JPS5575324A - Thickness shear oscillator - Google Patents

Thickness shear oscillator

Info

Publication number
JPS5575324A
JPS5575324A JP14949578A JP14949578A JPS5575324A JP S5575324 A JPS5575324 A JP S5575324A JP 14949578 A JP14949578 A JP 14949578A JP 14949578 A JP14949578 A JP 14949578A JP S5575324 A JPS5575324 A JP S5575324A
Authority
JP
Japan
Prior art keywords
film
electrode
frequency control
adhesion
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14949578A
Other languages
Japanese (ja)
Inventor
Hiroshi Onuki
Isao Shinoda
Seiji Higashichi
Yoshio Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP14949578A priority Critical patent/JPS5575324A/en
Publication of JPS5575324A publication Critical patent/JPS5575324A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0528—Holders; Supports for bulk acoustic wave devices consisting of clips
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

Abstract

PURPOSE:To secure reduction of the crystal impedance by keeping balance on both surfaces for the additional film such as the electrode film sticking to the oscillator bar, the frequency control film and others. CONSTITUTION:Film thickness ta of exciting electrode film 6a at the side where frequency control film 7 sticks is set smaller previously than thickness tb of electrode film 6b at the side with no adhesion of film 7 by the amount equivalent to the adhesion amount of the frequency control film. Otherwise electrode film 10 is added previously on film 6b of the side with no adhesion of the film 7 among the electrode films formed under conditions of ta/tb 1. Also the different materials (in terms of specific gravity) are used on the upper and rear surfaces each for films 6a and 6b. In such way, the balance is kept for the mass of the additional film on both surface of bar 5.
JP14949578A 1978-12-01 1978-12-01 Thickness shear oscillator Pending JPS5575324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14949578A JPS5575324A (en) 1978-12-01 1978-12-01 Thickness shear oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14949578A JPS5575324A (en) 1978-12-01 1978-12-01 Thickness shear oscillator

Publications (1)

Publication Number Publication Date
JPS5575324A true JPS5575324A (en) 1980-06-06

Family

ID=15476389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14949578A Pending JPS5575324A (en) 1978-12-01 1978-12-01 Thickness shear oscillator

Country Status (1)

Country Link
JP (1) JPS5575324A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037925U (en) * 1983-08-23 1985-03-15 ティーディーケイ株式会社 electronic components
JPS60101825U (en) * 1983-12-19 1985-07-11 三洋電機株式会社 Thickness shear oscillator
WO1999037023A1 (en) * 1998-01-16 1999-07-22 Mitsubishi Denki Kabushiki Kaisha Thin film pietoelectric element
JP2008113420A (en) * 2006-10-05 2008-05-15 Nippon Dempa Kogyo Co Ltd Crystal oscillator
JPWO2007088696A1 (en) * 2006-01-31 2009-06-25 株式会社村田製作所 Piezoelectric vibration device
WO2012060235A1 (en) * 2010-11-01 2012-05-10 株式会社村田製作所 Piezoelectric vibration device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037925U (en) * 1983-08-23 1985-03-15 ティーディーケイ株式会社 electronic components
JPS60101825U (en) * 1983-12-19 1985-07-11 三洋電機株式会社 Thickness shear oscillator
JPH032991Y2 (en) * 1983-12-19 1991-01-25
WO1999037023A1 (en) * 1998-01-16 1999-07-22 Mitsubishi Denki Kabushiki Kaisha Thin film pietoelectric element
US6396200B2 (en) 1998-01-16 2002-05-28 Mitsubishi Denki Kabushiki Kaisha Thin film piezoelectric element
JPWO2007088696A1 (en) * 2006-01-31 2009-06-25 株式会社村田製作所 Piezoelectric vibration device
JP4930381B2 (en) * 2006-01-31 2012-05-16 株式会社村田製作所 Piezoelectric vibration device
JP2008113420A (en) * 2006-10-05 2008-05-15 Nippon Dempa Kogyo Co Ltd Crystal oscillator
WO2012060235A1 (en) * 2010-11-01 2012-05-10 株式会社村田製作所 Piezoelectric vibration device
JP5605433B2 (en) * 2010-11-01 2014-10-15 株式会社村田製作所 Piezoelectric vibration device

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