CN103196389B - The apparatus and method of detection computations holographic substrates face shape and discontinuity of materials error - Google Patents
The apparatus and method of detection computations holographic substrates face shape and discontinuity of materials error Download PDFInfo
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Abstract
The present invention is the device of detection computations holographic substrates face shape and discontinuity of materials error, be included on experiment porch and interferometer, standard lens, detected calculation holographic substrate and reference spherical mirror are installed, standard lens, detected calculation holographic substrate and reference spherical mirror are arranged in the collimated light path of interferometer successively, and their rotary middle spindle overlaps with collimated light beam central shaft; With reference to spherical mirror, for the corrugated after detected calculation holographic substrate conversion is reflected back in interferometer, corrugated after changing is test waves, the reference corrugated that corrugated after conversion and standard lens provide is interfered, obtains comprising the face shape error of detected calculation holographic substrate and the interferogram of discontinuity of materials error.The present invention also provides a kind of method of detection computations holographic substrates face shape and discontinuity of materials error.The present invention contributes to realizing aspheric high precision test, is applicable to carry out high precision test and metering to aspheric surface.
Description
Technical field
The invention belongs to field of optical detection, relate to a kind of detected calculation holographic substrate (Computer Generated Hologram, CGH) face shape error and discontinuity of materials error eliminated to the method for Aspherical-surface testing Influence on test result.
Background technology
Along with the development of applied optics, in optical system, adopt aspheric surface more and more general, but high-precision Aspherical-surface testing technology but become the bottleneck of its wide popularization and application.Aspherical-surface testing detects maximum problem than sphere: due to the face shape that aspheric surface is changeable, and the non-spherical wavefront and the tested wave-front coherence that are difficult to a generation standard relate to.Calculation holographic (Computer-generatedhologram, CGH), because of its outstanding wavefront generative capacity, solves this difficult problem just.Therefore, calculation holographic device coordinates various commercial interferometer to be widely used in the high precision test of aspheric surface.
In order to really realize high precision test, the impact of various error on testing result must be carefully analyzed.By calculating Holographic test aspheric surface, the error comprised mainly is divided into the design error of hologram, the alignment error of measured lens, the fabrication error of hologram and alignment error thereof.Adopt the algorithm that precision is high, the design error of hologram can be made to ignore.The alignment error of measured lens then can be holographic by design basis, and observation experiment interferogram is controlled in scope little as far as possible.Design, to quasi-holographic, can ensure the accurate aligning of calculation holographic device.Therefore, the fabrication error of hologram is the most critical factor determining accuracy of detection.
In the fabrication error of calculation holographic device, substrate face shape error is in the highest flight, its having the greatest impact to accuracy of detection; Substrate material unevenness also can directly introduce larger metrical error, and in order to realize more high-precision measurement, substrate face shape error and substrate material unevenness error need to be eliminated on the impact of accuracy of detection.It is before writing holography, utilize interferometer directly to measure basal surface shape error amount on the method that accuracy of detection affects that tradition eliminates substrate face shape error, then this error amount is deducted the interferogram obtained after write, the difficult point of this method is the two width interferograms that correctly cannot record the holographic front and back of write, and in measuring process, because different substrate situation substrates may change shape.Therefore cannot measure and write the face shape error that holographic process produces and the error debuging process generation.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, the device of a kind of detection computations holographic substrates face shape and discontinuity of materials error is provided, thus elimination calculation holographic substrate face shape and discontinuity of materials error are on the impact of Aspherical-surface testing result, effectively improve surface testing precision.
For achieving the above object, first aspect present invention provides the device of detection computations holographic substrates face shape and discontinuity of materials error, and described measurement mechanism comprises:
Experiment porch is installed interferometer, standard lens, detected calculation holographic substrate and reference spherical mirror, wherein, standard lens, detected calculation holographic substrate and reference spherical mirror are arranged in the collimated light path of interferometer successively, and their rotary middle spindle overlaps with collimated light beam central shaft, wherein:
Interferometer, for providing a branch of collimated light;
Standard lens, coalescence can provide standard ball ground roll face and is used for the reference corrugated of interfering for being carried out by collimated light beam;
Detected calculation holographic substrate, converts the corrugated consistent with reference sphere mirror surface-shaped to, and is converted to spherical wave by by the corrugated be reflected back with reference to spherical mirror by the standard ball ground roll face from standard lens outgoing;
With reference to spherical mirror, for the corrugated after detected calculation holographic substrate conversion is reflected back in interferometer, corrugated after changing is test waves, the reference corrugated that corrugated after conversion and standard lens provide is interfered, obtains the face shape error and the discontinuity of materials error interferogram that comprise detected calculation holographic substrate.
For achieving the above object, second aspect present invention provides a kind of method of detection computations holographic substrates face shape and discontinuity of materials error, and the method realizes as follows:
Step S1: utilize the first adjusting mechanism and the second adjusting mechanism to debug interferometer standard lens, ensures the optical axis of interferometer outgoing beam and the light shaft coaxle of standard lens outgoing beam;
Step S2: utilize standard lens that the directional light from interferometer outgoing is converted to standard ball ground roll, the portion of energy of this standard ball ground roll is returned interferometer as reference spherical wave by last surface reflection of standard lens;
Step S3: detected calculation holographic substrate is placed on the divergent beams of standard ball ground roll, be positioned at reference to the relevant position before spherical mirror, standard ball ground roll is through detected calculation holographic substrate transmission diffraction, the Zero-order diffractive corrugated of detected calculation holographic substrate is made to impinge perpendicularly on reference to spherical mirror, through with reference to spherical mirror reflection, obtains testing corrugated; This test corrugated propagates into be formed in interferometer and with the reference light that standard lens provides after detected calculation holographic substrate transmission diffraction detects interferogram; This interferogram contains the aberration on the face shape error of detected calculation holographic substrate, discontinuity of materials error and zero level corrugated, and the aberration on described zero level corrugated is spherical aberration;
Step S4: the wave aberration corrugated emulating zero level corrugated in optical design software CODE V, by wave aberration corrugated Zernike polynomial repressentation, then deducts the wave aberration on wave aberration corrugated from the interferogram that step S3 obtains;
Step S5: eliminate the face shape error and discontinuity of materials control information that are just only left detected calculation holographic substrate in the interferogram of wave aberration, due to standard ball ground roll successively twice transmission diffraction through detected calculation holographic substrate converted to by standard lens, the actual twice for being detected the on-chip face shape error of calculation holographic and discontinuity of materials error actual value of size of the face shape error comprised in the interferogram therefore obtained and discontinuity of materials error amount, the face shape error obtained from interferogram and discontinuity of materials error amount are reduced by half, just can obtain real face shape error and discontinuity of materials error size on detected calculation holographic substrate.
Beneficial effect of the present invention: compared with prior art, the present invention utilizes to measure the scrambling of substrate surface and the size of discontinuity of material from the zero order light of detected calculation holographic substrate diffraction, then detect the interferogram of the sign aspheric surface quality obtained and deduct from utilizing detected calculation holographic substrate to carry out aspheric surface the face shape and discontinuity of materials error amount that zero order diffracted light measures, so just can eliminate substrate face shape error and substrate material unevenness error to the impact of Aspherical-surface testing result.The present invention not only well solves classic method and measures substrate face shape error Problems existing, and can also measure substrate material unevenness extent by mistake simultaneously.
The invention solves classic method cannot correctly record write holographic before and after two width interferograms, in measuring process, cause because substrate may change shape and can not go out the problem of substrate face shape error by accurate calibration.And substrate material unevenness error also can be calibrated while calibrating substrate face shape error.The present invention can on the basis accurately detecting calculation holographic substrate face shape and discontinuity of materials error amount, elimination substrate face shape error and substrate material unevenness error are on the impact of testing result completely, therefore contribute to improving accuracy of detection, be suitable for that the manufacturing enterprise of high precision test, scientific research and detection unit are carried out to aspheric surface and use.
The present invention contributes to improving accuracy of detection, realizes aspheric high precision test, is applicable to carry out the manufacturing enterprise of high precision test, scientific research institutions and detection measurement unit to aspheric surface and uses.
Accompanying drawing explanation
Fig. 1 is the structural drawing of the device of detection computations holographic substrates face shape of the present invention and discontinuity of materials error;
Fig. 2 is the process flow diagram of the method for detection computations holographic substrates face shape of the present invention and discontinuity of materials error.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
As shown in Figure 1, realize measurement mechanism of the present invention and be included in interferometer 2, standard lens 3, detected calculation holographic substrate 4 and reference spherical mirror 5 that experiment porch 1 is installed, wherein, standard lens 3, detected calculation holographic substrate 4 and reference spherical mirror 5 are arranged in the collimated light path of interferometer 2 successively, and their rotary middle spindle overlaps with collimated light beam central shaft.
Interferometer 2, for providing a branch of collimated light;
Standard lens 3, coalescence can provide standard ball ground roll face and is used for the reference corrugated of interfering for being carried out by collimated light beam;
Detected calculation holographic substrate 4, converts the corrugated consistent with reference spherical mirror 5 shapes to, and is converted to spherical wave by by the corrugated be reflected back with reference to spherical mirror 5 by the standard ball ground roll face from standard lens 3 outgoing;
With reference to spherical mirror 5, for the corrugated after changing through detected calculation holographic substrate 4 is reflected back in interferometer 2, corrugated after changing is test waves, the reference corrugated that corrugated after conversion and standard lens 3 provide is interfered, obtains the face shape error and the discontinuity of materials error interferogram that comprise detected calculation holographic substrate 4.
Described interferometer 2 is fixed on the first adjusting mechanism 6, the first adjusting mechanism 6, for regulating the pitching of interferometer 2, by regulating the first adjusting mechanism 6, ensures the parallel beam energy horizontal transmission from interferometer 2 outgoing.Described interferometer 2 emergent light is the monochromatic light of 632.8nm.The model of described interferometer 2 can be Zygo interferometer or Feisuo interferometer.
Described standard lens 3 is fixed on the second adjusting mechanism 7, second adjusting mechanism 7 for the pitching of adjustment criteria camera lens 3, beat and in the x-direction, y direction and translation in the z-direction, by regulating the second adjusting mechanism 7, ensure optical axis maintenance level from the light beam of standard lens 3 outgoing and with from interferometer 2 emergent light light shaft coaxle.Described standard lens 3 is fixed on the unthreaded hole place of interferometer 2 through the second adjusting mechanism 7.Can cover completely from the divergent beams of described standard lens 3 outgoing and be irradiated to detected calculation holographic substrate 4.Described standard lens 3, collimated light beam for being provided by interferometer 2 carries out coalescence the directional light from interferometer 2 outgoing to be converted to standard ball ground roll, and the portion of energy of this standard ball ground roll is returned interferometer 2 as reference spherical wave by last surface reflection of standard lens 3; The F number of described standard lens 3 is to be greater than 1 be advisable.The numerical aperture of the described convergent beam from standard lens 3 outgoing must be greater than the light beam numerical aperture of incident detected calculation holographic substrate 4, ensures that detected calculation holographic substrate 4 can be fully irradiated.
Described detected calculation holographic substrate 4 is fixed on the 3rd adjusting mechanism 8,3rd adjusting mechanism 8 for regulate the pitching of detected calculation holographic substrate 4, beat and in the x-direction, y direction and translation in the z-direction, by regulating the 3rd adjusting mechanism 8, ensure optical axis maintenance level from the light beam of detected calculation holographic substrate 4 outgoing and with from interferometer 2 emergent light light shaft coaxle.Described detected calculation holographic substrate 4 is binary pure phase-type ring-type calculation holographic.Described detected calculation holographic substrate 4 utilizes Computer Design to go out required position, corrugated phase, and recycling microelectronic process engineering produces two or more grade stepped profile through etching in substrate.The making of described detected calculation holographic substrate 4 comprises the making of mask plate, graph transfer printing and etching.If the substrate that detected calculation holographic substrate 4 is selected is the K9 glass material that thermal stability and chemical stability are higher, application wet etching method, and need chromium plating.If select fused quartz to make base material, then without the need to chromium plating, adopt dry etching method.Described detected calculation holographic substrate 4 need plating thickness be the anti-reflection film of below 100nm.
