JP6101521B2 - Piezoelectric device and method of using the same - Google Patents

Description

  The present invention relates to a piezoelectric device having a piezoelectric element including a rectangular parallelepiped piezoelectric body and a pair of electrodes, and using a displacement in the length direction of the piezoelectric body, and a method of using the piezoelectric device.

  In general, a piezoelectric element has a single layer structure, a bimorph structure, a unimorph structure, a stacked structure, or the like. Various combinations of usage forms are possible. For example, the displacement in the stacking direction of the plate-shaped laminate is used, or the displacement in the length direction (not including the stacking direction) of the single layer or the laminate is used. The driving power source may be direct current, alternating current, positive and negative polarity, or one side polarity. Also, there are various electrical wiring methods for piezoelectric elements depending on which part is connected to the wiring (see Patent Documents 1 and 2).

JP 2009-7236 A JP 2007-200742 A

  When a piezoelectric element is used by being connected to a substrate with a conductive material containing metal, the phenomenon that the metal component of the conductive material moves on or in a non-metallic medium in a high humidity environment may result in poor reliability. there were. That is, it is a migration (ion migration) phenomenon.

  In order to suppress the occurrence of the migration phenomenon, basically, the distance between the pair of electrodes should be increased, or the conductive material should be isolated from the high humidity environment. There is a problem that becomes complicated.

  The present invention has been made in consideration of such problems, and even if the piezoelectric element is placed in a high humidity environment, the occurrence of ion migration from the conductive material can be suppressed without complicating the structure. An object of the present invention is to provide a piezoelectric device and a method of using the same.

[1] A piezoelectric device according to a first aspect of the present invention is a piezoelectric device that includes a piezoelectric element including a rectangular parallelepiped piezoelectric body and a pair of electrodes, and uses displacement in the length direction of the piezoelectric body. And one electrode of the pair of electrodes has a first surface electrode provided in contact with one surface of the piezoelectric body, and the other electrode of the pair of electrodes is the piezoelectric element. A second surface electrode provided in contact with the one surface of the body, wherein one end of the first surface electrode and one end of the second surface electrode face each other with a space The length of the first surface electrode along the length direction of the piezoelectric body is shorter than that of the second surface electrode, and the other end of the first surface electrode has a first conductive material containing metal. The second end of the second surface electrode is mounted on the first terminal of the substrate via the second conductive material containing metal. Mounted on the second terminal of the substrate is, the first terminal is a high potential of the DC power supply is applied, the second terminal is characterized in that the low potential of the DC power is applied.

  As a result, even when the piezoelectric element is in a high humidity environment, it is possible to suppress the occurrence of the ion migration phenomenon caused by the first conductive material without complicating the structure, and the influence on the reliability of the piezoelectric device can be reduced. The influence on the performance of the apparatus using the body apparatus can be reduced.

  In addition, the distance between the electrodes where the first conductive material and the second conductive material are not in contact can be reduced. As a result, the facing area of the pair of electrodes can be increased, and a region operable as a piezoelectric body can be increased. This brings about an increase in driving force, an increase in displacement (dynamic range), and the like, and it becomes possible to improve performance.

[ 2 ] In the first aspect of the present invention, the substrate is a constituent member of a suspension of a magnetic head, and there is a space between the portion having the first terminal and the portion having the second terminal. Good. In this case, minute positioning of the magnetic head can be realized by utilizing the displacement of the piezoelectric body in the length direction.

[ 3 ] In the first aspect of the present invention, the thickness of the piezoelectric member sandwiched between the portion of the one electrode paired with the second surface electrode and the second surface electrode is ta, When the interval is Da,
Da> ta
It may be.

[ 4 ] In this case, the thickness ta of the piezoelectric body may be 5 μm or more, and the space interval Da may be 30 μm or more.

[ 5 ] In the first invention, the one electrode and the other electrode are selected from Pt (platinum), Pd (palladium), Pd / Ag (silver), Ni (nickel), and Cu (copper). It may be composed of an electrode material whose main component is one or more.

[ 6 ] In the first aspect of the present invention, the first conductive material and the second conductive material may include one or more selected from silver, copper, tin, lead, nickel, gold, and solder as a metal component. . Especially, it is suitable when it contains silver.
[7] In the first aspect of the present invention, the other electrode may be composed of only the second surface electrode.

