JP3236350B2 - 光学スイッチおよびその製造方法 - Google Patents
光学スイッチおよびその製造方法Info
- Publication number
- JP3236350B2 JP3236350B2 JP17117592A JP17117592A JP3236350B2 JP 3236350 B2 JP3236350 B2 JP 3236350B2 JP 17117592 A JP17117592 A JP 17117592A JP 17117592 A JP17117592 A JP 17117592A JP 3236350 B2 JP3236350 B2 JP 3236350B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- substrate
- light
- optical
- fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000000758 substrate Substances 0.000 claims description 68
- 239000000835 fiber Substances 0.000 claims description 41
- 239000013307 optical fiber Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 description 37
- 235000012431 wafers Nutrition 0.000 description 25
- 238000005530 etching Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 230000010354 integration Effects 0.000 description 8
- 238000004806 packaging method and process Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229920004943 Delrin® Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000010399 physical interaction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/723,105 US5155778A (en) | 1991-06-28 | 1991-06-28 | Optical switch using spatial light modulators |
US723105 | 1991-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06175049A JPH06175049A (ja) | 1994-06-24 |
JP3236350B2 true JP3236350B2 (ja) | 2001-12-10 |
Family
ID=24904867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17117592A Expired - Fee Related JP3236350B2 (ja) | 1991-06-28 | 1992-06-29 | 光学スイッチおよびその製造方法 |
Country Status (7)
Families Citing this family (87)
Publication number | Priority date | Publication date | Assignee | Title |
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AU649162B2 (en) * | 1991-08-17 | 1994-05-12 | Nippon Telegraph & Telephone Corporation | Optical connector |
US6219015B1 (en) | 1992-04-28 | 2001-04-17 | The Board Of Directors Of The Leland Stanford, Junior University | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
KR100333952B1 (en) * | 1992-07-06 | 2003-05-17 | Samsung Electronics Co Ltd | Optical system |
US5414819A (en) * | 1992-12-18 | 1995-05-09 | Nec Research Institute, Inc. | Optical interconnection network |
US5408552A (en) * | 1993-02-17 | 1995-04-18 | General Electric Company | Light valves for light guides using scattering materials |
US5345521A (en) * | 1993-07-12 | 1994-09-06 | Texas Instrument Incorporated | Architecture for optical switch |
US6467345B1 (en) | 1993-10-18 | 2002-10-22 | Xros, Inc. | Method of operating micromachined members coupled for relative rotation |
US6044705A (en) * | 1993-10-18 | 2000-04-04 | Xros, Inc. | Micromachined members coupled for relative rotation by torsion bars |
US6426013B1 (en) | 1993-10-18 | 2002-07-30 | Xros, Inc. | Method for fabricating micromachined members coupled for relative rotation |
US5844588A (en) * | 1995-01-11 | 1998-12-01 | Texas Instruments Incorporated | DMD modulated continuous wave light source for xerographic printer |
US5754217A (en) * | 1995-04-19 | 1998-05-19 | Texas Instruments Incorporated | Printing system and method using a staggered array spatial light modulator having masked mirror elements |
US5841579A (en) | 1995-06-07 | 1998-11-24 | Silicon Light Machines | Flat diffraction grating light valve |
US5774604A (en) * | 1996-10-23 | 1998-06-30 | Texas Instruments Incorporated | Using an asymmetric element to create a 1XN optical switch |
US5982553A (en) | 1997-03-20 | 1999-11-09 | Silicon Light Machines | Display device incorporating one-dimensional grating light-valve array |
US6191882B1 (en) * | 1997-09-22 | 2001-02-20 | Creo Srl | Micromachined linear light valve |
US6088102A (en) | 1997-10-31 | 2000-07-11 | Silicon Light Machines | Display apparatus including grating light-valve array and interferometric optical system |
US6187515B1 (en) * | 1998-05-07 | 2001-02-13 | Trw Inc. | Optical integrated circuit microbench system |
US6271808B1 (en) | 1998-06-05 | 2001-08-07 | Silicon Light Machines | Stereo head mounted display using a single display device |
US6130770A (en) | 1998-06-23 | 2000-10-10 | Silicon Light Machines | Electron gun activated grating light valve |
US6101036A (en) | 1998-06-23 | 2000-08-08 | Silicon Light Machines | Embossed diffraction grating alone and in combination with changeable image display |
US6215579B1 (en) | 1998-06-24 | 2001-04-10 | Silicon Light Machines | Method and apparatus for modulating an incident light beam for forming a two-dimensional image |
US6303986B1 (en) | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
US6872984B1 (en) | 1998-07-29 | 2005-03-29 | Silicon Light Machines Corporation | Method of sealing a hermetic lid to a semiconductor die at an angle |
US6316282B1 (en) | 1999-08-11 | 2001-11-13 | Adc Telecommunications, Inc. | Method of etching a wafer layer using multiple layers of the same photoresistant material |
US6242363B1 (en) | 1999-08-11 | 2001-06-05 | Adc Telecommunications, Inc. | Method of etching a wafer layer using a sacrificial wall to form vertical sidewall |
US6229640B1 (en) | 1999-08-11 | 2001-05-08 | Adc Telecommunications, Inc. | Microelectromechanical optical switch and method of manufacture thereof |
GB9923428D0 (en) * | 1999-10-04 | 1999-12-08 | Thomas Swan & Company Limited | Optical switch |
US6483969B1 (en) | 1999-12-01 | 2002-11-19 | The United States Of America As Represented By The Secretary Of The Army | Apparatus, assembly, and method for making micro-fixtured lensed assembly for optoelectronic devices and optical fibers |
US6956878B1 (en) | 2000-02-07 | 2005-10-18 | Silicon Light Machines Corporation | Method and apparatus for reducing laser speckle using polarization averaging |
US6556740B1 (en) | 2000-04-14 | 2003-04-29 | Nanogear | Fiber optic cross connect with folding of light beams |
US6430331B1 (en) * | 2000-04-14 | 2002-08-06 | C Speed Corporation | Double hermetic package for fiber optic cross connect |
US6347167B1 (en) | 2000-04-14 | 2002-02-12 | C Speed Corporation | Fiber optic cross connect with uniform redirection length and folding of light beams |
US6396973B1 (en) | 2000-04-14 | 2002-05-28 | C Speed Corporation | Fiber optic cross connect with transparent substrate |
US6374007B1 (en) | 2000-04-14 | 2002-04-16 | C Speed Corporation | Double hermetic package for fiber optic cross connect |
US6430330B1 (en) | 2000-04-14 | 2002-08-06 | C Speed Corporation | Modular approach to substrate population in a fiber optic cross connect |
SE517550C2 (sv) * | 2000-04-17 | 2002-06-18 | Micronic Laser Systems Ab | Mönstergenereringssystem användande en spatialljusmodulator |
US6867897B2 (en) * | 2003-01-29 | 2005-03-15 | Reflectivity, Inc | Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays |
US6810176B2 (en) | 2000-08-07 | 2004-10-26 | Rosemount Inc. | Integrated transparent substrate and diffractive optical element |
US7003187B2 (en) | 2000-08-07 | 2006-02-21 | Rosemount Inc. | Optical switch with moveable holographic optical element |
KR100294052B1 (ko) * | 2000-08-21 | 2001-06-15 | 김춘호 | 마이크로 집적 렌즈를 채용한 스캐닝 리니어 어레이표시장치 |
KR100359942B1 (ko) * | 2000-09-26 | 2002-11-07 | 엘지전자 주식회사 | 광 스위치 |
KR100349941B1 (ko) * | 2000-09-29 | 2002-08-24 | 삼성전자 주식회사 | 광 스위칭을 위한 마이크로 액추에이터 및 그 제조방법 |
DE10061259A1 (de) * | 2000-12-01 | 2002-06-27 | Fraunhofer Ges Forschung | Schaltungsanordnung |
