CN103166109B - GaN-based laser diode - Google Patents
GaN-based laser diode Download PDFInfo
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- CN103166109B CN103166109B CN201310064059.2A CN201310064059A CN103166109B CN 103166109 B CN103166109 B CN 103166109B CN 201310064059 A CN201310064059 A CN 201310064059A CN 103166109 B CN103166109 B CN 103166109B
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- oxide film
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- type zinc
- laser diode
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Abstract
The invention discloses a laser diode with a magnesium-arsenic co-doping p-type zinc oxide film adopted. The structure of the laser diode includes an n-type nickel oxide film, the magnesium-arsenic co-doping p-type zinc oxide film, a bottom electrode and a top electrode, wherein the n-type nickel oxide film is formed on the upper surface of a gallium nitride substrate, the magnesium-arsenic co-doping p-type zinc oxide film is formed on the upper surface of the n-type nickel oxide film, the bottom electrode is formed on the lower surface of the n-type nickel oxide film, and the top electrode is formed on the upper surface of the magnesium-arsenic co-doping p-type zinc oxide film.
Description
Technical field
The invention belongs to semiconductor applications, relate in particular to a kind of gallium nitrate based laser diode.
Background technology
Zinc oxide (ZnO) is thin-film material conventional in laser diode.At room temperature, the energy gap of zinc oxide (ZnO) is 3.37eV, and free exciton combines can up to 60meV.But the key that ZnO moves towards photoelectric device application realizes the reliable and stable and p-type ZnO film of low-resistance.Owing to there is many intrinsic Shi zhiming (as Zn in ZnO
i, V
odeng) and the impurity such as H of involuntary doping, be usually expressed as N-shaped.The existence of these Shi zhiming can produce strong self-compensation mechanism to the acceptor impurity mixed, so be difficult to the P type doping realizing ZnO.
At present, the report being obtained p-type zinc-oxide film by the mode of codope is had in the industry.Such as, magnesium and antimony is mixed to form Mg-Sb codoped p type ZnO film in zinc oxide, wherein magnesium (Mg) can increase the energy gap of ZnO effectively as the dopant of ZnO, so the intrinsic shallow donor energy level in ZnO just can away from conduction band limit, thus increase its ionization energy, reduce the N-shaped conductive characteristic of ZnO.But due to the auto-compensation of intrinsic shallow donor defect existed in ZnO, make Sb be difficult to be used to doping preparation p-type ZnO material.
Accompanying drawing explanation
Fig. 1 is the structural representation of the gallium nitrate based laser diode that the present invention proposes;
Summary of the invention:
The present invention is directed to prior art Problems existing, propose a kind of gallium nitrate based laser diode adopting magnesium arsenic codoped p type zinc-oxide film, the structure of this gallium nitrate based laser diode is:
N-shaped nickel oxide film, it is formed on the upper surface of gallium nitride substrate; Magnesium arsenic codoped p type zinc-oxide film, it is formed on the upper surface of described N-shaped nickel oxide film, and hearth electrode, and it is formed on described N-shaped nickel oxide film lower surface, top electrode, and it is formed on the upper surface of described magnesium arsenic codoped p type zinc-oxide film.
Wherein, the thickness of described magnesium arsenic codoped p type zinc-oxide film is 150-300nm, and in this magnesium arsenic codoped p type zinc-oxide film, the molar content of Mg is 8-13%, and the molar content of arsenic is 0.5-1.5%; The thickness of described N-shaped nickel oxide film is 200-400nm.
Wherein, at normal temperatures, the piezoelectric constant d of the p-type ZnO crystal film of magnesium arsenic codope
33be greater than 18pC/N, its resistivity is greater than 10
10Ω cm.
Embodiment:
Below by embodiment, the present invention is described in detail.
Embodiment 1
As shown in Figure 1, the structure of the laser diode of employing magnesium arsenic codoped p type zinc-oxide film of the present invention is:
The upper surface of gallium nitride substrate 2 has N-shaped nickel oxide film 3, and the thickness of this N-shaped nickel oxide film 3 is 200-400nm; Magnesium arsenic codoped p type zinc-oxide film 4, it is formed on the upper surface of described N-shaped nickel oxide film 3, wherein, the thickness of described magnesium arsenic codoped p type zinc-oxide film 4 is 150-300nm, in this magnesium arsenic codoped p type zinc-oxide film 4, the molar content of Mg is 8-13%, and the molar content of arsenic is 0.5-1.5%; Further, at normal temperatures, the piezoelectric constant d of the p-type ZnO crystal film 4 of magnesium arsenic codope
33be greater than 18pC/N, its resistivity is greater than 10
10Ω cm.
Hearth electrode 1 is formed on the lower surface of gallium nitride substrate 2, and top electrode 5 is formed on the upper surface of magnesium arsenic codoped p type zinc-oxide film 4.Various metals material can be adopted to form the material of hearth electrode 1 and top electrode 5, such as gold, silver or copper.Also can adopt metal compound material such as, to form described hearth electrode 1 and top electrode 5, ITO.
Embodiment 2
As shown in Figure 1, the structure of the laser diode of employing magnesium arsenic codoped p type zinc-oxide film of the present invention is:
The upper surface of gallium nitride substrate 2 has N-shaped nickel oxide film 3, and the thickness of this N-shaped nickel oxide film 3 is 300nm; Magnesium arsenic codoped p type zinc-oxide film 4, it is formed on the upper surface of described N-shaped nickel oxide film 3, wherein, the thickness of described magnesium arsenic codoped p type zinc-oxide film 4 is 200nm, in this magnesium arsenic codoped p type zinc-oxide film 4, the molar content of Mg is 11%, and the molar content of arsenic is 0.8%; Further, at normal temperatures, the piezoelectric constant d of the p-type ZnO crystal film 4 of magnesium arsenic codope
33be greater than 18pC/N, its resistivity is greater than 10
10Ω cm.
Hearth electrode 1 is formed on the lower surface of gallium nitride substrate 2, and top electrode 5 is formed on the upper surface of magnesium arsenic codoped p type zinc-oxide film 4.Various metals material can be adopted to form the material of hearth electrode 1 and top electrode 5, such as gold, silver or copper.Also can adopt metal compound material such as, to form described hearth electrode 1 and top electrode 5, ITO.
Above execution mode is to invention has been detailed introduction, but above-mentioned execution mode is not intended to limit scope of the present invention, and protection scope of the present invention is defined by the appended claims.
Claims (2)
1. adopt a laser diode for magnesium arsenic codoped p type zinc-oxide film, the structure of this laser diode is:
N-shaped nickel oxide film, it is formed on the upper surface of gallium nitride substrate; Magnesium arsenic codoped p type zinc-oxide film, it is formed on the upper surface of described N-shaped nickel oxide film, and hearth electrode, and it is formed on described N-shaped nickel oxide film lower surface, top electrode, and it is formed on the upper surface of described magnesium arsenic codoped p type zinc-oxide film;
Wherein, the thickness of described magnesium arsenic codoped p type zinc-oxide film is 150nm, and in this magnesium arsenic codoped p type zinc-oxide film, the molar content of Mg is 8-13%, and the molar content of arsenic is 0.5-1.5%; The thickness of described N-shaped nickel oxide film is 200nm;
Wherein, at normal temperatures, the piezoelectric constant d of the p-type ZnO crystal film of magnesium arsenic codope
33be greater than 18pC/N, its resistivity is greater than 10
10Ω cm.
2. laser diode as claimed in claim 1, is characterized in that:
Gold, silver, copper or ITO is adopted to form hearth electrode and top electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310064059.2A CN103166109B (en) | 2013-02-28 | 2013-02-28 | GaN-based laser diode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310064059.2A CN103166109B (en) | 2013-02-28 | 2013-02-28 | GaN-based laser diode |
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| Publication Number | Publication Date |
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| CN103166109A CN103166109A (en) | 2013-06-19 |
| CN103166109B true CN103166109B (en) | 2015-07-15 |
Family
ID=48588960
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310064059.2A Active CN103166109B (en) | 2013-02-28 | 2013-02-28 | GaN-based laser diode |
Country Status (1)
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090095877A (en) * | 2008-03-06 | 2009-09-10 | 부산대학교 산학협력단 | p-type ZnO semiconductor codoped by Na and F codoping |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7048872B2 (en) * | 2002-09-16 | 2006-05-23 | The Regents Of The University Of California | Codoped direct-gap semiconductor scintillators |
| US8546797B2 (en) * | 2009-10-20 | 2013-10-01 | Stanley Electric Co., Ltd. | Zinc oxide based compound semiconductor device |
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2013
- 2013-02-28 CN CN201310064059.2A patent/CN103166109B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090095877A (en) * | 2008-03-06 | 2009-09-10 | 부산대학교 산학협력단 | p-type ZnO semiconductor codoped by Na and F codoping |
Non-Patent Citations (2)
| Title |
|---|
| p-ZnMgO:As薄膜的MOCVD生长及其发光器件制备研究;赵龙;《中国优秀硕士学位论文全文数据库 信息科技辑》;20121115(第11期);版权页、首页、正文第37-52页 * |
| Realization of p-type ZnO by (nN,Mg) codoping from first-principles;Lanli Chen et al.;《Optical Materials》;20101231;第32卷;1216-1222 * |
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| CN103166109A (en) | 2013-06-19 |
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Effective date of registration: 20190102 Address after: 213300 Hongkou Road 218, Zhongguancun Science and Technology Industrial Park, Liyang City, Changzhou City, Jiangsu Province Patentee after: Liyang High-tech Venture Center Address before: 213300 No. 86 Beimen East Road, Liyang City, Changzhou City, Jiangsu Province Patentee before: Liyang Hongda Motors Co., Ltd. |