CN103117438A - Terahertz waveguide cavity filter - Google Patents
Terahertz waveguide cavity filter Download PDFInfo
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- CN103117438A CN103117438A CN201310066735XA CN201310066735A CN103117438A CN 103117438 A CN103117438 A CN 103117438A CN 201310066735X A CN201310066735X A CN 201310066735XA CN 201310066735 A CN201310066735 A CN 201310066735A CN 103117438 A CN103117438 A CN 103117438A
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Abstract
The invention relates to a terahertz waveguide cavity filter composed of an upper cavity located at the upper portion and a lower cavity located at the lower portion in stacking mode. The upper cavity is sealed on the lower cavity, and a waveguide cavity with a hollow-out structure is arranged at the combining position of the upper cavity and the lower cavity and is located in the lower cavity. A third resonant cavity is connected with a waveguide output section in series through a fifth sensitive coupling window. A waveguide input section, a first sensitive coupling window, a first resonant cavity, a third sensitive coupling window, a second resonant cavity, a second sensitive coupling window and the waveguide output section are sequentially connected in series to form a coupling path to serve as a main signal channel. The waveguide input section, a fourth sensitive coupling window, a third resonant cavity, a fifth sensitive coupling window and the waveguide output section are sequentially connected in series to form a second coupling path for forming a transmission zero point at the passband low end. The terahertz waveguide cavity filter has the advantages that a passband of the waveguide cavity filter is in a frequency range of 380-390GHz, communication and the like under specified conditions can be achieved by utilizing an atmospheric absorption window in the frequency range.
Description
Technical field
The invention belongs to Terahertz passive device technical field, particularly a kind of WR2.2(cross-sectional area based on the body silicon etching process that is applicable to 325 ~ 500GHz frequency range is the rectangular waveguide cavity band-pass filter of 0.56mm * 0.28mm).
Background technology
The Terahertz frequency refers generally to the electromagnetic band in 300GHz～3000GHz scope, it is positioned at microwave frequency band (300MHz～300GHz) and between the infrared frequency range, be limited to technical merit, the past never obtains utilizing, and becomes one section Terahertz blank (Terahertz Gap).Because electromagnetic spectrum is day by day crowded, the following frequency spectrum resource of 300GHz is developed totally, and this section " blank " is needed badly and is used.In recent years, along with the progress of technology, the device and the systematic research that are applicable to the Terahertz frequency range are carried out, wherein become the focus of present research as the important composition parts-terahertz filter of Terahertz system.But at the different frequency range of Terahertz frequency separation, electromagnetic transmission has different characteristics, and therefore, there is very large difficulty in the waveguide filter that research and development are applicable to the Terahertz frequency range of special frequency channel.In order to expand the scope of utilizing of frequency spectrum resource, change the day by day crowded present situation of electromagnetic spectrum, research and development are the problems of scientific worker's facing in affiliated field applicable to the waveguide filter of Terahertz frequency special frequency channel.
Filter is a two-port network, and its characteristic by providing signal to transmit and provide decay in the filter passband frequency in stopband is in order to the frequency response in somewhere in the selective system.Typical frequency response comprises low pass, high pass, band is logical and band resistance characteristic.Filter has been widely used in various types of communications, radar test or the measuring system in fact.The way of realization of filter mainly is divided into planar circuit (microstrip line, co-planar waveguide etc.) and metallic cavity circuit (rectangular waveguide), realizes that principle is that the form of one or more resonant elements by coupling coupled together, and realizes certain frequency response.Its frequency response is directly determined by the characteristic of resonant element, power and the overall structure topology of unit coupling: the resonant element characteristic mainly comprises its concrete shape and Q value; The form of coupling then can be divided into according to the field distribution on the coupling surface coupling of magnetic coupling, electric coupling and mixed form, can be divided into according to the character of coupling surface place equivalent electric circuit again capacitive coupling, inductive coupled etc.; The overall structure topology then determines exponent number, zero pole location of filter.Present Terahertz frequency range, traditional planar circuit filter can't use because its dielectric loss is too high; Because its structure is trickle, the traditional metal processing technology can't realize the simple metal waveguide circuit again; Other photon crystal structure filter is short of again versatility, so also lack the filter form performance maturation, that have versatility.
Summary of the invention
The objective of the invention is provides a kind of terahertz waveguide cavity body filter that can be applicable to 325～500GHz frequency range for the existing deficiency of filter on the Terahertz frequency range, makes every effort to change the present situation that present Terahertz frequency range lacks universal filter.
Technical scheme of the present invention is: the terahertz waveguide cavity body filter, consisted of with the lower chamber that is positioned at the bottom is stacked by superposed upper cavity, described upper cavity is sealed on the lower chamber and has the waveguide cavity that engraved structure forms in both junctions, and described waveguide cavity is positioned at lower chamber; It is characterized in that, described waveguide cavity comprises waveguide input section and the waveguide deferent segment that is cuboid, between waveguide input section and waveguide deferent segment and also be the first resonant cavity of cuboid, the second resonant cavity and the 3rd resonant cavity, connect by the first inductive coupled window between described waveguide input section and the first resonant cavity, described the first resonant cavity is connected by the 3rd inductive coupled window with the second resonant cavity, described the second resonant cavity is connected by the second inductive coupled window with the waveguide deferent segment, by the 4th inductive coupled window series connection, connect by the 5th inductive coupled window between described the 3rd resonant cavity and the waveguide deferent segment between described waveguide input Duan Yudi three resonant cavitys; Described waveguide input section, the first inductive coupled window, the first resonant cavity, the 3rd inductive coupled window, the second resonant cavity, the second inductive coupled window and waveguide deferent segment are followed in series to form coupling path one as main signal path; Described waveguide input section, the 4th inductive coupled window, the 3rd resonant cavity, the 5th inductive coupled window and waveguide deferent segment are followed in series to form coupling path two, are used for forming a transmission zero at the passband low side; The middle part of described the first resonant cavity, the second resonant cavity and the 3rd resonant cavity has the boss in order to three resonant cavitys in interval, waveguide input section and waveguide deferent segment.
The invention has the beneficial effects as follows: wave-guide cavity wave filter passband of the present invention is positioned at 380 ~ 390GHz frequency range, can utilize the atmospheric window of 94GHz to realize the high-power output of quadruple, can utilize again the characteristics such as communication under this frequency range Atmospheric Absorption window realization specified conditions, have good transmission performance.Abandon simultaneously the filter of prior art at the project organization of upper and lower half filter structure of cavity difference etching, might produce the inaccurate problem of contraposition when having avoided upper and lower cavity closed fully, greatly improved the processing and fabricating of filter.
Description of drawings
Fig. 1 is terahertz waveguide cavity body filter master TV structure schematic diagram of the present invention.
Fig. 2 is terahertz waveguide cavity body filter plan structure schematic diagram of the present invention.
Fig. 3 is the main TV structure schematic diagram of the lower chamber of terahertz waveguide cavity body filter of the present invention.
Fig. 4 is the plan structure schematic diagram of the lower chamber of terahertz waveguide cavity body filter of the present invention.
Fig. 5 is the critical size schematic diagram of plan structure of the lower chamber of terahertz waveguide cavity body filter of the present invention.
Fig. 6 is the test curve of terahertz waveguide cavity body filter of the present invention under 325 ~ 440GHz frequency range.
Description of reference numerals: upper cavity 1, lower chamber 2, waveguide cavity 3, waveguide input section 4, waveguide deferent segment 5, the first resonant cavity 6, the second resonant cavity 7, the 3rd resonant cavity 8, the first inductive coupled window 9, the second inductive coupled window 10, the 3rd inductive coupled window 11, the 4th inductive coupled window 12, the 5th inductive coupled window 13, boss 14, short-circuit end 15, short-circuit end 16.
