KR101601750B1 - Piezoelectric actuator, piezoelectric vibration apparatus and portable terminal - Google Patents

Abstract

A piezoelectric actuator, a piezoelectric vibrating device, and a portable terminal, which can be stably driven for a long period of time without peeling from a piezoelectric element even if the flexible wiring board bonded to the piezoelectric element is driven for a long period of time.
A piezoelectric actuator 1 according to the present embodiment includes a multilayer body 4 in which an internal electrode 2 and a piezoelectric layer 3 are laminated and a multilayer body 4 on one main surface of the multilayer body 4, A piezoelectric element 10 having an electrically connected surface electrode 5 and a piezoelectric element 10 partially bonded to one surface of the piezoelectric element 10 via a conductive adhesive agent 7 containing conductive particles and resin, And at least a part of the peripheral edge portion 601 of the bonding region of the flexible wiring board 6 and the piezoelectric element 10 is provided with conductive particles Are arranged more than one portion.

Description

TECHNICAL FIELD [0001] The present invention relates to a piezoelectric actuator, a piezoelectric vibrating device, and a portable terminal.

The present invention relates to a piezoelectric vibrating device, a piezoelectric actuator suitable for a portable terminal, a piezoelectric vibrating device, and a portable terminal.

8, a bimorph type piezoelectric element 10 formed by forming a surface electrode 104 on the surface of a laminated body 103 in which a plurality of internal electrodes 101 and piezoelectric layers 102 are stacked, The surface electrode 104 of the piezoelectric element 10 and the flexible substrate 105 are bonded to the main surface of the piezoelectric element 10 with the conductive bonding member 106. [ ) Of the wiring conductors 107 are electrically connected to each other (see Patent Document 2).

Further, a piezoelectric vibrating device in which a center portion or one end in the longitudinal direction of a bimorph type piezoelectric element is fixed to a diaphragm is known (see Patent Documents 3 and 4).

Japanese Patent Application Laid-Open No. 2002-10393 Japanese Unexamined Patent Application Publication No. 6-14396 International Publication No. 2005/004535 Japanese Patent Application Laid-Open No. 2006-238072

Here, solder or a conductive adhesive agent is used as the conductive bonding member 106 for bonding the flexible wiring board 105 and the piezoelectric element 10.

However, when the conductive joint member 106 is bonded using solder, since the rigidity of the solder is high, it is possible to prevent vibrations from the outside of the flexible wiring board 105 and resonance of the piezoelectric actuator 105 caused by resonance of the flexible wiring board 105 itself The vibration of the unusual flexible wiring board 105 which does not follow the vibration causes the stress concentration such as shearing or bending near the end face of the bonding portion of the piezoelectric element 10 and the flexible wiring board 105 to cause the flexible wiring board 105 May be peeled off from the piezoelectric element 10.

In addition, when the piezoelectric element 10 is merely bonded with a conductive adhesive, when the piezoelectric element 10 is driven at a high speed by flowing a large current, since the electrical and thermal resistance values of the conductive adhesive are high, The resin constituting the conductive adhesive is thermally deteriorated by heat generation of the adhesive itself and the bonding strength is lowered. As a result, the flexible wiring board 105 may peel off from the piezoelectric element 10.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a piezoelectric actuator, a piezoelectric vibration device, and a portable terminal which are stably driven for a long period of time without being peeled off from the piezoelectric element even if the flexible wiring board bonded to the piezoelectric element is driven for a long period .

A piezoelectric actuator according to the present invention is a piezoelectric actuator comprising: a laminated body in which an internal electrode and a piezoelectric layer are laminated; a piezoelectric element provided on one main surface of the laminated body and electrically connected to the internal electrode; And a flexible printed circuit board having a wiring conductor partially bonded to the flexible printed circuit board through a conductive adhesive containing resin and electrically connected to the surface electrode, wherein at least a part of a peripheral portion of the bonding region between the flexible wiring board and the piezoelectric element The conductive particles are arranged more than the other portions.

The piezoelectric vibrating apparatus of the present invention is characterized by having the piezoelectric actuator and a diaphragm bonded to the other main surface of the piezoelectric element.

Further, the portable terminal of the present invention has the piezoelectric actuator, the electronic circuit, the display, and the housing, and the other main surface of the piezoelectric actuator is bonded to the display or the housing.

