CN103176121B - Flying probe tester - Google Patents
Flying probe tester Download PDFInfo
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- CN103176121B CN103176121B CN201310058794.2A CN201310058794A CN103176121B CN 103176121 B CN103176121 B CN 103176121B CN 201310058794 A CN201310058794 A CN 201310058794A CN 103176121 B CN103176121 B CN 103176121B
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- 239000000523 sample Substances 0.000 title claims abstract description 45
- 239000011159 matrix material Substances 0.000 claims abstract description 12
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 239000010438 granite Substances 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 description 13
- 238000004088 simulation Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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Abstract
A kind of flying probe tester, it comprises: matrix; Two X-axis, parallelly be oppositely arranged, each X-axis comprises the first guide rail, the first motor and the first screw mandrel, and the first screw mandrel and the first guide rail parallel are oppositely arranged, two the first motors lay respectively at two the first screw mandrels relatively away from one end, the driving shaft of each first motor is connected with the first screw mandrel is coaxial; Two Y-axis, each Y-axis comprises the second guide rail, two web joints and two the first slide blocks, the two ends of the second guide rail are fixedly connected with two web joints respectively, two the first slide blocks are individually fixed on two web joints surface relative with the second guide rail, along the first guide rail slidably, the first screw mandrel is through the first slide block for first slide block; Two Z axis, are located in two Y-axis respectively; Wherein, each Y-axis is provided with near first slide block of the first motor the screw be screwed with the first screw mandrel, and another one first slide block is provided with the pilot hole passed for the first screw mandrel.Above-mentioned flying probe tester cost is lower and kinematic accuracy is higher.
Description
[technical field]
The present invention relates to a kind of printed circuit board test device, particularly relate to a kind of flying probe tester.
[background technology]
Flying probe tester be install in X-axis and Y-axis by motor-driven can the probe of independent movement fast, utilize probe to contact with the solder joint of pcb board in the controlled movement of Z-direction, and carry out the equipment of electric measurement.Due to the functional requirement of flying probe tester, the two ends of its Y-axis are generally erected in two X-axis respectively, and its span is larger, drive (two drive) or drive (singly driving) by the motor of single X-axis by the motor in two X-axis.In order to improve testing efficiency, flying probe tester generally has multiple probe, and X-Y axle also increases thereupon.The number of axle of flying probe tester is more just, and Y-axis adopts two cost driven very high, and add the restriction of installing space, multiple Y-axis generally needs shared X-axis (namely an X-axis being provided with multiple Y-axis), and Y-axis adopts two feasibility of driving to be subject to very large restriction.Along with the live width of pcb board and line-spacing more and more less, require more and more higher to the kinematic accuracy of flying probe tester, and the kinematic accuracy of traditional flying probe tester more and more can not meet the demands.What have the greatest impact to flying probe tester kinematic accuracy is that it adopts the X-Y axle construction of singly driving, and therefore, adopts the kinematic accuracy of the X-Y axle singly driven to become more and more important.
[summary of the invention]
In view of above-mentioned condition, be necessary to provide the flying probe tester that a kind of cost is lower, kinematic accuracy is higher.
A kind of flying probe tester, it comprises:
Matrix;
Two X-axis, be located on described matrix, and to be parallelly oppositely arranged, each described X-axis comprises the first guide rail, the first motor and the first screw mandrel, described first screw mandrel and described first guide rail parallel are oppositely arranged, described two the first motors lay respectively at described two the first screw mandrels relatively away from one end, described two the first motors are intersected and is oppositely arranged, and the driving shaft of each first motor is connected with described first screw mandrel is coaxial;
Two Y-axis, be connected with described X-axis, the two ends of each described Y-axis are located in described two X-axis respectively, and each described Y-axis comprises the second guide rail, two web joints and two the first slide blocks, the two ends of described second guide rail are fixedly connected with described two web joints respectively, described two the first slide blocks are individually fixed on described two web joints surface relative with described second guide rail, and described first slide block along described first guide rail slidably, and described first screw mandrel is through described first slide block; And
Two Z axis, are located in described two Y-axis respectively, and described Z axis along described second guide rail slidably;
Wherein, each described Y-axis is provided with near described first slide block of described first motor the screw be screwed with the first screw mandrel, and the first slide block described in another one is provided with the pilot hole passed for described first screw mandrel; Described first motor drives described first screw mandrel to rotate, and makes described first slide block of close described first motor along described first slide.
