CN103196389A - Device and method for detecting surface shape and material non-uniformity error of computer-generated holography substrate - Google Patents
Device and method for detecting surface shape and material non-uniformity error of computer-generated holography substrate Download PDFInfo
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Abstract
The invention provides a device for detecting a surface shape and material non-uniformity error of a computer-generated holography substrate. The device comprises an interferometer, a normal lens, a computer-generated holography substrate to be detected and a reference spherical mirror, wherein the interferometer, the normal lens, the computer-generated holography substrate to be detected and the reference spherical mirror are installed on a test platform. The normal lens, the computer-generated holography substrate to be detected and the reference spherical mirror are sequentially located in a collimation optical path from the interferometer. Rotary center axes of the normal lens, the computer-generated holography substrate to be detected and the reference spherical mirror are coincided with a central axis of the collimation optical path. The reference spherical mirror is used for reflecting a wave surface being converted by the computer-generated holography substrate to be detected to the interferometer. The converted wave surface is testing waves. Interference is performed to the converted wave surface and a reference wave surface provided by the normal lens so that an interference pattern containing surface shape error and the material non-uniformity error of the computer-generated holography substrate to be detected is obtained. The invention further provides a method for detecting the surface shape and the material non-uniformity error of the computer-generated holography substrate. According to the device and the method for detecting the surface shape and the material non-uniformity error of the computer-generated holography substrate, high-precision detection of a non-spherical face is facilitated and the method is suitable for conducting the high-precision detection and measurement on the non-spherical face surface shape.
Description
Technical field
The invention belongs to the optical detection field, (Computer Generated Hologram, CGH) face shape error and discontinuity of materials error are to the method for aspheric surface testing result influence to relate to the detected calculation holographic substrate of a kind of elimination.
Background technology
Along with the continuous development of applied optics, in optical system, adopt aspheric surface more and more general, yet high-precision aspheric surface detection technique but become the bottleneck of its wide popularization and application.Aspheric surface detects than the maximum problem of sphere detection: because the changeable face shape of aspheric surface, very difficult non-spherical wavefront and the tested wave-front coherence that produces a standard relates to.(Computer-generated hologram CGH) because of its outstanding wavefront generative capacity, has solved this difficult problem to calculation holographic just.Therefore, the calculation holographic device cooperates various commercial interferometers to be widely used in the high precision detection of aspheric surface.
For the real high precision that realizes detects, must anatomize various errors to the influence of testing result.Detect aspheric surface with calculation holographic, the error that comprises mainly is divided into the design error of hologram, the adjustment error of measured lens, making error and the alignment error thereof of hologram.Adopt the high algorithm of precision, the design error of hologram is ignored.The adjustment error of measured lens then can be passed through the design basis holography, and the observation experiment interferogram is controlled it in as far as possible little scope.Design can guarantee the accurate aligning of calculation holographic device to quasi-holographic.Therefore, the making error of hologram is the most critical factor that determines accuracy of detection.
In the making error of calculation holographic device, the substrate face shape error is in the highest flight, and it has the greatest impact to accuracy of detection; The substrate material unevenness also can directly be introduced bigger detection error, and in order to realize more high-precision measurement, basal surface shape sum of errors substrate material unevenness error need be eliminated the influence of accuracy of detection.It is to utilize interferometer directly to measure basal surface shape error amount before writing holography to the method that accuracy of detection influences that tradition is eliminated the substrate face shape error, deduct this error amount the interferogram that after writing, obtains then, the difficult point of this method is correctly to record two width of cloth interferograms that write holographic front and back, and in measuring process, because different substrate situation substrates may change shape.Therefore can't measure and write holographic the process face shape error that produces and the error of debuging the process generation.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, the device of the holographic substrate face shape of a kind of detection computations and discontinuity of materials error is provided, thereby eliminate calculation holographic substrate face shape and discontinuity of materials error to the influence of aspheric surface testing result, improve face shape accuracy of detection effectively.
For achieving the above object, first aspect present invention provides the device of the holographic substrate face shape of detection computations and discontinuity of materials error, and described measurement mechanism comprises:
Interferometer, standard lens, detected calculation holographic substrate are installed and with reference to spherical mirror at experiment porch, wherein, standard lens, detected calculation holographic substrate and be arranged in collimated light path from interferometer successively with reference to spherical mirror, and their rotary middle spindle overlaps with the collimated light beam central shaft, wherein:
Interferometer is used for providing a branch of collimated light;
Standard lens is for the reference corrugated of collimated light beam being assembled and being provided standard ball ground roll face and be used for interfering;
Detected calculation holographic substrate will convert the corrugated consistent with reference sphere minute surface shape from the standard ball ground roll face of standard lens outgoing to, and will be converted to spherical wave by the corrugated that the mirror reflection of reference sphere is returned;
With reference to spherical mirror, be used for the corrugated reflected back interferometer after detected calculation holographic substrate conversion, corrugated after the conversion is test waves, the reference corrugated that corrugated and standard lens after the conversion provide is interfered, obtain comprising face shape error and the discontinuity of materials error interferogram that is detected the calculation holographic substrate.
For achieving the above object, second aspect present invention provides the method for the holographic substrate face shape of a kind of detection computations and discontinuity of materials error, and this method realizes as follows:
Step S1: utilize first adjusting mechanism and second adjusting mechanism to debug the interferometer standard lens, guarantee the optical axis of interferometer outgoing beam and the light shaft coaxle of standard lens outgoing beam;
Step S2: utilize standard lens will be converted to the standard ball ground roll from the directional light of interferometer outgoing, the portion of energy of this standard ball ground roll by last return reflection surface interferometer of standard lens as the reference spherical wave;
Step S3: will be detected on the divergent beams that the calculation holographic substrate is placed on the standard ball ground roll, be positioned at reference to the relevant position before the spherical mirror, the standard ball ground roll is through detected calculation holographic substrate transmission diffraction, make the Zero-order diffractive corrugated of detected calculation holographic substrate impinge perpendicularly on reference on the spherical mirror and through the mirror reflection of reference sphere, obtain testing the corrugated; This test corrugated propagates into after through detected calculation holographic substrate transmission diffraction in the interferometer and forms with reference light that standard lens provides detects interferogram; This interferogram has comprised the face shape error of detected calculation holographic substrate, the aberration on discontinuity of materials sum of errors zero level corrugated, and the aberration on described zero level corrugated is spherical aberration;
Step S4: the wave aberration corrugated on emulation zero level corrugated in optical design software CODE V with wave aberration corrugated Zernike polynomial repressentation, deducts the wave aberration on wave aberration corrugated then from the interferogram that step S3 obtains;
Step S5: just eliminate in the interferogram of wave aberration only face shape error and the discontinuity of materials control information of remaining detected calculation holographic substrate, owing to the standard ball ground roll that is converted to by standard lens successively twice transmission diffraction through detected calculation holographic substrate, therefore the size of the face shape error that comprises in the interferogram that obtains and discontinuity of materials error amount is actual in being detected the twice of the on-chip face shape error of calculation holographic and discontinuity of materials error actual value, the face shape error that will obtain from interferogram and discontinuity of materials error amount reduce by half, and just can obtain real face shape error and discontinuity of materials error size on the detected calculation holographic substrate.
Beneficial effect of the present invention: compared with prior art, the present invention utilizes from the zero order light of detected calculation holographic substrate diffraction to measure the scrambling of substrate surface and the size of discontinuity of material, detect the interferogram of the sign aspheric surface quality that obtains and deduct face shape and the discontinuity of materials error amount that zero order diffracted light is measured from utilizing detected calculation holographic substrate to carry out aspheric surface then, so just can eliminate basal surface shape sum of errors substrate material unevenness error to the influence of aspheric surface testing result.The present invention has not only well solved classic method and has measured the problem that the substrate face shape error exists, and can also measure the size of substrate material unevenness error simultaneously.