[8] In the first aspect of the present invention, the one electrode includes the first surface electrode, and a first side electrode connected to the first surface electrode and formed on a side surface of the piezoelectric body, The other electrode includes the second surface electrode and a second side electrode connected to the second surface electrode and formed on a side surface of the piezoelectric body. The first side electrode and the second side electrode A surface electrode connected to any one of the electrodes and formed on the surface of the piezoelectric body, the spacing of the space between the first surface electrode and the second surface electrode being Da, and an end of the surface electrode; When the distance between the end portions of the first side electrode or the end portion of the surface electrode and the second side electrode is La,
Da> La
It may be.

[9] In the first aspect of the present invention, the one electrode includes the first surface electrode, a first side electrode connected to the first surface electrode and formed on a side surface of the piezoelectric body, and the first electrode. A third surface electrode connected to a side electrode and formed on the other surface of the piezoelectric body, wherein the other electrode is connected to the second surface electrode and the second surface electrode; A second side electrode formed on a side surface of the body, and a fourth surface electrode connected to the second side electrode and formed on the other surface of the piezoelectric body, the first surface electrode and the first surface electrode When the distance between the two surface electrodes is Da, and the distance between the end of the third surface electrode and the end of the fourth surface electrode is La,
Da> La
It may be.

[10] In [8] or [9], the one electrode includes one inner layer electrode connected to the first side electrode and formed in the piezoelectric body, and the second side electrode and the inner layer When the distance between the ends of the electrodes is Lb,
Da> Lb
It may be.

[11] In [8] or [9], the one electrode includes one or more first inner layer electrodes connected to the first side electrode and formed in the piezoelectric body, and the other electrode. Has one or more second inner layer electrodes connected to the second side electrode and formed in the piezoelectric body, and the distance between the second side electrode and the end of the first inner layer electrode is Lb1, When the distance between the first side electrode and the end of the second inner layer electrode is Lb2,
Da> Lb1
Da> Lb2
It may be.

[12] A method of using the piezoelectric device according to the second aspect of the present invention includes a piezoelectric element including a rectangular parallelepiped piezoelectric body and a pair of electrodes, and uses the displacement in the length direction of the piezoelectric body. The piezoelectric device has a first surface electrode provided in contact with one surface of the piezoelectric body, and the pair of electrodes includes the first surface electrode. The other electrode has a second surface electrode provided in contact with the one surface of the piezoelectric body, the one end of the first surface electrode, and the second surface electrode One end is opposed to each other with a space, and the length of the first surface electrode along the length of the piezoelectric body is shorter than that of the second surface electrode, and the piezoelectric device is mounted on the substrate. When mounted on the first terminal and the second terminal, the first terminal to which the high potential of the DC power supply is applied The other end of the second surface electrode is mounted on the second terminal to which the low potential of the DC power supply is applied by mounting the other end of the first surface electrode through a first conductive material containing metal. The part is mounted via a second conductive material containing a metal.

As described above, according to the piezoelectric device and the method of using the same according to the present invention, the occurrence of ion migration from the conductive material is suppressed without complicating the structure of the piezoelectric element even in a high humidity environment. Thus, the influence on the reliability of the piezoelectric device and the influence on the performance of the equipment using the piezoelectric device can be reduced. Furthermore, the effect of the present invention is further enhanced in a high temperature and high humidity environment in addition to a high humidity environment.
In addition, the distance between the electrodes where the first conductive material and the second conductive material are not in contact can be reduced. As a result, the facing area of the pair of electrodes can be increased, and a region operable as a piezoelectric body can be increased. This brings about an increase in driving force, an increase in displacement (dynamic range), and the like, and it becomes possible to improve performance.

FIG. 1A is a longitudinal sectional view showing the configuration of the piezoelectric device (first piezoelectric device) according to the first embodiment, and FIG. 1B is a plan view showing the first piezoelectric device as viewed from above. 2A is a plan view showing the piezoelectric element as seen from above, FIG. 2B is a sectional view on IIB-IIB in FIG. 2A, and FIG. 2C is a side view showing the piezoelectric element as seen from the right side. It is a longitudinal cross-sectional view which shows the structure of the piezoelectric material apparatus which concerns on a 1st comparative example. FIG. 4A is a longitudinal sectional view showing the configuration of the piezoelectric device (second piezoelectric device) according to the second embodiment, and FIG. 4B is a longitudinal sectional view showing the configuration of the piezoelectric device according to the second comparative example. FIG. FIG. 5A is a longitudinal sectional view showing a configuration of a piezoelectric device (third piezoelectric device) according to a third embodiment, and FIG. 5B is a longitudinal section showing a configuration of a piezoelectric device according to a third comparative example. FIG. FIG. 6A is a longitudinal sectional view showing a configuration of a piezoelectric device (fourth piezoelectric device) according to a fourth embodiment, and FIG. 6B is a longitudinal sectional view showing a configuration of a piezoelectric device according to a fourth comparative example. FIG. FIG. 7A is a longitudinal sectional view showing the configuration of the piezoelectric device (fifth piezoelectric device) according to the fifth embodiment, and FIG. 7B shows the piezoelectric device (sixth piezoelectric material) according to the sixth embodiment. It is a longitudinal cross-sectional view which shows the structure of an apparatus. It is a longitudinal cross-sectional view which shows the structure of the piezoelectric material apparatus (7th piezoelectric material apparatus) based on 7th Embodiment.

  Embodiments of a piezoelectric device and a method for using the same according to the present invention will be described below with reference to FIGS.

  First, as shown in FIGS. 1A and 1B, a piezoelectric device according to the first embodiment (hereinafter referred to as a first piezoelectric device 10A) includes one piezoelectric body 12 having a rectangular parallelepiped shape and a pair of electrodes 14A. And 14B are mounted on the substrate 18. The pair of electrodes 14 </ b> A and 14 </ b> B is made of, for example, an electrode material mainly containing Pt (platinum). In addition, as electrode material, you may be comprised with the electrode material which has as a main component 1 or more selected from Pd, Pd / Ag, Ni, and Cu other than Pt.

  The substrate 18 is, for example, a constituent member of a suspension of a magnetic head, and includes a first portion 26A in which a first terminal 20A and a first wiring 24A connected to a DC power source 22 are formed on one surface (for example, an upper surface), And a second portion 26B having a second terminal 20B and a second wiring 24B connected to the DC power source 22 formed thereon. A space 28 exists between the first portion 26A and the second portion 26B, and the piezoelectric element 16 is mounted across the first portion 26A and the second portion 26B. Then, when the piezoelectric element 16 is displaced in the lateral direction (length direction), the first portion 26 </ b> A and the second portion 26 </ b> B are also displaced in the approaching direction or the separating direction according to the displacement of the piezoelectric element 16. Thereby, minute positioning of the magnetic head can be realized using the displacement of the piezoelectric body 12 in the length direction.

  In the above-mentioned example, the example in which the present embodiment is applied to the constituent member of the suspension of the magnetic head has been described. However, in addition to the magnetic head, the present embodiment can be applied when using a piezoelectric element such as a camera, a buzzer, or a fuel injector. In addition, it can be used for ultrasonic motors, vibration expressing bodies, and the like.

  The piezoelectric body 12 is configured by laminating three piezoelectric layers (first piezoelectric layer 12A to third piezoelectric layer 12C). With respect to the polarization direction P, the first piezoelectric layer 12A is directed downward in FIG. 1, the second piezoelectric layer 12B is directed upward, and the third piezoelectric layer 12C is directed downward. Of course, there is no problem even if the polarization direction is opposite to the above.

  Of the pair of electrodes 14A and 14B of the piezoelectric element 16, one electrode 14A has a first surface electrode 30A provided in contact with one surface 12a (for example, the lower surface) of the piezoelectric body 12, and the other electrode 14B. Has a second surface electrode 30 </ b> B provided in contact with one surface 12 a of the piezoelectric body 12.

  One end 30Aa of the first surface electrode 30A and one end 30Ba of the second surface electrode 30B are opposed to each other with a space 32, and are along the length direction of the piezoelectric body 12 of the first surface electrode 30A. The length L1 is shorter than the length L2 of the second surface electrode 30B.

  The other end 30Ab of the first surface electrode 30A is mounted on the first terminal 20A of the substrate 18 via the first conductive material 34A containing metal, and the other end 30Bb of the second surface electrode 30B is made of metal. It is mounted on the second terminal 20B of the substrate via the second conductive material 34B including it. The first conductive material 34A and the second conductive material 34B include one or more selected from, for example, silver, copper, tin, lead, nickel, gold, and solder as a metal component.

  In addition to the first surface electrode 30A described above, one electrode 14A includes a first side electrode 36A, a third surface electrode 30C, and a first inner layer electrode 38A, and the other electrode 14B includes the second electrode 14A described above. In addition to the surface electrode 30B, a second side electrode 36B, a fourth surface electrode 30D, and a second inner layer electrode 38B are provided.

  The first side surface electrode 36 </ b> A is connected to the first surface electrode 30 </ b> A and is formed on one side surface 12 c of the piezoelectric body 12. The third surface electrode 30C is connected to the first side electrode 36A, and is formed on the other surface 12b (for example, the upper surface) of the piezoelectric body 12. The first inner layer electrode 38A is connected to the first side surface electrode 36A and is formed at the boundary between the first piezoelectric layer 12A and the second piezoelectric layer 12B.

  The second side electrode 36B is connected to the second surface electrode 30B and is formed on the other side surface 12d of the piezoelectric body 12. The fourth surface electrode 30 </ b> D is connected to the second side surface electrode 36 </ b> B and is formed on the other surface 12 b of the piezoelectric body 12. The second inner layer electrode 38B is connected to the second side electrode 36B and is formed at the boundary between the second piezoelectric layer 12B and the third piezoelectric layer 12C.

Here, the thickness of the first piezoelectric layer 12A is t1, the thickness of the second piezoelectric layer 12B is t2, the thickness of the third piezoelectric layer 12C is t3, one end 30Aa of the first surface electrode 30A and the second When the interval of the space 32 between one end 30Ba of the surface electrode 30B is Da,
Da> t1
Da> t2
Da> t3
It is.

  In particular, the thicknesses t1, t2, and t3 are each 5 μm or more, and the space Da is the distance at which the electric field between the first surface electrode 30A and the second surface electrode 30B does not increase, more specifically, the first conductive material. The distance is set such that the metal component of 34A becomes an electric field that does not move toward the second surface electrode 30B, that is, the distance at which the ion migration phenomenon does not occur. Specifically, it is 30 μm or more.

The distance between the end of the third surface electrode 30C and the end of the fourth surface electrode 30D is La, the distance between the first inner layer electrode 38A and the second side electrode 36B is Lb1, and the second inner layer electrode 38B and the first When the distance between the side electrodes 36A is Lb2,
Da> La
Da> Lb1
Da> Lb2
It is.

  The directions of the piezoelectric element 16 and the piezoelectric body 12 are defined. As shown in FIGS. 2A to 2C, the piezoelectric element 16 (piezoelectric body 12) has a rectangular parallelepiped shape as a whole. Therefore, when the piezoelectric element 16 and the piezoelectric body 12 are viewed from the top, they have a rectangular shape. The piezoelectric body 12 is formed by laminating a first piezoelectric layer 12A to a third piezoelectric layer 12C. Accordingly, the direction in which the first piezoelectric layer 12A to the third piezoelectric layer 12C are stacked is the stacking direction of the piezoelectric body 12, and the direction along the long side when the piezoelectric body 12 is viewed from the top surface is the piezoelectric body. It is defined as 12 length directions.

  Since the thickness of the piezoelectric layer is usually small, in FIG. 2B, FIG. 2C, etc., the magnification in the stacking direction is shown more emphasized than the other two directions. 2A, the long side is 0.2 to 100 mm and the short side is 0.1 to 50 mm. In FIG. 2B, the thickness of one piezoelectric layer is 5 to 500 μm.

  As shown in FIGS. 1A and 1B, in the first piezoelectric device 10A, the high potential (for example, + potential) of the DC power supply 22 is applied to the first terminal 20A, and the DC power supply 22 is applied to the second terminal 20B. A low potential (eg -potential) is applied. The potential may be a ground potential. Thereby, a voltage is applied between the pair of electrodes 14A and 14B in the same direction as the polarization direction of the piezoelectric body 12. That is, the voltage E is applied to the first piezoelectric layer 12A to the third piezoelectric layer 12C in the same direction as the polarization direction P. As a result, due to the lateral effect of the electric field induced strain in the piezoelectric body 12, the piezoelectric body 12 undergoes a displacement that contracts in the length direction, and the first portion 26A and the second portion 26B of the substrate 18 are displaced in the direction in which they approach each other. To do. Therefore, by changing the voltage between the first terminal 20A and the second terminal 20B, the separation distance between the first portion 26A and the second portion 26B can be appropriately changed.

  The first terminal 20A may be a ground potential, the second terminal 20B may be a negative potential, and the first terminal 20A side may be set to a higher potential than the second terminal 20B side. In the above description, the electric field is applied to the electrode pair in the same direction as the polarization direction. However, the present embodiment can be applied to the case where the polarization direction is set to be opposite. When the polarization direction and the direction of the electric field applied to the electrode pair are opposite, the piezoelectric body 12 is displaced in the length direction, and the first portion 26A and the second portion 26B of the substrate 18 are separated from each other. Will be displaced.

  Next, the operation of the first piezoelectric device 10A will be described.

  In general, the ion migration phenomenon due to a metal component such as silver is a phenomenon in which metal ions (cations) move toward the cathode. That is, this is a phenomenon in which a metal component moves from a conductive material attached to a terminal to which a high potential is applied toward a low potential portion (a portion where an electric field sufficient to cause an ion migration phenomenon occurs).

