CN103163701B - Netted public electrode structural liquid crystal display part and manufacture method thereof - Google Patents
Netted public electrode structural liquid crystal display part and manufacture method thereof Download PDFInfo
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- CN103163701B CN103163701B CN201110425372.5A CN201110425372A CN103163701B CN 103163701 B CN103163701 B CN 103163701B CN 201110425372 A CN201110425372 A CN 201110425372A CN 103163701 B CN103163701 B CN 103163701B
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Abstract
The invention provides a kind of netted public electrode structural liquid crystal display part and manufacture method thereof, overlap on data line the first public electrode wire and overlap on gate line second public electrode wire intersect, the transparent common electrode of comb teeth-shaped is intersected with the first public electrode wire and the second public electrode wire and is electrically connected, define netted public electrode arrangement architecture, when display driver, this netted public electrode arrangement architecture can realize the mesh current conduction in longitudinal direction (data line direction) and horizontal (gate line direction), reduce crosstalk phenomenon, improve the display performance of liquid crystal display device.
Description
Technical field
The present invention relates to Thin Film Transistor-LCD technical field, particularly relate to a kind of netted public electrode structural liquid crystal display part and manufacture method thereof.
Background technology
TFT-LCD (Thin Film Transistor-LCD, Thin film transistor liquid crystal display) be the one of liquid crystal display, it uses thin-film transistor technologies to improve image quality, is widely used in TV, flat-panel screens and projector.At present, market is developed towards the feature such as high-contrast, high brightness, low colour cast, fast response, wide viewing angle the performance requirement of TFT-LCD.
Wide viewing angle lateral electric-field type of the prior art (In-plane Switching mode, IPS) TFT-LCD becomes one of main flow wide viewing angle TFT-LCD technology, its public electrode and pixel electrode are produced in same TFT substrate, transverse electric field is utilized to drive public electrode and pixel electrode, liquid crystal molecule can be made to rotate in the plane, thus significantly increase horizontal view angle and vertical angle of view, therefore there is the advantages such as wide viewing angle, high-contrast, high brightness.
Improvement is carried out to electrode arranging structure and can reach preferred transverse electric field effect, and then increase visual angle and transmittance.In prior art, a kind of one of electrode arranging structure of representational bigrid sweep trace IPS-TFT-LCD that has much is comb teeth-shaped, as shown in FIG. 1A and 1B.
Structure shown in Figure 1A comprises: TFT side substrate 100, be made in the gate line 101 on TFT side substrate 100, the public electrode wire 102 crossing with gate line 101 and data line 103, be made in the TFT structure 104 at gate line 101 and the overlapping place of data line 103, and the transparent common electrode 106 of comb teeth-shaped (comb teeth) and pixel electrode 107, pixel electrode 107 and transparent common electrode 106 are all in comb teeth-shaped or interdigital shape, both comb are staggered, the source electrode electrical connection data line 103 of TFT structure 104, the pixel electrode 107 that drain electrode 104a is electrically connected by via hole 105.
Structure shown in Figure 1B comprises: TFT side substrate 110, be made in the gate line 111 on TFT side substrate 110, be parallel to the public electrode wire 112 of gate line 111, the data line 113 crossing with gate line 111, be made in the TFT structure 114 at gate line 111 and the overlapping place of data line 113 and transparent common electrode 116 and pixel electrode 117, the source electrode electrical connection data line 113 of TFT structure 114, the pixel electrode 117 that drain electrode 114a is electrically connected by via hole 115, pixel electrode 117 and transparent common electrode 116 are all in comb teeth-shaped or interdigital shape, and both comb are staggered.
As can be seen from Figure 1A and 1B, above-mentioned two kinds of structures, public electrode wire all only has the extension in a direction, or extending longitudinally along data line direction, or along the horizontal expansion of gate line direction, when bi-gate line drives each TFT structure, when special frame, public electrode wire is easily subject to the impact of other signals and produces horizontal or longitudinal crosstalk (crosstalk) phenomenon, makes pixel correction, affects display effect.
Summary of the invention
The object of the present invention is to provide a kind of netted public electrode structural liquid crystal display part and manufacture method thereof, improve the cross-interference issue of public electrode wire, improve the display performance of liquid crystal display device.
For solving the problem, the invention provides a kind of netted public electrode structural liquid crystal display part, comprising:
Gate line;
Be parallel to the first public electrode wire of described gate line;
The data line crossing with described gate line and the first public electrode wire and the second public electrode wire;
Be in the TFT structure at described gate line and the overlapping place of data line;
The transparent common electrode of the comb teeth-shaped be electrically connected with described first public electrode wire and the second public electrode wire, its comb has and extends and the whippletree part overlapped on described gate line and the tooth-like part of anything extended along described data line direction along described gate line direction, and described tooth-like part of anything comprises and overlaps on the first tooth-like part of anything on described data line and the second public electrode wire respectively and be connected the second tooth-like part of anything of described whippletree part at described second public electrode wire with between data line;
The pixel electrode of comb teeth-shaped, the comb of its comb and described transparent common electrode is staggered.
Further, described gate line is bi-gate line structure.
Further, described transparent common electrode and pixel electrode are tin indium oxide or indium zinc oxide.
Further, the first tooth-like part of anything that described transparent common electrode is overlapped in described second public electrode wire is electrically connected with described first public electrode wire and the second public electrode wire by via hole.
Further, the comb of described pixel electrode is electrically connected by the drain electrode of via hole with described TFT structure.
Accordingly, the present invention also provides a kind of manufacture method of netted public electrode structural liquid crystal display part, comprising:
Form gate line on a substrate and be parallel to the first public electrode wire of described gate line;
On the substrate formed crossing with described gate line and the first public electrode wire and data line and the second public electrode wire;
TFT structure is formed at the gate line of described substrate and the overlapping place of data line;
Form the staggered pixel electrode of comb and transparent common electrode on the substrate, wherein, described transparent common electrode is electrically connected with described first public electrode wire and the second public electrode wire, the comb of described transparent common electrode has along the extension of described gate line direction and the whippletree part overlapped on described gate line and the tooth-like part of anything extended along described data line direction, described tooth-like part of anything comprises and overlaps on the first tooth-like part of anything on described data line and the second public electrode wire respectively and be connected the second tooth-like part of anything of described whippletree part at described second public electrode wire with between data line.
Compared with prior art, netted public electrode structural liquid crystal display part of the present invention and manufacture method thereof, the first public electrode wire overlapping on data line and the second public electrode wire overlapping on gate line intersect, the transparent common electrode of comb teeth-shaped is intersected with the first public electrode wire and the second public electrode wire and is electrically connected, define netted public electrode arrangement architecture, when gate line drives, this netted public electrode arrangement architecture can realize the mesh current conduction in longitudinal direction (data line direction) and horizontal (gate line direction), reduce the crosstalk phenomenon of vertical and horizontal, improve the display performance of liquid crystal display device.
Accompanying drawing explanation
Figure 1A is the structural representation of a kind of bigrid sweep trace IPS-TFT-LCD of prior art;
Figure 1B is the structural representation of the another kind of bigrid sweep trace IPS-TFT-LCD of prior art;
Fig. 2 is the structural representation of the netted public electrode structural liquid crystal display part of one embodiment of the invention;
Fig. 3 is the manufacturing process flow diagram of the netted public electrode structural liquid crystal display part of one embodiment of the invention;
Fig. 4 A to 4D is the device architecture vertical view in the manufacturing process of the netted public electrode structural liquid crystal display part of one embodiment of the invention.
Embodiment
The netted public electrode structural liquid crystal display part proposed the present invention below in conjunction with the drawings and specific embodiments and manufacture method thereof are described in further detail.