The invention solves classic method and can't correctly record two width of cloth interferograms that write holographic front and back, in measuring process, cause the problem that can not accurately calibrate the substrate face shape error owing to substrate may change shape.And when calibrating the substrate face shape error, also can calibrate substrate material unevenness error.The present invention can be on the basis that accurately detects calculation holographic substrate face shape and discontinuity of materials error amount, eliminate basal surface shape sum of errors substrate material unevenness error fully to the influence of testing result, therefore help to improve accuracy of detection, be suitable for aspheric surface is carried out manufacturing enterprise, scientific research and the use of detection unit that high precision detects.
The present invention helps to improve accuracy of detection, realizes that aspheric high precision detects, and is applicable to aspheric surface is carried out manufacturing enterprise, scientific research institutions and the use of detection measurement unit that high precision detects.
Description of drawings
Fig. 1 is the structural drawing of the device of the holographic substrate face shape of detection computations of the present invention and discontinuity of materials error;
Fig. 2 is the process flow diagram of the method for the holographic substrate face shape of detection computations of the present invention and discontinuity of materials error.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
As shown in Figure 1, realize that measurement mechanism of the present invention is included on the experiment porch 1 interferometer 2 installed, standard lens 3, detected calculation holographic substrate 4 and with reference to spherical mirror 5, wherein, standard lens 3, detected calculation holographic substrate 4 and be arranged in collimated light path from interferometer 2 successively with reference to spherical mirror 5, and their rotary middle spindle overlaps with the collimated light beam central shaft.
Interferometer 2 is used for providing a branch of collimated light;
Detected calculation holographic substrate 4 will convert the corrugated consistent with 5 shapes of reference spherical mirror from the standard ball ground roll face of standard lens 3 outgoing to, and will be converted to spherical wave by the corrugated of reference spherical mirror 5 reflected backs;
With reference to spherical mirror 5, be used for the corrugated reflected back interferometer 2 after detected calculation holographic substrate 4 conversions, corrugated after the conversion is test waves, the reference corrugated that corrugated and standard lens 3 after the conversion provide is interfered, obtain comprising face shape error and the discontinuity of materials error interferogram that is detected calculation holographic substrate 4.
Described interferometer 2 is fixed on first adjusting mechanism 6, and first adjusting mechanism 6 is used for regulating the pitching of interferometer 2, and by regulating first adjusting mechanism 6, guaranteeing can horizontal transmission from the parallel beam of interferometer 2 outgoing.Described interferometer 2 emergent lights are the monochromatic light of 632.8nm.The model of described interferometer 2 can be Zygo interferometer or Feisuo interferometer.
Described standard lens 3 is fixed on second adjusting mechanism 7, second adjusting mechanism 7 is used for the pitching, beat of adjustment criteria camera lens 3 and along x direction, y direction with along the translation of z direction, by regulating second adjusting mechanism 7, guarantee from the optical axis of the light beam of standard lens 3 outgoing keep level and with from interferometer 2 emergent light light shaft coaxles.Described standard lens 3 is fixed on the unthreaded hole place of interferometer 2 through second adjusting mechanism 7.Can cover fully from the divergent beams of described standard lens 3 outgoing and to shine on the detected calculation holographic substrate 4.Described standard lens 3, be used for the collimated light beam that interferometer 2 provides being assembled and will being converted to the standard ball ground roll from the directional light of interferometer 2 outgoing, the portion of energy of this standard ball ground roll by standard lens 3 last return reflection surface interferometer 2 as with reference to spherical wave; The F number of described standard lens 3 is with greater than 1 be advisable.The numerical aperture of described convergent beam from standard lens 3 outgoing must guarantee that detected calculation holographic substrate 4 can be shone fully greater than the light beam numerical aperture of the detected calculation holographic substrate 4 of incident.
Described detected calculation holographic substrate 4 is fixed on the 3rd adjusting mechanism 8, the 3rd adjusting mechanism 8 is used for regulating the pitching, beat of detected calculation holographic substrate 4 and along x direction, y direction with along the translation of z direction, by regulating the 3rd adjusting mechanism 8, guarantee from the optical axis of the light beam of detected calculation holographic substrate 4 outgoing keep level and with from interferometer 2 emergent light light shaft coaxles.Described detected calculation holographic substrate 4 is the pure phase-type ring-type of binary calculation holographic.Described detected calculation holographic substrate 4 is to utilize computing machine to design position, needed corrugated phase, and the recycling microelectronic process engineering produces two or more grade stepped profile through etching in substrate.The making of described detected calculation holographic substrate 4 comprises making, graph transfer printing and the etching of mask version.Detected calculation holographic substrate 4 is used wet etching method, and is needed chromium plating if the substrate of selecting for use is the higher K9 glass material of thermal stability and chemical stability.If select for use fused quartz to make base material, then need not chromium plating, adopt dry etching method.Needing to plate thickness on the described detected calculation holographic substrate 4 is the following anti-reflection film of 100nm.