The X-axis that above-mentioned flying probe tester adopts adopts first motor to drive single Y-axis, is formed and singly drives structure, thus avoid adopting cost higher twoly drive structure, and then to reduce costs; Simultaneously, each Y-axis is provided with near the first slide block of the first motor of X-axis the screw be screwed with the first screw mandrel, another one first slide block is provided with the pilot hole passed for described first screw mandrel, each Y-axis one end is made to play driving and guide effect, the other end play the guiding role, thus improve the driving precision of Y-axis, and then improve the kinematic accuracy of flying probe tester.Therefore, above-mentioned flying probe tester cost is lower and kinematic accuracy is higher.
Wherein in an embodiment, described Y-axis also comprises the second screw mandrel and the second motor, described second screw mandrel and described second guide rail parallel are oppositely arranged, described second motor is installed on web joint described in one of them, and the driving shaft of described second motor is connected with described second screw mandrel is coaxial, described second screw mandrel drives described Z axis along described second slide.
Wherein in an embodiment, each described first slide block is made up of a pair slide block, and described first screw mandrel is through described a pair slide block, and described a pair slide block is fixed on described web joint.
Wherein in an embodiment, described Y-axis is drive end near one end of described first motor, and the one end away from described first motor is driven end, and the barycenter of described Y-axis is near described drive end.
Wherein in an embodiment, the barycenter of described Y-axis and the distance of described drive end are 80 ~ 100 millimeters.
Wherein in an embodiment, the friction factor of the relatively described X-axis in two ends of described Y-axis is less than 0.01, and the friction factor of the relatively described X-axis in the two ends of described Y-axis is equal.
Wherein in an embodiment, the coupling stiffness at described Y-axis two ends is more than 1,000 ten thousand newtons per square meter.
Wherein in an embodiment, described web joint is made up of compound substance.
Wherein in an embodiment, described matrix is natural granite.
Wherein in an embodiment, described X-axis and described Y-axis intersect vertically, and described Z axis is perpendicular to described Y-axis and described X-axis.
[accompanying drawing explanation]
Fig. 1 is the structural representation of the flying probe tester of embodiment of the present invention;
Fig. 2 is the structural representation of the left Y-axis of the flying probe tester shown in Fig. 1;
Fig. 3 is the structural representation of the right Y-axis of the flying probe tester shown in Fig. 1;
Fig. 4 is the simulation contact surface of the Y-axis of the flying probe tester shown in Fig. 1.
[embodiment]
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is described more fully.Preferred embodiment of the present invention is given in accompanying drawing.But the present invention can realize in many different forms, is not limited to embodiment described herein.On the contrary, provide the object of these embodiments be make the understanding of disclosure of the present invention more comprehensively thorough.
It should be noted that, when element is called as " being fixed on " another element, directly can there is element placed in the middle in it on another element or also.When an element is considered to " connection " another element, it can be directly connected to another element or may there is centering elements simultaneously.Term as used herein " vertical ", " level ", "left", "right" and similar statement are just for illustrative purposes.
Unless otherwise defined, all technology used herein and scientific terminology are identical with belonging to the implication that those skilled in the art of the present invention understand usually.The object of term used in the description of the invention herein just in order to describe specific embodiment, is not intended to be restriction the present invention.Term as used herein " and/or " comprise arbitrary and all combinations of one or more relevant Listed Items.