Embodiment
The inventor of the present patent application finds that under study for action in the Terahertz frequency range, the dielectric loss of various dielectric materials sharply increases, and the filter that contains Filled Dielectrics is difficult to be applied in this frequency range, for example based on the flat filter of little band.The inventor finds simultaneously, in 380 ~ 390GHz of its passband Terahertz frequency range, can utilize the atmospheric window of 94GHz to realize the high-power output of quadruple, can utilize again the communication under this frequency range Atmospheric Absorption window realization specified conditions.The inventor is based on above-mentioned discovery, researched and developed out the terahertz waveguide cavity body filter that passband is positioned at 380 ~ 390GHz.
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, the terahertz waveguide cavity body filter that the present patent application provides, by superposed upper cavity 1 be positioned at that the lower chamber 2 of bottom is stacked to be consisted of, described upper cavity 1 is sealed on the lower chamber 2 and has the waveguide cavity 3 that engraved structure forms in both junctions, and described waveguide cavity 3 is positioned at lower chamber 2; It is characterized in that, described waveguide cavity 3 comprises waveguide input section 4 and the waveguide deferent segment 5 that is cuboid, between waveguide input section 4 and waveguide deferent segment 5 and also be the first resonant cavity 6 of cuboid, the second resonant cavity 7 and the 3rd resonant cavity 8, connect by the first inductive coupled window 9 between described waveguide input section 4 and the first resonant cavity 6, described the first resonant cavity 6 is connected by the 3rd inductive coupled window 11 with the second resonant cavity 7, described the second resonant cavity 7 is connected by the second inductive coupled window 10 with waveguide deferent segment 5, connect by the 4th inductive coupled window 12 between described waveguide input section 4 and the 3rd resonant cavity 8, connect by the 5th inductive coupled window 13 between described the 3rd resonant cavity 8 and the waveguide deferent segment 5; Described waveguide input section the 4, first inductive coupled window 9, the first resonant cavity 6, the 3rd inductive coupled window 11, the second resonant cavity 7, the second inductive coupled window 10 and waveguide deferent segment 5 are followed in series to form coupling path one as main signal path, are used to form the second order band-pass filtering property that centre frequency is positioned at 385GHz; Described waveguide input section the 4, the 4th inductive coupled window 12, the 3rd resonant cavity 8, the 5th inductive coupled window 13 and waveguide deferent segment 5 are followed in series to form coupling path two, be used for forming a transmission zero at the passband low side, thereby optimize bandpass filtering at the Out-of-band rejection of low side; The middle part of described the first resonant cavity 6, the second resonant cavity 7 and the 3rd resonant cavity 8 has the boss 14 in order to three resonant cavitys in interval, waveguide input section 4 and waveguide deferent segment 5.
Above-mentioned waveguide cavity 3 is take air as filled media, upper cavity 1 and lower chamber 2 are silica-based gold-plated material, waveguide input section 4 and the waveguide deferent segment 5 of waveguide cavity 3 are standard WR2.2 rectangular waveguide, and wide, the high size of cross section is respectively 560 μ m ± 5 μ m, 280 μ m ± 5 μ m.
The present invention is described further below in conjunction with the drawings and specific embodiments, and by embodiment the present invention is further described specifically.
Shown in Figure 4 and 5, the waveguide cavity of THz wave waveguide filter mainly is made of waveguide input section 4, waveguide deferent segment 5 and 3 rectangular cavities (6,7,8) between waveguide input section 4 and waveguide deferent segment 5.Waveguide input section 4, waveguide deferent segment 5 are the standard rectangular waveguide of WR2.2 specification, and wide, the high size of cross section is respectively 0.56mm ± 5 μ m, 0.28mm ± 5 μ m.Whole filter structure is made of waveguide input section 4, the 5 two sections WR2.2 standard rectangular waveguide of waveguide deferent segment and three rectangular cavities, be separated to form by inductive coupled window (9,10,11,12,13) between each structure, be divided into two signal coupling paths from principle, coupling path one is positioned at the first resonant cavity 6 and the second resonant cavity 7 of 385Ghz through two resonance frequencys of right side series connection, be main signal path, be used to form the second order band-pass filtering property that centre frequency is positioned at 385GHz, the thickness of three inductive coupled windows and width will determine the frequency response waveform therebetween; Coupling path two is used for forming a transmission zero at the passband low side through the rectangular cavity in left side (i.e. the 3rd resonant cavity 8), optimizes bandpass filtering at the Out-of-band rejection of low side.
Coupling path one comprises waveguide input section 4[2403 μ m * (560 ± 5 μ m) * (280 ± 5 μ m)], the first resonant cavity 6[(506 ± 3 μ m) * (506 ± 3 μ m) * (280 ± 5 μ m)], the second resonant cavity 7[(506 ± 3 μ m) * (506 ± 3 μ m) * (280 ± 5 μ m)], waveguide deferent segment 5[2403um * (560 ± 5 μ m) * (280 ± 5 μ m)], the first inductive coupled window 9[(306 between waveguide input section the 4 and first resonant cavity 6 ± 3 μ m) * (44 ± 3 μ m) * (280 ± 5 μ m)], the 3rd inductive coupled window 11[(216 between the first resonant cavity 6 and the second resonant cavity 7 ± 3 μ m) * (74 ± 3 μ m) * (280 ± 5 μ m)], the second inductive coupled window 10[(306 between the second resonant cavity 7 and the waveguide deferent segment 5 ± 3 μ m) * (44 ± 3 μ m) * (280 ± 5 μ m)].Data in the square brackets have represented respectively the resonant cavity of cuboid and coupling window at length and width and high three-dimensional dimension, the error amount that its three-dimensional dimension of ± expression allows.
Coupling path two comprises waveguide input section 4[2403um * (560 ± 5 μ m) * (280 ± 5 μ m)], the 3rd resonant cavity 8[(506 ± 3 μ m) * (806 ± 3 μ m) * (280 ± 5 μ m)], waveguide deferent segment 5[2403um * (560 ± 5 μ m) * (280 ± 5 μ m)], the 4th inductive coupled window 12[(206 between waveguide input section the 4 and the 3rd resonant cavity 8 ± 3 μ m) * (114 ± 3 μ m) * (280 ± 5 μ m)], the 5th inductive coupled window 13[(206 between the 3rd resonant cavity 8 and the waveguide deferent segment 5 ± 3 μ m) * (114 ± 3 μ m) * (280 ± 5 μ m)].
The first inductive coupled window 9 is 50 ± 5 μ m apart from the distance of the short-circuit end 15 of waveguide input section 4, the second inductive coupled window 10 is 50 ± 5m apart from the distance of the short-circuit end 16 of waveguide deferent segment 5, the distance of the first inductive coupled window 9 end faces of the 3rd inductive coupled window 11 distances the first resonant cavity 6 is 140 ± 5m, the 4th inductive coupled window 12 is adjacent to waveguide and inputs the short-circuit end 16 that short-circuit end 15, the five inductive coupled windows 13 of section 4 are adjacent to waveguide deferent segment 5.
Above-mentioned inductive coupled window is made of the partition wall that is positioned at its both sides, and the upper limb of partition wall is concordant with the siliceous substrate surface of lower chamber 2, and the lower edge of partition wall is concordant with the resonant cavity bottom surface of lower chamber 2, and namely the height of inductive coupled window also is 280 μ m ± 5 μ m.
In order to realize better purpose of the present invention, the present invention also can further take following technical measures.Following technical measures can be taked separately, also capable of being combined taking, even take in the lump.
Above-mentioned THz wave waveguide filter is the subdivision structure, the faying face of the upper cavity 1 of closed shaping filter waveguide cavity 3 is smooth substrate, the composition surface of lower chamber 2 is for going out the overall structure of filter waveguide cavity by etching and processing on substrate, upper cavity 1 is sealed on lower chamber 3 bondings and consists of the THz wave waveguide filter.The THz wave waveguide filter is taked said structure, can avoid respectively half filter structure of etching of the upper and lower cavity of conventional filter fully, may produce the inaccurate problem of contraposition when upper and lower cavity is closed.
The planar structure of above-mentioned waveguide cavity can be designed to relatively perpendicular to side signal transmission to center line symmetrical, symmetrical such as the center line A-A among relative Fig. 4.
The partition wall of above-mentioned inductive coupled window both sides, its upper limb is concordant with the lower chamber substrate surface, and the lower end is concordant with the resonant cavity bottom surface.
Above-mentioned waveguide cavity preferably takes to go out by etching and processing the overall structure of waveguide cavity on siliceous substrate, again by sputter craft of gilding plating Gold plated Layer on the waveguide cavity structure.The thickness of Gold plated Layer is preferably 2.5 ~ 3.5 μ m.
Terahertz waveguide cavity body filter provided by the invention takes Bulk micro machining processing to produce.Bulk micro machining is representative a kind of in MEMS (Microelectromechanical Systems, the MEMS (micro electro mechanical system)) technique.The MEMS representative be by characteristic size in the integrated system of the assembly of 0.001mm～0.1mm, have the machining accuracy of micron dimension.Bulk micro machining has when guaranteeing certain technological level that processing charges is relatively cheap, processing conditions is relatively simple and the relatively low characteristics of specification requirement.
Described Bulk micro machining, its technological process is roughly as follows:
At first, at the mask layer of Surface Creation one deck different chemical composition of siliceous substrate.
Then, the mode by photoetching generates figure at mask layer, and figure is positioned at the correspondence position of siliceous substrate sections on mask layer that needs corrosion, and the mask layer of this part is removed the siliceous substrate under exposing.
Subsequently; corrode siliceous substrate by the gaseous corrosion agent; obtain the rectangular channel of prescribed depth and shape; the gaseous corrosion agent has anisotropic characteristics; to guarantee that it mainly corrodes in the degree of depth; and mask layer is not had corrosiveness, can protect the siliceous substrate under it not corroded by residual mask layer.
Thereafter, remove residual mask layer by corrosive agent, this corrosive agent is tackled siliceous substrate does not have corrosiveness, and after this operation was finished, only remainder was through the siliceous substrate of etching processing.
After this, on the surface of siliceous substrate, and metallization operations is carried out by the mode of metal sputtering in the surface of rectangular channel.
At last, this substrate and an other substrate of processing through surface metalation are carried out bonding, form a metallized chamber of inner surface, this chamber is the resonant cavity (6 among Fig. 4,7 or 8) of filter.
As shown in Figure 6, terahertz waveguide cavity body filter provided by the invention is the guide filter structure take air as filled media, and namely the building blocks of function of filter is the waveguide take air as filled media.Adopting vector network analyzer system (Agilent N5245A) to expand module (OML-V022VNA2) in conjunction with frequency measures it, measurement result is to be 4.37dB in the loss of 387GHz center frequency point, the 3-dB bandwidth is 12.8GHz(380.6～393.4GHz), reflection is about-20dB, and Out-of-band rejection is greater than 20dB.This means that (325～500GHz) can realize complete filtering performance and lower insertion loss to waveguide filter of the present invention, have solved other form filter because loss is excessive, are difficult to be applied in the difficult problem of this frequency range at the Terahertz low side.
Wave-guide cavity wave filter passband of the present invention is positioned at 380 ~ 390GHz frequency range, can utilize the atmospheric window of 94GHz to realize the high-power output of quadruple, can utilize again the characteristics such as communication under this frequency range Atmospheric Absorption window realization specified conditions, have good transmission performance.
THz wave waveguide filter provided by the invention, structural design has been taked with the upper cavity of smooth substrate as closed shaping filter waveguide cavity, go out the overall structure of filter waveguide cavity on as the substrate of lower chamber by etching and processing, upper cavity is sealed on the lower chamber bonding and consists of the THz wave waveguide filter, abandoned the filter of prior art at the project organization of upper and lower half filter structure of cavity difference etching, might produce the inaccurate problem of contraposition when having avoided upper and lower cavity closed fully, greatly improve the processing and fabricating of filter.
Terahertz waveguide cavity body filter of the present invention adopts WR2.2 standard rectangular Waveguide interface, has the operating frequency height, and loss is little, is easy to make, and the advantages such as highly versatile have a good application prospect in the Terahertz system.
Be necessary to be pointed out that at this that top embodiment just is used for further setting forth the present invention, so that those of ordinary skill in the art understands the present invention better.The present invention has disclosed its first-selected embodiment by literal; but but can understand wherein optimization and alterability by reading these technology explanatory notes; and improve not departing from scope and spirit of the present invention, but such improvement should still belong to the protection range of claim of the present invention.
Claims (10)
1. the terahertz waveguide cavity body filter is made of with the lower chamber that is positioned at the bottom is stacked superposed upper cavity, and described upper cavity is sealed on the lower chamber and has the waveguide cavity that engraved structure forms in both junctions, and described waveguide cavity is positioned at lower chamber; It is characterized in that, described waveguide cavity comprises waveguide input section and the waveguide deferent segment that is cuboid, between waveguide input section and waveguide deferent segment and also be the first resonant cavity of cuboid, the second resonant cavity and the 3rd resonant cavity, connect by the first inductive coupled window between described waveguide input section and the first resonant cavity, described the first resonant cavity is connected by the 3rd inductive coupled window with the second resonant cavity, described the second resonant cavity is connected by the second inductive coupled window with the waveguide deferent segment, by the 4th inductive coupled window series connection, connect by the 5th inductive coupled window between described the 3rd resonant cavity and the waveguide deferent segment between described waveguide input Duan Yudi three resonant cavitys; Described waveguide input section, the first inductive coupled window, the first resonant cavity, the 3rd inductive coupled window, the second resonant cavity, the second inductive coupled window and waveguide deferent segment are followed in series to form coupling path one as main signal path; Described waveguide input section, the 4th inductive coupled window, the 3rd resonant cavity, the 5th inductive coupled window and waveguide deferent segment are followed in series to form coupling path two, are used for forming a transmission zero at the passband low side; The middle part of described the first resonant cavity, the second resonant cavity and the 3rd resonant cavity has the boss in order to three resonant cavitys in interval, waveguide input section and waveguide deferent segment.
2. terahertz waveguide cavity body filter according to claim 1 is characterized in that, waveguide input section and the waveguide deferent segment of described waveguide cavity are standard WR2.2 rectangular waveguide.
3. terahertz waveguide cavity body filter according to claim 1 is characterized in that, three resonant cavity space structures of described waveguide cavity are cuboid.
4. terahertz waveguide cavity body filter according to claim 1 is characterized in that, five inductive coupled window space structures of described waveguide cavity are cuboid.
5. terahertz waveguide cavity body filter according to claim 1, it is characterized in that, described inductive coupled window is made of the partition wall that is positioned at its both sides, and the upper limb of partition wall is concordant with the siliceous substrate surface of lower chamber, and the lower edge of partition wall is concordant with the resonant cavity bottom surface of lower chamber.
6. terahertz waveguide cavity body filter according to claim 5, it is characterized in that, the described first inductive coupled window is 50 ± 5 μ m apart from the distance of the short-circuit end of waveguide input section, the second inductive coupled window is 50 ± 5 μ m apart from the distance of the short-circuit end of waveguide deferent segment, the distance of the first inductive coupled window end face of the 3rd inductive coupled window distance the first resonant cavity is 140 ± 5 μ m, the 4th inductive coupled window is adjacent to the short-circuit end of waveguide input section, and the 5th inductive coupled window is adjacent to the short-circuit end of waveguide deferent segment.
7. terahertz waveguide cavity body filter according to claim 1 is characterized in that, the planar structure of described waveguide cavity can be designed to relatively perpendicular to side signal transmission to center line symmetrical.
8. terahertz waveguide cavity body filter according to claim 1 is characterized in that, above-mentioned waveguide cavity takes to go out by etching and processing the overall structure of waveguide cavity on siliceous substrate, again by sputter craft of gilding plating Gold plated Layer on the waveguide cavity structure.
9. terahertz waveguide cavity body filter according to claim 8 is characterized in that, the thickness of described Gold plated Layer is 2.5 ~ 3.5 μ m.
10. terahertz waveguide cavity body filter according to claim 8 is characterized in that, above-mentioned waveguide cavity is take air as filled media.
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Cited By (10)
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| CN104183896A (en) * | 2014-08-11 | 2014-12-03 | 电子科技大学 | Four-port device testing structure applicable to terahertz frequency band |
| CN104658837A (en) * | 2015-02-09 | 2015-05-27 | 中国科学院电子学研究所 | Terahertz electromagnetic wave power transmission window provided with dual-wedge long-strip-shaped rectangular window flake |
| CN104795620A (en) * | 2015-04-10 | 2015-07-22 | 电子科技大学 | Manufacturing method of terahertz waveguide passive device |
| CN104795616A (en) * | 2015-04-17 | 2015-07-22 | 电子科技大学 | Cross-coupled terahertz rectangular cavity filter with transmission zeros |
| CN105893682A (en) * | 2016-04-05 | 2016-08-24 | 电子科技大学 | Optimum design method based on overall performance of terahertz frequency band device |
| CN109546275A (en) * | 2018-12-07 | 2019-03-29 | 中国船舶重工集团公司第七二四研究所 | A kind of high-performance isomery cavity Terahertz duplexer |
| CN110932672A (en) * | 2019-11-18 | 2020-03-27 | 东南大学 | Full-band terahertz quadrupler module |
| CN113241507A (en) * | 2021-05-10 | 2021-08-10 | 南京智能高端装备产业研究院有限公司 | Rectangular cavity band-pass filter based on stacked structure |
| CN113315475A (en) * | 2021-05-28 | 2021-08-27 | 中电科思仪科技股份有限公司 | Terahertz broadband down-conversion device and working method thereof |
| CN114824706A (en) * | 2022-04-22 | 2022-07-29 | 电子科技大学 | Integrally processed filter and method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104183896B (en) * | 2014-08-11 | 2016-11-09 | 电子科技大学 | It is applicable to four port devices test structures of Terahertz frequency range |
| CN104183896A (en) * | 2014-08-11 | 2014-12-03 | 电子科技大学 | Four-port device testing structure applicable to terahertz frequency band |
| CN104658837A (en) * | 2015-02-09 | 2015-05-27 | 中国科学院电子学研究所 | Terahertz electromagnetic wave power transmission window provided with dual-wedge long-strip-shaped rectangular window flake |
| CN104795620A (en) * | 2015-04-10 | 2015-07-22 | 电子科技大学 | Manufacturing method of terahertz waveguide passive device |
| CN104795620B (en) * | 2015-04-10 | 2017-08-25 | 电子科技大学 | A kind of manufacture method of terahertz waveguide passive device |
| CN104795616A (en) * | 2015-04-17 | 2015-07-22 | 电子科技大学 | Cross-coupled terahertz rectangular cavity filter with transmission zeros |
| CN105893682A (en) * | 2016-04-05 | 2016-08-24 | 电子科技大学 | Optimum design method based on overall performance of terahertz frequency band device |
| CN109546275A (en) * | 2018-12-07 | 2019-03-29 | 中国船舶重工集团公司第七二四研究所 | A kind of high-performance isomery cavity Terahertz duplexer |
| CN110932672A (en) * | 2019-11-18 | 2020-03-27 | 东南大学 | Full-band terahertz quadrupler module |
| CN113241507A (en) * | 2021-05-10 | 2021-08-10 | 南京智能高端装备产业研究院有限公司 | Rectangular cavity band-pass filter based on stacked structure |
| CN113315475A (en) * | 2021-05-28 | 2021-08-27 | 中电科思仪科技股份有限公司 | Terahertz broadband down-conversion device and working method thereof |
| CN114824706A (en) * | 2022-04-22 | 2022-07-29 | 电子科技大学 | Integrally processed filter and method thereof |
| CN114824706B (en) * | 2022-04-22 | 2023-06-23 | 电子科技大学 | Integrated filter and method thereof |
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Application publication date: 20130522 |