piece to be parallel to each other and to be perpendicular to the first sliding rod, wherein the distance between the cutting edge of the first left slit piece and the cutting edge of the second left slit piece is the perpendicular distance between incident light and emergent light in the continuously variable slit mechanism;
s2, installing two displacement measuring instruments with reading precision reaching 0.0005 mm: a displacement measuring instrument is arranged on the second slide bar and is used for measuring the horizontal movement distance a1 of the second slide bar; the other displacement measuring instrument is arranged on the first sliding rod and is used for measuring the horizontal movement distance a2 of the first sliding rod;
s3, starting the stepping motor, respectively measuring the horizontal movement distance a2 of the first sliding rod and the horizontal movement distance a1 of the second sliding rod by using two displacement measuring instruments, and when the reading is minimum, stopping the rotation of the stepping motor and recording the readings a1min and a2 min; at the moment, a first right seam piece and a second right seam piece are arranged on the second sliding rod, so that the cutting edge of the first right seam piece is opposite to the cutting edge of the first left seam piece, the cutting edge of the second right seam piece is opposite to the cutting edge of the second left seam piece, and the two pairs of cutting edges are spliced to a zero seam;
s4, starting the stepping motor again until the readings of the two displacement meters are maximum, recording the readings a1max and a2max, and calculating the maximum slit width Tmax as (a1max-a1min) + (a2max-a2min) by using the readings a1min, a2min, a1max and a2max, so as to obtain a Tmax/2 value;
s5, starting the stepping motor to rotate towards the direction against the force of the seam eliminating spring until the photoelectric switch is triggered, recording the step number of the stepping motor as zero, starting the stepping motor again until the readings of the two displacement measuring instruments are respectively (a1max + a1min)/2 and (a2max + a2min)/2, stopping the stepping motor from rotating, wherein the position is the Tmax/2 position, setting the Tmax/2 position as the zero position of the mechanism of the continuous variable slit mechanism, and recording the step number n1 from the position of the photoelectric switch to the Tmax/2 position;
s6, a mechanism zeroing process: starting the stepping motor to rotate towards the direction against the force of the gap eliminating spring until the photoelectric switch is triggered, and then continuously driving the stepping motor to move for n1 steps along the same direction, wherein the continuous variable narrow gap mechanism reaches the zero position of the mechanism;
s7, at the zero position of the mechanism, the readings of the two displacement measuring instruments are set to zero, and the reading mode is adjusted: the compression is negative and the protrusion is positive, i.e. a1, a2 are both negative when the slit width is less than Tmax/2 and a1, a2 are both positive when the slit width is greater than Tmax/2;
s8, starting the stepping motor from the zero position of the mechanism, and enabling the stepping motor to walk by any step number nrStopping, recording the values of readings a1 and a2 of the two displacement meters, and calculating a correction value e' by using the following formula:
φr＝nr·s
wherein,
C0a design value representing the vertical distance between the central axis of the mounting shaft and the central axis of the output shaft of the stepping motor,
D0a design value representing the vertical distance from the pin to the vertical connecting line of the central axis of the mounting shaft and the central axis of the output shaft of the stepping motor,
s is the step angle of the stepper motor;
s9 according to the formula <math><mrow>
<msup>
<mrow>
<mi>cos</mi>
<mi>φ</mi>
</mrow>
<mo>′</mo>
</msup>
<mo>=</mo>
<mfrac>
<mrow>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msub>
<mi>C</mi>
<mn>0</mn>
</msub>
<mo>±</mo>
<msub>
<mi>D</mi>
<mn>0</mn>
</msub>
<msqrt>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msup>
<mi>e</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>+</mo>
<msup>
<mi>e</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msup>
<msub>
<mi>D</mi>
<mn>0</mn>
</msub>
<mn>2</mn>
</msup>
<mo>-</mo>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msup>
<msub>
<mi>C</mi>
<mn>0</mn>
</msub>
<mn>2</mn>
</msup>
</msqrt>
</mrow>
<mrow>
<msup>
<mi>e</mi>
<mo>′</mo>
</msup>
<mo>·</mo>
<mrow>
<mo>(</mo>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>+</mo>
<msup>
<msub>
<mi>D</mi>
<mn>0</mn>
</msub>
<mn>2</mn>
</msup>
<mo>)</mo>
</mrow>
</mrow>
</mfrac>
</mrow></math>
Wherein + -varies at the maximum slit and the minimum slit
And then, an inverse cosine function formula is utilized: phi '═ arccos (cos phi') and the formula:
phi 'has the same +, -sign as a',
i.e. it can be calculated:
Tgis the target slit width and is,
tmax/2 is calculated in the step S5;
then in use, the stepping motor is controlled to rotate for n 'steps, the obtained slit Tr' and the target slit width TgOf [ mu '═ T'r-TgThe thickness is controlled to be +/-0.002 mm.