KR20020065799A (ko) * | 2001-02-07 | 2002-08-14 | 엘지전자 주식회사 | 광 스위치 |
US7177081B2 (en) | 2001-03-08 | 2007-02-13 | Silicon Light Machines Corporation | High contrast grating light valve type device |
WO2002079852A1 (en) * | 2001-03-30 | 2002-10-10 | Yoon-Joong Yong | Light modulating system using deformable mirror arrays |
US6490384B2 (en) | 2001-04-04 | 2002-12-03 | Yoon-Joong Yong | Light modulating system using deformable mirror arrays |
US6859578B2 (en) * | 2001-05-18 | 2005-02-22 | Nuonics, Inc. | Fault-tolerant fiber-optical multiwavelength processor |
US6801682B2 (en) | 2001-05-18 | 2004-10-05 | Adc Telecommunications, Inc. | Latching apparatus for a MEMS optical switch |
US6865346B1 (en) | 2001-06-05 | 2005-03-08 | Silicon Light Machines Corporation | Fiber optic transceiver |
US6747781B2 (en) | 2001-06-25 | 2004-06-08 | Silicon Light Machines, Inc. | Method, apparatus, and diffuser for reducing laser speckle |
US6782205B2 (en) | 2001-06-25 | 2004-08-24 | Silicon Light Machines | Method and apparatus for dynamic equalization in wavelength division multiplexing |
US6829092B2 (en) | 2001-08-15 | 2004-12-07 | Silicon Light Machines, Inc. | Blazed grating light valve |
US6930364B2 (en) | 2001-09-13 | 2005-08-16 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
US6956995B1 (en) | 2001-11-09 | 2005-10-18 | Silicon Light Machines Corporation | Optical communication arrangement |
US6800238B1 (en) | 2002-01-15 | 2004-10-05 | Silicon Light Machines, Inc. | Method for domain patterning in low coercive field ferroelectrics |
CN1316271C (zh) * | 2002-03-01 | 2007-05-16 | 柔斯芒特公司 | 带有三维波导的光学开关 |
US6767751B2 (en) | 2002-05-28 | 2004-07-27 | Silicon Light Machines, Inc. | Integrated driver process flow |
US6728023B1 (en) | 2002-05-28 | 2004-04-27 | Silicon Light Machines | Optical device arrays with optimized image resolution |
US7054515B1 (en) | 2002-05-30 | 2006-05-30 | Silicon Light Machines Corporation | Diffractive light modulator-based dynamic equalizer with integrated spectral monitor |
US6822797B1 (en) | 2002-05-31 | 2004-11-23 | Silicon Light Machines, Inc. | Light modulator structure for producing high-contrast operation using zero-order light |
US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
US6908201B2 (en) | 2002-06-28 | 2005-06-21 | Silicon Light Machines Corporation | Micro-support structures |
US7057795B2 (en) | 2002-08-20 | 2006-06-06 | Silicon Light Machines Corporation | Micro-structures with individually addressable ribbon pairs |
US6801354B1 (en) | 2002-08-20 | 2004-10-05 | Silicon Light Machines, Inc. | 2-D diffraction grating for substantially eliminating polarization dependent losses |
KR100492488B1 (ko) * | 2002-09-27 | 2005-06-02 | (주)세협테크닉스 | 다층구조의 웨이퍼를 이용한 광 스위치 |
US6712480B1 (en) | 2002-09-27 | 2004-03-30 | Silicon Light Machines | Controlled curvature of stressed micro-structures |
US6928207B1 (en) | 2002-12-12 | 2005-08-09 | Silicon Light Machines Corporation | Apparatus for selectively blocking WDM channels |
US6987600B1 (en) | 2002-12-17 | 2006-01-17 | Silicon Light Machines Corporation | Arbitrary phase profile for better equalization in dynamic gain equalizer |
US7057819B1 (en) | 2002-12-17 | 2006-06-06 | Silicon Light Machines Corporation | High contrast tilting ribbon blazed grating |
US6934070B1 (en) | 2002-12-18 | 2005-08-23 | Silicon Light Machines Corporation | Chirped optical MEM device |
US6927891B1 (en) | 2002-12-23 | 2005-08-09 | Silicon Light Machines Corporation | Tilt-able grating plane for improved crosstalk in 1×N blaze switches |
US7068372B1 (en) | 2003-01-28 | 2006-06-27 | Silicon Light Machines Corporation | MEMS interferometer-based reconfigurable optical add-and-drop multiplexor |
US7286764B1 (en) | 2003-02-03 | 2007-10-23 | Silicon Light Machines Corporation | Reconfigurable modulator-based optical add-and-drop multiplexer |
US6947613B1 (en) | 2003-02-11 | 2005-09-20 | Silicon Light Machines Corporation | Wavelength selective switch and equalizer |
US6922272B1 (en) | 2003-02-14 | 2005-07-26 | Silicon Light Machines Corporation | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices |
US7027202B1 (en) | 2003-02-28 | 2006-04-11 | Silicon Light Machines Corp | Silicon substrate as a light modulator sacrificial layer |
US6829077B1 (en) | 2003-02-28 | 2004-12-07 | Silicon Light Machines, Inc. | Diffractive light modulator with dynamically rotatable diffraction plane |
US6806997B1 (en) | 2003-02-28 | 2004-10-19 | Silicon Light Machines, Inc. | Patterned diffractive light modulator ribbon for PDL reduction |
US7391973B1 (en) | 2003-02-28 | 2008-06-24 | Silicon Light Machines Corporation | Two-stage gain equalizer |
US6922273B1 (en) | 2003-02-28 | 2005-07-26 | Silicon Light Machines Corporation | PDL mitigation structure for diffractive MEMS and gratings |
US7042611B1 (en) | 2003-03-03 | 2006-05-09 | Silicon Light Machines Corporation | Pre-deflected bias ribbons |
US7203398B2 (en) * | 2003-03-20 | 2007-04-10 | Texas Instruments Incorporated | Compact DMD-based optical module |
CN100368841C (zh) * | 2005-09-08 | 2008-02-13 | 中国科学院半导体研究所 | 热光开关阵列或热光调制器的封装结构及其封装方法 |
US7428092B2 (en) * | 2005-11-30 | 2008-09-23 | Spatial Photonics, Inc. | Fast-response micro-mechanical devices |
EP2745164A4 (en) | 2011-09-30 | 2015-05-20 | Hewlett Packard Development Co | OPTICAL PERFORMANCE DIVIDER WITH ZIGZAG |
JP6183479B2 (ja) * | 2016-01-28 | 2017-08-23 | 住友大阪セメント株式会社 | 光変調器及びそれを用いた光送信装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6183515A (ja) * | 1984-09-18 | 1986-04-28 | Honda Motor Co Ltd | 導光回路ユニツト |
ATE61487T1 (de) * | 1985-10-16 | 1991-03-15 | British Telecomm | Ablenkungsvorrichtung fuer strahlung. |
US4811210A (en) * | 1985-11-27 | 1989-03-07 | Texas Instruments Incorporated | A plurality of optical crossbar switches and exchange switches for parallel processor computer |
US4838637A (en) * | 1987-05-04 | 1989-06-13 | Unisys Corporation | Integrated solid state non-volatile fiber optic switchboard |
US4859012A (en) * | 1987-08-14 | 1989-08-22 | Texas Instruments Incorporated | Optical interconnection networks |
US4856863A (en) * | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
US5071232A (en) * | 1989-08-01 | 1991-12-10 | Ricoh Company, Ltd. | Optical deflection element and space optical matrix switching device |
-
1991
- 1991-06-28 US US07/723,105 patent/US5155778A/en not_active Expired - Lifetime
-
1992
- 1992-06-26 EP EP92110826A patent/EP0525395B1/en not_active Expired - Lifetime
- 1992-06-26 CN CN92105171A patent/CN1031531C/zh not_active Expired - Fee Related
- 1992-06-26 DE DE69213858T patent/DE69213858T2/de not_active Expired - Fee Related
- 1992-06-27 KR KR1019920011348A patent/KR100285697B1/ko not_active Expired - Fee Related
- 1992-06-29 JP JP17117592A patent/JP3236350B2/ja not_active Expired - Fee Related
- 1992-08-14 TW TW081106425A patent/TW258792B/zh active
Also Published As
Publication number | Publication date |
---|---|
DE69213858D1 (de) | 1996-10-24 |
US5155778A (en) | 1992-10-13 |
KR100285697B1 (ko) | 2001-04-02 |
CN1069127A (zh) | 1993-02-17 |
JPH06175049A (ja) | 1994-06-24 |
CN1031531C (zh) | 1996-04-10 |
TW258792B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1995-10-01 |
KR930000981A (ko) | 1993-01-16 |
EP0525395B1 (en) | 1996-09-18 |
DE69213858T2 (de) | 1997-02-13 |
EP0525395A1 (en) | 1993-02-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |