CN103176121A - Flying probe tester - Google Patents

Flying probe tester Download PDF

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Publication number
CN103176121A
CN103176121A CN2013100587942A CN201310058794A CN103176121A CN 103176121 A CN103176121 A CN 103176121A CN 2013100587942 A CN2013100587942 A CN 2013100587942A CN 201310058794 A CN201310058794 A CN 201310058794A CN 103176121 A CN103176121 A CN 103176121A
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CN
China
Prior art keywords
axis
screw mandrel
guide rail
motor
flying probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013100587942A
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Chinese (zh)
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CN103176121B (en
Inventor
谭艳萍
宋福民
王星
陈楚技
高云峰
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Shenzhen Hans CNC Technology Co Ltd
Original Assignee
Shenzhen Hans Laser Technology Co Ltd
Shenzhen Hans CNC Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Shenzhen Hans Laser Technology Co Ltd, Shenzhen Hans CNC Technology Co Ltd filed Critical Shenzhen Hans Laser Technology Co Ltd
Priority to CN201310058794.2A priority Critical patent/CN103176121B/en
Publication of CN103176121A publication Critical patent/CN103176121A/en
Application granted granted Critical
Publication of CN103176121B publication Critical patent/CN103176121B/en
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Abstract

A flying probe tester comprises a substrate, two parallel X-axes, two Y-axes and two Z-axes. Each X-axis comprises a first guide rail, two first motors and two first screw, the two first screws are parallel with the first guide rail, the two first motors are located at one ends, which are relatively distant, of the two first screws, and a drive shaft of each first motor is coaxially connected with the corresponding first screw. Each Y-axis comprises a second guide rail, two connecting plates and two first slider, two ends of the second guide rail are fixedly connected with the two connecting plates respectively, the two first sliders are fixed on two surfaces, opposite to the second guide rail, of the two connecting plates respectively, the first sliders can slide along the first guide rail, and the first screws penetrate through the first sliders. The two Z-axes are disposed on the two Y-axes. One first slider, close to the corresponding first motor, of each Y-axis is provided with a screw hole connected with the corresponding screw in a threaded manner, and the other first slider is provided with a guide hole allowing for penetration of the corresponding screw. The flying probe tester is low in cost and high in motion precision.

Description

Flying probe tester
[technical field]
The present invention relates to a kind of printed circuit board test device, particularly relate to a kind of flying probe tester.
[background technology]
Flying probe tester is to install on X-axis and Y-axis by motor-driven probe that can independent fast moving, utilizes probe to contact in the controlled movement of Z-direction and the solder joint of pcb board, and carries out the equipment of electric measurement.Due to the functional requirement of flying probe tester, the two ends of its Y-axis generally are erected at respectively on two X-axis, and its span is larger, by the motor-driven on two X-axis (two driving) or by the motor-driven (singly driving) of single X-axis.In order to improve testing efficiency, flying probe tester generally has a plurality of probes, and the X-Y axle also increases thereupon.The number of axle of flying probe tester is more just, and Y-axis adopts two costs that drive very high, adds the restriction of installing space, and a plurality of Y-axis generally need to share X-axis (namely on an X-axis, a plurality of Y-axis being installed), and Y-axis adopts two feasibilities of driving to be subject to very large restriction.Along with live width and the line-spacing of pcb board are more and more less, more and more higher to the kinematic accuracy requirement of flying probe tester, and the kinematic accuracy of traditional flying probe tester more and more can not meet the demands.What the flying probe tester kinematic accuracy was had the greatest impact is that it adopts the X-Y axle construction of singly driving, and therefore, adopts the kinematic accuracy of the X-Y axle that singly drives to become more and more important.
[summary of the invention]
In view of above-mentioned condition, be necessary to provide the flying probe tester that a kind of cost is lower, kinematic accuracy is higher.
A kind of flying probe tester, it comprises:
Matrix;
Two X-axis, be located on described matrix, and parallel being oppositely arranged, each described X-axis comprises the first guide rail, the first motor and the first screw mandrel, described the first screw mandrel and described the first guide rail parallel are oppositely arranged, described two the first motors lay respectively at described two the first screw mandrels relatively away from an end, described two the first motors are intersected are oppositely arranged, and the driving shaft of each the first motor and described coaxial connection of the first screw mandrel;
Two Y-axis, be connected with described X-axis, the two ends of each described Y-axis are located at respectively on described two X-axis, and each described Y-axis comprises the second guide rail, two web joints and two the first slide blocks, the two ends of described the second guide rail are fixedly connected with described two web joints respectively, described two the first slide blocks are individually fixed on described two web joints surface relative with described the second guide rail, and described the first slide block along described the first guide rail slidably, and described the first screw mandrel passes described the first slide block; And
Two Z axis are located at respectively on described two Y-axis, and described Z axis along described the second guide rail slidably;
Wherein, each described Y-axis is provided with near described first slide block of described the first motor the screw that is screwed with the first screw mandrel, and described the first slide block of another one is provided with the pilot hole that passes for described the first screw mandrel; Described the first screw mandrel of described the first motor-driven rotates, and described the first slide block near described the first motor is slided along described the first guide rail.
The X-axis that above-mentioned flying probe tester adopts adopts the first single Y-axis of motor-driven, forms and singly drives structure, thereby avoid adopting higher two of cost to drive structure, and then reduce costs; Simultaneously, each Y-axis is provided with near the first slide block of the first motor of X-axis the screw that is screwed with the first screw mandrel, another one the first slide block is provided with the pilot hole that passes for described the first screw mandrel, making each Y-axis one end rise drives and guide effect, the other end play the guiding role, thereby improve the driving precision of Y-axis, and then improve the kinematic accuracy of flying probe tester.Therefore, above-mentioned flying probe tester cost is lower and kinematic accuracy is higher.
Therein in embodiment, described Y-axis also comprises the second screw mandrel and the second motor, described the second screw mandrel and described the second guide rail parallel are oppositely arranged, described the second motor is installed on one of them described web joint, and the driving shaft of described the second motor and described coaxial connection of the second screw mandrel, described the second screw mandrel drives described Z axis and slides along described the second guide rail.
In embodiment, each described first slide block is comprised of a pair of slide block therein, and described the first screw mandrel passes described a pair of slide block, and described a pair of slide block is fixed on described web joint.
In embodiment, described Y-axis is drive end near an end of described the first motor therein, is driven end away from an end of described the first motor, and the barycenter of described Y-axis is near described drive end.
In embodiment, the barycenter of described Y-axis and the distance of described drive end are 80 ~ 100 millimeters therein.
In embodiment, the friction factor of the relatively described X-axis in the two ends of described Y-axis is less than 0.01, and the friction factor of the relatively described X-axis in the two ends of described Y-axis equates therein.
Therein in embodiment, the coupling stiffness at described Y-axis two ends is that 1,000 ten thousand newton are more than every square metre.
In embodiment, described web joint is made by compound substance therein.
In embodiment, described matrix is natural granite therein.
In embodiment, described X-axis and described Y-axis intersect vertically therein, and described Z axis is perpendicular to described Y-axis and described X-axis.
[description of drawings]
Fig. 1 is the structural representation of the flying probe tester of embodiment of the present invention;
Fig. 2 is the structural representation of the left side Y-axis of flying probe tester shown in Figure 1;
Fig. 3 is the structural representation of the right side Y-axis of flying probe tester shown in Figure 1;
Fig. 4 is the simulation flow figure of the Y-axis of flying probe tester shown in Figure 1.
[embodiment]
For the ease of understanding the present invention, the below is described more fully the present invention with reference to relevant drawings.Provided preferred embodiment of the present invention in accompanying drawing.But the present invention can realize in many different forms, is not limited to embodiment described herein.On the contrary, provide the purpose of these embodiment be make the understanding of disclosure of the present invention more comprehensively thorough.
Need to prove, when element is called as " being fixed in " another element, can directly can there be element placed in the middle in it on another element or also.When an element is considered to " connection " another element, it can be directly connected to another element or may have simultaneously centering elements.Term as used herein " vertical ", " level ", " left side ", " right side " and similar statement are just for illustrative purposes.
Unless otherwise defined, all technology of using of this paper and scientific terminology are with to belong to the implication that those skilled in the art of the present invention understand usually identical.The term that uses in instructions of the present invention herein is not intended to be restriction the present invention just in order to describe the purpose of specific embodiment.Term as used herein " and/or " comprise one or more relevant Listed Items arbitrarily with all combinations.
See also Fig. 1 to Fig. 3, the flying probe tester 100 of embodiment of the present invention comprises matrix 110, two X-axis 120, two Y-axis 130 and two Z axis 140.Matrix 110 is as the carrier of the kinematic axis of flying probe tester 100, and two X-axis 120, two Y-axis 130 and two Z axis 140 consist of the three-dimensional motion axle of flying probe testers 100.Wherein, two X-axis 120, two Y-axis 130 and two Z axis 140 can consist of three-dimensional cartesian coordinate system or three-dimensional oblique coordinates, and for example, when consisting of three-dimensional cartesian coordinate system, X-axis 120 intersects vertically with Y-axis 130, and Z axis 140 is perpendicular to Y-axis 130 and X-axis 120.
Two X-axis 120 are located on matrix 110, and parallel being oppositely arranged.Matrix 110 can be natural granite.
Each X-axis 120 comprises the first guide rail 121, the first motor 123 and the first screw mandrel 125, the first screw mandrel 125 is with first guide rail 123 is parallel is oppositely arranged, two the first motors 123 lay respectively at two the first screw mandrels 125 relatively away from an end, two the first motors 123 are intersected are oppositely arranged.And the driving shaft of each the first motor 123 is with first screw mandrel 125 is coaxial is connected.For example, the driving shaft of the first motor 123 can be connected with the first screw mandrel 125 by the first shaft coupling 127.
Two Y-axis 130 are connected with X-axis 120.The two ends of each Y-axis 130 are located at respectively on two X-axis 120, and each Y-axis 130 comprises the second guide rail 131, two web joints 133 and two the first slide blocks 135.The two ends of the second guide rail 131 are fixedly connected with two web joints 133 respectively.Two the first slide blocks 135 are individually fixed on two web joints 133 surface relative with the second guide rail 131, and the first slide block 135 along the first guide rail 121 slidably, and the first screw mandrel 125 passes the first slide block 135.
Two Z axis 140 are located at respectively on two Y-axis 130, and Z axis 140 along the second guide rail 131 slidably.Wherein, each Y-axis 130 is provided with near first slide block 135 of the first motor 123 screw that is screwed with the first screw mandrel 125, and another one the first slide block 135 is provided with the pilot hole that passes for the first screw mandrel 125; The first motor 123 drives the first screw mandrel 125 and rotates, and the first slide block 135 near the first motor 123 is slided along the first guide rail 121.
Further, Y-axis 130 also comprises the second screw mandrel 137 and the second motor 138, the second screw mandrel 137 is with second guide rail 131 is parallel is oppositely arranged, the second motor 138 is installed on one of them web joint 133, and the driving shaft of the second motor 138 is with second screw mandrel 137 is coaxial is connected, and the second screw mandrel 137 drives Z axis 140 and slides along the second guide rail 131.For example, the driving shaft of the second motor 138 can be connected with the second screw mandrel 137 by the second shaft coupling 139.Web joint 133 can be made by compound substance.
Further, each first slide block 135 is comprised of a pair of slide block, and the first screw mandrel 125 passes a pair of slide block, and a pair of slide block is fixed on web joint 133.
Further, Y-axis 130 is drive end near an end of the first motors 123, is driven end away from an end of the first motor 123, and the barycenter of Y-axis 130 is near drive end, and preferably, the barycenter of Y-axis 130 and the distance of drive end are 80 ~ 100 millimeters.The friction factor of the Y-axis 130 relative X-axis 120 in two ends is less than 0.01, and the friction factor of the Y-axis 130 relative X-axis 120 in two ends equates.The coupling stiffness at Y-axis 130 two ends is that 1,000 ten thousand newton are more than every square metre.
The X-axis 120 that above-mentioned flying probe tester 100 adopts adopts first motor 123 to drive single Y-axis 130, forms and singly drives structure, thereby avoid adopting higher two of cost to drive structure, and then reduce costs; Simultaneously, each Y-axis 130 is provided with near the first slide block 135 of the first motor 123 of X-axis 120 screw that is screwed with the first screw mandrel 125, another one the first slide block 135 is provided with the pilot hole that passes for described the first screw mandrel 125, making each Y-axis 130 1 end rise drives and guide effect, the other end play the guiding role, thereby improve the driving precision of Y-axis 130, and then improve the kinematic accuracy of flying probe tester 100.Therefore, above-mentioned flying probe tester 100 costs are lower and kinematic accuracy is higher.
Below in conjunction with the above-mentioned flying probe tester 100 of specific embodiment explanation.
In the present embodiment, flying probe tester 100 is on six axle flying probe testers, this flying probe tester 100 1 has six axles, X-axis 120, Y-axis 130, Z axis 140 have respectively two, the matrix 110 that is used for the carrying kinematic axis be the natural granite structure, is used for X-axis 120 and selects other screw mandrel slide rail composite unit of micron order with the structure of Y-axis 130 transmissions and guiding, and the screw mandrel slide rail composite unit is " screw mandrel is connected with the slide block middle part; the medial surface of assembly is guide rail, is connected with the slide block outside ".Y-axis 130 two ends are erected at respectively on two X-axis 120, set up an end of two Y-axis 130 on each X-axis 120.Because two slide blocks are arranged on each X-axis 120, the multiaxis coupling, the first slide block 135 near the first motor 123 1 ends just is connected with the first screw mandrel 125, play transmission and guide effect, Y-axis 130 these ends are called drive end, and another one the first slide block 135 is not connected with the first screw mandrel 125, and namely the pilot hole at the first slide block 135 middle parts is larger than screw mandrel diameter, only play the guiding role, Y-axis 130 these ends are called driven end.That is to say, the first motor 123 on each X-axis 120 can only drive the Y-axis 130 near the one end, just play the effect of guiding on this X-axis 120 for another one Y-axis 130, each Y-axis 130 is to adopt form tangential movement on X-axis 120 of singly driving.Z axis 140 is arranged on Y-axis 130, and transmission and guiding by other screw mandrel slide rail composite unit of micron order move up and down.
The flying probe tester 100 of the present embodiment compresses the span of Y-axis 130 as far as possible under the prerequisite that keeps function.In order to reduce the quality of Y-axis 130, the rigidity of considering guide rail screw mandrel assembly itself is larger, Y-axis 130 base plates that will be connected with assembly trisect, remove middle one section, only keep a section of two ends, namely form two web joints 133, guaranteed the integral rigidity of Y-axis 130, reduced again Y-axis 130 quality.Set up on this basis preliminary Y-axis 130 realistic models, and this model is carried out detailed emulation, so that further design, simulation flow as shown in Figure 4.
According to above-mentioned simulation result, obtain barycenter distribution, friction profile and rigidity size to the mass motion Accuracy situation of Y-axis 130:
Kinematic accuracy when when (1) Y-axis 130 barycenter are near drive end, specific mass is away from drive end is well a lot;
(2) friction of Y-axis 130 direction of motion hour its kinematic accuracy is better;
(3) Y-axis 130 two ends coupling stiffnesses are consistent and kinematic accuracy is had the greatest impact when larger, wherein play conclusive effect with the tangent torsional rigidity of its direction of motion.
In the present embodiment, dynamic perfromance satisfies condition as Y-axis 130 single order mode are more than 200Hz, and its vibration shape is for to swing along direction of motion; Kinematic accuracy satisfies condition, and when adjusting when the 1mm stroke for Y-axis 130, the two ends kinematic error can enter the 10um error band in 20ms.During the close drive end 80-100mm of Y-axis 130 barycenter, the motion ratio of precision is better; Y-axis 130 two ends friction factor less than 0.01 and two ends frictions when consistent the motion ratio of precision better; Y-axis 130 coupling stiffnesses in 1,000 ten thousand newton more than every square metre and when larger with the tangent torsional rigidity of its direction of motion kinematic accuracy better.
According to simulation result, web joint 133 sizes and the installing space of Y-axis 130 are subject to strict restriction, in order further to lower its quality, and make the barycenter distribution of whole Y-axis 130 reach requirement, also to guarantee whole Y-axis 130 rigidity, two web joints 133 up and down of Y-axis 130 all adopt compound substance manufacturing, and quality, barycenter and rigidity situation have all satisfied requirement.Requirement for the coupling stiffness that satisfies Y-axis 130 two ends, the transmission that the present embodiment is selected and pilot unit are the screw mandrel track combination unit that high-accuracy rank, pretension degree meet the demands, since can guarantee the coupling stiffness of Y-axis 130, and its friction is rolling friction, frictional resistance is little, satisfies the requirement of friction size distribution.Owing to the tangent torsional rigidity of Y-axis 130 direction of motion, its kinematic accuracy being played conclusive effect, in the present embodiment, first slide block 135 at Y-axis 130 two ends has been selected two slide blocks, greatly improves its torsional rigidity, satisfies the requirement of torsional rigidity.
in the present embodiment, compressing Y-axis 130 spans as far as possible, reduce on Y-axis 130 quality bases and set up preliminary realistic model, obtaining barycenter by the simulation flow method distributes, friction profile and the rigidity size mass motion Accuracy situation to Y-axis 130, and adopt compound substance to make Y-axis 130 connecting bottom boards, select screw mandrel track combination unit and Y-axis 130 two ends two slide blocks of employing that high-accuracy rank is connected with the pretension degree to connect to improve its torsional rigidity, make X-Y axle 130 kinematic accuracies greatly improve, improve further the kinematic accuracy of flying probe tester 100, if and solve to adopt two driving and the Cost Problems that brings.Simultaneously, changed people and thought that all the time the long span structure that adopts one-sided driving is difficult to be applied to the view on the exigent machine of kinematic accuracy.
The above embodiment has only expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention.Should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.