(Effects of the Invention)

According to the present invention, it is possible to obtain a piezoelectric actuator in which the flexible wiring substrate is not peeled off from the piezoelectric element even when the piezoelectric element is driven for a long period of time without abnormal vibration.

1 is a schematic perspective view showing an embodiment of a piezoelectric actuator of the present invention.
Fig. 2 (a) is a schematic sectional view cut along the line AA shown in Fig. 1 (b), and Fig. 2 (b) is a partially enlarged plan view of the piezoelectric actuator shown in Fig.
Fig. 3 is a partially enlarged planar perspective view showing another example of Fig. 2 (b).
4 is a schematic perspective view schematically showing a piezoelectric vibrating apparatus according to an embodiment of the present invention.
5 is a schematic perspective view schematically showing a portable terminal according to an embodiment of the present invention.
6 is a schematic cross-sectional view taken along the line AA shown in Fig.
7 is a schematic sectional view taken along the line BB shown in Fig.
Fig. 8A is a schematic perspective view showing an embodiment of a conventional piezoelectric actuator, and Fig. 8B is a schematic cross-sectional view taken along the line AA shown in Fig.

An embodiment of the piezoelectric actuator of the present invention will be described in detail with reference to the drawings.

Fig. 1 is a schematic perspective view showing an embodiment of a piezoelectric actuator according to the present invention. Fig. 2 (a) is a schematic cross-sectional view cut along the line AA shown in Fig. 1 (b) Fig. 2 is a partially enlarged plan view of the piezoelectric actuator. Fig.

The piezoelectric actuator 1 of the present embodiment shown in Fig. 1 includes a multilayer body 4 in which an internal electrode 2 and a piezoelectric layer 3 are laminated, an internal electrode 2 on one main surface of the multilayer body 4, A piezoelectric element 10 having an electrically connected surface electrode 5 and a piezoelectric element 10 partially bonded to one surface of the piezoelectric element 10 via a conductive adhesive agent 7 containing conductive particles and resin, And at least a part of the peripheral edge portion 601 of the bonding region of the flexible wiring board 6 and the piezoelectric element 10 has a conductive particle different from that of the conductive particle. Are arranged more than one portion.

The laminate 4 constituting the piezoelectric element 10 is formed by stacking the internal electrode 2 and the piezoelectric layer 3 and includes a plurality of active portions 41 in which a plurality of internal electrodes 2 are overlapped in the stacking direction And has another inert portion 42, for example, formed in a long shape. In the case of a piezoelectric actuator to be mounted on a display or a housing of a portable terminal, the length of the multilayer body 4 is preferably 18 mm to 28 mm, more preferably 22 mm to 25 mm, for example. The width of the layered product 4 is preferably, for example, 1 mm to 6 mm, more preferably 3 mm to 4 mm. The thickness of the layered product 4 is preferably 0.2 mm to 1.0 mm, more preferably 0.4 mm to 0.8 mm, for example.

The internal electrode 2 constituting the multilayer body 4 is formed by co-firing ceramics forming the piezoelectric layer 3 and comprises a first pole 21 and a second pole 22. For example, the first pole 21 becomes the ground pole and the second pole 22 becomes the positive pole or the negative pole. The first pole 21 and the second pole 22 are arranged in the order of lamination so that the piezoelectric layer 3 is alternately stacked with the piezoelectric layer 3 and the piezoelectric layer 3 sandwiched therebetween The driving voltage is applied. As the forming material, for example, a conductor containing a silver or silver-palladium alloy as a main component having low reactivity with piezoelectric ceramics, or a conductor including copper, platinum or the like can be used. However, even if a ceramic component or a glass component is contained in these conductors good.

In the example shown in Fig. 1, the ends of the first pole 21 and the second pole 22 are alternately led to a pair of opposed sides of the laminate 4, respectively. In the case of a piezoelectric actuator mounted on a display or a housing of a portable terminal, the length of the internal electrode 2 is preferably 17 mm to 25 mm, more preferably 21 mm to 24 mm, for example. The width of the internal electrode 2 is preferably, for example, 1 mm to 5 mm, more preferably 2 mm to 4 mm. The thickness of the internal electrode 2 is preferably 0.1 to 5 mu m, for example.