  However, in the first piezoelectric device 10A, first, the distance between the first surface electrode 30A and the second surface electrode 30B is set to a distance at which the ion migration phenomenon does not occur. Therefore, the ion migration phenomenon does not occur between the first conductive material 34A in contact with the first surface electrode 30A and the second surface electrode 30B. Next, since the length of the first surface electrode 30A that is in direct contact with the first conductive material 34A to which a high potential is applied is short, the electrode facing through the piezoelectric body 12 (first piezoelectric layer 12A) is This is the first inner layer electrode 38A constituting the same one electrode 14A. That is, since the first surface electrode 30A and the first inner layer electrode 38A are both at the same potential, no electric field is generated. Therefore, the ion migration phenomenon does not occur between the first conductive material 34A in contact with the first surface electrode 30A and the first inner layer electrode 38A. In addition, a high electric field is applied between the end (left end) of the first inner layer electrode 38A and the end (right end) of the second conductive material 34B in contact with the second surface electrode 30B, but the direction of the electric field depends on the second conductivity. Since the cation of the metal component in the material 34B does not move, no ion migration phenomenon occurs between the second conductive material 34B in contact with the first inner layer electrode 38A and the second surface electrode 30B.

  As described above, in the first piezoelectric device 10A, the occurrence of the ion migration phenomenon caused by the first conductive material 34A can be suppressed without complicating the structure of the piezoelectric element 16 even in a high humidity environment. The influence on the reliability of the first piezoelectric device 10A and the influence on the performance of the equipment using the first piezoelectric device 10A can be reduced.

  Moreover, the first side electrode 36A, the second side electrode 36B, the third surface electrode 30C, the fourth surface electrode 30D, the first inner layer electrode 38A, and the second inner layer electrode 38B are electrodes mainly composed of Pt. Accordingly, the distance La between the third surface electrode 30C and the fourth surface electrode 30D, the distance Lb1 between the first inner layer electrode 38A and the second side electrode 36B, and the distance Lb2 between the second inner layer electrode 38B and the first side electrode 36A. Can be shortened to about 5 μm, for example. As a result, the facing area of the pair of electrodes 14A and 14B can be increased, and a region operable as the piezoelectric body 12 can be increased. This brings about an increase in driving force (a force for moving the first portion 26A and the second portion 26B), an increase in the amount of displacement (dynamic range), and the like, and an improvement in performance can be achieved.

  Incidentally, as shown in FIG. 3, in the piezoelectric device 100A according to the first comparative example in which the low potential is applied to the first terminal 20A and the high potential is applied to the second terminal 20B, the second potential to which the high potential is applied. The second surface electrode 30B is mounted on the terminal 20B via the second conductive material 34B. In general, since the thickness of the first piezoelectric layer 12A is narrower than the interval Da of the space 32, the first piezoelectric layer 12A has a second gap between the second conductive material 34B connected to the second surface electrode 30B at the same potential and the first inner layer electrode 38A. A high electric field is likely to be generated so that an ion migration phenomenon of the metal component in the two conductive material 34B occurs.

  That is, the direction of the high electric field generated between the end portion (left end) of the first inner layer electrode 38A and the end portion (right end) of the second conductive material 34B in contact with the second surface electrode 30B depends on the direction in the second conductive material 34B. Since the cation of the metal component moves, the ion migration phenomenon is likely to occur between the first inner layer electrode 38A and the second conductive material 34B in contact with the second surface electrode 30B.

  Next, various modified examples will be described together with comparative examples.

  The piezoelectric device according to the second embodiment (hereinafter referred to as a second piezoelectric device 10B) has substantially the same configuration as the first piezoelectric device 10A described above, as shown in FIG. 4A. Is different. That is, the piezoelectric body 12 has a four-layer structure and has a fourth piezoelectric layer 12D. It has a third inner layer electrode 38C connected to the first side electrode 36A and formed at the boundary between the third piezoelectric layer 12C and the fourth piezoelectric layer 12D. The length of the third surface electrode 30C formed on the fourth piezoelectric layer 12D is shorter than the fourth surface electrode 30D.

  As shown in FIG. 5A, the piezoelectric device according to the third embodiment (hereinafter referred to as a third piezoelectric device 10C) has substantially the same configuration as that of the first piezoelectric device 10A described above. The body 12 has a two-layer structure, and is different in that the second inner layer electrode 38B does not exist.

  In the second piezoelectric device 10B and the third piezoelectric device 10C, as in the first piezoelectric device 10A, the first surface is provided between the first conductive material 34A in contact with the first surface electrode 30A and the second surface electrode 30B. The ion migration phenomenon does not occur between the first conductive material 34A in contact with the electrode 30A and the first inner layer electrode 38A and between the second conductive material 34B in contact with the first inner layer electrode 38A and the second surface electrode 30B.

  Therefore, the second piezoelectric device 10B and the third piezoelectric device 10C generate the ion migration phenomenon caused by the first conductive material 34A without complicating the structure of the piezoelectric element 16 even in a high humidity environment. This can reduce the influence on the reliability of the second piezoelectric device 10B and the third piezoelectric device 10C and the influence on the performance of the equipment using the second piezoelectric device 10B and the third piezoelectric device 10C. be able to. In addition, the performance as a piezoelectric device can be improved.

  4B and 5B, the piezoelectric devices 100B and 100C according to the second comparative example and the third comparative example in which a low potential is applied to the first terminal 20A and a high potential is applied to the second terminal 20B. Then, like the piezoelectric device 100A according to the first comparative example, the length L2 of the second surface electrode 30B is longer than the first surface electrode 30A. Therefore, the electrode facing through the first piezoelectric layer 12A is the first inner layer electrode 38A to which a low potential is applied. Therefore, the second conductive material 34B connected to the second surface electrode 30B at the same potential is connected to the second conductive material 34B. A high electric field is likely to be generated between the first inner layer electrode 38A and the ion migration phenomenon of the metal component in the second conductive material 34B.

  Next, as shown in FIG. 6A, the piezoelectric device according to the fourth embodiment (hereinafter referred to as a fourth piezoelectric device 10D) has substantially the same configuration as the first piezoelectric device 10A described above. However, the difference is that the piezoelectric body 12 has a single-layer structure, and the piezoelectric body 12 includes only the first piezoelectric layer 12A.

  That is, one electrode 14A in the pair of electrodes 14A and 14B includes a first surface electrode 30A, a first side electrode 36A, and a third surface electrode 30C, and the other electrode 14B includes the second surface electrode 30B and the second surface electrode 30B. A side electrode 36B is provided. The second side electrode 36B may be omitted, and the other electrode 14B may be configured by only the second surface electrode 30B.

  In this case, similarly to the first piezoelectric device 10A, since the length L1 of the first surface electrode 30A that is in direct contact with the first conductive material 34A is short, the first surface electrode 30A and the first piezoelectric layer 12A are interposed. The third surface electrodes 30C facing each other have the same potential, and no ion migration phenomenon occurs between the first conductive material 34A in contact with the first surface electrode 30A and the third surface electrode 30C. Further, the ion migration phenomenon does not occur between the first conductive material 34A in contact with the first surface electrode 30A and the second surface electrode 30B and between the first inner layer electrode 38A and the second conductive material 34B in contact with the second surface electrode 30B. .

  Accordingly, the fourth piezoelectric device 10D, like the first piezoelectric device 10A, does not complicate the structure of the piezoelectric element 16 even in a high humidity environment, and the ion migration phenomenon caused by the first conductive material 34A. Can be suppressed, and the influence on the reliability of the fourth piezoelectric device 10D and the influence on the performance of the equipment using the fourth piezoelectric device 10D can be reduced.

  In particular, in the fourth piezoelectric device 10D, since the fourth surface electrode 30D is not formed on the other surface 12b (upper surface) of the piezoelectric body 12, the end portion of the third surface electrode 30C is brought close to the second side electrode 36B. Therefore, the region operable as the piezoelectric body 12 can be made larger, and the performance can be further improved.

  Incidentally, as shown in FIG. 6B, in the piezoelectric device 100D according to the fourth comparative example in which the low potential is applied to the first terminal 20A and the high potential is applied to the second terminal 20B, the second potential to which the high potential is applied. The length L2 of the surface electrode 30B is longer than the first surface electrode 30A. For this reason, since the electrodes facing each other through the first piezoelectric layer 12A are the third surface electrode 30C to which a low potential is applied, the second conductive material 34B in contact with the second surface electrode 30B and the third surface electrode 30C. In such a case, a high electric field enough to cause an ion migration phenomenon easily occurs.

  For this reason, it is conceivable to increase the distance La between the second side electrode 36B and the third surface electrode 30C, but the facing area between the pair of electrodes 14A and 14B is reduced, and the region operable as the piezoelectric body 12 is reduced. . This brings about a decrease in driving force, a decrease in displacement, and the like, and the performance as a piezoelectric device is lowered.

  Next, the piezoelectric devices according to the fifth, sixth and seventh embodiments (hereinafter referred to as a fifth piezoelectric device 10E, a sixth piezoelectric device 10F and a seventh piezoelectric device 10G, respectively) As shown in FIGS. 7A, 7B, and 8, the first piezoelectric device 10A, the second piezoelectric device 10B, and the third piezoelectric device 10C have substantially the same configuration, but the fourth piezoelectric device 10D has the same configuration. The structure follows the structure. In other words, the fourth surface electrode 30D does not exist in the fifth piezoelectric device 10E, and the fourth surface electrode 30D does not exist in the sixth piezoelectric device 10F and the seventh piezoelectric device 10G.

  The fifth piezoelectric device 10E, the sixth piezoelectric device 10F, and the seventh piezoelectric device 10G have the same effects as the first piezoelectric device 10A, the second piezoelectric device 10B, and the third piezoelectric device 10C, respectively. The same effects as those of the fourth piezoelectric device 10D are obtained. That is, in the fifth piezoelectric device 10E, the end of the third surface electrode 30C can be brought close to the second side electrode 36B, and in the sixth piezoelectric device 10F and the seventh piezoelectric device 10G, the fourth surface electrode 30D. Since the end of each can be brought close to the first side surface electrode 36A, a region operable as a piezoelectric body can be made larger, and the performance can be further improved.

  Of course, in the fifth piezoelectric device 10E, since the fourth surface electrode 30D does not exist, the second side electrode 36B only needs to be connected to the second inner layer electrode 38B, and the other surface 12b of the piezoelectric body 12 is sufficient. It is not necessary to reach Further, in the sixth piezoelectric device 10F, since the third surface electrode 30C does not exist, the first side surface electrode 36A only needs to be connected to the third inner layer electrode 38C, and the other surface 12b of the piezoelectric material 12 is present. It is not necessary to reach Similarly, in the seventh piezoelectric device 10G, since the third surface electrode 30C does not exist, the first side electrode 36A only needs to be connected to the first inner layer electrode 38A. It is not necessary to reach 12b.

  In the present embodiment, the piezoelectric material is made of a Mn-added PZT system so that the crystal particle diameter of the piezoelectric body 12 can be controlled to be small in order to ensure the strength or the driving voltage opposite to the polarization direction is advantageous. It is possible to design known materials such as

  Although not shown in the figure, a coating layer made of an organic material or ceramic material is used to prevent dust generation and moisture resistance on the entire surface excluding the terminal portion of the piezoelectric element, the side main part, or a specific main part. It can also be provided for prevention and prevention of dirt. The organic material is preferably polyimide, epoxy, acrylic, or the like, and the ceramic material is preferably piezoelectric, glass, or the like.

  The piezoelectric device and the method of using the same according to the present invention are not limited to the above-described embodiments, and it goes without saying that various configurations can be adopted without departing from the gist of the present invention.

10A to 10G... 1st piezoelectric device to 7th piezoelectric device 12... Piezoelectric bodies 12A to 12D... 1st piezoelectric material layer to 4th piezoelectric material layer 12a... One surface (lower surface) 12b.
14A: One electrode (a pair of electrodes) 14B: The other electrode (a pair of electrodes)
DESCRIPTION OF SYMBOLS 16 ... Piezoelectric element 18 ... Board | substrate 20A ... 1st terminal 20B ... 2nd terminal 22 ... DC power supply 26A ... 1st part 26B ... 2nd part 28 ... Space 30A ... 1st surface electrode 30Aa ... One end part 30Ab ... The other End 30B ... second surface electrode 30Ba ... one end 30Bb ... the other end 32 ... space 34A ... first conductive material 34B ... second conductive materials 38A-38C ... first inner layer electrode-3rd inner layer electrode L1 ... Length of first surface electrode L2: Length of second surface electrode

Claims (12)