Refer to Fig. 1 to Fig. 3, the flying probe tester 100 of embodiment of the present invention, comprise matrix 110, two X-axis 120, two Y-axis 130 and two Z axis 140.Matrix 110 is as the carrier of the kinematic axis of flying probe tester 100, and two X-axis, 120, two Y-axis 130 and two Z axis 140 form the three-dimensional motion axle of flying probe tester 100.Wherein, two X-axis, 120, two Y-axis 130 and two Z axis 140 can form three-dimensional cartesian coordinate system or three-dimensional oblique coordinates, and such as, when forming three-dimensional cartesian coordinate system, X-axis 120 and Y-axis 130 intersect vertically, and Z axis 140 is perpendicular to Y-axis 130 and X-axis 120.
Two X-axis 120 are located on matrix 110, and are parallelly oppositely arranged.Matrix 110 can be natural granite.
Each X-axis 120 comprises the first guide rail 121, first motor 123 and the first screw mandrel 125, first screw mandrel 125 is parallel with the first guide rail 123 to be oppositely arranged, two the first motors 123 lay respectively at two the first screw mandrels 125 relatively away from one end, two the first motors 123 are intersected and are oppositely arranged.Further, the driving shaft of each first motor 123 is connected with the first screw mandrel 125 is coaxial.Such as, the driving shaft of the first motor 123 can be connected with the first screw mandrel 125 by the first shaft coupling 127.
Two Y-axis 130 are connected with X-axis 120.The two ends of each Y-axis 130 are located in two X-axis 120 respectively, and each Y-axis 130 comprises the second guide rail 131, two web joints 133 and two the first slide blocks 135.The two ends of the second guide rail 131 are fixedly connected with two web joints 133 respectively.Two the first slide blocks 135 are individually fixed on two web joints 133 surface relative with the second guide rail 131, and the first slide block 135 along the first guide rail 121 slidably, and the first screw mandrel 125 is through the first slide block 135.
Two Z axis 140 are located in two Y-axis 130 respectively, and Z axis 140 along the second guide rail 131 slidably.Wherein, each Y-axis 130 is provided with near first slide block 135 of the first motor 123 screw be screwed with the first screw mandrel 125, and another one first slide block 135 is provided with the pilot hole passed for the first screw mandrel 125; First motor 123 drives the first screw mandrel 125 to rotate, and the first slide block 135 near the first motor 123 is slided along the first guide rail 121.
Further, Y-axis 130 also comprises the second screw mandrel 137 and the second motor 138, second screw mandrel 137 is parallel with the second guide rail 131 to be oppositely arranged, second motor 138 is installed on one of them web joint 133, and the driving shaft of the second motor 138 is connected with the second screw mandrel 137 is coaxial, the second screw mandrel 137 drives Z axis 140 to slide along the second guide rail 131.Such as, the driving shaft of the second motor 138 can be connected with the second screw mandrel 137 by the second shaft coupling 139.Web joint 133 can be made up of compound substance.
Further, each first slide block 135 is made up of a pair slide block, and the first screw mandrel 125 is through a pair slide block, and a pair slide block is fixed on web joint 133.
Further, Y-axis 130 is drive end near one end of the first motor 123, and the one end away from the first motor 123 is driven end, and the barycenter of Y-axis 130 is near drive end, and preferably, the barycenter of Y-axis 130 and the distance of drive end are 80 ~ 100 millimeters.The friction factor of the relative X-axis 120 in Y-axis 130 two ends is less than 0.01, and Y-axis 130 two ends are equal relative to the friction factor of X-axis 120.The coupling stiffness at Y-axis 130 two ends is more than 1,000 ten thousand newtons per square meter.
The X-axis 120 that above-mentioned flying probe tester 100 adopts adopts first motor 123 to drive single Y-axis 130, is formed and singly drives structure, thus avoid adopting cost higher twoly drive structure, and then to reduce costs; Simultaneously, each Y-axis 130 is provided with near the first slide block 135 of the first motor 123 of X-axis 120 screw be screwed with the first screw mandrel 125, another one first slide block 135 is provided with the pilot hole passed for described first screw mandrel 125, each Y-axis 130 one end is made to play driving and guide effect, the other end play the guiding role, thus improve the driving precision of Y-axis 130, and then improve the kinematic accuracy of flying probe tester 100.Therefore, above-mentioned flying probe tester 100 cost is lower and kinematic accuracy is higher.
Below in conjunction with specific embodiment, above-mentioned flying probe tester 100 is described.
In the present embodiment, flying probe tester 100 is on six axle flying probe testers, this flying probe tester 100 1 has six axles, X-axis 120, Y-axis 130, Z axis 140 have two respectively, for carrying the matrix 110 of kinematic axis for natural granite structure, select other screw mandrel slide rail composite unit of micron order for X-axis 120 and the structure of Y-axis 130 transmission and guiding, screw mandrel slide rail composite unit is " screw mandrel is connected with in the middle part of slide block; the medial surface of assembly is guide rail, is connected with slide block is outside ".Y-axis 130 two ends are erected in two X-axis 120 respectively, and in each X-axis 120, erection has one end of two Y-axis 130.Because each X-axis 120 there are two slide blocks, multiaxis is coupled, the first slide block 135 near first motor 123 one end is just connected with the first screw mandrel 125, play transmission and guide effect, this end of Y-axis 130 is called drive end, and another one first slide block 135 is not connected with the first screw mandrel 125, and the pilot hole namely in the middle part of the first slide block 135 is larger than screw mandrel diameter, only play the guiding role, this end of Y-axis 130 is called driven end.That is, the first motor 123 in each X-axis 120 can only drive the Y-axis 130 near its one end, this X-axis 120 just plays the effect of guiding for another one Y-axis 130, each Y-axis 130 adopts form tangential movement in X-axis 120 of singly driving.Z axis 140 is arranged in Y-axis 130, is moved up and down by the transmission of other screw mandrel slide rail composite unit of micron order and guiding.
The flying probe tester 100 of the present embodiment compresses the span of Y-axis 130 under the prerequisite keeping function as far as possible.In order to reduce the quality of Y-axis 130, consider that the rigidity of guide rail screw mandrel assembly itself is larger, Y-axis 130 base plate be connected with assembly is trisected, remove middle one section, only retain one section of two ends, namely form two web joints 133, ensure that the integral rigidity of Y-axis 130, again reduce Y-axis 130 quality.Set up preliminary Y-axis 130 realistic model on this basis, and emulate in detail this model, to design further, simulation flow as shown in Figure 4.
According to above-mentioned simulation result, obtain barycenter distribution, friction profile and rigidity size to the mass motion Accuracy situation of Y-axis 130:
(1) Y-axis 130 barycenter specific mass when drive end is well a lot of away from kinematic accuracy during drive end;
(2) friction hour its kinematic accuracy of Y-axis 130 direction of motion is better;
(3) Y-axis 130 two ends coupling stiffness unanimously and larger time kinematic accuracy is had the greatest impact, wherein tangent with its direction of motion torsional rigidity plays conclusive effect.
In the present embodiment, dynamic perfromance satisfies condition as Y-axis 130 single order mode is more than 200Hz, and its vibration shape is for swing along direction of motion; Kinematic accuracy satisfies condition as when Y-axis 130 is adjusted when 1mm stroke, two ends kinematic error can enter 10um error band in 20ms.Y-axis 130 barycenter motion precision comparison when drive end 80-100mm is good; Y-axis 130 two ends friction factor be less than 0.01 and two ends friction is consistent time motion precision comparison good; Y-axis 130 coupling stiffness more than 1,000 ten thousand newtons per square meter and the torsional rigidity tangent with its direction of motion is larger time kinematic accuracy better.
According to simulation result, web joint 133 size of Y-axis 130 and installing space are subject to strict restriction, in order to lower its quality further, and make the distribution of the barycenter of whole Y-axis 130 reach requirement, also to ensure whole Y-axis 130 rigidity, two web joints 133 up and down of Y-axis 130 all adopt compound substance to manufacture, and quality, barycenter and rigidity situation all meet requirement.In order to meet the requirement of the coupling stiffness at Y-axis 130 two ends, the screw mandrel track combination unit that transmission selected by the present embodiment and pilot unit are high-accuracy rank, pretension degree meets the demands, since can ensure the coupling stiffness of Y-axis 130, and its friction is rolling friction, frictional resistance is little, meets the requirement of friction size distribution.Because the torsional rigidity tangent with Y-axis 130 direction of motion plays conclusive effect to its kinematic accuracy, in the present embodiment, first slide block 135 at Y-axis 130 two ends has selected two slide blocks, greatly improves its torsional rigidity, meets the requirement of torsional rigidity.
In the present embodiment, compressing Y-axis 130 span as far as possible, reduce on Y-axis 130 quality base and set up preliminary realistic model, barycenter distribution is obtained by simulation flow method, friction profile and rigidity size are to the mass motion Accuracy situation of Y-axis 130, and adopt compound substance to manufacture Y-axis 130 connecting bottom board, the screw mandrel track combination unit selecting high-accuracy rank and pretension degree to meet the demands and Y-axis 130 two ends adopt two slide blocks to be connected to improve its torsional rigidity, X-Y axle 130 kinematic accuracy is made greatly to improve, improve the kinematic accuracy of flying probe tester 100 further, and solve the Cost Problems brought according to two driving.Meanwhile, change people to think all the time and adopt the long span structure of one-sided driving to be difficult to be applied to the view on the exigent machine of kinematic accuracy.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (9)
1. a flying probe tester, is characterized in that, comprising:
Matrix;
Two X-axis, be located on described matrix, and to be parallelly oppositely arranged, each described X-axis comprises the first guide rail, the first motor and the first screw mandrel, described first screw mandrel and described first guide rail parallel are oppositely arranged, described two the first motors lay respectively at described two the first screw mandrels relatively away from one end, described two the first motors are intersected and is oppositely arranged, and the driving shaft of each first motor is connected with described first screw mandrel is coaxial;
Two Y-axis, be connected with described X-axis, the two ends of each described Y-axis are located in described two X-axis respectively, and each described Y-axis comprises the second guide rail, two web joints and two the first slide blocks, the two ends of described second guide rail are fixedly connected with described two web joints respectively, described two the first slide blocks are individually fixed on described two web joints surface relative with described second guide rail, and described first slide block along described first guide rail slidably, and described first screw mandrel is through described first slide block; And
Two Z axis, are located in described two Y-axis respectively, and described Z axis along described second guide rail slidably;
Wherein, each described Y-axis is provided with near described first slide block of described first motor the screw be screwed with the first screw mandrel, first slide block described in another one is provided with the pilot hole passed for described first screw mandrel, and the pilot hole in the middle part of the first slide block is larger than screw mandrel diameter; Described first motor drives described first screw mandrel to rotate, and makes described first slide block of close described first motor along described first slide; Described Y-axis is drive end near one end of described first motor, and the one end away from described first motor is driven end, and the barycenter of described Y-axis is near described drive end.
2. flying probe tester as claimed in claim 1, it is characterized in that, described Y-axis also comprises the second screw mandrel and the second motor, described second screw mandrel and described second guide rail parallel are oppositely arranged, described second motor is installed on web joint described in one of them, and the driving shaft of described second motor is connected with described second screw mandrel is coaxial, described second screw mandrel drives described Z axis along described second slide.
3. flying probe tester as claimed in claim 1, it is characterized in that, each described first slide block is made up of a pair slide block, and described first screw mandrel is through described a pair slide block, and described a pair slide block is fixed on described web joint.
4. flying probe tester as claimed in claim 1, it is characterized in that, the barycenter of described Y-axis and the distance of described drive end are 80 ~ 100 millimeters.
