CN1031531C - 光学开关装置制造方法及其用途 - Google Patents

光学开关装置制造方法及其用途 Download PDF

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Publication number
CN1031531C
CN1031531C CN92105171A CN92105171A CN1031531C CN 1031531 C CN1031531 C CN 1031531C CN 92105171 A CN92105171 A CN 92105171A CN 92105171 A CN92105171 A CN 92105171A CN 1031531 C CN1031531 C CN 1031531C
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CN
China
Prior art keywords
substrate
mirror
optical fiber
switch
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN92105171A
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English (en)
Chinese (zh)
Other versions
CN1069127A (zh
Inventor
格雷戈里·A·马热尔
T·格斯·姆多尔德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
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Texas Instruments Inc
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Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of CN1069127A publication Critical patent/CN1069127A/zh
Application granted granted Critical
Publication of CN1031531C publication Critical patent/CN1031531C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Liquid Crystal (AREA)
CN92105171A 1991-06-28 1992-06-26 光学开关装置制造方法及其用途 Expired - Fee Related CN1031531C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US723,105 1985-04-15
US07/723,105 US5155778A (en) 1991-06-28 1991-06-28 Optical switch using spatial light modulators

Publications (2)

Publication Number Publication Date
CN1069127A CN1069127A (zh) 1993-02-17
CN1031531C true CN1031531C (zh) 1996-04-10

Family

ID=24904867

Family Applications (1)

Application Number Title Priority Date Filing Date
CN92105171A Expired - Fee Related CN1031531C (zh) 1991-06-28 1992-06-26 光学开关装置制造方法及其用途

Country Status (7)

Country Link
US (1) US5155778A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0525395B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP3236350B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100285697B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN1031531C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69213858T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW258792B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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Also Published As

Publication number Publication date
DE69213858D1 (de) 1996-10-24
JP3236350B2 (ja) 2001-12-10
US5155778A (en) 1992-10-13
KR100285697B1 (ko) 2001-04-02
CN1069127A (zh) 1993-02-17
JPH06175049A (ja) 1994-06-24
TW258792B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-10-01
KR930000981A (ko) 1993-01-16
EP0525395B1 (en) 1996-09-18
DE69213858T2 (de) 1997-02-13
EP0525395A1 (en) 1993-02-03

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SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C15 Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993)
OR01 Other related matters
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee