CN103155410A - Piezoelectric vibration device - Google Patents
Piezoelectric vibration device Download PDFInfo
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- CN103155410A CN103155410A CN2011800486461A CN201180048646A CN103155410A CN 103155410 A CN103155410 A CN 103155410A CN 2011800486461 A CN2011800486461 A CN 2011800486461A CN 201180048646 A CN201180048646 A CN 201180048646A CN 103155410 A CN103155410 A CN 103155410A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0509—Holders; Supports for bulk acoustic wave devices consisting of adhesive elements
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
- H03H9/0552—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the device and the other elements being mounted on opposite sides of a common substrate
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
A piezoelectric vibration device that is highly reliable, and in which a piezoelectric element and a support member etc. do not easily break due to the concentration of stress in electrical connections is provided. The piezoelectric vibration device (1) in which a piezoelectric element (7) is bonded to a piezoelectric element bonding surface (2a) of a support member (2), the piezoelectric element (7) comprises a first drive electrode (9) formed on a first main surface (8a), and a second drive electrode (10) formed on a second main surface (8b), and the first drive electrode (9) is electrically connected to a first wiring electrode (3) formed on the piezoelectric element bonding surface (2a) of the support member (2), and the piezoelectric element (7) is bonded to the support member (2) by means of a first bonding material layer (5).
Description
Technical field
The present invention relates to such as the piezoelectric vibrating device that is used for piezo-activator, piezoelectric sounding body etc., more specifically, relate to and make piezoelectric element engage and utilize the piezoelectric vibrating device of beam mode with supporting member.
Background technology
In the past, piezoelectric vibrating device was used for piezo-activator, piezoelectric sounding body or haptic apparatus (Haptics) etc.As piezoelectric sounding body, for example there is piezoelectric speaker.
In following patent documentation 1, a kind of piezoelectric vibrating device for piezoelectric sounding body is disclosed.In this piezoelectric vibrating device, a plurality of piezoelectric vibrators have been held in housing.Figure 17 means that a plurality of piezoelectric vibrators 1001,1002 are contained in the part amplification view of the major part of the part in housing 1003.Here, only illustrate the part of housing 1003.In accommodation section 1003a in being arranged on housing 1003, held piezoelectric vibrator 1001,1002. Piezoelectric vibrator 1001,1002 is across sept 1004 and stacked.And, according to the piezoelectric vibrator 1001 that clips the both sides that are layered in sept 1004,1002 mode, the clamp section 1005 that is made of metal is installed.By clamp section 1005, clamping piezoelectric vibrator 1001,1002, and realized and being electrically connected to of the electrode of piezoelectric vibrator 1001,1002 lateral surface by clamp section 1005.The end of piezoelectric vibrator 1001,1002 opposite side is also by same structure supporting.
Technical literature formerly
Patent documentation
Patent documentation 1:JP JP 2006-324893 communique
Summary of the invention
The problem that invention will solve
In the piezoelectric vibrating device that patent documentation 1 is put down in writing, for being electrically connected to, used piezoelectric vibrator 1001,1002 above-mentioned clamp section 1005.Therefore, can omit joint based on closing line etc.
But, in piezoelectric vibrating device, in the situation that make piezoelectric vibrator 1001,1002 thickness attenuation, thereby by clamp section 1005 clip the piezoelectric vibrator 1001 that is supported, 1002 there are the following problems: the vibration that is produced owing to making the piezoelectric vibrating device vibration, stress concentrates on supporting piezoelectric vibrator 1001,1002 part, thereby produces piezoelectric vibrator 1001,1002 breakage, distortion.
On the other hand, also adopted the method that closing line is electrically connected to the drive electrode of piezoelectric vibrator in the past, but followed the vibration of piezoelectric vibrator, and can produce closing line in the office, junction surface of closing line and come off.In addition, if improve the intensity of the bonding part of closing line, due to the rigidity of fastener and the difference of the rigidity of the drive electrode of piezoelectric vibrator, can cause because stress concentrates the piezoelectric vibrator breakage.And, also can produce peeling off of drive electrode, cloth line electrode.
The object of the present invention is to provide a kind of piezoelectric vibrating device, used the piezoelectric element that is formed with drive electrode at two interareas of piezoelectric board, and be difficult to produce the poor flow of the electric connection part office of drive electrode, be difficult to produce the destruction of piezoelectric element etc., and being difficult to produce peeling off of electrode, reliability is excellent.
Be used for solving the means of problem
Piezoelectric vibrating device involved in the present invention possesses piezoelectric element, and it has: piezoelectrics, and it has opposed the 1st interarea and the 2nd interarea mutually; The 1st drive electrode is formed on the 1st interarea side of piezoelectrics itself and the 1st main surface parallel; With the 2nd drive electrode, be formed on the 2nd interarea side of piezoelectrics itself and the 2nd main surface parallel, and opposed with the 1st drive electrode, the 1st drive electrode, the 2nd drive electrode opposed zone on the thickness direction of piezoelectrics is made as the active region, and the 1st drive electrode and the 2nd drive electrode not opposed zone is made as non-active region; And supporting member, it has the piezoelectric element composition surface that engages piezoelectric element.
In the present invention, supporting member has the 1st cloth line electrode, and the 1st cloth line electrode is formed on the piezoelectric element composition surface, and is electrically connected to the 1st drive electrode of piezoelectric element.
In addition, in the present invention, piezoelectric vibrating device also possesses the 1st fastener layer, and the 1st fastener layer is electrically connected to the 1st drive electrode of piezoelectric element with the 1st cloth line electrode of supporting member, and the piezoelectric element composition surface of the 1st interarea of piezoelectric element and supporting member is engaged.
In certain particular aspects of piezoelectric vibrating device involved in the present invention, piezoelectric element also has connecting electrode, and this connecting electrode is formed on the 1st interarea of piezoelectrics in the non-active region of piezoelectrics, and is electrically connected to the 2nd drive electrode that is formed on the 2nd interarea.In addition, supporting member also has the 2nd cloth line electrode, and the 2nd cloth line electrode is formed on the piezoelectric element composition surface, and is electrically connected to the 2nd drive electrode.And then piezoelectric vibrating device also possesses the 2nd fastener layer, and the 2nd fastener layer is electrically connected to connecting electrode with the 2nd cloth line electrode, and the piezoelectric element composition surface of the 1st interarea of piezoelectric element and supporting member is engaged.In this case, not only utilize the 1st fastener layer, also utilize the 2nd fastener layer to join securely piezoelectric element to the piezoelectric element composition surface.Simultaneously, the 1st, the 2nd drive electrode is electrically connected to the 1st, the 2nd cloth line electrode that is arranged on supporting member.
Certain particular aspects at piezoelectric vibrating device involved in the present invention, there is the beam mode support that is used for from this supporting member of external support in supporting member, when making piezoelectric element vibrate with beam mode, supporting member beam mode with same frequency together with this piezoelectric element vibrates.In this case, only as described above supporting member is supported from the outside by the beam mode support, piezoelectric element and supporting member are vibrated with beam mode.Preferably, the beam mode support is positioned at periphery, and this periphery is positioned at the outside in the zone that has engaged piezoelectric element, and the 1st cloth line electrode arrives periphery.In this case, can easily the 1st cloth line electrode be electrically connected to the outside.
In addition, preferred, the node of at least 1 beam mode in supporting member is positioned at the beam mode support.In this case, the vibration based on beam mode is difficult to be hindered.
In another particular aspects of piezoelectric vibrating device involved in the present invention, piezoelectric element also has protective layer, and this protective layer is formed on the 1st interarea of piezoelectrics, and is made of the insulating properties material.The piezoelectric element composition surface of described protective layer and supporting member engages.In this case, can prevent reliably the short circuit of the 1st drive electrode and the 2nd drive electrode by protective layer in the 1st interarea side of piezoelectric element.In addition, by protective layer, piezoelectric element can be joined securely to the piezoelectric element composition surface of supporting member.
In another particular aspects of piezoelectric vibrating device involved in the present invention, the mode that piezoelectric element also has according to covering the 2nd drive electrode is formed on the 2nd interarea of piezoelectrics and the protective layer that is made of the insulating properties material.In this case, the 2nd drive electrode is covered by protective layer, so can prevent that the 2nd drive electrode from directly contacting with finger.Therefore, can prevent from getting an electric shock.
In another particular aspects of piezoelectric vibrating device involved in the present invention, protective layer is made of the material identical with piezoelectrics.In this case, can provide a kind of does not increase the kind of material and is provided with the piezoelectric vibrating device of protective layer.
In another particular aspects of piezoelectric vibrating device involved in the present invention, supporting member has opposed the 1st piezoelectric element composition surface, the 2nd piezoelectric element composition surface, on the 1st piezoelectric element composition surface, the 2nd piezoelectric element composition surface engaged respectively piezoelectric element.In this case, because engaged piezoelectric element on the two sides of supporting member, thus can obtain larger displacement, and can improve acoustic pressure.
In another particular aspects of piezoelectric vibrating device involved in the present invention, piezoelectrics and supporting member have the flat shape of rectangle, and this rectangle has minor face and long limit.The minor face of the length of the minor face of the rectangle of supporting member and the rectangle of piezoelectrics equal in length.The 1st drive electrode, the 2nd drive electrode form the short side direction total length across piezoelectrics.In this case, cut off with the interval equal in length with the minor face of the rectangle of the length of the minor face of the rectangle of above-mentioned supporting member and piezoelectrics by female duplexer that stacked female piezoelectrics and female supporting member are consisted of, thereby can easily obtain piezoelectric vibrating device.Therefore, can improve the production of piezoelectric vibrating device.
In another particular aspects of piezoelectric vibrating device involved in the present invention, the 1st drive electrode is formed on the 1st interarea of piezoelectrics, and the 2nd drive electrode is formed on whole of the 2nd interarea of piezoelectrics.Piezoelectric element also has on the 1st interarea that is formed on piezoelectrics in the non-active region of piezoelectrics and the connecting electrode that is electrically connected to the 2nd drive electrode.This connecting electrode forms the side that arrives piezoelectrics from the 1st interarea of piezoelectrics, and the crest line place that consists of at side and the 2nd interarea of piezoelectrics is connected with the 2nd drive electrode.In this case, the drive efficiency ground of piezoelectric element be can not reduce, the 1st drive electrode and the 2nd wiring electrode engagement easily made on the piezoelectric element composition surface of supporting member.
In another particular aspects of piezoelectric vibrating device involved in the present invention, the length on the long limit of the rectangle of the Length Ratio piezoelectric element on the long limit of the rectangle of supporting member is long, the 1st cloth line electrode arrive supporting member joint the zone, side of part of piezoelectric element.In this case, can easily the 1st cloth line electrode be electrically connected to outside.
Another particular aspects at piezoelectric vibrating device involved in the present invention, the length on the long limit of the rectangle of supporting member is made as L1, when the length along the long side direction of the rectangle of supporting member of the active region in piezoelectrics was made as L2, (L2/L1) * 100% was more than 75%.In this case, can not reduce the mode of the displacement of the piezoelectric element that vibrates with beam mode, make piezoelectric element engage and realize the electrical connection of piezoelectric member with supporting member.
The invention effect
Piezoelectric vibrating device involved in the present invention is because the 1st drive electrode of piezoelectric element is electrically connected to the 1st cloth line electrode of supporting member by the 1st fastener layer, and by the 1st fastener layer, piezoelectric element is bonded on the piezoelectric element composition surface of supporting member, so piezoelectric element is engaged in supporting member securely.Therefore, in the situation that piezoelectric vibrating device is vibrated with beam mode, be difficult to produce the peeling off of destruction, electrode of electrical connections, can effectively improve the reliability of piezoelectric vibrating device.
Description of drawings
(a) of Fig. 1 and (b) be used to stereogram and exploded perspective view that the piezoelectric vibrating device that the 1st execution mode of the present invention is related is described.
Fig. 2 means the length L 2 and the ratio (L2/L1) * 100% of the length L 1 on the long limit of supporting member and the figure of displacement the relationship between quantities of the active region of piezoelectric element in the related piezoelectric vibrating device of the 1st execution mode of the present invention.