The piezoelectric layer 3 constituting the layered product (4) is formed of a ceramics having a piezoelectric property will, for example, ceramics such as lead titanate zirconate (PbZrO ₃ -PbTiO ₃₎ made of a perovskite-type oxide, niobium acid lithium (LiNbO _3), lithium tantalate (LiTaO ₃₎ or the like can be used. Since the thickness of one layer of the piezoelectric layer 3 is driven at a low voltage, it is preferable to set the thickness to 0.01 to 0.1 mm, for example. In order to obtain a large bending vibration, it is preferable to have a piezoelectric d31 constant of 200 pm / V or more.

A surface electrode 5 electrically connected to the internal electrode 2 is formed on one main surface of the layered product 4. The surface electrode 5 in the embodiment shown in FIG. 1 is composed of a first surface electrode 51 having a large area, a second surface electrode 52 having a small area, and a third surface electrode 53. For example, the first surface electrode 51 is electrically connected to the internal electrode 2 serving as the first electrode 21, and the second surface electrode 52 is electrically connected to the second electrode 22 And the third surface electrode 53 is electrically connected to the internal electrode 2 serving as the second electrode 22 disposed on the other main surface side. In the case of a piezoelectric actuator mounted on a display or a housing of a portable terminal, the length of the first surface electrode 51 is preferably 17 mm to 23 mm, more preferably 19 mm to 21 mm. The width of the first surface electrode 51 is preferably, for example, 1 mm to 5 mm, more preferably 2 mm to 4 mm. The length of the second surface electrode 52 and the third surface electrode 53 is preferably 1 mm to 3 mm, for example. The width of the second surface electrode 52 and the third surface electrode 53 is preferably 0.5 mm to 1.5 mm, for example.

The piezoelectric actuator 1 has a flexible wiring board 6 partially bonded to one main surface of the laminate 4 constituting the piezoelectric element 10 through a conductive adhesive 7 made of a conductive particle and a resin have.

The flexible wiring board 6 is provided with a wiring conductor 61 and a part of the flexible wiring board 6 is laminated so that the surface electrode 5 and the wiring conductor 61 are electrically connected via the conductive adhesive agent 7. [ Is bonded to one main surface of the body (4).

The flexible wiring board 6 is, for example, a flexible printed wiring board in which two wiring conductors 61 are embedded in a resin film, and a connector (not shown) for connecting to an external circuit is connected to one end.

Examples of the conductive adhesive 7 include metal powder such as silver powder and gold powder in a resin having a low elastic modulus (Young's modulus) such as polyimide, polyamideimide, silicone rubber, synthetic rubber, etc., And the like, and the like. As a result, the stress caused by the vibration can be reduced as compared with the solder. More preferably, it is an anisotropic conductive material among the conductive adhesive agent (7). The anisotropic conductive material is composed of a resin adhesive for bonding with the conductive particles responsible for electrical bonding. This anisotropic conductive material is electrically continuous in the thickness direction and is insulated in the in-plane direction. Therefore, even in the narrow pitch wiring, the anisotropic conductive material is not electrically short-circuited between the surface electrodes of different poles, The connecting portion can be made compact.

At least a part of the peripheral edge portion 601 of the junction region of the flexible wiring board 6 and the piezoelectric element 10 is arranged more than the other portions of the conductive particle. Here, the bonding region is a region occupied by the conductive adhesive 7 and means a region within 0.4 mm from the end face of the peripheral portion 601 of the bonding region. The fact that the conductive particles are arranged more than the other portions in a part of the peripheral edge portion 601 means that the surface of the conductive adhesive 7 is peeled off by the flexible wiring board 6, Means that the proportion of the conductive particles occupied per unit area in a part of the portion 601 is larger than the other portions.

Since at least a part of the peripheral edge portion 601 of the junction region of the flexible wiring board 6 and the piezoelectric element 10 is provided with more conductive particles than the other portions, the thermal conductivity of this portion is improved, The heat generated by the vibration of the piezoelectric element 10 and the heat conduction and diffusion of the heat of the conductive adhesive agent 7 are promoted so that the resin constituting the conductive adhesive agent 7 is thermally deteriorated, The problem that the wiring board 6 is peeled off from the piezoelectric element 10 can be greatly reduced.

Further, by placing a large number of conductive particles in at least a part of the peripheral edge portion 601, the shear or tensile stress concentration is lowered due to the rotation of the conductive particles and the low Young's modulus. Therefore, cracks are prevented from occurring in the conductive adhesive agent 7 from this portion. Particularly, when a force is applied in the direction in which the flexible wiring board 6 is connected to the outside, a large shear or tensile stress is concentrated on the root of the joint portion of the flexible wiring board 6, but as described above, 601, the concentration of shear stress can be particularly suppressed due to the rotation of the conductive particles of the conductive adhesive agent 7, so that cracks are generated in the root of the joint portion and there is no risk that the flexible wiring board 6 is peeled off. It is preferable that at least a part of the peripheral edge portion 601 of the conductive particles more than the other portions is the entire periphery of the peripheral edge portion 601. [

It is preferable that at least a part of the peripheral edge portion 601 in which a large number of conductive particles are arranged has, for example, 5 to 20% more number or percentage of conductive particles than other portions. This ratio can be obtained by peeling the flexible wiring board 6 and observing it with an electron microscope.

3, the part is located in the region between the outer periphery of one main surface of the piezoelectric element 10 and the surface electrode 5, so that the low Young's modulus of the resin or the rotation of many conductive particles can be prevented from being affected by external vibrations, It is possible to reduce the stress generated by the vibration not followed by the actuator such as the resonance of the substrate 6 itself and the viscoelasticity of the resin to lower the amplitude of the vibration that does not follow.

The thickness of the conductive adhesive agent 7 bonded at the region between the outer periphery of one major surface of the piezoelectric element 10 and the surface electrode 5 is set such that the surface electrode 5 and the wiring conductor 61 are electrically opposite to each other Since the thickness of the conductive adhesive 7 is thicker than the thickness of the conductive adhesive 7, the thermal resistance is increased, but the conductive particles having a high thermal conductivity can be arranged in this region to provide a function of heat conduction suppressing an increase in thermal resistance. As a result, it is possible to reduce the occurrence of cracks due to deterioration of the resin constituting the conductive adhesive agent 7 by conducting and diffusing the heat generated by the vibration of the piezoelectric element 10 and the heat of the conductive adhesive agent 7 itself.

In the above configuration, when the conductive adhesive 7 is an anisotropic conductive material containing, for example, gold-plated resin balls or the like as conductive particles, the surface electrode 5 and the wiring conductor 61 overlap each other in a plan view In which conductive particles constituting the conductive adhesive agent 7 are electrically connected to the surface electrode 5 and the wiring conductor 61 and the conductive particles are not bonded to each other, 10 and the wiring conductor 61, or in which the conductive particles mainly connected to either one of them are mainly present. In such a connection type, it is possible to keep the thermal conductivity high and to suppress the shearing or concentration of the tensile stress as described above, but it may be a bonding material or a joining process which does not necessarily require an anisotropic conductive material or the like.

As described above, in order to effectively improve the thermal conductivity and reduce the concentration of stress, it is preferable that the conductive particles not connected to either of the piezoelectric element 10 and the wiring conductor 61 are made 70% or more of the total.

Further, by flattening the other principal surface of the piezoelectric element 10, for example, when the other principal surface is bonded to an object (for example, a vibration plate, which will be described later) to which vibration is applied, The bending vibration is likely to occur, and the efficiency of bending vibration as a whole can be increased.

The piezoelectric actuator 1 shown in Fig. 1 is a so-called bi-morph type piezoelectric actuator, in which an electric signal is inputted from the surface electrode 5 to bend and vibrate so that one main surface and the other main surface become a curved surface. The actuator is not limited to a bimorph type, but may be a unimorph type. For example, the piezoelectric actuator can be flexibly vibrated even when a unimorph type piezoelectric actuator is bonded to the other main surface of a piezoelectric actuator.

Next, a method of manufacturing the piezoelectric actuator 1 of the present embodiment will be described.

First, a ceramic green sheet to be a piezoelectric layer 3 is produced. Specifically, a ceramic slurry is prepared by mixing a plasticizer of piezoelectric ceramics, a binder composed of an organic polymer such as acrylic or butyral, and a plasticizer. Then, a ceramic green sheet is produced using this ceramic slurry by using a tape molding method such as a doctor blade method and a calender roll method. As long as it has a piezoelectric ceramic and the piezoelectric properties, for example, it may be used such as lead titanate zirconate (PbZrO ₃ -PbTiO ₃₎ made of a perovskite-type oxide. As the plasticizer, dibutyl phthalate (DBP), dioctyl phthalate (DOP) and the like can be used.

Subsequently, a conductive paste to be the internal electrode 2 is produced. Specifically, a binder and a plasticizer are added to and mixed with a metal powder of a silver-palladium alloy to prepare a conductive paste. This conductive paste is applied on the ceramic green sheet in a pattern of the internal electrode 2 by screen printing. Further, a plurality of ceramic green sheets on which the conductive paste is printed are laminated, debindered at a predetermined temperature, baked at a temperature of 900 to 1200 DEG C, and ground to a predetermined shape using a planar grinding machine or the like The laminate 4 having the internal electrode 2 and the piezoelectric layer 3 alternately stacked is manufactured.

The laminate 4 is not limited to the one produced by the above production method and can be manufactured by any manufacturing method if the multilayer body 4 in which a plurality of the internal electrodes 2 and the piezoelectric layer 3 are laminated can be manufactured .

Thereafter, a silver-containing conductive paste prepared by adding a binder, a plasticizer, and a solvent to a mixture of conductive particles mainly composed of silver and glass was applied to the main surface and the side surface of the layered product 4 in the pattern of the surface electrodes 5 Printed by screen printing or the like, dried, and baked at a temperature of 650 to 750 ° C to form the surface electrode 5.

When the surface electrode 5 and the internal electrode 2 are electrically connected to each other, vias passing through the piezoelectric layer 3 may be formed to connect the side electrodes to the side surface of the multilayer body 4, Or may be manufactured by a manufacturing method.

Then, the flexible wiring board 6 is connected (fixed) to the piezoelectric element 10 by using the conductive adhesive 7.

First, a paste for a conductive adhesive is applied and formed on a predetermined position of the piezoelectric element 10 by a method such as screen printing. Thereafter, the flexible wiring board 6 is connected and fixed to the piezoelectric element 10 by curing the conductive adhesive paste in a state in which the flexible wiring board 6 is in contact. The conductive adhesive paste may be coated on the flexible wiring board 6 side.

When the resin constituting the conductive adhesive 7 is made of a thermoplastic resin, a conductive adhesive is applied to predetermined positions of the piezoelectric element 10 or the flexible wiring board 6 and then the piezoelectric element 10 and the flexible wiring board 6) are brought into contact with each other through a conductive adhesive agent, the thermoplastic resin softens and flows, and then the temperature is returned to room temperature, the thermoplastic resin hardens again, and the flexible wiring board 6 is connected and fixed to the piezoelectric element 10 .

Here, in order that a large number of conductive particles constituting the conductive adhesive agent 7 are disposed on the periphery of the region of the flexible wiring board 6 overlapping with the piezoelectric element 10 in plan view, And a conductive adhesive paste having a high content of conductive particles may be applied to the peripheral edge portion of the conductive paste.

Particularly, when the anisotropic conductive member is used as the conductive bonding member 7, it is necessary to control the pressing amount so that adjacent conductive particles do not contact with each other.

In the above description, the method of forming the conductive adhesive 7 on the piezoelectric element 10 or the flexible wiring board 6 has been described. However, the sheet of the conductive adhesive 7 previously formed in the form of a sheet may be bonded to the piezoelectric element 10, It may be bonded by heat pressing in a state sandwiched between the wiring boards 6.

As shown in Fig. 4, the piezoelectric vibrating device of the present invention has a piezoelectric actuator 1 and a diaphragm 81 joined to the other main surface of the piezoelectric actuator 1. [

The diaphragm 81 has a rectangular thin plate shape. The diaphragm 81 can be formed by suitably using a rigid and elastic material such as acrylic resin or glass. The thickness of the vibration plate 81 is set to, for example, 0.4 mm to 1.5 mm.

The diaphragm 81 is bonded to the other main surface of the piezoelectric actuator 1 via a bonding member 82. [ The entire surface of the other main surface may be bonded to the diaphragm 81 via the bonding member 82, or substantially the entire surface may be bonded.

The joining member 82 has a film shape. The joining member 82 is formed to be more flexible than the diaphragm 81 and easy to deform. The elastic modulus and rigidity of the diaphragm 81 are smaller than those of the diaphragm 81, such as Young's modulus, stiffness and volume elastic modulus. That is, the joining member 82 is deformable and deforms more greatly than the diaphragm 81 when the same force is applied. The other main surface (main surface on the -z direction side in the figure) of the piezoelectric actuator 1 is entirely fixed to one main surface (main surface on the + z direction side of the drawing) of the joining member 82, (Main surface on the + z direction side of the drawing) of the diaphragm 81 is fixed to the other main surface (main surface on the -z direction side of the drawing)

The joining member 82 may be a single member or a composite member composed of several members. As such a joining member 82, for example, a double-sided tape having a pressure-sensitive adhesive on both sides of a base made of a nonwoven fabric or the like, various elastic adhesives as an adhesive having elasticity, and the like can be suitably used. The thickness of the bonding member 82 is preferably larger than the amplitude of the bending vibration of the piezoelectric actuator 1. However, if the bonding member 82 is excessively thick, the vibration is damped and is set to, for example, 0.1 mm to 0.6 mm. However, in the piezoelectric vibrating device of the present invention, the material of the joining member 82 is not limited, and the joining member 82 may be formed to be harder than the diaphragm 81 and hard to be deformed. In addition, in some cases, the connecting member 82 may not be provided.

The piezoelectric vibrating device of this example having such a configuration functions as a piezoelectric vibrating device that bends and vibrates the piezoelectric actuator 1 by applying an electric signal, thereby vibrating the diaphragm 81. [ The other end portion in the longitudinal direction of the diaphragm 81 (the end in the -y direction in the figure or the peripheral edge portion of the diaphragm 81, etc.) may be supported by a support member not shown.

Since the piezoelectric vibrating device of this example is constituted by using the piezoelectric actuator 1 in which the occurrence of unnecessary vibration is reduced, the occurrence of unnecessary vibration can be reduced.

In the piezoelectric vibrating device of the present example, the diaphragm 81 is bonded to the other flat surface of the piezoelectric actuator 1. Thereby, the piezoelectric vibrating apparatus in which the piezoelectric actuator 1 and the vibration plate 81 are strongly bonded can be obtained.

5 to 7, the portable terminal of the present invention includes a piezoelectric actuator 1, an electronic circuit (not shown), a display 91, and a housing 92. The piezoelectric actuator 1, And the other main surface of the housing 92 is joined to the housing 92. Fig. 5 is a schematic perspective view schematically showing the portable terminal of the present invention, Fig. 6 is a schematic cross-sectional view taken along line A-A in Fig. 5, and Fig. 7 is a schematic cross-sectional view taken along line B-B in Fig.

Here, it is preferable that the piezoelectric actuator 1 and the housing 92 are joined by using a deformable joining member. 6 and 7, the joining member 82 is a deformable joining member.

The piezoelectric actuator 1 and the housing 92 are joined by the deformable joining member 82 so that the deformable joining member 82 is deformed more greatly than the housing 92 when vibration is transmitted from the piezoelectric actuator 1.

At this time, since the vibration of the opposite phase reflected from the housing 92 can be alleviated by the deformable joining member 82, the piezoelectric actuator 1 can transmit a strong vibration to the housing 92 without being affected by the ambient vibration have.

Particularly, since at least a part of the joint members 82 is made of a viscoelastic body, a strong vibration from the piezoelectric actuator 1 is transmitted to the housing 92, while a weak vibration reflected from the housing 92 is transmitted to the joint member 82 Is preferable in view of being able to absorb. For example, a double-sided tape having a pressure-sensitive adhesive on both sides of a substrate made of a nonwoven fabric or the like, or a bonding member having a structure including an adhesive having elasticity can be used. Can be used.

In this example, the piezoelectric actuator 1 is mounted on a part of the housing 92 serving as a cover of the display 91, and a part of the housing 92 functions as a diaphragm 922.

In this example, the piezoelectric actuator 1 is bonded to the housing 92, but the piezoelectric actuator 1 may be bonded to the display 91.

The housing 92 has a box-shaped housing main body 921 having one open side and a diaphragm 922 closing the opening of the housing main body 921. The housing 92 (the housing main body 921 and the vibration plate 922) can be formed by suitably using a material such as a synthetic resin having a high rigidity and a high elastic modulus.

The periphery of the diaphragm 922 is attached to the housing main body 921 through a bonding material 93 so as to be vibratable. The bonding material 93 is formed to be more flexible than the diaphragm 922 and is easy to deform. The elastic modulus and stiffness such as Young's modulus, rigidity and bulk modulus of elasticity are smaller than those of the diaphragm 922. That is, the bonding material 93 is deformable and deforms more greatly than the diaphragm 922 when the same force is applied.

The bonding material 93 may be a single material or a composite material composed of several members. As the bonding material 93, for example, a double-sided tape or the like having a pressure-sensitive adhesive on both sides of a substrate made of a nonwoven fabric or the like can be suitably used. The thickness of the bonding material 93 is set so as not to be attenuated by excessively thickening, and is set to, for example, 0.1 mm to 0.6 mm. However, in the portable terminal of the present invention, the material of the bonding material 93 is not limited, and the bonding material 93 may be formed to be harder than the vibration plate 922 and hard to be deformed. In some cases, the bonding material 93 may not be provided.

Examples of the electronic circuit (not shown) include a circuit for processing image information to be displayed on the display 91 and audio information to be transmitted by the portable terminal, a communication circuit, and the like. At least one of these circuits may be included, or all the circuits may be included. Further, it may be a circuit having other functions. It is also possible to have a plurality of electronic circuits. The electronic circuit and the piezoelectric actuator 1 are connected by a connection wiring not shown in the drawing.

The display 91 is a display device having a function of displaying image information, and for example, a known display such as a liquid crystal display, a plasma display, and an organic EL display can be suitably used. Further, the display 91 may have an input device such as a touch panel. The cover (diaphragm 922) of the display 91 may have an input device such as a touch panel. Further, the entire display 91 or a part of the display 91 may function as a diaphragm.

Further, the portable terminal of the present invention is characterized in that the display 91 or the housing 92 generates vibration transmitting sound information through the cartilage or airway of the ear. The portable terminal of this embodiment can transmit sound information by bringing the diaphragm (the display 91 or the housing 92) into contact with the ear directly or through other objects and transmitting vibrations to the ear cartilage. That is, the sound information can be transmitted by directly or indirectly bringing the diaphragm (the display 91 or the housing 92) into contact with the ear and vibrating the ear cartilage. This makes it possible to obtain a portable terminal capable of transmitting sound information even when the surroundings are noisy, for example. Further, the object interposed between the diaphragm (the display 91 or the housing 92) and the ear may be, for example, a cover for a portable terminal, a headphone or an earphone, or any object capable of transmitting vibration . Further, it may be a portable terminal that transmits sound information by propagating sound generated from diaphragm (display 91 or housing 92) in air. Further, it may be a portable terminal that transmits sound information through a plurality of routes.

The portable terminal of the present embodiment can transmit high-quality sound information by transmitting sound information using the piezoelectric actuator 1 in which the occurrence of undesired vibration is reduced.

[Example]

A specific example of the piezoelectric actuator of the present invention will be described. Specifically, the piezoelectric actuator shown in Fig. 1 was produced as follows.

The piezoelectric element was a rectangular parallelepiped having a length of 23.5 mm, a width of 3.3 mm, and a thickness of 0.5 mm. The piezoelectric element had a structure in which a piezoelectric layer having a thickness of 30 占 퐉 and internal electrodes were alternately laminated, and the total number of piezoelectric layers was 16 layers. The piezoelectric layer was formed of lead titanate zirconate. The inner electrode was made of a silver palladium alloy.

A ceramic green sheet on which a conductive paste made of palladium was printed was laminated and pressurized, followed by degreasing at a predetermined temperature, followed by firing at 1000 占 폚 to obtain a multilayer sintered body.

Then, the surface electrodes were printed so as to be longer by 1 mm at both ends in the width direction than the internal electrodes.

A voltage of an electric field intensity of 2 kV / mm was applied between the internal electrodes (between the first and second electrodes) through the surface electrode, and the piezoelectric element was polarized.

Thereafter, a conductive adhesive containing gold-plated resin balls as conductive particles was applied and formed on the surface of the piezoelectric element to be bonded to the flexible wiring board. At this time, a conductive adhesive containing 20 vol% of conductive particles and a conductive adhesive containing 10 vol% of conductive particles were coated and formed in a region of 0.3 mm in width of the periphery of the region where the flexible wiring substrate and the piezoelectric element overlap each other, did.

Thereafter, the flexible wiring board was connected to and fixed to the piezoelectric element by heating under pressure in a state in which the flexible wiring board was in contact with the piezoelectric element, thereby fixing the piezoelectric actuator (sample No. 1) of the present invention. In addition, as the above-mentioned conductive adhesive, an anisotropic conductive material which conducts in the thickness direction and does not conduct in the in-plane direction is used.

In addition, as a comparative example, a piezoelectric actuator (sample No. 2) having the same constitution as the above-described sample No. 1 except for the range of the present invention was produced, except that the flexible wiring board was bonded to the piezoelectric element with solder.

A sinusoidal signal having an effective value of ± 10 Vrms was applied to each piezoelectric actuator through a flexible wiring board to a piezoelectric element at a frequency of 1 kHz at a frequency of 1 kHz. As a result, all of the sample No. 1 and the sample No. 2 Was obtained.

Subsequently, a sinusoidal signal of an effective value of 3 V was applied between 0.2 and 5000 Hz, and it was confirmed whether or not abnormal vibration caused by cracks on the surface of the flexible wiring board occurred. 1, no abnormal vibration was observed other than the vibration originating from the resonance and anti-resonance frequency of the piezoelectric element. On the other hand, in the piezoelectric actuator of sample No. 2 outside the scope of the present invention, abnormal vibration was measured at frequencies other than the vibrations derived from the piezoelectric elements.

Thereafter, a sinusoidal wave signal having an effective value of ± 10 Vrms was applied in a continuous operation of 100,000 cycles to perform a drive test. Sample No. 2 outside the scope of the present invention had abnormal vibration, and the flexible wiring board was peeled off from the piezoelectric element in 900,000 cycles.

On the other hand, the piezoelectric actuator of sample No. 1 of the present invention continued driving without generating abnormal vibration even after 100,000 cycles elapsed. Further, cracks, cracks, and the like were not observed in the conductive adhesive to which the flexible wiring substrate was connected and fixed, and peeling of the flexible wiring substrate was not observed.

The use of the piezoelectric actuator of the present invention did not cause abnormal vibration and it was possible to confirm excellent durability without causing a problem that the flexible wiring board is peeled off from the piezoelectric element even when the piezoelectric actuator is continuously operated for a long period of time.

1: piezoelectric actuator 2: internal electrode
21: first pole 22: second pole
3: piezoelectric layer 4: laminated body
41: active part 42: inert part
5: surface electrode 51: first surface electrode
52: second surface electrode 53: third surface electrode
6: flexible wiring board 61: wiring conductor
601:
602: area between the outer periphery of one main surface and the surface electrode
7: conductive adhesive 81: diaphragm
82: joining member 91: display
92: housing 921: housing body
922: diaphragm 93: bonding material

Claims (8)

A piezoelectric element having a laminate in which an internal electrode and a piezoelectric layer are laminated and a surface electrode electrically connected to the internal electrode on one main surface of the laminate,
And a flexible wiring board having a wiring conductor partially bonded to the one main surface via a conductive adhesive containing conductive particles and resin and electrically connected to the surface electrode,
Wherein at least a part of the peripheral portion of the region where the flexible wiring board and the piezoelectric element are bonded is arranged with more conductive particles than the other portions. The method according to claim 1,
And said part is in a region between the outer periphery of said one main surface and said surface electrode. The method according to claim 1,
Wherein the conductive adhesive is an anisotropic conductive material. A piezoelectric vibrating apparatus comprising the piezoelectric actuator according to any one of claims 1 to 3 and a diaphragm bonded to the other main surface of the piezoelectric element. 5. The method of claim 4,
Wherein the piezoelectric actuator and the diaphragm are joined using a deformable joining member. A piezoelectric actuator comprising: the piezoelectric actuator according to any one of claims 1 to 3; an electronic circuit; a display; and a housing,
And the other main surface of the piezoelectric actuator is bonded to the display or the housing. The method according to claim 6,
Wherein the piezoelectric actuator and the display or the housing are joined using a deformable joining member. delete

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