Describedly be fixed on the 4th adjusting mechanism 9 with reference to spherical mirror 5, the 4th adjusting mechanism 9 is used for regulating pitching with reference to spherical mirror 5, beat and along x direction, y direction with along the translation of z direction, by regulating the 4th adjusting mechanism 9, guarantee from the optical axis of the light beam of reference spherical mirror 5 reflected backs keep level and with from interferometer 2 emergent light light shaft coaxles.Described material with reference to spherical mirror 5 can be chosen any material that can plate reflectance coating thereon, as quartz etc.Describedly the time need meet the following conditions in design with reference to the spacing between spherical mirror 5 and the detected calculation holographic substrate 4: the standard ball ground roll that standard lens 3 converts to forms the non-zero order diffraction light of zero order diffracted light and at different levels times after through the transmission diffraction of detected calculation holographic substrate 4, satisfy the refraction theorem of light in the time of will just making the zero order diffracted light process be detected calculation holographic substrate 4 with reference to the spacing between spherical mirror 5 and the detected calculation holographic substrate 4, and the Zero-order diffractive corrugated to impinge perpendicularly on reference to turning back in the interferometer on the spherical mirror 5 and through reference spherical mirror 5 reflection original roads.
Described second adjusting mechanism 7, the 3rd adjusting mechanism 8 and the 4th adjusting mechanism 9 all are the accurate adjusting mechanisms of five dimensions, are respectively applied to adjust standard lens 3, detected calculation holographic substrate 4 and with reference to the pitching of spherical mirror 5, beat and along x direction, y direction with along the translation of z direction.
The present invention is for realizing aspheric high precision accurate measurement, and Fig. 2 shows the method flow of the holographic substrate face shape of detection computations and discontinuity of materials error, and this method realizes as follows:
Step S1: utilize first adjusting mechanism 6 and second adjusting mechanism 7 to debug interferometer 2, standard lens 3, guarantee the optical axis of interferometer 2 outgoing beams and the light shaft coaxle of standard lens 3 outgoing beams;
Step S2: utilize standard lens 3 to be converted to the standard ball ground roll from the directional light of interferometer 2 outgoing, the portion of energy of this standard ball ground roll by last return reflection surface interferometer 2 of standard lens 3 as with reference to spherical wave;
Step S3: will be detected on the divergent beams that calculation holographic substrate 4 is placed on the standard ball ground roll, be positioned at reference to the relevant position before the spherical mirror 5, the standard ball ground roll is through detected calculation holographic substrate 4 transmission diffractions, make the Zero-order diffractive corrugated of detected calculation holographic substrate 4 impinge perpendicularly on reference on the spherical mirror 5 and through 5 reflections of reference spherical mirror, obtain testing the corrugated; This test corrugated propagates into after through detected calculation holographic substrate 4 transmission diffractions in the interferometer 2 and forms with reference light that standard lens 3 provides detects interferogram; This interferogram has comprised the face shape error of detected calculation holographic substrate 4, the aberration on discontinuity of materials sum of errors zero level corrugated, and the aberration on described zero level corrugated is spherical aberration;
Step S4: the wave aberration corrugated on emulation zero level corrugated in optical design software CODE V with wave aberration corrugated Zernike polynomial repressentation, deducts the wave aberration on wave aberration corrugated then from the interferogram that step S3 obtains;
Step S5: just eliminate in the interferogram of wave aberration only face shape error and the discontinuity of materials control information of remaining detected calculation holographic substrate 4, owing to the standard ball ground roll that is converted to by standard lens 3 successively twice transmission diffraction through detected calculation holographic substrate 4, therefore the size reality of the face shape error that comprises in the interferogram that obtains and discontinuity of materials error is the face shape error on the detected calculation holographic substrate 4 and the twice of discontinuity of materials error actual value, the face shape error that will obtain from interferogram and discontinuity of materials error amount reduce by half, and just can obtain real face shape error and discontinuity of materials error size on the detected calculation holographic substrate 4.