A piezoelectric device having a piezoelectric element including a rectangular parallelepiped piezoelectric body and a pair of electrodes, and using displacement in the length direction of the piezoelectric body,
Of the pair of electrodes, one electrode has a first surface electrode provided in contact with one surface of the piezoelectric body,
Of the pair of electrodes, the other electrode has a second surface electrode provided in contact with the one surface of the piezoelectric body,
One end of the first surface electrode and one end of the second surface electrode are opposed to each other with a space between them,
The length of the first surface electrode along the length direction of the piezoelectric body is shorter than the second surface electrode,
The other end of the first surface electrode is mounted on the first terminal of the substrate via a first conductive material containing metal,
The other end of the second surface electrode is mounted on the second terminal of the substrate via a second conductive material containing metal,
The piezoelectric device according to claim 1, wherein a high potential of a DC power source is applied to the first terminal, and a low potential of the DC power source is applied to the second terminal. In the piezoelectric device according to claim 1 Symbol placement,
The piezoelectric device according to claim 1, wherein the substrate is a constituent member of a suspension of a magnetic head, and a space exists between a portion having the first terminal and a portion having the second terminal. The piezoelectric device according to claim 1 or 2 ,
When the thickness of the piezoelectric body sandwiched between the portion of the one electrode paired with the second surface electrode and the second surface electrode is ta and the space interval is Da,
Da> ta
A piezoelectric device, characterized in that The piezoelectric device according to claim 3 , wherein
A thickness ta of the piezoelectric body is 5 μm or more;
The piezoelectric device, wherein the space Da is 30 μm or more. The piezoelectric device according to any one of claims 1 to 4 ,
The one electrode and the other electrode are electrodes mainly composed of one or more selected from Pt (platinum), Pd (palladium), Pd / Ag (silver), Ni (nickel), and Cu (copper). A piezoelectric device comprising a material. The piezoelectric device according to any one of claims 1 to 5 ,
The first conductive material and the second conductive material include at least one selected from silver, copper, tin, lead, nickel, gold, and solder as a metal component. The piezoelectric device according to any one of claims 1 to 6 ,
The other electrode is composed only of the second surface electrode. The piezoelectric device according to any one of claims 1 to 6 ,
The one electrode has the first surface electrode and a first side electrode connected to the first surface electrode and formed on a side surface of the piezoelectric body,
The other electrode includes the second surface electrode, and a second side electrode connected to the second surface electrode and formed on a side surface of the piezoelectric body,
A surface electrode connected to one of the first side electrode and the second side electrode and formed on the surface of the piezoelectric body;
The spacing of the space between the first surface electrode and the second surface electrode is Da, between the end of the surface electrode and the end of the first side electrode, or between the end of the surface electrode and the second side electrode. When the distance is La,
Da> La
A piezoelectric device, characterized in that The piezoelectric device according to any one of claims 1 to 6 ,
The one electrode is connected to the first surface electrode, the first surface electrode connected to the first surface electrode and formed on a side surface of the piezoelectric body, and connected to the first side electrode. A third surface electrode formed on the other surface,
The other electrode is connected to the second surface electrode, to the second surface electrode, to a second side electrode formed on a side surface of the piezoelectric body, to the second side electrode, and to the piezoelectric body A fourth surface electrode formed on the other surface,
When the space between the first surface electrode and the second surface electrode is Da, and the distance between the end of the third surface electrode and the end of the fourth surface electrode is La,
Da> La
A piezoelectric device, characterized in that The piezoelectric device according to claim 8 or 9,
The one electrode has one inner layer electrode connected to the first side electrode and formed in the piezoelectric body,
When the distance between the end of the second side electrode and the inner layer electrode is Lb,
Da> Lb
A piezoelectric device, characterized in that The piezoelectric device according to claim 8 or 9,
The one electrode has one or more first inner layer electrodes connected to the first side electrode and formed in the piezoelectric body,
The other electrode is connected to the second side electrode and has one or more second inner layer electrodes formed in the piezoelectric body,
When the distance between the second side electrode and the end of the first inner layer electrode is Lb1, and the distance between the first side electrode and the end of the second inner layer electrode is Lb2,
Da> Lb1
Da> Lb2
A piezoelectric device, characterized in that A method of using a piezoelectric device having a piezoelectric element including a rectangular parallelepiped piezoelectric body and a pair of electrodes, and utilizing displacement in the length direction of the piezoelectric body,
The piezoelectric device is
Of the pair of electrodes, one electrode has a first surface electrode provided in contact with one surface of the piezoelectric body,
Of the pair of electrodes, the other electrode has a second surface electrode provided in contact with the one surface of the piezoelectric body,
One end of the first surface electrode and one end of the second surface electrode are opposed to each other with a space between them,
The length of the first surface electrode along the length direction of the piezoelectric body is shorter than the second surface electrode,
When mounting the piezoelectric device on the first terminal and the second terminal of the substrate,
The other end of the first surface electrode is mounted on the first terminal to which a high potential of a DC power source is applied via a first conductive material containing metal,
Use of a piezoelectric device characterized in that the other end of the second surface electrode is mounted on the second terminal to which a low potential of the DC power supply is applied via a second conductive material containing metal. Method.

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