Described reference spherical mirror 5 is fixed on the 4th adjusting mechanism 9,4th adjusting mechanism 9 for regulate with reference to the pitching of spherical mirror 5, beat and in the x-direction, y direction and translation in the z-direction, by regulating the 4th adjusting mechanism 9, ensure optical axis maintenance level from the light beam be reflected back with reference to spherical mirror 5 and with from interferometer 2 emergent light light shaft coaxle.The described material with reference to spherical mirror 5 can choose any material that can plate reflectance coating thereon, as quartz etc.Described with reference to the following condition of demand fulfillment when designing of the spacing between spherical mirror 5 and detected calculation holographic substrate 4: the standard ball ground roll that standard lens 3 converts to forms the non-zero order diffraction light of zero order diffracted light and at different levels times after the transmission diffraction of detected calculation holographic substrate 4, to just make zero order diffracted light in time being detected calculation holographic substrate 4, meet the refraction theorem of light with reference to the spacing between spherical mirror 5 and detected calculation holographic substrate 4, and Zero-order diffractive corrugated will impinge perpendicularly on reference to spherical mirror 5 turns back in interferometer through reflecting former road with reference to spherical mirror 5.
Described second adjusting mechanism 7, the 3rd adjusting mechanism 8 and the 4th adjusting mechanism 9 are all five dimension accurate adjusting mechanisms, be respectively used to adjust standard lens 3, detected calculation holographic substrate 4 and with reference to the pitching of spherical mirror 5, beat and in the x-direction, y direction and translation in the z-direction.
The present invention is for realizing aspheric high precision accurate measurement, and Fig. 2 shows the method flow of detection computations holographic substrates face shape and discontinuity of materials error, and the method realizes as follows:
Step S1: utilize the first adjusting mechanism 6 and the second adjusting mechanism 7 to debug interferometer 2, standard lens 3, ensures the optical axis of interferometer 2 outgoing beam and the light shaft coaxle of standard lens 3 outgoing beam;
Step S2: utilize standard lens 3 that the directional light from interferometer 2 outgoing is converted to standard ball ground roll, the portion of energy of this standard ball ground roll is returned interferometer 2 as reference spherical wave by last surface reflection of standard lens 3;
Step S3: detected calculation holographic substrate 4 is placed on the divergent beams of standard ball ground roll, be positioned at reference to the relevant position before spherical mirror 5, standard ball ground roll is through detected calculation holographic substrate 4 transmission diffraction, the Zero-order diffractive corrugated of detected calculation holographic substrate 4 is made to impinge perpendicularly on reference to spherical mirror 5, through reflecting with reference to spherical mirror 5, obtains testing corrugated; This test corrugated propagates into be formed in interferometer 2 and with the reference light that standard lens 3 provides after detected calculation holographic substrate 4 transmission diffraction detects interferogram; This interferogram contains the aberration on the face shape error of detected calculation holographic substrate 4, discontinuity of materials error and zero level corrugated, and the aberration on described zero level corrugated is spherical aberration;
Step S4: the wave aberration corrugated emulating zero level corrugated in optical design software CODE V, by wave aberration corrugated Zernike polynomial repressentation, then deducts the wave aberration on wave aberration corrugated from the interferogram that step S3 obtains;
Step S5: eliminate the face shape error and discontinuity of materials control information that are just only left detected calculation holographic substrate 4 in the interferogram of wave aberration, due to standard ball ground roll successively twice transmission diffraction through detected calculation holographic substrate 4 converted to by standard lens 3, therefore the face shape error comprised in the interferogram obtained and discontinuity of materials be the actual twice for being detected face shape error on calculation holographic substrate 4 and discontinuity of materials error actual value of extent by mistake, the face shape error obtained from interferogram and discontinuity of materials error amount are reduced by half, just can obtain real face shape error and discontinuity of materials error size on detected calculation holographic substrate 4.
Continue please as shown in Figure 1, when using this device detection computations holographic substrates face shape and discontinuity of materials error, because detected calculation holographic substrate 4 has certain thickness, aberration can be introduced when carrying out face shape and the discontinuity of materials error of calibrated and calculated holographic substrates 4 in step S3 with Zero-order diffractive ripple, this aberration mainly spherical aberration, the root mean square wave aberration value of spherical aberration can be expressed as following formula:
Wherein W
sAfor the root mean square wave aberration value of spherical aberration, t is the thickness of detected calculation holographic substrate 4, and n is the refractive index of detected calculation holographic substrate 4 material, F
nfor the F number of standard lens 3.As can be seen from formula (1), for the calculation holographic substrate 4 of same thickness, the F number of standard lens 3 is larger, and the spherical aberration of introducing will be less.
In order to the actual value of the face shape and discontinuity of materials error that can obtain calculation holographic substrate 4, the impact of spherical aberration must be eliminated.As step S4 is said, first utilize optical design software CODEV to emulate the wave aberration corrugated on zero level corrugated, then by Glan nurse-Schmidt (Gram-Schmidt) orthogonalization method, Ze Nike (Zernike) fitting of a polynomial carried out on the wave aberration corrugated of zero order wave:
Wherein, F (ρ, θ) is wave aberration corrugated, a
ifor detecting the Ze Nike fitting coefficient on corrugated; Z
i(ρ, θ) is zernike polynomial, and it adopts polar coordinates to express, and ρ is polar coordinates radius, and θ is polar angle, i=1,2,3......N; I is the numbering that individual event zernike polynomial is corresponding, and N is the total item of zernike polynomial;
the wavefront figure that Wei You Ze Nike fitting coefficient and zernike polynomial represent; When i is 9, corresponding zernike polynomial is 6 ρ
4-6 ρ
2+ 1, it represents the spherical aberration on corrugated.9th zernike coefficient of wave aberration corrugated zernike polynomial is exactly the occurrence of spherical aberration, from the interferogram that step S3 obtains, deduct this spherical aberration value, information remaining in interferogram is just face shape and the discontinuity of materials control information of detected calculation holographic substrate 4.
Due to standard ball ground roll successively twice transmission diffraction through detected calculation holographic substrate 4 converted to by standard lens 3, if there is face shape and the uneven error of material in detected calculation holographic substrate 4, standard ball ground roll is often through the transmission diffraction of a calculation holographic substrate 4, face shape and the uneven error of material will be reflected in the interferogram obtained, and have just superposed face shape error and the discontinuity of materials error amount of twice in the interferogram therefore obtained.Remaining shape and discontinuity of materials error amount in the interferogram eliminating spherical aberration impact are reduced by half, just can obtain real face shape and discontinuity of materials error size on detected calculation holographic substrate 4.
In order to eliminate the face shape of calculation holographic substrate and discontinuity of materials error to the impact of Aspherical-surface testing result, detecting on the basis obtaining the real face shape of calculation holographic substrate 4 and discontinuity of materials error size, also needing following work:
Build Zygo or Feisuo interferometer detection aspheric surface light path, this light path is for being total to light channel structure, and the structure drawing of device of Fig. 1 is similar, and unique difference is exactly that the reference spherical mirror 5 in figure mono-is replaced to aspheric mirror to be detected;
The standard ball ground roll converted to by standard lens returns along the incident and former road of desirable normal direction in tested aspheric mirror position after holographic substrates transmission diffraction as calculated, the reflecting light carrying tested surface face shape information again propagates into be formed in interferometer and with the reference light that standard lens provides and detects interferogram after calculation holographic substrate transmission diffraction, contain aspheric surface information to be measured in this interferogram, further comprises face shape and the discontinuity of materials control information of calculation holographic substrate.Face shape and the discontinuity of materials error amount of the calculation holographic substrate utilizing the present invention to calibrate is deducted with this interferogram, just thoroughly can eliminate the face shape of calculation holographic substrate and discontinuity of materials error to the impact of Aspherical-surface testing result, improve Aspherical-surface testing precision significantly.