Continuous ask for an interview shown in Figure 1, when using the holographic substrate face shape of this device detection computations and discontinuity of materials error, because detected calculation holographic substrate 4 has certain thickness, can introduce aberration when coming the face shape of the holographic substrate 4 of calibrated and calculated and discontinuity of materials error with the Zero-order diffractive ripple among the step S3, this aberration mainly is spherical aberration, and the root mean square wave aberration value of spherical aberration can be expressed as following formula:
W wherein
SABe the root mean square wave aberration value of spherical aberration, t is the thickness of detected calculation holographic substrate 4, and n is the refractive index of detected calculation holographic substrate 4 materials, F
nF number for standard lens 3.From formula (1) as can be seen, for the calculation holographic substrate 4 of same thickness, the F number of standard lens 3 is more big, and the spherical aberration of introducing will be less.
For the face shape that can obtain calculation holographic substrate 4 and the actual value of discontinuity of materials error, must eliminate the influence of spherical aberration.S4 is said as step, at first utilizes the wave aberration corrugated on optical design software CODEV emulation zero level corrugated, by Glan nurse-Schmidt (Gram-Schmidt) orthogonalization method Ze Nike (Zernike) fitting of a polynomial is carried out on the wave aberration corrugated of zero order wave then:
Wherein, (ρ θ) is the wave aberration corrugated, a to F
iFor detecting the Ze Nike fitting coefficient on corrugated; Z
i(ρ θ) is zernike polynomial, and it adopts polar coordinates to express, and ρ is the polar coordinates radius, and θ is polar angle, i=1,2,3......N; I is the numbering of individual event zernike polynomial correspondence, and N is the total item of zernike polynomial;
The corrugated face shape that Wei You Ze Nike fitting coefficient and zernike polynomial are represented; When i was 9, corresponding zernike polynomial was 6 ρ
4-6 ρ
2+ 1, it represents the spherical aberration on corrugated.The 9th zernike coefficient of wave aberration corrugated zernike polynomial is exactly the occurrence of spherical aberration, deduct this spherical aberration value from the interferogram that step S3 obtains, information remaining in the interferogram is just for being detected face shape and the discontinuity of materials control information of calculation holographic substrate 4.
Owing to the standard ball ground roll that is converted to by standard lens 3 successively twice transmission diffraction through detected calculation holographic substrate 4, if detected calculation holographic substrate 4 exists face shape and the inhomogeneous error of material, the every transmission diffraction through a calculation holographic substrate 4 of standard ball ground roll, the inhomogeneous error of face shape and material will be reflected in the interferogram that obtains, face shape error and the discontinuity of materials error amount of the twice that therefore just superposeed in the interferogram that obtains.Reduce by half eliminating in the interferogram of spherical aberration influence remaining shape and discontinuity of materials error amount, just can obtain on the detected calculation holographic substrate 4 face shape and discontinuity of materials error size really.
For the face shape of eliminating the calculation holographic substrate and discontinuity of materials error to the influence of aspheric surface testing result, obtain in detection also needing to finish following work on the basis of calculation holographic substrate 4 real face shapes and discontinuity of materials error size:
Build Zygo or Feisuo interferometer and detect the aspheric surface light path, this light path is similar for the structure drawing of device that is total to light channel structure and Fig. 1, and unique difference is exactly that the reference spherical mirror 5 among the figure one is replaced to aspheric mirror to be detected;
The standard ball ground roll that is converted to by standard lens returns along desirable normal direction incident and former road in tested aspheric mirror position behind the holographic substrate transmission diffraction as calculated, the reflecting light that carries tested surface face shape information detects interferogram through propagating into behind the calculation holographic substrate transmission diffraction in the interferometer and forming with reference light that standard lens provides again, comprise aspheric surface information to be measured in this interferogram, also comprised face shape and the discontinuity of materials control information of calculation holographic substrate.Deduct face shape and the discontinuity of materials error amount that utilizes the calculation holographic substrate that the present invention calibrates with this interferogram, just can thoroughly eliminate the face shape of calculation holographic substrate and discontinuity of materials error to the influence of aspheric surface testing result, improve the aspheric surface accuracy of detection significantly.
The above; only be that the present invention is for detection of the face shape of calculation holographic substrate and the embodiment of discontinuity of materials error; but protection scope of the present invention is not limited thereto; detected object of the present invention is not limited to the calculation holographic substrate; comprise that also other have the substrate of reflection or transmission property; anyly be familiar with the people of this technology in the disclosed technical scope of the present invention; the replacement that is understood that or increase and decrease; all should be encompassed in of the present invention comprising within the scope; therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (10)
1. the device of the holographic substrate face shape of a detection computations and discontinuity of materials error, it is characterized in that: described device comprises:
Interferometer (2), standard lens (3), detected calculation holographic substrate (4) are installed and with reference to spherical mirror (5) at experiment porch (1), wherein, standard lens (3), detected calculation holographic substrate (4) and be arranged in collimated light path from interferometer (2) successively with reference to spherical mirror (5), and their rotary middle spindle overlaps with the collimated light beam central shaft, wherein:
Interferometer (2) is used for providing a branch of collimated light;
Standard lens (3) is for the reference corrugated of collimated light beam being assembled and being provided standard ball ground roll face and be used for interfering;
Detected calculation holographic substrate (4) will convert the corrugated consistent with reference spherical mirror (5) face shape from the standard ball ground roll face of standard lens (3) outgoing to, and will be converted to spherical wave by the corrugated of reference spherical mirror (5) reflected back;
With reference to spherical mirror (5), be used for the corrugated reflected back interferometer (2) after detected calculation holographic substrate (4) conversion, corrugated after the conversion is test waves, the reference corrugated that corrugated and standard lens (3) after the conversion provide is interfered, obtain comprising face shape error and the discontinuity of materials error interferogram that is detected calculation holographic substrate (4).
2. the device of the holographic substrate face shape of detection computations and discontinuity of materials error according to claim 1, it is characterized in that: described interferometer (2) is fixed on first adjusting mechanism (6), first adjusting mechanism (6), be used for regulating the pitching of interferometer (2), by regulating first adjusting mechanism (6), guaranteeing can horizontal transmission from the parallel beam of interferometer (2) outgoing.
3. as the device of the holographic substrate face shape of detection computations as described in the claim 2 and discontinuity of materials error, it is characterized in that: described standard lens (3) is fixed on second adjusting mechanism (7), second adjusting mechanism (7) is used for the pitching, beat of adjustment criteria camera lens (3) and along x direction, y direction with along the translation of z direction, by regulating second adjusting mechanism (7), guarantee from the optical axis of the light beam of standard lens (3) outgoing keep level and with from interferometer (2) emergent light light shaft coaxle.
4. as the device of the holographic substrate face shape of detection computations as described in the claim 3 and discontinuity of materials error, it is characterized in that: described detected calculation holographic substrate (4) is fixed on the 3rd adjusting mechanism (8), the 3rd adjusting mechanism (8) be used for to be regulated the pitching, beat of detected calculation holographic substrate (4) and along x direction, y direction with along the translation of z direction, by regulating the 3rd adjusting mechanism (8), guarantee from the optical axis of the light beam of detected calculation holographic substrate (4) outgoing keep level and with from interferometer (2) emergent light light shaft coaxle.
5. as the device of the holographic substrate face shape of detection computations as described in the claim 4 and discontinuity of materials error, it is characterized in that: describedly be fixed on the 4th adjusting mechanism (9) with reference to spherical mirror (5), the 4th adjusting mechanism (9) be used for to be regulated pitching with reference to spherical mirror (5), beat and along x direction, y direction with along the translation of z direction, by regulating the 4th adjusting mechanism (9), guarantee from the optical axis of the light beam of reference spherical mirror (5) reflected back keep level and with from interferometer (2) emergent light light shaft coaxle.