5. flying probe tester as claimed in claim 1, it is characterized in that, the friction factor of the relatively described X-axis in two ends of described Y-axis is less than 0.01, and the friction factor of the relatively described X-axis in the two ends of described Y-axis is equal.
6. flying probe tester as claimed in claim 1, it is characterized in that, the coupling stiffness at described Y-axis two ends is more than 1,000 ten thousand newtons per square meter.
7. flying probe tester as claimed in claim 1, it is characterized in that, described web joint is made up of compound substance.
8. flying probe tester as claimed in claim 1, it is characterized in that, described matrix is natural granite.
9. flying probe tester as claimed in claim 1, it is characterized in that, described X-axis and described Y-axis intersect vertically, and described Z axis is perpendicular to described Y-axis and described X-axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310058794.2A CN103176121B (en) | 2013-02-25 | 2013-02-25 | Flying probe tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310058794.2A CN103176121B (en) | 2013-02-25 | 2013-02-25 | Flying probe tester |
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| CN103176121A CN103176121A (en) | 2013-06-26 |
| CN103176121B true CN103176121B (en) | 2015-09-16 |
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| CN201310058794.2A Active CN103176121B (en) | 2013-02-25 | 2013-02-25 | Flying probe tester |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103499785A (en) * | 2013-10-14 | 2014-01-08 | 无锡俊达测试技术服务有限公司 | Flying probe tester |
| CN104898464B (en) * | 2014-03-06 | 2017-11-07 | 大族激光科技产业集团股份有限公司 | A kind of control module of Insulation test |
| CN105067990B (en) * | 2015-07-24 | 2018-10-19 | 大族激光科技产业集团股份有限公司 | The design method of horizontal flying probe testing machine |
| CN105676108A (en) * | 2016-01-07 | 2016-06-15 | 苏州市璟硕自动化设备有限公司 | Automatic detection system for circuit boards |
| CN106771964B (en) * | 2016-11-30 | 2019-09-17 | 大族激光科技产业集团股份有限公司 | Plane formula flying probe tester and its cutting agency |
| CN107255783B (en) * | 2017-05-27 | 2020-02-18 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Flying probe testing device |
| CN114839516B (en) * | 2022-07-06 | 2022-10-28 | 中北大学 | Table type flying probe testing machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1125323A (en) * | 1994-01-03 | 1996-06-26 | 国际商业机器公司 | Open frame gantry probing system |
| CN2754107Y (en) * | 2004-12-27 | 2006-01-25 | 康善存 | Needle-mounted carriage for electronic circuit board measuring machine |
| CN201382978Y (en) * | 2008-12-30 | 2010-01-13 | 南京协力多层电路板有限公司 | Testing machine of electronic circuit board |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11304884A (en) * | 1998-04-24 | 1999-11-05 | Micronics Japan Co Ltd | Prober for large-sized circuit board |
| US6657449B2 (en) * | 2000-12-21 | 2003-12-02 | Hansaem Digitec Co., Ltd. | Test pin unit for PCB test device and feeding device of the same |
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2013
- 2013-02-25 CN CN201310058794.2A patent/CN103176121B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1125323A (en) * | 1994-01-03 | 1996-06-26 | 国际商业机器公司 | Open frame gantry probing system |
| CN2754107Y (en) * | 2004-12-27 | 2006-01-25 | 康善存 | Needle-mounted carriage for electronic circuit board measuring machine |
| CN201382978Y (en) * | 2008-12-30 | 2010-01-13 | 南京协力多层电路板有限公司 | Testing machine of electronic circuit board |
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Effective date of registration: 20200611 Address after: 518101 workshop 5 / F, 1 / 2 / F, 14 / F, 17 / F, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. Address before: 518055, the Han Dynasty laser building, No. 9 West West Road, Nanshan District hi tech park, Guangdong, Shenzhen Co-patentee before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |
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Address after: 518101 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's CNC Technology Co.,Ltd. Address before: 518101 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. |