Preferably, step S8 is repeated a plurality of times to obtain a plurality of correction values e ', and the average value of the plurality of correction values e' is usedN' in step S9 is calculated.
Preferably, the displacement measuring instrument is a comparator.
According to the technical scheme, the installation and debugging method of the continuously variable slit mechanism has the advantages and positive effects that: in the invention, because a correction value capable of correcting the system error of the continuous variable slit mechanism is found by utilizing the design size and the actually measured size, the slit mechanism manufactured by parts with common precision grade can achieve high precision after debugging by utilizing the correction value.
The method is an open-loop system, can realize synchronous adjustment of double slits in the same plane at a certain distance, and realizes the adjustment precision of the slit width of +/-2 mu m. By using the method of the invention, the continuously variable slit mechanism with lower processing and mounting precision grade can meet the precision requirement of the continuously variable slit mechanism with higher processing and mounting precision, and the manufacturing and mounting cost of the continuously variable slit mechanism is reduced to a certain extent.
The above and other objects, features and advantages of the present invention will become more apparent from the following description of preferred embodiments with reference to the accompanying drawings.
Drawings
FIG. 1 is a perspective view of a continuously variable slit mechanism;
FIG. 2 is a front view of the continuously variable slit mechanism shown in FIG. 1;
FIG. 3 is a top view of the continuously variable slit mechanism shown in FIG. 1;
FIG. 4 is a left side view of the continuously variable slit mechanism shown in FIG. 1;
FIG. 5 is a rear view of the continuously variable slit mechanism shown in FIG. 1;
FIG. 6 is a schematic diagram illustrating the operation of the continuously variable slit mechanism;
FIG. 7 is a schematic diagram showing various design dimensions of a continuously variable slit mechanism designed according to the requirements of a target slit width;
FIG. 8 is a schematic view showing respective actual dimensions with errors in an actually assembled continuously variable slit mechanism;
FIG. 9 is a schematic view showing a state where a slit width is a minimum width in an actually assembled continuously variable slit mechanism;
fig. 10 is a schematic view showing a state where a slit width is the maximum width in an actually assembled continuously variable slit mechanism;
fig. 11 is a schematic view showing a case where a slit width is half of a maximum width in an actually assembled continuously variable slit mechanism;
FIG. 12 shows a front and back slit width error comparison using the method of the present invention;
fig. 13 shows an error curve corrected using the method of the present invention.
Detailed Description
Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the embodiments described herein are only for illustration and are not intended to limit the invention.
Fig. 1 to 5 show a continuously variable slit mechanism to which the present applicant has applied a utility model, in which machining accuracy and mounting accuracy of each part can be of a general accuracy class without requiring particularly high accuracy. Therefore, the manufacturing cost of the continuously variable slit mechanism is far lower than that of the continuously variable slit mechanism requiring relatively high accuracy. With the continuously variable slit mechanism shown in fig. 1 to 5, after errors are eliminated by the method of the present invention, the detection accuracy may reach or even exceed the level of the high-accuracy continuously variable slit mechanism.
The continuously variable slit mechanism shown in fig. 1 to 5 includes a support 1, a slide bar frame 11 mounted on the support 1, a first slide bar 21 and a second slide bar 22 mounted on the slide bar frame 11 in parallel with each other, a swing block 5, a seam eliminating spring 24, a driving stepping motor (not shown in the figure), and a first left slit piece 31, a first right slit piece 33, a second left slit piece 32, and a second right slit piece 34.
The left end of the longitudinal center line of the swing block 5 is provided with a mounting hole, the right end is provided with a long groove 51, and the center of the mounting hole and the longitudinal center line of the long groove 51 are on the same straight line. A mounting shaft 6 passes through the mounting hole of the swing block 5 to connect the swing block 5 to the bracket 1. Two long circular pin holes 52 are arranged on the swing block 5, the central connecting line of the two pin holes 52 is perpendicular to the extension line of the central line of the long groove 51, and the two pin holes 52 are symmetrically arranged relative to the extension line of the central line of the long groove 51. A pin 23 is fixed on each of the first slide bar 21 and the second slide bar 22, and the two pins 23 respectively correspond to the two pin holes 52 of the swing block 5 and extend out of the corresponding pin holes.
Two ends of the seam-eliminating spring 24 are hung on the hanging nails on the back of the bracket 1, and the middle part of the seam-eliminating spring bypasses the right side of one pin 23 and the left side of the other pin 23; the spring force of the gap-eliminating spring 24 is exerted on the pin 23 and transmitted to the oscillating mass 5 through the pin 23, which causes the pin 23 to maintain contact with the oblong pin hole 52 of the oscillating mass 5 and simultaneously causes the eccentric shaft 81 of the eccentric 8 to maintain contact with the elongated slot 51 of the oscillating mass 5.
The output shaft 7 of the stepping motor drives an eccentric wheel 8 to rotate, and an eccentric shaft 81 of the eccentric wheel 8 extends into the long groove 51 of the swing block 5 to work in cooperation with the swing block.
See fig. 1 and 6. The working process of the continuous variable slit mechanism is as follows: when the stepping motor is started, the output shaft 7 of the stepping motor drives the eccentric wheel 8 to rotate, the eccentric shaft 81 of the eccentric wheel 8 drives the swing block 5 to rotate around the mounting shaft 6, and then the two pins 23 are driven to move through the two pin holes 52 on the swing block 5, and the two pins 23 drive the first slide bar 21 and the second slide bar 22 to move in opposite directions, so that the two groups of slit sheets fixed on the first slide bar 21 and the second slide bar 22 move relatively, and the width of the two slits is synchronously and continuously changed. The eccentric 8 rotates a circle, the slit passes twice between the maximum slit and the minimum slit and divides the whole circle into two parts. The center distance of the slits is kept unchanged during the slit width changing process.
See fig. 6. Because O1A is on the same part pendulum block 5 as O1E and O1E ', when O1A turns through an angle β, O1E and O1E' also turn through an angle β, and therefore the following geometrical relationship holds: Δ ABO1∽ΔEFO2
AB＝e0·sinφ，O1B＝C0-e0·cosφ
Thus:
D0·e0·sinφ＝a·C0-a·e0·cosφ
D0 2·e0 2·(1-cos2φ)＝a2·C0 2-2a2·C0·e0·cosφ+a2·e0 2·cos2φe0 2·(a2+D0 2)cos2φ-2a2·C0·e0·cosφ+a2·C0 2-e0 2·D0 2＝0
according to a quadratic equation of one unit Ax2The root equation of + Bx + C ═ 0:obtaining:
see fig. 7.
The continuously variable slit mechanism is dimensioned according to the dimensional requirements of the target slit width Tg: e.g. of the type0，C0，D0Wherein:
e0a design value representing the vertical distance between the central axis of the eccentric shaft 81 of the eccentric wheel 8 and the central axis of the output shaft 7 of the stepping motor,
C0a design value representing the vertical distance between the central axis of the mounting shaft 6 and the central axis of the stepper motor output shaft 7,
D0a design value representing the vertical distance of the pin 23 from the vertical line connecting the central axis of the mounting shaft 6 and the central axis of the stepper motor output shaft 7,
tg is 0 to Tmax, representing the target slit width, which is a range of values, so that: theoretical value of horizontal movement distance of the sliding rod:
according to the relation:
and the arccosine equation: phi is acos phi
The number of steps of the stepper motor when the target slit width Tg is reached from the zero position of the mechanism, i.e. the position Tmax/2, can be calculated as:
where + -varies at the maximum slit and the minimum slit. s is the stepping angle of the stepping motor, and the value of n needs to be rounded to obtain an integer, so that the stepping motor is controlled to rotate for n steps, and the requirement of the target slit width Tg can be met.
See fig. 8. In fact, the respective actual dimensions (e, C, D) of the continuously variable slit mechanism are made due to manufacturing errors and mounting errors1，D2) Are values with errors, resulting in actual dimensions a1, a2 also being values with errors. If in actual use, the actual slit width Tr and the target slit width Tg achieved by controlling the stepping motor to rotate n steps are different, and the difference can seriously affect the detection accuracy of the spectrometer. In order to reduce the difference and improve the slit width precision of the continuously variable slit mechanism, the invention finds a correction value e' when the continuously variable slit mechanism is debugged, and the slit width precision of the continuously variable slit mechanism can be greatly improved after the correction.
The installation and debugging method of the continuously variable slit mechanism comprises the following steps:
s1, mounting the first left slit piece 31 and the second left slit piece 32 on the first slide bar 21, adjusting the cutting edge of the first left slit piece 31 and the cutting edge of the second left slit piece 32 to be parallel to each other and to be perpendicular to the first slide bar 21, and setting the distance between the cutting edge of the first left slit piece 31 and the cutting edge of the second left slit piece 32 as the perpendicular distance between the incident light and the emergent light in the continuously variable slit mechanism.
S2, installing two Marh2000 comparators with reading precision reaching 0.0005 mm: a Marh2000 comparator is arranged at the left end part of the second slide bar 22 and is used for measuring the horizontal movement distance a1 of the second slide bar 22; another comparator is installed at the right end of the first slide bar 21 for measuring the horizontal movement distance a2 of the first slide bar 21;
s3, starting the stepping motor, respectively measuring the horizontal movement distance a1 of the first slide bar 21 and the horizontal movement distance a2 of the second slide bar 22 by using two Marh2000 comparators, and when the reading is minimum, stopping the rotation of the stepping motor and recording the readings a1min and a2 min; at this time, a first right seam piece 33 and a second right seam piece 34 are arranged on the second sliding rod 22, so that the cutting edge of the first right seam piece 32 is opposite to the cutting edge of the first left seam piece 31, the cutting edge of the second right seam is opposite to the cutting edge of the second left seam piece 32, and the two pairs of cutting edges are spliced to a zero seam; care was taken to keep the two slits parallel, illuminating the slit with a lamp on one side and looking on the other side to ensure that no light passed through the slit, i.e. a patched to zero gap, is considered, see fig. 9.
S4, starting the stepping motor again until the readings of the two Marh2000 comparators are maximum, recording the readings a1max and a2max, and calculating the maximum slit width Tmax which is a1max-a1min + a2max-a2min by using the readings a1min, a2min, a1max and a2max, so as to obtain a Tmax/2 value; the maximum slit width Tmax position is shown in fig. 10.
S5, starting the stepping motor to rotate towards the direction against the seam eliminating spring until the photoelectric switch is triggered, recording the step number of the stepping motor as zero, starting the stepping motor again until the readings of the two Marh2000 comparators are respectively a1max + a1min/2 and a2max + a2min/2, stopping the rotation of the stepping motor, wherein the position is the Tmax/2 position, and setting the Tmax/2 position as the zero position of the mechanism of the continuous variable slit mechanism to record the step number n1 from the position of the triggered photoelectric switch to the Tmax/2 position of the stepping motor; in the zero position of the mechanism, see fig. 11, the stepping motor rotates through an angle of 0 degrees, and both a1 and a2 are equal to 0.
S6, a mechanism zeroing process: starting the stepping motor to rotate towards the direction against the force of the gap eliminating spring until the photoelectric switch is triggered, and then continuously driving the stepping motor to move for n1 steps along the same direction, wherein the continuous variable narrow gap mechanism reaches the zero position of the mechanism;
s7, at the zero position of the mechanism, the readings of the two displacement measuring instruments are set to zero, and the reading mode is adjusted: the compression is negative and the protrusion is positive, i.e. a1, a2 are both negative when the slit width is less than Tmax/2 and a1, a2 are both positive when the slit width is greater than Tmax/2;
s8, starting from the zero position of the mechanism, starting the stepping motor, enabling the stepping motor to walk for any number of steps nr to stop, recording the values of readings a1 and a2 of the two displacement measuring instruments, and calculating a correction value e' by using the following formula:
φr＝nr·s
wherein,
C0showing the central axis of the mounting shaft 6 and the central axis of the output shaft 7 of the stepping motorThe designed distance between the two-dimensional light source,