Claims (10)

1. a flying probe tester, is characterized in that, comprising:
Matrix;
Two X-axis, be located on described matrix, and parallel being oppositely arranged, each described X-axis comprises the first guide rail, the first motor and the first screw mandrel, described the first screw mandrel and described the first guide rail parallel are oppositely arranged, described two the first motors lay respectively at described two the first screw mandrels relatively away from an end, described two the first motors are intersected are oppositely arranged, and the driving shaft of each the first motor and described coaxial connection of the first screw mandrel;
Two Y-axis, be connected with described X-axis, the two ends of each described Y-axis are located at respectively on described two X-axis, and each described Y-axis comprises the second guide rail, two web joints and two the first slide blocks, the two ends of described the second guide rail are fixedly connected with described two web joints respectively, described two the first slide blocks are individually fixed on described two web joints surface relative with described the second guide rail, and described the first slide block along described the first guide rail slidably, and described the first screw mandrel passes described the first slide block; And
Two Z axis are located at respectively on described two Y-axis, and described Z axis along described the second guide rail slidably;
Wherein, each described Y-axis is provided with near described first slide block of described the first motor the screw that is screwed with the first screw mandrel, and described the first slide block of another one is provided with the pilot hole that passes for described the first screw mandrel; Described the first screw mandrel of described the first motor-driven rotates, and described the first slide block near described the first motor is slided along described the first guide rail.
2. flying probe tester as claimed in claim 1, it is characterized in that, described Y-axis also comprises the second screw mandrel and the second motor, described the second screw mandrel and described the second guide rail parallel are oppositely arranged, described the second motor is installed on one of them described web joint, and the driving shaft of described the second motor and described coaxial connection of the second screw mandrel, described the second screw mandrel drives described Z axis and slides along described the second guide rail.
3. flying probe tester as claimed in claim 1, is characterized in that, each described first slide block is comprised of a pair of slide block, and described the first screw mandrel passes described a pair of slide block, and described a pair of slide block is fixed on described web joint.
4. flying probe tester as claimed in claim 1, is characterized in that, described Y-axis is drive end near an end of described the first motor, is driven end away from an end of described the first motor, and the barycenter of described Y-axis is near described drive end.
5. flying probe tester as claimed in claim 4, is characterized in that, the barycenter of described Y-axis and the distance of described drive end are 80 ~ 100 millimeters.
6. flying probe tester as claimed in claim 1, is characterized in that, the friction factor of the relatively described X-axis in the two ends of described Y-axis is less than 0.01, and the friction factor of the relatively described X-axis in the two ends of described Y-axis equates.
7. flying probe tester as claimed in claim 1, is characterized in that, the coupling stiffness at described Y-axis two ends is that 1,000 ten thousand newton are more than every square metre.
8. flying probe tester as claimed in claim 1, is characterized in that, described web joint is made by compound substance.
9. flying probe tester as claimed in claim 1, is characterized in that, described matrix is natural granite.
10. flying probe tester as claimed in claim 1, is characterized in that, described X-axis and described Y-axis intersect vertically, and described Z axis is perpendicular to described Y-axis and described X-axis.
CN201310058794.2A 2013-02-25 2013-02-25 Flying probe tester Active CN103176121B (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103499785A (en) * 2013-10-14 2014-01-08 无锡俊达测试技术服务有限公司 Flying probe tester
CN104898464A (en) * 2014-03-06 2015-09-09 大族激光科技产业集团股份有限公司 Insulation test control module
CN105067990A (en) * 2015-07-24 2015-11-18 大族激光科技产业集团股份有限公司 Design method of horizontal flying probe test machine
CN105676108A (en) * 2016-01-07 2016-06-15 苏州市璟硕自动化设备有限公司 Automatic detection system for circuit boards
CN106771964A (en) * 2016-11-30 2017-05-31 大族激光科技产业集团股份有限公司 Plane formula flying probe tester and its cutting agency
CN107255783A (en) * 2017-05-27 2017-10-17 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) A kind of flying probe device

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JPH11304884A (en) * 1998-04-24 1999-11-05 Micronics Japan Co Ltd Prober for large-sized circuit board
US20020079914A1 (en) * 2000-12-21 2002-06-27 Song Sang Ok Test pin unit for PCB test device and feeding device of the same
CN2754107Y (en) * 2004-12-27 2006-01-25 康善存 Needle-mounted carriage for electronic circuit board measuring machine
CN201382978Y (en) * 2008-12-30 2010-01-13 南京协力多层电路板有限公司 Testing machine of electronic circuit board

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1125323A (en) * 1994-01-03 1996-06-26 国际商业机器公司 Open frame gantry probing system
JPH11304884A (en) * 1998-04-24 1999-11-05 Micronics Japan Co Ltd Prober for large-sized circuit board
US20020079914A1 (en) * 2000-12-21 2002-06-27 Song Sang Ok Test pin unit for PCB test device and feeding device of the same
CN2754107Y (en) * 2004-12-27 2006-01-25 康善存 Needle-mounted carriage for electronic circuit board measuring machine
CN201382978Y (en) * 2008-12-30 2010-01-13 南京协力多层电路板有限公司 Testing machine of electronic circuit board

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103499785A (en) * 2013-10-14 2014-01-08 无锡俊达测试技术服务有限公司 Flying probe tester
CN104898464A (en) * 2014-03-06 2015-09-09 大族激光科技产业集团股份有限公司 Insulation test control module
CN104898464B (en) * 2014-03-06 2017-11-07 大族激光科技产业集团股份有限公司 A kind of control module of Insulation test
CN105067990A (en) * 2015-07-24 2015-11-18 大族激光科技产业集团股份有限公司 Design method of horizontal flying probe test machine
CN105067990B (en) * 2015-07-24 2018-10-19 大族激光科技产业集团股份有限公司 The design method of horizontal flying probe testing machine
CN105676108A (en) * 2016-01-07 2016-06-15 苏州市璟硕自动化设备有限公司 Automatic detection system for circuit boards
CN106771964A (en) * 2016-11-30 2017-05-31 大族激光科技产业集团股份有限公司 Plane formula flying probe tester and its cutting agency
CN106771964B (en) * 2016-11-30 2019-09-17 大族激光科技产业集团股份有限公司 Plane formula flying probe tester and its cutting agency
CN107255783A (en) * 2017-05-27 2017-10-17 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) A kind of flying probe device
CN107255783B (en) * 2017-05-27 2020-02-18 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Flying probe testing device

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