6. the device of the holographic substrate face shape of detection computations and discontinuity of materials error according to claim 1, it is characterized in that: described second adjusting mechanism (7), the 3rd adjusting mechanism (8) and the 4th adjusting mechanism (9) all are the accurate adjusting mechanisms of five dimensions, are respectively applied to adjust standard lens (3), detected calculation holographic substrate (4) and with reference to the pitching of spherical mirror (5), beat and along x direction, y direction with along the translation of z direction.
7. the device of the holographic substrate face shape of detection computations and discontinuity of materials error according to claim 1, it is characterized in that: described interferometer (2) emergent light is the monochromatic light of 632.8nm.
8. the device of the holographic substrate face shape of detection computations and discontinuity of materials error according to claim 1, it is characterized in that: described detected calculation holographic substrate (4) is the pure phase-type ring-type of binary calculation holographic.
9. the device of the holographic substrate face shape of detection computations and discontinuity of materials error according to claim 1 is characterized in that: can cover fully from the divergent beams of described standard lens (3) outgoing and shine on the detected calculation holographic substrate (4).
10. the method for the holographic substrate face shape of a detection computations and discontinuity of materials error is characterized in that comprising the steps:
Step S1: utilize first adjusting mechanism and second adjusting mechanism to debug interferometer, standard lens, guarantee the optical axis of interferometer outgoing beam and the light shaft coaxle of standard lens outgoing beam;
Step S2: utilize standard lens will be converted to the standard ball ground roll from the directional light of interferometer outgoing, the portion of energy of this standard ball ground roll by last return reflection surface interferometer of standard lens as the reference spherical wave;
Step S3: will be detected on the divergent beams that the calculation holographic substrate is placed on the standard ball ground roll, be positioned at reference to the relevant position before the spherical mirror, the standard ball ground roll is through detected calculation holographic substrate transmission diffraction, make the Zero-order diffractive corrugated of detected calculation holographic substrate impinge perpendicularly on reference on the spherical mirror and through the mirror reflection of reference sphere, obtain testing the corrugated; This test corrugated propagates into after through detected calculation holographic substrate transmission diffraction in the interferometer and forms with reference light that standard lens provides detects interferogram; This interferogram has comprised the face shape error of detected calculation holographic substrate, the aberration on discontinuity of materials sum of errors zero level corrugated, and the aberration on described zero level corrugated is spherical aberration;
Step S4: the wave aberration corrugated on emulation zero level corrugated in optical design software CODE V with wave aberration corrugated Zernike polynomial repressentation, deducts the wave aberration on wave aberration corrugated then from the interferogram that step S3 obtains;
Step S5: just eliminate in the interferogram of wave aberration only face shape error and the discontinuity of materials control information of remaining detected calculation holographic substrate, owing to the standard ball ground roll that is converted to by standard lens successively twice transmission diffraction through detected calculation holographic substrate, therefore the size of the face shape error that comprises in the interferogram that obtains and discontinuity of materials error is actual in being detected the twice of the on-chip face shape error of calculation holographic and discontinuity of materials error actual value, the face shape error that will obtain from interferogram and discontinuity of materials error amount reduce by half, and just can obtain real face shape error and discontinuity of materials error size on the detected calculation holographic substrate.
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| CN102889856A (en) * | 2012-09-28 | 2013-01-23 | 中国科学院光电技术研究所 | Device and method for positioning center of small hole based on computer generated hologram (CGH) |
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| CN1427242A (en) * | 2001-12-21 | 2003-07-02 | 三星电子株式会社 | Apparatus and method for measuring non-spheric surface with hologram and concave surface |
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| CN110285772B (en) * | 2019-06-20 | 2021-05-25 | 中国人民解放军国防科技大学 | Evaluation method, system and medium for calculating detection precision of holographic element |
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| CN116586640B (en) * | 2023-07-14 | 2023-09-22 | 中国科学院长春光学精密机械与物理研究所 | Spherical test board, manufacturing method thereof and calibration method of transfer function of interferometer |
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