As shown in Figure 2, the invention provides a kind of netted public electrode structural liquid crystal display part, comprising:
Gate line 201;
Be parallel to the first public electrode wire 202 of described gate line 201;
The data line 203 crossing with described gate line 201 and the first public electrode wire 202 and the second public electrode wire 204;
Be in the TFT structure 205 at described gate line 201 and the overlapping place of data line 203;
The transparent common electrode 207 of the comb teeth-shaped be electrically connected with described first public electrode wire 202 and the second public electrode wire 204, its comb has and extends and the whippletree part 207a overlapped on described gate line 201 and the tooth-like part of anything extended along described data line 203 direction along described gate line 201 direction, and described tooth-like part of anything comprises and overlaps on the first tooth-like part of anything 207b on described data line 203 and the second public electrode wire 204 respectively and be connected the second tooth-like part of anything 207c of described whippletree part 207a at described second public electrode wire 204 with between data line 203; And
With the pixel electrode 208 of the staggered comb teeth-shaped of comb of described transparent common electrode 207.
In the present embodiment, described gate line 201 is bi-gate line structure, because source electrode driver cost is higher than gate drivers cost, so the quantity reducing data line can reduce the cost of driver, have the liquid crystal display of bi-gate line (dual gate) by reducing the data line of half quantity, the gate line of the quantity that doubles reduces costs.
In the present embodiment, described pixel electrode 208 and transparent common electrode 207 can adopt the manufacture of the transparent material such as tin indium oxide or indium zinc oxide, and the first tooth-like part of anything 207b that transparent common electrode 207 is overlapped in described second public electrode wire 204 is electrically connected with described first public electrode wire 202 and the second public electrode wire 204 by via hole 206b; Pixel electrode 208 is electrically connected with the drain electrode 205a of described TFT structure 205 by via hole 206a; The source electrode of TFT structure 205 is general and data line 203 is one-body molded, and grid is general and gate line 201 is one-body molded.
In other embodiments of the invention, in order to increase memory capacitance, the display quality of further raising liquid crystal display, the whippletree part 207a place that also can overlap on described gate line 201 in transparent common electrode 207 arranges memory capacitance, can not reduce the aperture opening ratio of liquid crystal display simultaneously.Wherein, gate line 201 is as the bottom crown of memory capacitance, transparent common electrode 207 as the top crown of memory capacitance, gate line 201 formed after and transparent common electrode 207 formed before can reserve insulation course (such as gate insulator, passivation layer etc.) using the medium as memory capacitance on the gate line 201 that whippletree part 207a is corresponding.
Accordingly, as shown in Figure 3, the present invention also provides a kind of manufacture method of netted public electrode structural liquid crystal display part, comprises the following steps:
S1, forms gate line on a substrate and is parallel to the first public electrode wire of described gate line;
S2, forms the data line crossing with described gate line and the first public electrode wire and the second public electrode wire on the substrate;
S3, forms TFT structure at the gate line of described substrate and the overlapping place of data line;
S4, form the staggered pixel electrode of comb and transparent common electrode on the substrate, wherein, described transparent common electrode is electrically connected with described first public electrode and the second public electrode, the comb of described transparent common electrode has along the extension of described gate line direction and the whippletree part overlapped on described gate line and the tooth-like part of anything extended along described data line direction, described tooth-like part of anything comprises and overlaps on the first tooth-like part of anything on described data line and the second public electrode wire respectively and be connected the second tooth-like part of anything of described whippletree part at described second public electrode wire with between data line.
Below in conjunction with accompanying drawing 4A ~ 4D, the manufacture method of the netted public electrode structural liquid crystal display part that the present invention proposes is described in further detail.
As shown in Figure 4 A, in step sl, substrate 200 deposits the first metallic material film (not shown) by the mode sputtered or evaporate, then, on described first metallic material film, gate insulation layer and certain thickness photoresist film is deposited by the mode of plasma reinforced chemical vapour deposition, make described photoresist film expose and develop by gate mask plate, form photoetching offset plate figure; Then, gate insulator layer, the first metallic material film, remove unnecessary photoresist layer, the grid (not shown) forming gate line 201, first public electrode wire 202 and be electrically connected with gate line one; In the present embodiment, gate line 201 is bi-gate line structure.
Preferably, substrate 200 is the isolation material such as glass, quartz or plastics.First metal material layer can be the monofilm of such as Mo, Cr, W, Ti, Ta, Mo, Al or Cu, or for being selected from the composite membrane that combination in any two kinds or more of in Cr, W, Ti, Ta, Mo, Al or Cu is formed.The material of gate insulation layer is oxide, nitride or oxynitrides.
As shown in Figure 4 B, in step s 2, on the substrate 200 comprising gate line 201 and the first public electrode wire 202, deposit certain thickness second metallic material film, the data line 203 crossing with gate line 201 and the first public electrode wire 202 and the second public electrode wire 204 is formed by data line mask plate, second public electrode wire 204 intersects with the first public electrode wire 202, defines the blank of netted public electrode structure.
As shown in Figure 4 B, gate line 201 and the TFT structure 205 at the overlapping place of data line 203 can be positioned in the lump in forming step S3 while forming data line 203 and the second public electrode wire 204 in step s 2, comprise the source electrode and drain electrode 205a and the raceway groove between source electrode and drain electrode 205a that form TFT structure 205.Wherein, the source electrode of TFT structure 205 and data line 203 one-body molded.
As shown in Figure 4 C, after formation TFT structure 205, the whole surface of substrate 200 comprising described formation TFT structure 205 forms passivation layer (not shown), and described passivation layer is monox, silicon nitride, silicon oxynitride or organic material.Then by passivation layer mask plate, formed in described passivation layer and expose the TFT structure 205 part drain electrode via hole 206a of 205a and the via hole 206b of exposed portion first public electrode wire 202 and part second public electrode wire 204.
As shown in Figure 4 D, in step s 4 which, described passivation layer deposits certain thickness tin indium oxide or indium zinc oxide transparent conductive material, adopt pixel electrode mask plate to form the pixel electrode 208 of comb teeth-shaped and the transparent common electrode 207 of comb teeth-shaped, described pixel electrode 208 is electrically connected with the drain electrode 205a of described TFT structure 205 by described via hole 206a.The comb of described pixel electrode 208 and the comb of described transparent common electrode 207 are staggered, described transparent common electrode 207 has and extends and the whippletree part 207a overlapped on described gate line 201 and the tooth-like part of anything extended along described data line 203 direction along described gate line 201 direction, and described tooth-like part of anything comprises and overlaps on the first tooth-like part of anything 207b on described data line 203 and the second public electrode wire 204 respectively and be connected the second tooth-like part of anything 207c of described whippletree part 207a at described second public electrode wire 204 with between data line 203.The first tooth-like part of anything 207a that transparent common electrode 207 overlaps on described second public electrode wire 204 is electrically connected with described first public electrode wire 202 and the second public electrode wire 204 by via hole 206b.Now, on the basis that the second public electrode wire 204 and the first public electrode wire 202 intersect, the comb of transparent common electrode 207 intersects with the second public electrode wire 204, first public electrode wire 202 further, defines netted public electrode structure.
It should be noted that, in other embodiments of the invention, the first public electrode wire 202 also can not be formed with the same mask plate technique of gate line 201, and the second public electrode wire 204 also can not be formed with the same mask plate technique of data line 203.
In sum, mesh electrode structural liquid crystal display part of the present invention and manufacture method thereof, overlap on data line the first public electrode wire and overlap on gate line second public electrode wire intersect, the transparent common electrode of comb teeth-shaped is intersected with the first public electrode wire and the second public electrode wire and is electrically connected, define netted electrode arranging structure, when gate line drives, this netted electrode arranging structure can realize the mesh current conduction in longitudinal direction (data line direction) and horizontal (gate line direction), reduce the crosstalk phenomenon of vertical and horizontal, improve the display performance of liquid crystal display device.
Obviously, those skilled in the art can carry out various change and modification to invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. a netted public electrode structural liquid crystal display part, is characterized in that, comprising:
Gate line;
Be parallel to the first public electrode wire of described gate line;
The data line crossing with described gate line and the first public electrode wire and the second public electrode wire;
Be in the TFT structure at described gate line and the overlapping place of data line;
The transparent common electrode of the comb teeth-shaped be electrically connected with described first public electrode wire and the second public electrode wire, its comb has and extends and the whippletree part overlapped on described gate line and the tooth-like part of anything extended along described data line direction along described gate line direction, and described tooth-like part of anything comprises and overlaps on the first tooth-like part of anything on described data line and the second public electrode wire respectively and be connected the second tooth-like part of anything of described whippletree part at described second public electrode wire with between data line;
The pixel electrode of comb teeth-shaped, the comb of its comb and described transparent common electrode is staggered.
2. netted public electrode structural liquid crystal display part as claimed in claim 1, it is characterized in that, described gate line is bi-gate line structure.
3. netted public electrode structural liquid crystal display part as claimed in claim 1, it is characterized in that, described transparent common electrode and pixel electrode are tin indium oxide or indium zinc oxide.
4. netted public electrode structural liquid crystal display part as claimed in claim 1, it is characterized in that, the first tooth-like part of anything that described transparent common electrode is overlapped on described second public electrode wire is electrically connected with described first public electrode wire and the second public electrode wire by via hole.
5. netted public electrode structural liquid crystal display part as claimed in claim 1, is characterized in that, the comb of described pixel electrode is electrically connected by the drain electrode of via hole with described TFT structure.
6. a manufacture method for mesh electrode structural liquid crystal display part, is characterized in that, comprising:
Form gate line on a substrate and be parallel to the first public electrode wire of described gate line;
Form the data line crossing with described gate line and the first public electrode wire and the second public electrode wire on the substrate;
TFT structure is formed at the gate line of described substrate and the overlapping place of data line;
Form the staggered pixel electrode of comb and transparent common electrode on the substrate, wherein, described transparent common electrode is electrically connected with described first public electrode wire and the second public electrode wire, the comb of described transparent common electrode has along the extension of described gate line direction and the whippletree part overlapped on described gate line and the tooth-like part of anything extended along described data line direction, described tooth-like part of anything comprises and overlaps on the first tooth-like part of anything on described data line and the second public electrode wire respectively and be connected the second tooth-like part of anything of described whippletree part at described second public electrode wire with between data line.
7. the manufacture method of mesh electrode structural liquid crystal display part as claimed in claim 6, it is characterized in that, described gate line is bi-gate line.
8. the manufacture method of mesh electrode structural liquid crystal display part as claimed in claim 6, it is characterized in that, described transparent common electrode and pixel electrode are tin indium oxide or indium zinc oxide.
9. the manufacture method of mesh electrode structural liquid crystal display part as claimed in claim 6, it is characterized in that, the first tooth-like part of anything that described transparent common electrode is overlapped in described second public electrode is electrically connected with described first public electrode wire and the second public electrode wire by via hole.
10. the manufacture method of mesh electrode structural liquid crystal display part as claimed in claim 6, it is characterized in that, the comb of described pixel electrode is electrically connected by the drain electrode of via hole with described TFT structure.
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CN102033365A (en) * | 2009-10-08 | 2011-04-27 | 海帝士科技公司 | Fringe field switching mode liquid crystal display device and method of fabricating the same |
CN102237355A (en) * | 2010-04-30 | 2011-11-09 | 瀚宇彩晶股份有限公司 | TFT array substrate and LCD panel |
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CN106681064B (en) * | 2016-11-25 | 2019-08-13 | 厦门天马微电子有限公司 | Array substrate and display panel |
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