The figure of the length L 2 that Fig. 3 means the active region of piezoelectric element in the related piezoelectric vibrating device of the 1st execution mode of the present invention and the relation of the ratio (L2/L1) * 100% of the length L 1 on the long limit of supporting member and the power of generation.
Fig. 4 is the stereogram of the related piezoelectric vibrating device of the 2nd execution mode of the present invention.
Fig. 5 is the exploded perspective view of the related piezoelectric vibrating device of the 2nd execution mode of the present invention.
Fig. 6 means the front section view of the 1st variation of the piezoelectric element that is used by piezoelectric vibrating device of the present invention.
Fig. 7 means the front section view of the 2nd variation of the piezoelectric element that is used by piezoelectric vibrating device of the present invention.
Fig. 8 means the front section view of the 3rd variation of the piezoelectric element that is used by piezoelectric vibrating device of the present invention.
Fig. 9 is the stereogram of the related piezoelectric vibrating device of the 3rd execution mode of the present invention.
Figure 10 is the front section view of the related piezoelectric vibrating device of the 4th execution mode of the present invention.
Figure 11 is the schematic, exploded, isometric illustration that is provided with the vibration module of a plurality of piezoelectric vibrating devices of the present invention.
Figure 12 is the stereogram be used to the variation that the piezoelectric vibrating device that the 1st execution mode of the present invention is related is described.
Figure 13 is the exploded perspective view of the related piezoelectric vibrating device of variation shown in Figure 12.
Figure 14 is for the stereogram of explanation by the supporting member of other variation uses of the related piezoelectric vibrating device of the 1st execution mode of the present invention.
Figure 15 is the stereogram be used to another variation that the piezoelectric vibrating device that the 1st execution mode of the present invention is related is described.
Figure 16 is the exploded perspective view of the related piezoelectric vibrating device of variation shown in Figure 15.
Figure 17 means the part amplification view of the major part of existing piezoelectric vibrating device.
Embodiment
Below, with reference to accompanying drawing, concrete execution mode of the present invention is described, make thus the present invention become clear.
Fig. 1 (a) and (b) be stereogram and the exploded perspective view of the related piezoelectric vibrating device 1 of the 1st execution mode of the present invention.Piezoelectric vibrating device 1 is the piezoelectric vibrating device of single piezoelectric chip type.Piezoelectric vibrating device 1 has the supporting member 2 of the rectangular plate shape of the function of bringing into play oscillating plate.
In the present embodiment, supporting member 2 consists of by the substrate of the rectangular plate shape that is made of the insulating properties material.As this substrate that is consisted of by the insulating properties material, in the present embodiment, used glass epoxy substrate.Glass epoxy substrate has excellent machinability.Therefore, as described later, can easily and exactly cut out from female matrix.Therefore, volume production piezoelectric vibrating device 1 accurately.
Certainly, can consist of supporting member 2 by the suitable insulating properties material of realizing larger displacement.In addition, supporting member 2 also can be made of metallic plate, in this case, in order to prevent the 1st, the 2nd interelectrode short circuit of wiring described later, can insulating barrier be set at the upper surface of metallic plate.
Above-mentioned supporting member 2 has the shape of rectangular plate shape, and the lengthwise dimension of the flat shape of this rectangle is made as L1, and the Width size is made as W.
The upper surface of supporting member 2 is piezoelectric element composition surface 2a.Upper surface at supporting member 2 is formed with the 1st cloth line electrode 3 and the 2nd cloth line electrode 4.1st, the 2nd cloth line electrode 3,4 electrically insulated from one another, opposed across the gap.
Engaged piezoelectric element 7 at above-mentioned the 1st, the 2nd cloth line electrode 3,4 by the 1st, the 2nd fastener layer 5,6.1st, the 2nd fastener layer 5,6 is made of the suitable conductive adhesive that contains electroconductive stuffing.Certainly, even use the adhesive do not contain electroconductive stuffing, if electrode each other part directly contact can guarantee conducting.Therefore, also can use the insulating properties adhesive.Perhaps, at the 1st, the 2nd fastener layer 5,6, have if impose on the AC field of piezoelectric element 7 the AC impedance value that can transmit the electric energy that can drive piezoelectric element 7, can may not mutually directly contact each other by electrode, also can utilize the such electromagnetic field couples of capacitor.
Above-mentioned piezoelectric element 7 has the flat shape of rectangular plate shape.The Width size of piezoelectric element 7 is made as with the Width size W of supporting member 2 and equates.More specifically, piezoelectric element 7 has the piezoelectrics 8 of rectangular plate shape.Piezoelectrics 8 have as the lower surface 8a of the 1st interarea with as the upper surface 8b of the 2nd interarea.
Formed the 1st drive electrode 9 on the lower surface 8a of piezoelectrics 8.Whole surface at the upper surface 8b of piezoelectrics 8 has formed the 2nd drive electrode 10.The 1st drive electrode 9 and the 2nd drive electrode 10 are partly driven active region by piezoelectric effect across the opposed piezoelectrics of piezoelectrics 8.Part beyond the active region of piezoelectrics 8 is non-active region.
In the present embodiment, the 1st drive electrode 9 is not formed on whole of lower surface 8a, so have above-mentioned active region and non-active region at piezoelectrics 8.
On lower surface 8a according to having formed connecting electrode 10a across gap and the 1st opposed mode of drive electrode 9.Connecting electrode 10a arrives the crest line of side and upper surface 8b formation from the lower surface 8a of piezoelectrics 8 through the side.On this crest line, connecting electrode 10a is connected in the 2nd drive electrode 10.
Above-mentioned the 1st, the 2nd drive electrode 9,10 and connecting electrode 10a can be formed by suitable conductive material.That is, can be by the conductive layer more than 1 that is consisted of by Ag, Cu, Ni, Cr, Pd or their alloy etc., form the 1st, the 2nd drive electrode 9,10 and connecting electrode 10a.
In piezoelectric element 7,1st, the 2nd drive electrode 9,10 opposed across piezoelectrics 8, so exchange or the voltage of random waveform by applying from the 1st, the 2nd drive electrode 9,10, piezoelectric element 7 and duplexer as the supporting member 2 of oscillating plate are vibrated with beam mode.
