CN103180735B - 软物质的微阵列制作方法 - Google Patents

软物质的微阵列制作方法 Download PDF

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Publication number
CN103180735B
CN103180735B CN201280003445.4A CN201280003445A CN103180735B CN 103180735 B CN103180735 B CN 103180735B CN 201280003445 A CN201280003445 A CN 201280003445A CN 103180735 B CN103180735 B CN 103180735B
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microarray
substrate
soft
soft material
micro
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Chinese (zh)
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CN103180735A (zh
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桧山聪
栗林香织
尾上弘晃
竹内昌治
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NTT Docomo Inc
University of Tokyo NUC
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NTT Docomo Inc
University of Tokyo NUC
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/32—Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
    • B05D1/322—Removable films used as masks
    • B05D1/325—Masking layer made of peelable film
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12N—MICROORGANISMS OR ENZYMES; COMPOSITIONS THEREOF; PROPAGATING, PRESERVING, OR MAINTAINING MICROORGANISMS; MUTATION OR GENETIC ENGINEERING; CULTURE MEDIA
    • C12N15/00—Mutation or genetic engineering; DNA or RNA concerning genetic engineering, vectors, e.g. plasmids, or their isolation, preparation or purification; Use of hosts therefor
    • C12N15/09—Recombinant DNA-technology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N37/00—Details not covered by any other group of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00279—Features relating to reactor vessels
    • B01J2219/00306—Reactor vessels in a multiple arrangement
    • B01J2219/00313—Reactor vessels in a multiple arrangement the reactor vessels being formed by arrays of wells in blocks
    • B01J2219/00315—Microtiter plates
    • B01J2219/00317—Microwell devices, i.e. having large numbers of wells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00497—Features relating to the solid phase supports
    • B01J2219/00527—Sheets
    • B01J2219/00529—DNA chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00605—Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
    • B01J2219/00632—Introduction of reactive groups to the surface
    • B01J2219/00637—Introduction of reactive groups to the surface by coating it with another layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00659—Two-dimensional arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718—Type of compounds synthesised
    • B01J2219/0072—Organic compounds
    • B01J2219/00722—Nucleotides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718—Type of compounds synthesised
    • B01J2219/0072—Organic compounds
    • B01J2219/00725—Peptides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Immunology (AREA)
  • Biotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Zoology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Wood Science & Technology (AREA)
  • Microbiology (AREA)
  • Urology & Nephrology (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • Biophysics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Plant Pathology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Cell Biology (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
CN201280003445.4A 2011-03-28 2012-03-27 软物质的微阵列制作方法 Active CN103180735B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-070934 2011-03-28
JP2011070934A JP5656192B2 (ja) 2011-03-28 2011-03-28 ソフトマテリアルのマイクロアレイ作製方法
PCT/JP2012/057996 WO2012133450A1 (ja) 2011-03-28 2012-03-27 ソフトマテリアルのマイクロアレイ作製方法

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CN103180735A CN103180735A (zh) 2013-06-26
CN103180735B true CN103180735B (zh) 2014-12-31

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US (1) US8999443B2 (enExample)
EP (1) EP2594941B1 (enExample)
JP (1) JP5656192B2 (enExample)
CN (1) CN103180735B (enExample)
WO (1) WO2012133450A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3305721B1 (en) 2015-06-08 2023-10-18 Japan Science And Technology Agency High-density micro-chamber array and measurement method using same
US9561953B1 (en) * 2015-08-24 2017-02-07 Infineon Technologies Ag Method of forming a protective coating for a packaged semiconductor device
JP7082364B2 (ja) * 2018-03-02 2022-06-08 日本電信電話株式会社 フィルム状ソフトマテリアル、蛍光フィルム基材及びフィルム状ソフトマテリアルの製造方法、並びに応力計測方法
DE102020115368B4 (de) 2019-10-29 2025-05-22 Taiwan Semiconductor Manufacturing Co., Ltd. Herstellungsverfahren für eine halbleitervorrichtung
JP2021150493A (ja) * 2020-03-19 2021-09-27 キオクシア株式会社 半導体記憶装置
CN113213419B (zh) * 2020-07-15 2023-12-08 江苏力博医药生物技术股份有限公司 一种微阵列结构图案化的工艺

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6559474B1 (en) * 2000-09-18 2003-05-06 Cornell Research Foundation, Inc, Method for topographical patterning of materials
CN1576841A (zh) * 2003-07-29 2005-02-09 欧姆龙株式会社 生物分子形状的转录方法、芯片基片的制作方法及生物芯片的制作方法
US20100108519A1 (en) * 2006-09-14 2010-05-06 Soper Steven A Polymeric Nanopillars and Nanotubes, Their Manufacture and Uses

Family Cites Families (3)

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Publication number Priority date Publication date Assignee Title
JP2006114489A (ja) 2004-09-14 2006-04-27 Nagoya Institute Of Technology 誘電体メタマテリアル、および磁性体メタマテリアル
JP2008014352A (ja) 2006-07-04 2008-01-24 Maezawa Kyuso Industries Co Ltd 逆止弁ユニットと濾過整流板
CN103443624A (zh) * 2007-03-26 2013-12-11 纳米系统公司 形成受控单分子层的方法和装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6559474B1 (en) * 2000-09-18 2003-05-06 Cornell Research Foundation, Inc, Method for topographical patterning of materials
CN1576841A (zh) * 2003-07-29 2005-02-09 欧姆龙株式会社 生物分子形状的转录方法、芯片基片的制作方法及生物芯片的制作方法
US20100108519A1 (en) * 2006-09-14 2010-05-06 Soper Steven A Polymeric Nanopillars and Nanotubes, Their Manufacture and Uses

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Nanoscale Resolution,Multicomponent Biomolecular Arrays Generated By Aligned Printing With ParyleneP eel-Off;Christine P.Tan;《Nano letters》;20100120;第10卷;第719-725页 *
SEQUENTIAL PARYLENE LIFT-OFF PROCESS FOR SELECTIVE PATTERNING OF BIOLOGICAL MATERIALS;K. Kuribayashi;《MEMS》;20070131;第21-25页 *
Topographical Patterning of Chemically Sensitive Biological Materials Using a Polymer-Based Dry Lift Off;B.Ilic;《Biomedical Microdevices》;20001231;第317-322页 *

Also Published As

Publication number Publication date
CN103180735A (zh) 2013-06-26
EP2594941B1 (en) 2015-10-07
JP2012202968A (ja) 2012-10-22
WO2012133450A1 (ja) 2012-10-04
JP5656192B2 (ja) 2015-01-21
US8999443B2 (en) 2015-04-07
US20130136863A1 (en) 2013-05-30
EP2594941A1 (en) 2013-05-22
EP2594941A4 (en) 2014-08-13

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