D0a design value representing the vertical distance of the pin 23 from the vertical line connecting the central axis of the mounting shaft 6 and the central axis of the stepper motor output shaft 7,
s is the step angle of the stepper motor;
nrrespectively taking different values, calculating multiple modified values e', and taking average value of multiple modified values e
S9 according to the formula <math><mrow>
<mi>cos</mi>
<msup>
<mi>φ</mi>
<mo>′</mo>
</msup>
<mo>=</mo>
<mfrac>
<mrow>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msub>
<mi>C</mi>
<mn>0</mn>
</msub>
<mo>±</mo>
<msub>
<mi>D</mi>
<mn>0</mn>
</msub>
<msqrt>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msup>
<mover>
<mi>e</mi>
<mo>‾</mo>
</mover>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>+</mo>
<msup>
<mover>
<mi>e</mi>
<mo>‾</mo>
</mover>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msup>
<msub>
<mi>D</mi>
<mn>0</mn>
</msub>
<mn>2</mn>
</msup>
<mo>-</mo>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>·</mo>
<msup>
<msub>
<mi>C</mi>
<mn>0</mn>
</msub>
<mn>2</mn>
</msup>
</msqrt>
</mrow>
<mrow>
<msup>
<mover>
<mi>e</mi>
<mo>‾</mo>
</mover>
<mo>′</mo>
</msup>
<mo>·</mo>
<mrow>
<mo>(</mo>
<msup>
<mi>a</mi>
<mrow>
<mo>′</mo>
<mn>2</mn>
</mrow>
</msup>
<mo>+</mo>
<msup>
<msub>
<mi>D</mi>
<mn>0</mn>
</msub>
<mn>2</mn>
</msup>
<mo>)</mo>
</mrow>
</mrow>
</mfrac>
</mrow></math>
Wherein + -varies at the maximum slit and the minimum slit
And then, an inverse cosine function formula is utilized: phi '═ acos phi' and the formula:
phi 'has the same +, -sign as a',
i.e. it can be calculated:
tg is the target slit width, Tmax/2 is calculated in the step of S5;
then in use the stepper motor is controlled to rotate n' steps and the resulting slit is Tr.
Example of actual debugging
As shown in the attached table, according to the different target slot widths: tg is 0-3.5 mm, and the design size of each part of the continuous variable narrow gap mechanism is as follows:
e0＝2.8mm C0＝32mm D0＝10mm
in fact, due to manufacturing and mounting errors, so that
e＝2.9mm C＝32.1mm D1＝10.1mm D2＝10mm
The parameters calculated by design size are as follows:
theoretical maximum half width
When Tg is set to 1.505,
theoretical target
Since a is negative, φ takes a negative value:
φ＝-a cosφ＝-7.55682449
theoretically, the number of steps taken by the stepping motor to reach the target slit is:
namely, the stepping motor is driven to move for-76 steps, and the target slit width can be achieved.
Due to the existence of processing, manufacturing and installation errors, the actual measured values are as follows:
a1＝-0.1325，a2＝-0.1312，
actual slit width Tr ═ 1.757-0.1325-0.1312 ═ 1.5593
The actual error μ has a value: mu-Tr-Tg-1.505-1.5593-0.0543 mm
If the installation and debugging method of the invention is used, the following steps are carried out:
first, the number of steps n of the stepping motor is arbitrarily determinedr，φr＝nrS, remeasurement of the operation n in the stepping motorrA1 and a2 at step, and then a corrected e 'is calculated according to the following formula'
Let nr-550, then: phi is ar＝nr·s＝550×0.1＝55°
When the stepping motor moves to the step-550, the measurement a 1-0.7883, a 2-0.7805
Taking different nrMeasuring several times, calculating the average
Similarly, let Tg be 1.505 for the target slit, and the actual maximum half width was measured
Then <math><mrow>
<msup>
<mi>a</mi>
<mo>′</mo>
</msup>
<mo>=</mo>
<mfrac>
<mrow>
<msub>
<mi>T</mi>
<mi>g</mi>
</msub>
<mo>-</mo>
<mfrac>
<msub>
<mi>T</mi>
<mi>max</mi>
</msub>
<mn>2</mn>
</mfrac>
</mrow>
<mn>2</mn>
</mfrac>
<mo>=</mo>
<mfrac>
<mrow>
<mn>1.505</mn>
<mo>-</mo>
<mn>1.823</mn>
</mrow>
<mn>2</mn>
</mfrac>
<mo>=</mo>
<mo>-</mo>
<mn>0.159</mn>
</mrow></math>
Since a 'is a negative value, phi' takes a negative value of-acoS phi-9.178466
Step motor is driven to go-92 steps
Measurement a 1-0.1602, a 2-0.1586,
the corrected actual slit width Tr' is 1.823-0.1602-0.1586 is 1.5042
Corrected error mu'
μ′＝T′r-Tg＝1.5042-1.505＝-0.0008mm
According to a series of error data before and after correction in the attached table, with Tr/Tr 'as abscissa and μ/μ' as ordinate, an error curve is drawn, and as shown in FIG. 12, the effect of correction can be clearly compared from two curves: before correction, the error is gradually increased along with the change of the slit width from narrow to wide, the maximum error exceeds 0.1mm, and the error corrected by the method is within the range of +/-0.002 mm in the change range of the slit width.
A corrected error curve is plotted from a series of corrected error data in the attached table i, as shown in fig. 13, from which it can be seen that the error value is within the range of ± 0.002 mm.
Therefore, using the method of the present invention, it is possible to allow the continuously variable slit mechanism to adopt a common tolerance level, and thus, the manufacturing and processing costs can be greatly reduced.
While the present invention has been described with reference to several exemplary embodiments, it is understood that the terminology used is intended to be in the nature of words of description and illustration, rather than of limitation. As the present invention may be embodied in several forms without departing from the spirit or essential characteristics thereof, it should also be understood that the above-described embodiments are not limited by any of the details of the foregoing description, but rather should be construed broadly within its spirit and scope as defined in the appended claims, and therefore all changes and modifications that fall within the meets and bounds of the claims, or equivalences of such meets and bounds are therefore intended to be embraced by the appended claims.
Claims (3)
1. A mounting and debugging method of a continuously variable slit mechanism is used for eliminating system errors of the continuously variable slit mechanism, the continuously variable slit mechanism comprises a support (1), a first sliding rod (21) and a second sliding rod (22) which are arranged on the support (1) and are parallel to each other and can slide relative to the support (1), a swinging block (5), an eccentric wheel (8), a seam eliminating spring (24), a stepping motor, a first left seam piece (31), a first right seam piece (33), a second left seam piece (32) and a second right seam piece (34), one end of the swinging block (5) is provided with a mounting hole positioned on the central line of the swinging block (5) and two long circular pin holes (52) symmetrically arranged relative to the central line of the swinging block (5), the mounting hole and the two long circular pin holes (52) are positioned on the same straight line, a mounting shaft (6) which is matched with the mounting hole in a rotating mode is fixed on the support (1), a pin (23) which is matched with the corresponding long circular pin hole (52) to work is respectively fixed on the first sliding rod (21) and the second sliding rod (22), a long groove (51) is arranged at the other end of the swinging block (5), and the long groove (51) is symmetrical relative to the central line of the swinging block (5); two ends of the seam-eliminating spring (24) are hung on the hanging nails on the back of the bracket (1), and the middle part of the seam-eliminating spring bypasses the right side of one pin (23) and the left side of the other pin (23); the spring force of the seam eliminating spring (24) enables the pin (23) to keep contact with the long circular pin hole (52) on the swinging block (5), and simultaneously enables the eccentric shaft (81) of the eccentric wheel (8) to keep contact with the long groove (51) of the swinging block (5); an output shaft (7) of the stepping motor drives the eccentric wheel (8) to rotate, and an eccentric shaft (81) of the eccentric wheel (8) extends into the long groove (51) of the swing block (5) to work in a matched mode; the installation and debugging method of the continuously variable slit mechanism comprises the following steps:
s1, mounting a first left slit piece (31) and a second left slit piece (32) on a first sliding rod (21), adjusting the cutting edge of the first left slit piece (31) to be parallel to the cutting edge of the second left slit piece (32) and to be perpendicular to the first sliding rod (21), wherein the distance between the cutting edge of the first left slit piece (31) and the cutting edge of the second left slit piece (32) is the perpendicular distance between incident light and emergent light in the continuously variable slit mechanism;
s2, installing two displacement measuring instruments with reading precision reaching 0.0005 mm: a displacement measuring instrument is arranged on the second sliding rod (22) and is used for measuring the horizontal moving distance a1 of the second sliding rod (22); the other displacement measuring instrument is arranged on the first sliding rod (21) and is used for measuring the horizontal moving distance a2 of the first sliding rod (21);
s3, starting the stepping motor, respectively measuring the horizontal movement distance a2 of the first sliding rod (21) and the horizontal movement distance a1 of the second sliding rod (22) by using two displacement measuring instruments, and when the reading is minimum, stopping the rotation of the stepping motor and recording the readings a1min and a2 min; at the moment, a first right seam piece (33) and a second right seam piece (34) are arranged on the second sliding rod (22), so that the cutting edge of the first right seam piece (32) is opposite to the cutting edge of the first left seam piece (31), the cutting edge of the second right seam piece (34) is opposite to the cutting edge of the second left seam piece (32), and the two pairs of cutting edges are spliced to a zero seam;
s4, starting the stepping motor again until the readings of the two displacement meters are maximum, recording the readings a1max and a2max, and calculating the maximum slit width Tmax as (a1max-a1min) + (a2max-a2min) by using the readings a1min, a2min, a1max and a2max, so as to obtain a Tmax/2 value;
s5, starting the stepping motor to rotate towards the direction against the force of the seam eliminating spring until the photoelectric switch is triggered, recording the step number of the stepping motor as zero, starting the stepping motor again until the readings of the two displacement measuring instruments are respectively (a1max + a1min)/2 and (a2max + a2min)/2, stopping the stepping motor from rotating, wherein the position is the Tmax/2 position, setting the Tmax/2 position as the zero position of the mechanism of the continuous variable slit mechanism, and recording the step number n1 from the position of the photoelectric switch to the Tmax/2 position;
s6, a mechanism zeroing process: starting the stepping motor to rotate towards the direction against the force of the gap eliminating spring until the photoelectric switch is triggered, and then continuously driving the stepping motor to move for n1 steps along the same direction, wherein the continuous variable narrow gap mechanism reaches the zero position of the mechanism;
s7, at the zero position of the mechanism, the readings of the two displacement measuring instruments are set to zero, and the reading mode is adjusted: the compression is negative and the protrusion is positive, i.e. a1, a2 are both negative when the slit width is less than Tmax/2 and a1, a2 are both positive when the slit width is greater than Tmax/2;
s8, starting the stepping motor from the zero position of the mechanism, and enabling the stepping motor to walk by any step number nrStopping, recording the values of readings a1 and a2 of the two displacement meters, and calculating a correction value e' by using the following formula:
φr＝nr·s
wherein,
C0the central axis of the installation shaft (6) and the output shaft of the stepping motor(7) Is designed for the vertical distance between the central axes,
D0a design value representing the vertical distance from the pin (23) to the vertical connecting line of the central axis of the mounting shaft (6) and the central axis of the output shaft (7) of the stepping motor,
s is the step angle of the stepper motor;
s9 according to the formula
Where + -changes at the maximum and minimum slits reuse the inverse cosine function formula: phi '═ arccos (cos phi') and the formula:
phi 'has the same +, -sign as a',
i.e. it can be calculated:
Tgis the target slit width and is,
tmax/2 is calculated in the step S5;
then in use, the stepping motor is controlled to rotate for n 'steps, the obtained slit Tr' and the target slit width TgOf [ mu '═ T'r-TgThe thickness is controlled to be +/-0.002 mm.
2. The installation and adjustment method of a continuously variable slit mechanism as claimed in claim 1, wherein: repeating step S8 for multiple times to obtain multiple correction values e', and averaging the multiple correction values e
N' in step S9 is calculated.
3. The installation and adjustment method of a continuously variable slit mechanism as claimed in claim 1, wherein: the displacement measuring instrument is a comparator.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010107047 CN102141507B (en) | 2010-01-29 | 2010-01-29 | Installation debugging method of continuously variable slit mechanism |
| PCT/CN2010/002197 WO2011091577A1 (en) | 2010-01-29 | 2010-12-29 | Installation and debugging method for continuously variable slit mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010107047 CN102141507B (en) | 2010-01-29 | 2010-01-29 | Installation debugging method of continuously variable slit mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102141507A CN102141507A (en) | 2011-08-03 |
| CN102141507B true CN102141507B (en) | 2012-08-08 |
Family
ID=44318604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010107047 Active CN102141507B (en) | 2010-01-29 | 2010-01-29 | Installation debugging method of continuously variable slit mechanism |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102141507B (en) |