On the other hand, the 1st drive electrode 9 engages with the 1st cloth line electrode 3 by the 1st fastener layer 5.Similarly, connecting electrode 10a engages with the 2nd cloth line electrode 4 by the 2nd fastener layer 6.
Carry out joint based on the 1st fastener layer 5 and the 2nd fastener layer 6 at the upper surface as the supporting member 2 of piezoelectric element composition surface 2a.Therefore, can piezoelectric element 7 be fixed firmly to the 1st, the 2nd cloth line electrode 3,4 by the 1st, the 2nd fastener layer 5,6.
And the 1st, the 2nd fastener layer 5,6 is made of conductive adhesive as mentioned above.Therefore, can make the 1st drive electrode 9 be electrically connected on reliably the 1st cloth line electrode 3, and can make connecting electrode 10a and the 2nd drive electrode 10 be electrically connected on reliably the 2nd cloth line electrode 4.
In existing piezoelectric vibrating device shown in Figure 17, because realize being electrically connected to clamp section 1005, so there be piezoelectric vibrator 1001,1002 breakage, the problem of distortion of producing.
On the other hand, in the present embodiment, by the 1st, the 2nd fastener layer 5,6, piezoelectric element 7 engages with supporting member 2, and has realized electrical connection.Therefore, vibration is difficult to interruptedly in piezoelectric element 7, so be difficult to produce the reduction etc. of displacement, can obtain good vibration characteristics., concentrate because be difficult to produce the stress that is caused by clamp section etc., so also be difficult to produce the destruction etc. of the 1st, the 2nd drive electrode 9,10 peel off, piezoelectrics 8 and supporting member 2 in addition.
In addition, by print process, can high accuracy and form at an easy rate the 1st, the 2nd drive electrode 9,10.
In addition, need to not weld at the 1st, the 2nd drive electrode 9,10 of piezoelectric element 7 etc., so can realize the slimming of piezoelectric element 7.
And then, because above-mentioned supporting member 2 is made of the insulating properties material, so be difficult to produce electric leakage, also be difficult to produce the people's who operates the electronic equipment that has carried piezoelectric vibrating device 1 electric shock.In addition, in existing piezoelectric vibrating device, used the oscillating plate that is consisted of by metal as supporting member, thus need to form insulating barrier, and in the present embodiment, because supporting member 2 is made of the insulating properties material, so do not need to form this insulating barrier.
In above-mentioned supporting member 2, preferably have the beam mode support, when piezoelectric element 7 has carried out vibration with beam mode, according to together with piezoelectric element 7 in the mode of beam mode vibration from external support supporting member 2.The structure that supporting member 2 is supported from the outside is arbitrarily, such as: overarm or two overarms etc.No matter which kind of mode, by utilizing the beam mode support, supporting member 2 is supported, thereby supporting member 2 vibrates with the beam mode with same frequency together with piezoelectric element 7.
In the present embodiment, above-mentioned beam mode support is present in extension 2b, 2c, namely is positioned at the periphery in the outside in the zone that has engaged piezoelectric element 7.And the 1st, the 2nd cloth line electrode 3,4 arrives extension 2b, 2c.
In addition, in the present embodiment, the node (node) of the beam mode at least one times in preferred supporting member 2 is positioned at above-mentioned beam mode support.Accordingly, be difficult at least hinder the vibration of first order buckling pattern.
Next, one example of manufacture method of the piezoelectric vibrating device 1 of present embodiment is described.
[0051] when making piezoelectric vibrating device 1, prepare female supporting member and female piezoelectric element.That is, prepare a plurality of supporting members 2 and piezoelectric element 7 set are rectangular female supporting member and female piezoelectric element.In this mother's supporting member, be formed for forming the 1st, the 2nd cloth line electrode 3,4 mother's the 1st, the 2nd cloth line electrode at upper surface.The formation of this mother's the 1st, the 2nd cloth line electrode can be undertaken by following suitable method, prepares the glass epoxy substrate with Copper Foil that is:, and Copper Foil is carried out the method that pattern forms; Form the method etc. of the 1st, the 2nd female cloth line electrode by silk screen printing, film-shaped established law on glass epoxy substrate.
Similarly, when obtaining female piezoelectric element, also can make the 1st, the 2nd drive electrode that uses the same method to form parent at upper surface and the lower surface of female piezoelectrics.
Then, with female piezoelectric element and female supporting member by be used for consisting of the 1st, the 2nd fastener layer 5,6 conductive adhesive bonds.Obtain by this method female duplexer.Through-thickness cuts off this mother's duplexer.Then, form the lateral parts of connecting electrode 10a in the side of piezoelectrics 8.By this method, volume production piezoelectric vibrating device 1 easily.
Namely, in the present embodiment, because making the size of length direction of minor face of the supporting member 2 of rectangular plate shape is that Width size W equates with the Width size of piezoelectric element 7, so as mentioned above by cutting off from female duplexer, can be easily and many piezoelectric vibrating devices 1 of volume production accurately.
The lengthwise dimension L1 of above-mentioned supporting member 2 is set as longer than the lengthwise dimension of piezoelectric element 7.And, as shown in Fig. 1 (a), in the piezoelectric element composition surface 2a of supporting member 2, the side of the part that supporting member 2 extends to piezoelectric element 7 stacked.Formed respectively the 1st, the 2nd cloth line electrode 3,4 according to the mode that arrives extension 2b, 2c, wherein this extension 2b, 2c arrive this side.Therefore, extension 2b, 2c are supported and conducting from the outside, thus because the place that is supported is not piezoelectric element 7, especially because be not the active region of piezoelectric element 7, thereby do not apply the stress of piezoelectrics of generation and the stress addition that concentrates on the vibration of support by electric field and crack at piezoelectric element 7 and wait damaged or be out of shape so can not make, and can not concentrate at the local stress that produces of electrical connection of the part of the active region of piezoelectric element 7, can easily the 1st, the 2nd cloth line electrode 3,4 be electrically connected on outside terminal.For example, can use metal clip (clip) as outside terminal.If metal clip is formed on the 1st, the 2nd cloth line electrode 3 of extension 2b, 2c, each clamping of 4, by the 1st, the 2nd cloth line electrode 3,4, can easily the 1st, the 2nd drive electrode 9,10 be electrically connected on outside terminal.In this case, support because of metal clip clamping extension 2b, 2c, so piezoelectric element 7 produces problem damaged, that be out of shape and is enhanced owing to concentrating based on the stress of the vibration of metal clip, in addition, the generation drive electrode that is caused by the difference of the rigidity of the drive electrode of the rigidity of metal clip and piezoelectric vibrator, the problem of peeling off of cloth line electrode are enhanced.
Above-mentioned active region lengthwise dimension in above-mentioned piezoelectric element 7 is made as L2.That is, the size with the long side direction of the above-mentioned rectangle of the 1st, the 2nd drive electrode 9,10 opposed active regions is made as L2.
The lengthwise dimension L2 that makes above-mentioned active region carries out various variations to the ratio (L2/L1) * 100 (%) of the lengthwise dimension L1 of above-mentioned supporting member 2, make the piezoelectric vibrating device 1 of many above-mentioned execution modes, and measured its displacement and generation power.
In addition, here, by according to utilize edge (edge) on thickness direction thus the equidistant mode of the both ends that the member of shape clips supporting member 2 from the end face of supporting member 2 to 2 extension 2b, 2c of the end face of piezoelectric element 7, at the fixing piezoelectric element 7 of the central portion of supporting member 2, thereby being constrained to this part is not subjected to displacement on thickness direction, interval between member is made as L1, apply given voltage (200V), and utilize laser displacement gauge to measure to the displacement of the thickness direction of central portion between member, this value is made as displacement.In addition, so-called generation power refers to apply voltage identical when measuring displacement, and is that zero mode is pressed the member of edge shape to the thickness direction of supporting member at the member central portion according to displacement, and utilizes the value of recommending this power of instrument measurement and obtaining.For this measurement, an example as execution mode, used the piezoelectric vibrating device 1 that has carried piezoelectric element 7 on the supporting member 2 that L1 consists of as the rectangular-shaped glass epoxy substrate by with Copper Foil of 0.2mm as 5mm, thickness as 53mm, W, it is that 50mm, W are that 5mm, thickness are the 1st, the 2nd drive electrode 9,10 that the rectangular-shaped piezoelectrics 8 that are made of PZT of 0.2mm utilize sputtering method to form that this piezoelectric element 7 has at L2.
At Fig. 2 and Fig. 3, result is shown.
In addition, the displacement of Fig. 2 and Fig. 3 and generation power are relative values, (L2/L1) * 100 (%) equaled 100% situation be made as 100% and obtain.
By Fig. 2 and Fig. 3 as can be known, if (L2/L1) * 100 (%) are more than 75%, displacement and generation power can enough obtain more than 90% greatly, and compare with less than 75%, and the value of displacement and the power of generation is also more stable with respect to the change of the ratio of L2/L1.Therefore, even due to the change in the production process of piezoelectric vibrating device 1, and the ratio change of the lengthwise dimension L1 of supporting member 2 and the lengthwise dimension L2 of active region, also has the value stabilization of displacement and the power of generation in the effect of enough large value, so (L2/L1) * 100 (%) are preferably more than 75%.
Fig. 4 and Fig. 5 are stereogram and the exploded perspective views of the related piezoelectric vibrating device 21 of the 2nd execution mode of the present invention.
The piezoelectric vibrating device 21 of the 2nd execution mode except the lower surface 2d of supporting member 2 also as the piezoelectric element composition surface, on this lower surface 2d also outside the 1st, the 2nd fastener layer 5,6 laminated piezoelectric elements 7, identical with the 1st execution mode.Therefore, for a part, mark same Ref. No., quote thus the explanation in the 1st execution mode.
In the piezoelectric vibrating device 21 of the 2nd execution mode, because the stacked piezoelectric element 7,7 on the two sides of supporting member 2, so not only can obtain the effect same with the 1st execution mode, and compare with the piezoelectric vibrating device 1 of the 1st execution mode, can obtain larger displacement, larger acoustic pressure.So, in the present invention, can be with the two sides of supporting member as the piezoelectric element composition surface.
In addition, respectively can stacked piezoelectric element 7 more than 2 on a piezoelectric element composition surface.
The piezoelectric element that uses at piezoelectric vibrating device of the present invention is not limited to piezoelectric element 7.
Fig. 6 is illustrated in the 1st variation of the piezoelectric element of piezoelectric vibrating device use of the present invention.Piezoelektrisches mehrschichtelement 31 has piezoelectrics 32.Piezoelectrics 32 have opposed the 1st, the 2nd interarea 32a, 32b.Piezoelectrics 32 have a plurality of piezoelectric body layers.Be formed with the 1st drive electrode 33 on the 1st interarea 32a of piezoelectrics 32, be formed with the 2nd drive electrode 34 on the 2nd interarea 32b.And then, be formed with a plurality of the 1st internal drive electrodes 35 of the public connection of end face of being connected with piezoelectrics at the 1st drive electrode 33 in piezoelectrics 32.In addition, according to across piezoelectric body layer and the 1st drive electrode 33 or the overlapping mode of the 1st internal drive electrode 35, a plurality of the 2nd internal drive electrodes 36 have been formed.A plurality of the 2nd internal drive electrodes 36 on the end face of piezoelectrics 32 with the 2nd drive electrode 34 is public is connected.So, in the present invention, can use the Piezoelektrisches mehrschichtelement 31 with a plurality of internal drive electrodes.
By using Piezoelektrisches mehrschichtelement 31, can obtain larger displacement with lower driving voltage.That is, proportional with the electric field strength that applies based on the displacement of piezoelectric effect.In Piezoelektrisches mehrschichtelement 31, because can make the thickness attenuation of the piezoelectric body layer between the drive electrode that is connected in different current potentials, so can obtain larger displacement with lower voltage.
In addition, Fig. 7 is illustrated in the 2nd variation of the piezoelectric element that piezoelectric vibrating device of the present invention uses.In piezoelectric element shown in Figure 7 41, have piezoelectrics 42.Piezoelectrics 42 have opposed the 1st, the 2nd interarea 42a, 42b.Piezoelectrics 42 have a plurality of piezoelectric body layers.In piezoelectrics 42 according to having formed the 1st, the 2nd drive electrode 43,44 across the opposed mode of piezoelectric body layer.The 1st drive electrode 43 forms abreast at the 1st interarea 42a side and the 1st interarea 42a of piezoelectrics 42.Similarly, the 2nd drive electrode 44 forms abreast at the 2nd interarea 42b side and the 2nd interarea 42b of piezoelectrics 42.That is, in the present invention, the 1st, the 2nd drive electrode also can not be formed directly on the 1st, the 2nd interarea of piezoelectrics.Be formed with inert layer 42c, 42d in the 1st, the 2nd drive electrode 43,44 the outside.So, can use the piezoelectric element 41 with inert layer 42c, 42d.
In piezoelectric element shown in Figure 7 41, because be provided with inert layer 42c, 42d, so can suppress the clamp section of the active region of piezoelectrics 42 inside.In addition, in piezoelectric element 41, because cover the 1st, the 2nd drive electrode 43,44 by inert layer 42c, 42d, so be difficult to be exposed in outside moisture.Therefore, can extend the life-span of product.In addition, be difficult to produce electric leakage, can also be difficult to produce the people's who operates the electronic equipment that has carried piezoelectric vibrating device electric shock.
And then Fig. 8 is illustrated in the 3rd variation of the piezoelectric element that piezoelectric vibrating device of the present invention uses.Piezoelektrisches mehrschichtelement 51 shown in Figure 8 has piezoelectrics 52.Piezoelectrics 52 have opposed the 1st, the 2nd interarea 52a, 52b.Piezoelectrics 52 have a plurality of piezoelectric body layers.In piezoelectrics 52, according to across piezoelectric body layer and opposed mode has formed the 1st, the 2nd drive electrode 53,54.The 1st drive electrode 53 forms abreast at the 1st interarea 52a side and the 1st interarea 52a of piezoelectrics 52.Similarly, the 2nd drive electrode 54 forms abreast at the 2nd interarea 52b side and the 2nd interarea 52b of piezoelectrics 52.In addition, piezoelectric element 41 as shown in Figure 7 is such, and Piezoelektrisches mehrschichtelement 51 has inert layer 52c, 52d in the 1st, the 2nd interarea 52a, the 52b side of piezoelectrics 52.And, formed a plurality of internal drive electrodes 55 the 1st, the 2nd drive electrode 53,54.
As Fig. 6～shown in Figure 8, the piezoelectric element that uses in piezoelectric vibrating device of the present invention can be both to have the element of inert layer in the outside of the 1st drive electrode and the 2nd drive electrode, can be still to be formed with the Piezoelektrisches mehrschichtelement of other drive electrodes between the 1st, the 2nd drive electrode.
Fig. 9 is the stereogram of the related piezoelectric vibrating device of the 3rd execution mode of the present invention.In the piezoelectric vibrating device 61 of the 3rd execution mode, formed the protective layer 62 that is consisted of by the insulating properties material on piezoelectric element 7.Other places, piezoelectric vibrating device 61 is identical with the piezoelectric vibrating device 1 of the 1st execution mode.Therefore, for the same Ref. No. of same part mark, thus the explanation of quoting piezoelectric vibrating device 1.
Certainly, protective layer 62 also can be formed by the piezoelectric identical with piezoelectrics 8.In this case, need not increase the kind of the material that is used to form piezoelectric vibrating device 61, and need not cause the numerous and diverse of manufacturing process, just can form protective layer 62.
Figure 10 means the front section view of the piezoelectric vibrating device that the 4th execution mode of the present invention is related.In the piezoelectric vibrating device 71 of the 4th execution mode, replace the protective layer 62 of the 3rd execution mode, formed protective layer 72 in the lower face side of piezoelectric element 7.And above-mentioned protective layer 72 is made of the fastener of insulating properties.In addition, piezoelectric vibrating device 71 has and follows the 1st, the 2nd fastener layer 5A, the 6A that formed protective layer 72 and formed than heavy back than the 1st, the 2nd fastener layer 5,6.
Therefore, as shown in figure 10, by above-mentioned protective layer 72, also piezoelectric element 7 is engaged with the piezoelectric element composition surface 2a of supporting member 2.Therefore, the area of the 1st fastener layer 5A is diminished.So, in the situation that be provided with protective layer 72, even if the area of the 1st fastener layer 5A is diminished, also can join securely piezoelectric element 7 to supporting member 2.
In the situation that be provided with protective layer 72, by using the insulating properties adhesive of excellent moisture resistance as protective layer 72, thereby can suppress to be entered and the deterioration in characteristics that causes by the moisture from the lower face side of piezoelectric element 7.As protective layer 72; using the member that can make the 1st drive electrode 9 and connecting electrode 10a electric insulation; in situation such as the adhesive of insulating properties, anisotropic conductive adhesive etc., can be between supporting member 2 and piezoelectric element 7 ground very close to each other configuration protection layer 72.
In addition, also can form the both sides of protective layer shown in Figure 9 62 and protective layer 72 shown in Figure 10.In this case, at the upper surface of piezoelectric element 7 and the either side of lower surface, can both pass through protective layer 62,72 and realize protection.
Piezoelectric vibrating device involved in the present invention can be used as the piezoelectric sounding body of various piezo-activators, piezoelectric speaker etc.In addition, in recent years, as a kind of input unit of portable electric appts, touch panel formula input unit is widely used.In this touch panel formula input unit, the device that is called as haptic apparatus that the counter-force relative with people's input gives click feel receives publicity.Piezoelectric vibrating device of the present invention can be suitable for use as the actuator that gives counter-force in this haptic apparatus.
Figure 12 is that Figure 13 is its exploded perspective view for the stereogram of explanation as the piezoelectric vibrating device 1A of the variation of the piezoelectric vibrating device 1 of the 1st execution mode.The piezoelectric vibrating device 1A of this variation has the supporting member 2 that supporting member 2A replaces the 1st execution mode.In this variation, used the piezoelectric element 7 identical with the 1st execution mode.Certainly, the width of supporting member 2A is set to wider than the width of piezoelectric element 7.As shown in figure 13, the upper surface at this supporting member 2A has formed the 1st cloth line electrode 3A and the 2nd cloth line electrode 4A.1st, the 2nd cloth line electrode 3A, 4A electrically insulated from one another, opposed across the gap.Piezoelectric element 7 engages by the 1st, the 2nd fastener layer 5, the 6 and the 1st, the 2nd cloth line electrode 3A, 4A.The 1st cloth line electrode 3A has junction surface 3a, portion of terminal 3b and linking part 3c.At stacked the 1st fastener layer 5 of junction surface 3a.Junction surface 3a spreads all over the whole Width of supporting member 2A.Portion of terminal 3b is arranged on the 2nd cloth line electrode 4A side.Portion of terminal 3b is opposed across gap and the 2nd cloth line electrode 4A on the Width of supporting member 2A.In addition, with the 2nd cloth line electrode 4A similarly, portion of terminal 3b is formed on distolateral by supporting member 2A.Junction surface 3a is connected linking part 3c with portion of terminal 3b and connects.And as shown in figure 12, portion of terminal 3b and the 2nd cloth line electrode 4A are in distolateral the exposing of this supporting member 2A.Therefore, can easily carry out and being electrically connected to of outside.
Figure 14 is for the stereogram that the supporting member 2B that uses in other variation of the related piezoelectric vibrating device of the 1st execution mode of the present invention is described.In piezoelectric vibrating device 1A shown in Figure 13, in order to prevent the short circuit of portion of terminal 3b and the 2nd cloth line electrode 4A, the width of supporting member 2A is set to wider than the width of piezoelectric element 7.Certainly, as shown in figure 14, also can have the 1st cloth line electrode 3B, and the supporting member 2B of the width same widths of use and piezoelectric element 7.In this case, the 1st cloth line electrode 3B has junction surface 3d, portion of terminal 3e and linking part 3f.At stacked the 1st fastener layer 5 of junction surface 3d.Junction surface 3d spreads all over the whole Width of supporting member 2B.Portion of terminal 3e is arranged on the 2nd cloth line electrode 4A side.Portion of terminal 3e is opposed across gap and the 2nd cloth line electrode 4A on the Width of supporting member 2B.In addition, with the 2nd cloth line electrode 4A similarly, portion of terminal 3e forms distolateral by supporting member 2A.Junction surface 3d is connected with portion of terminal 3e to connect through the linking part 3e of lower surface to another end face from the end face of supporting member 2B.
In addition, in supporting member 2B shown in Figure 14, its fabric width also can be larger than the width of piezoelectric element 7.
Figure 15 is that the variation of piezoelectric vibrating device 1 for explanation the 1st execution mode is the stereogram of piezoelectric vibrating device 1B, and Figure 16 is its exploded perspective view.Piezoelectric vibrating device 1B consists of by Piezoelektrisches mehrschichtelement shown in Figure 8 51 is laminated to supporting member 2A.Supporting member 2A is substantially identical with supporting member 2A shown in Figure 13.Certainly, although the width that makes supporting member 2A here is the size identical with the width of Piezoelektrisches mehrschichtelement 51, with the situation of Figure 13 similarly, also can use the width supporting member 2A wider than Piezoelektrisches mehrschichtelement 51.
In Figure 15 and variation shown in Figure 16, the portion of terminal 3b of the 1st cloth line electrode 3A and the 2nd cloth line electrode 4A are set to by the length direction one of supporting member 2A distolateral.Therefore, can easily carry out and being electrically connected to of outside the length direction one of supporting member 2A is distolateral.In addition, as shown in figure 15, because portion of terminal 3b and the 2nd cloth line electrode 4A are in distolateral the exposing of supporting member 2A, so can further easily carry out and being connected of outside.
Figure 11 is the schematic, exploded, isometric illustration of having used the vibration module 81 of piezoelectric vibrating device of the present invention.In this vibration module 81, a plurality of piezoelectric vibrating devices 1 of the 1st execution mode, 1 are arranged on the upper surface of substrate 82 by fastener layer 83,84.And, a plurality of piezoelectric vibrating devices 1,1 above, the flexible base plate 85 that configuration is used by touch panel formula input unit.This vibration module can be suitable for use in haptic apparatus.
In addition, in the piezoelectric vibrating device 1 of above-mentioned execution mode, used the piezoelectrics of rectangular plate shape, but the piezoelectrics of piezoelectric vibrating device of the present invention can be also the shapes beyond rectangular plate shape, such as discoideus other shapes such as grade.Similarly, for supporting member, also be not limited to the oscillating plate performance function as single piezoelectric chip vibrating device, be not limited to rectangular plate shape, also can have the shape of discoideus grade.
Symbol description
1,1A, 1B ... piezoelectric vibrating device
2,2A, 2B ... supporting member
2a ... the piezoelectric element composition surface
2b, 2c ... extension
2d ... lower surface
3,3A, 3B ... the 1st cloth line electrode
3a ... the junction surface
3b ... portion of terminal
3c ... linking part
3d ... the junction surface
3e ... portion of terminal
3f ... linking part
4,4A ... the 2nd cloth line electrode
5 ... the 1st fastener layer
5A ... the 1st fastener layer
6 ... the 2nd fastener layer
7 ... piezoelectric element
8 ... piezoelectrics
8a ... the 1st interarea
8b ... the 2nd interarea
9 ... the 1st drive electrode
10 ... the 2nd drive electrode
10a ... connecting electrode
21 ... piezoelectric vibrating device
31 ... piezoelectric element
32 ... piezoelectrics
32a ... the 1st interarea
32b ... the 2nd interarea
33 ... the 1st drive electrode
34 ... the 2nd drive electrode
35 ... the 1st internal drive electrode
36 ... the 2nd internal drive electrode
41 ... piezoelectric element
42 ... piezoelectrics
42a ... the 1st interarea
42b ... the 2nd interarea
42c, 42d ... inert layer
43 ... the 1st drive electrode
44 ... the 2nd drive electrode
51 ... piezoelectric element
52 ... piezoelectrics
52a ... the 1st interarea
52b ... the 2nd interarea
52c, 52d ... inert layer
53 ... the 1st drive electrode
54 ... the 2nd drive electrode
55 ... the internal drive electrode
61 ... piezoelectric vibrating device
62 ... protective layer
71 ... piezoelectric vibrating device
72 ... protective layer
81 ... vibration module
82 ... substrate
83,84 ... the fastener layer
85 ... flexible base plate
Claims (13)
1. piezoelectric vibrating device possesses:
Piezoelectric element, it has: piezoelectrics, it has opposed the 1st interarea and the 2nd interarea mutually; The 1st drive electrode is formed on described the 1st interarea side of described piezoelectrics itself and the 1st main surface parallel; With the 2nd drive electrode, be formed on described the 2nd interarea side of described piezoelectrics itself and the 2nd main surface parallel, and opposed with described the 1st drive electrode, described the 1st drive electrode, the 2nd drive electrode opposed zone on the thickness direction of described piezoelectrics is made as the active region, and described the 1st drive electrode and described the 2nd drive electrode not opposed zone are made as non-active region; And
Supporting member, it has the piezoelectric element composition surface that engages described piezoelectric element,
Described supporting member has the 1st cloth line electrode, and the 1st cloth line electrode is formed on described piezoelectric element composition surface, and is electrically connected to the 1st drive electrode of described piezoelectric element,
Described piezoelectric vibrating device also possesses the 1st fastener layer, the 1st fastener layer is electrically connected to described the 1st drive electrode of described piezoelectric element with described the 1st cloth line electrode of described supporting member, and the piezoelectric element composition surface of the 1st interarea of described piezoelectric element and described supporting member is engaged.
2. piezoelectric vibrating device according to claim 1, wherein,
Described piezoelectric element also has connecting electrode, and this connecting electrode is formed on the 1st interarea of described piezoelectrics in the described non-active region of described piezoelectrics, and is electrically connected to the 2nd drive electrode that is formed on described the 2nd interarea,
Described supporting member also has the 2nd cloth line electrode, and the 2nd cloth line electrode is formed on described piezoelectric element composition surface, and is electrically connected to described the 2nd drive electrode,
Described piezoelectric vibrating device also possesses the 2nd fastener layer, and the 2nd fastener layer is electrically connected to described connecting electrode with described the 2nd cloth line electrode, and the piezoelectric element composition surface of the 1st interarea of described piezoelectric element and described supporting member is engaged.
3. piezoelectric vibrating device according to claim 1 and 2, wherein,
There is the beam mode support that is used for from the described supporting member of external support in described supporting member, and when making described piezoelectric element vibrate with beam mode, described supporting member beam mode with same frequency together with this piezoelectric element vibrates.
4. piezoelectric vibrating device according to claim 3, wherein,
Described beam mode support is positioned at periphery, and this periphery is positioned at the outside in the zone that has engaged described piezoelectric element, and described the 1st cloth line electrode arrives described periphery.
5. piezoelectric vibrating device according to claim 4, wherein,
The node of at least 1 beam mode in described supporting member is positioned at described beam mode support.
6. the described piezoelectric vibrating device of any one according to claim 1～5, wherein,
Described piezoelectric element also has protective layer, and this protective layer is formed on the 1st interarea of described piezoelectrics, and is made of the insulating properties material, and the piezoelectric element composition surface of described protective layer and described supporting member engages.
7. the described piezoelectric vibrating device of any one according to claim 1～6, wherein,
The mode that described piezoelectric element also has according to described the 2nd drive electrode of covering is formed on the 2nd interarea of described piezoelectrics and the protective layer that is made of the insulating properties material.
8. according to claim 6 or 7 described piezoelectric vibrating devices, wherein,
Described protective layer is made of the material identical with described piezoelectrics.
9. the described piezoelectric vibrating device of any one according to claim 1～8, wherein,
Described supporting member has opposed the 1st piezoelectric element composition surface, the 2nd piezoelectric element composition surface, on the 1st piezoelectric element composition surface, the 2nd piezoelectric element composition surface engaged respectively described piezoelectric element.
10. the described piezoelectric vibrating device of any one according to claim 1～9, wherein,
Described piezoelectrics and described supporting member have the flat shape of rectangle, and this rectangle has minor face and long limit, and the minor face of the rectangle of the length of the minor face of the rectangle of described supporting member and described piezoelectrics is equal in length,
Described the 1st drive electrode, the 2nd drive electrode form the described short side direction total length of crossing over described piezoelectrics.
11. piezoelectric vibrating device according to claim 10, wherein,
Described the 1st drive electrode is formed on the 1st interarea of described piezoelectrics,
Described the 2nd drive electrode is formed on whole of the 2nd interarea of described piezoelectrics,
Described piezoelectric element also has on the 1st interarea that is formed on described piezoelectrics in the described non-active region of described piezoelectrics and the connecting electrode that is electrically connected to described the 2nd drive electrode,
This connecting electrode forms the side that arrives described piezoelectrics from described the 1st interarea of described piezoelectrics, and the crest line place that consists of at side and the 2nd interarea of described piezoelectrics is connected with described the 2nd drive electrode.
12. piezoelectric vibrating device according to claim 11, wherein,
The length on the long limit of the described rectangle of the described piezoelectric element of Length Ratio on the long limit of the described rectangle of described supporting member is long, described the 1st cloth line electrode arrive described supporting member joint the zone, side of part of described piezoelectric element.
13. piezoelectric vibrating device according to claim 12, wherein,
The length on the described long limit of the described rectangle of described supporting member is made as L1, and when the length along the long side direction of the described rectangle of described supporting member of the active region in described piezoelectrics was made as L2, (L2/L1) * 100% was more than 75%.
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| PCT/JP2011/074390 WO2012060235A1 (en) | 2010-11-01 | 2011-10-24 | Piezoelectric vibration device |
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| US11043088B2 (en) | 2009-09-30 | 2021-06-22 | Apple Inc. | Self adapting haptic device |
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Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2012060235A1 (en) | 2014-05-12 |
| WO2012060235A1 (en) | 2012-05-10 |
| JP5605433B2 (en) | 2014-10-15 |
| CN103155410B (en) | 2016-05-25 |
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