The above; be only the face shape of the present invention for detection computations holographic substrates and the embodiment of discontinuity of materials error; but protection scope of the present invention is not limited thereto; detected object of the present invention is not limited to calculation holographic substrate; also comprise the substrate that other have reflection or transmission property; any people being familiar with this technology is in the technical scope disclosed by the present invention; the replacement be understood that or increase and decrease; all should be encompassed in and of the present inventionly comprise within scope; therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (10)
1. a device for detection computations holographic substrates face shape and discontinuity of materials error, is characterized in that: described device comprises:
Experiment porch (1) is installed interferometer (2), standard lens (3), detected calculation holographic substrate (4) and reference spherical mirror (5), wherein, standard lens (3), detected calculation holographic substrate (4) and reference spherical mirror (5) are arranged in the collimated light path of interferometer (2) successively, and their rotary middle spindle overlaps with collimated light beam central shaft, wherein:
Interferometer (2), for providing a branch of collimated light;
Standard lens (3), coalescence can be converted to standard ball ground roll face and the reference corrugated for interfering by the directional light from interferometer (2) outgoing for being carried out by collimated light beam; The portion of energy of this standard ball ground roll is returned interferometer (2) as reference spherical wave by standard lens (3) last surface reflection; The F number of described standard lens (3) is greater than 1; Described standard lens (3) is fixed on the unthreaded hole place of interferometer (2) through the second adjusting mechanism (7); The numerical aperture of the described convergent beam from standard lens (3) outgoing must be greater than the light beam numerical aperture of incident detected calculation holographic substrate (4), ensures that detected calculation holographic substrate (4) can be fully irradiated;
Detected calculation holographic substrate (4), standard ball ground roll face from standard lens (3) outgoing is converted to the corrugated consistent with reference spherical mirror (5) face shape, and be converted to spherical wave by by the corrugated be reflected back with reference to spherical mirror (5); Described detected calculation holographic substrate (4) utilizes Computer Design to go out required position, corrugated phase, and recycling microelectronic process engineering produces two or more grade stepped profile through etching in substrate;
With reference to spherical mirror (5), for the corrugated after detected calculation holographic substrate (4) conversion is reflected back in interferometer (2), corrugated after changing is test waves, the reference corrugated that corrugated after conversion and standard lens (3) provide is interfered, obtains the face shape error and the discontinuity of materials error interferogram that comprise detected calculation holographic substrate (4); Described with reference to the following condition of demand fulfillment when designing of the spacing between spherical mirror (5) and detected calculation holographic substrate (4): the standard ball ground roll that standard lens (3) converts to forms the non-zero order diffraction light of zero order diffracted light and at different levels times after the transmission diffraction of detected calculation holographic substrate (4), will just make zero order diffracted light in time being detected calculation holographic substrate (4), meet the refraction theorem of light with reference to the spacing between spherical mirror (5) and detected calculation holographic substrate (4), and Zero-order diffractive corrugated to impinge perpendicularly on upper with reference to spherical mirror (5) and turn back in interferometer through reflecting former road with reference to spherical mirror (5).
2. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 1, it is characterized in that: described interferometer (2) is fixed on the first adjusting mechanism (6), first adjusting mechanism (6), for regulating the pitching of interferometer (2), by regulating the first adjusting mechanism (6), ensure the parallel beam energy horizontal transmission from interferometer (2) outgoing.
3. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 2, it is characterized in that: described standard lens (3) is fixed on the second adjusting mechanism (7), second adjusting mechanism (7) for the pitching of adjustment criteria camera lens (3), beat and in the x-direction, y direction and translation in the z-direction, by regulating the second adjusting mechanism (7), ensure from the optical axis of the light beam of standard lens (3) outgoing keep level and with from interferometer (2) emergent light light shaft coaxle.
4. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 3, it is characterized in that: described detected calculation holographic substrate (4) is fixed on the 3rd adjusting mechanism (8), 3rd adjusting mechanism (8) is for regulating the pitching of detected calculation holographic substrate (4), beat and in the x-direction, y direction and translation in the z-direction, by regulating the 3rd adjusting mechanism (8), ensure from the optical axis of the light beam of detected calculation holographic substrate (4) outgoing keep level and with from interferometer (2) emergent light light shaft coaxle.
5. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 4, it is characterized in that: described reference spherical mirror (5) is fixed on the 4th adjusting mechanism (9), 4th adjusting mechanism (9) for regulate with reference to the pitching of spherical mirror (5), beat and in the x-direction, y direction and translation in the z-direction, by regulating the 4th adjusting mechanism (9), ensure from the optical axis maintenance level of light beam be reflected back with reference to spherical mirror (5) and with from interferometer (2) emergent light light shaft coaxle.
6. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 1, it is characterized in that: described second adjusting mechanism (7), the 3rd adjusting mechanism (8) and the 4th adjusting mechanism (9) are all five dimension accurate adjusting mechanisms, be respectively used to adjust standard lens (3), detected calculation holographic substrate (4) and with reference to the pitching of spherical mirror (5), beat and in the x-direction, y direction and translation in the z-direction.
7. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 1, is characterized in that: described interferometer (2) emergent light is the monochromatic light of 632.8nm.
8. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 1, is characterized in that: described detected calculation holographic substrate (4) is binary pure phase-type ring-type calculation holographic.
9. the device of detection computations holographic substrates face shape and discontinuity of materials error as claimed in claim 1, is characterized in that: can cover completely from the divergent beams of described standard lens (3) outgoing and be irradiated to detected calculation holographic substrate (4).
10. use the detection computations holographic substrates face shape of the device of detection computations holographic substrates face shape and discontinuity of materials error described in claim 1 and a method for discontinuity of materials error, it is characterized in that comprising the steps:
Step S1: utilize the first adjusting mechanism and the second adjusting mechanism to debug interferometer, standard lens, ensures the optical axis of interferometer outgoing beam and the light shaft coaxle of standard lens outgoing beam;
Step S2: utilize standard lens that the directional light from interferometer outgoing is converted to standard ball ground roll, the portion of energy of this standard ball ground roll is returned interferometer as reference spherical wave by last surface reflection of standard lens;
Step S3: detected calculation holographic substrate is placed on the divergent beams of standard ball ground roll, be positioned at reference to the relevant position before spherical mirror, standard ball ground roll is through detected calculation holographic substrate transmission diffraction, the Zero-order diffractive corrugated of detected calculation holographic substrate is made to impinge perpendicularly on reference to spherical mirror, through with reference to spherical mirror reflection, obtains testing corrugated; This test corrugated propagates into be formed in interferometer and with the reference light that standard lens provides after detected calculation holographic substrate transmission diffraction detects interferogram; This interferogram contains the aberration on the face shape error of detected calculation holographic substrate, discontinuity of materials error and zero level corrugated, and the aberration on described zero level corrugated is spherical aberration;
Step S4: the wave aberration corrugated emulating zero level corrugated in optical design software CODE V, by wave aberration corrugated Zemike polynomial repressentation, then deducts the wave aberration on wave aberration corrugated from the interferogram that step S3 obtains;
Step S5: eliminate the face shape error and discontinuity of materials control information that are just only left detected calculation holographic substrate in the interferogram of wave aberration, due to standard ball ground roll successively twice transmission diffraction through detected calculation holographic substrate converted to by standard lens, therefore the face shape error comprised in the interferogram obtained and discontinuity of materials be the actual twice for being detected the on-chip face shape error of calculation holographic and discontinuity of materials error actual value of extent by mistake, the face shape error obtained from interferogram and discontinuity of materials error amount are reduced by half, just can obtain real face shape error and discontinuity of materials error size on detected calculation holographic substrate.
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| CN101949691A (en) * | 2010-09-07 | 2011-01-19 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile |
| CN102393565A (en) * | 2011-10-21 | 2012-03-28 | 中国科学院光电技术研究所 | Reflecting type inverse compensator |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN102778210A (en) * | 2012-07-13 | 2012-11-14 | 中国科学院光电技术研究所 | Computer-generated hologram-based aspheric surface absolute detection method |
| CN102889856A (en) * | 2012-09-28 | 2013-01-23 | 中国科学院光电技术研究所 | Device and method for positioning center of small hole based on computer generated hologram (CGH) |
-
2013
- 2013-04-02 CN CN201310113487.XA patent/CN103196389B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1427242A (en) * | 2001-12-21 | 2003-07-02 | 三星电子株式会社 | Apparatus and method for measuring non-spheric surface with hologram and concave surface |
| CN101949691A (en) * | 2010-09-07 | 2011-01-19 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile |
| CN102393565A (en) * | 2011-10-21 | 2012-03-28 | 中国科学院光电技术研究所 | Reflecting type inverse compensator |
| CN102519388A (en) * | 2011-10-28 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface figures of large-aperture off-axis convex aspheric mirror |
| CN102778210A (en) * | 2012-07-13 | 2012-11-14 | 中国科学院光电技术研究所 | Computer-generated hologram-based aspheric surface absolute detection method |
| CN102889856A (en) * | 2012-09-28 | 2013-01-23 | 中国科学院光电技术研究所 | Device and method for positioning center of small hole based on computer generated hologram (CGH) |
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