| WO (1) | WO2011091577A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853910A (en) * | 2012-08-30 | 2013-01-02 | 昆山书豪仪器科技有限公司 | Left and right precision regulating device based on eccentric shaft |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101682524B1 (en) * | 2011-09-19 | 2016-12-06 | 참엔지니어링(주) | Slit width adjusting apparatus |
| CN103630237A (en) * | 2012-08-20 | 2014-03-12 | 苏州生物医学工程技术研究所 | Electric precision adjustable slit device with feedback function |
| CN104502316A (en) * | 2014-12-11 | 2015-04-08 | 中国科学院苏州生物医学工程技术研究所 | Control method for spectral slit in confocal microscopy |
| CN106404172A (en) * | 2016-11-21 | 2017-02-15 | 天津市拓普仪器有限公司 | Parallel linkage displacement slit mechanism for spectrophotometer |
| CN106644082B (en) * | 2016-12-28 | 2018-03-23 | 江苏师范大学 | Cam, slit arrangement, micro Raman scattering spectrum device |
| JP6466496B2 (en) * | 2017-04-05 | 2019-02-06 | Ckd株式会社 | Inspection apparatus, PTP packaging machine, and PTP sheet manufacturing method |
| CN110763098A (en) * | 2018-07-25 | 2020-02-07 | 上海同济检测技术有限公司 | Vernier scale for measuring vertical relative displacement between slab beam hinge joints and using method thereof |
| CN109001116B (en) * | 2018-08-02 | 2020-09-29 | 佛山市方垣机仪设备有限公司 | Incident slit adjusting mechanism and atomic emission spectrometer using same |
| CN111442839B (en) * | 2020-04-10 | 2024-08-02 | 中国科学院西安光学精密机械研究所 | Device capable of switching optical slits on line |
| CN115560851B (en) * | 2022-09-22 | 2023-05-23 | 上海元析仪器有限公司 | Automatic slit-changing device for spectrum instrument capable of spatial filtering |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4781351A (en) * | 1987-04-06 | 1988-11-01 | Nicholas Parapetti | Device for adjustably supporting a dial indicator |
| CN1967208A (en) * | 2006-11-06 | 2007-05-23 | 北京光学仪器厂 | Slit arrangement |
| CN101532876A (en) * | 2009-04-14 | 2009-09-16 | 中国科学技术大学 | Micro accurate slit arrangement with adjustable slit width |
-
2010
- 2010-01-29 CN CN 201010107047 patent/CN102141507B/en active Active
- 2010-12-29 WO PCT/CN2010/002197 patent/WO2011091577A1/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4781351A (en) * | 1987-04-06 | 1988-11-01 | Nicholas Parapetti | Device for adjustably supporting a dial indicator |
| CN1967208A (en) * | 2006-11-06 | 2007-05-23 | 北京光学仪器厂 | Slit arrangement |
| CN101532876A (en) * | 2009-04-14 | 2009-09-16 | 中国科学技术大学 | Micro accurate slit arrangement with adjustable slit width |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853910A (en) * | 2012-08-30 | 2013-01-02 | 昆山书豪仪器科技有限公司 | Left and right precision regulating device based on eccentric shaft |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011091577A1 (en) | 2011-08-04 |
| CN102141507A (en) | 2011-08-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102141507B (en) | Installation debugging method of continuously variable slit mechanism | |
| KR100742982B1 (en) | Focused-beam ellipsometer | |
| CN104865157A (en) | Method of determining measurement data of samples and rheometer | |
| CN102589850B (en) | System for precisely measuring phase delay of wave plate and implementation method of system | |
| CN103411756A (en) | Method capable of accurately measuring phase delay quantity of wave plate | |
| CN104713649B (en) | A kind of Fourier transform spectrometer, interferometer | |
| EP2799823B1 (en) | Laser output measuring apparatus | |
| JP4773899B2 (en) | X-ray spectroscopic measurement method and X-ray spectroscopic apparatus | |
| CN209704644U (en) | Aero-engine | |
| WO2015043009A1 (en) | Adjustment device for verticality of fast axis of compound wave plate and adjustment method therefor | |
| CN114252460B (en) | Turnover opening and closing device and foldable electronic product detection equipment | |
| CN201917562U (en) | Light path structure of visible ultraviolet light detector | |
| JP2006201167A (en) | Positioning device | |
| CN101545853A (en) | Double refraction determining apparatus and method, thin-film production system and method | |
| JP2000304521A (en) | Angle gauge and polarimeter using the same | |
| WO2015163792A1 (en) | Device for the x-ray fluorescence analysis of materials with the formation of an excitation beam by a planar x-ray waveguide-resonator | |
| JPH02186226A (en) | Polarimeter | |
| CN103712692B (en) | Spectrometer and method of work | |
| CN205749245U (en) | Sphere crystal spectrometer centralising device | |
| CN111220543B (en) | Control method of single-rotation compensator spectrum type ellipsometer system | |
| CN218801732U (en) | Coaxiality calibrating device and lower swing machine applying same | |
| CN205404405U (en) | System for laser lamp -house power change error during elimination BSDF measures | |
| CN215525601U (en) | X-ray diffractometer for crystal angle measurement | |
| US20040136005A1 (en) | Measuring specular reflectance of a sample | |
| CN215810718U (en) | Piston rod processing table wall roughness detects structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |