CN104658837A - Terahertz electromagnetic wave power transmission window provided with dual-wedge long-strip-shaped rectangular window flake - Google Patents
Terahertz electromagnetic wave power transmission window provided with dual-wedge long-strip-shaped rectangular window flake Download PDFInfo
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- CN104658837A CN104658837A CN201510065469.8A CN201510065469A CN104658837A CN 104658837 A CN104658837 A CN 104658837A CN 201510065469 A CN201510065469 A CN 201510065469A CN 104658837 A CN104658837 A CN 104658837A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/36—Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy
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Abstract
The invention discloses a terahertz electromagnetic wave power transmission window provided with a dual-wedge long-strip-shaped rectangular window flake and a manufacturing method for the power transmission window. The power transmission window comprises two semi-waveguide plates and one dual-wedge long-strip-shaped rectangular window flake, wherein the dual-wedge long-strip-shaped rectangular window flake is assembled between the semi-waveguide plates and inlaid in an open slot of the semi-waveguide plates; contact surfaces among the semi-waveguide plates and the dual-wedge long-strip-shaped rectangular window flake are welded mutually for guaranteeing air-tightness. The total length of the power transmission window provided with the dual-wedge long-strip-shaped rectangular window flake is not limited by wavelength, so that implementation of subsequent metalizing process and the like can be guaranteed and the finished power transmission window is obtained; due to the design of a novel manufacturing process, conventional solder wires and solder sheets are replaced with plated copper films and gold films, so that part deformation in a welding process is reduced; in addition, external thermal pressure is applied to the to-be-welded power transmission window through a mould, so that close contact of welding surfaces is guaranteed and the air-tightness and reliability are improved.
Description
Technical field
The present invention relates to Terahertz delivery of energy device, relate more specifically to the two wedge elongated rectangular shape window delivery of energy window of a kind of terahertz electromagnetic wave.
Background technology
Last decade comes, and has all occurred the upsurge studied Terahertz (0.1THz ~ 10THz) technology both at home and abroad, has occurred huge application prospect simultaneously.Such as, passively observing in the radio astronomical telescope of steller radiation, needing terahertz electromagnetic wave source as local vibration source; Utilize THz transmission and far-infrared frequency spectrometer can study the Rotational Absorption spectrum of the HCl of dissolving; Terahertz imaging system can detect the concealed object within the packing materials such as plastics; Can also be applied to communication, Japanese NTT Developed in 2006 can cover the too box communication demonstration system of 1.5 kilometers; Militarily also have broad prospect of application, the U.S. has succeeded in developing the spaceborne imaging radar that works in W-waveband and has been operated in 0.225THz airborne imaging radar system.
On the other hand, the electron tube taking travelling wave tube as representative, as great-power electromagnetic baud generator part or amplifying device, also marches towards Terahertz frequency spectrum at present, thus develops the Terahertz electron tube being applied to Terahertz frequency spectrum.Such as, Russia has developed until the carcinotron of 1THz, the U.S. has developed until the travelling wave tube of 0.22THz, CPI Canada Company has developed until the distribution acting chamber oscillator/amplifier (Extended Interaction Oscillator (EIO)/Extended InteractionAmplifier (EIA)) of 0.3THz, domesticly also have developed until the travelling wave tube of 0.1THz.
Because the electron tubes such as travelling wave tube rely on electron beam in a vacuum produce or amplify electromagnetic, therefore requirement must have a delivery of energy window to be transported to pipe in pipe by electromagnetic wave.Under small-power condition, coaxial delivery of energy window is until 40GHz (0.04THz) has superior performance.But in high-power situation, even if the frequency range near 30GHz, because the size of coaxial delivery of energy structure is less, high-frequency loss is comparatively large, is therefore no longer suitable for high-power applications.After power is greater than 50W, it is the delivery of energy window construction of interface that all kinds of millimeter wave traveling wave tubes reported both at home and abroad adopt mostly with waveguide.Be that the delivery of energy window construction of interface has Pill-Box Window and Litton window etc. with waveguide, what wherein most was typical is Pill-Box Window, its typical structure as shown in Figure 1, wherein Fig. 1 (a) is front view, Fig. 1 (b) is profile, Fig. 1 (c) is top view, and Fig. 1 d waits axle graphics.As known in the figure, the core of this window is circular window, and calculate and show frequency domain near 30GHz, the size of Pill-Box Window window is about φ 11.6mm × 0.3mm, and near 0.3THz frequency domain, narrowed down to as φ 2.32mm × 0.06mm in the size of the known Pill-Box Window window of wavelength ratio.According to the existing manufacturing process of Pill-Box Window, need window to metallize at the position with conductor contact outside window, after this also need with solder, window and conductor outside window to be welded, require that the finished product formed has air-tightness.But, with regard to existing manufacturing technology, size is only to the window of φ 2.32mm × 0.06mm, cannot carries out metallization operations to it, also it cannot be welded with conductor outside window.Due to this reason, also do not have the report about the Pill-Box Window working in more than 0.15THz at present, people are also seeking more applicable new structure.
Summary of the invention
In view of this, main purpose of the present invention is to provide a kind of terahertz electromagnetic wave two wedge elongated rectangular shape window delivery of energy window, to realize the output of terahertz electromagnetic wave in high-power applications.
To achieve these goals, as one aspect of the present invention, the invention provides the two wedge elongated rectangular shape window delivery of energy window of a kind of terahertz electromagnetic wave, comprise two pieces half waveguide plate 7 and a two wedge elongated rectangular shape window 8, wherein said pair of wedge elongated rectangular shape window 8 is assemblied between described two pieces half waveguide plate 7, and be embedded in the fluting of described two pieces half waveguide plate 7, the contact-making surface between three is welded to each other, to ensure air-tightness.
Wherein, described half waveguide plate 7 is the flat boards having groove, and the width of described groove is a, and the degree of depth is b/2, and wherein a, b are length and the width of standard rectangular waveguide cavities corresponding to described delivery of energy window working frequency range.
Wherein, when working frequency range is 217 ~ 330GHz, a and b parameter is respectively 0.8636mm and 0.4318mm.
Wherein, the material of described half waveguide plate 7 is selected from Mo, molybdenum-copper, monel or oxygen-free copper.
Wherein, described pair of wedge elongated rectangular shape window 8 is one and respectively has the rectangular slat of a wedge at upper and lower two ends, and the middle part length of described pair of wedge elongated rectangular shape window 8 is L, and wedge length is L1, and L is 1 ~ 3mm, L1 is 1 ~ 3mm.
Wherein, the material of described pair of wedge elongated rectangular shape window 8 is selected from quartz crystal, 99%Al
2o
3pottery, 99%BeO is ceramic, BN is ceramic or sapphire.
As another aspect of the present invention, present invention also offers the manufacture method of the two wedge elongated rectangular shape window delivery of energy window of a kind of terahertz electromagnetic wave, comprise the following steps:
Process half waveguide plate 7, described half waveguide plate 7 plates copper film and golden film successively; Described half waveguide plate 7 of copper facing, gold is placed in hydrogen stove, and under 900 DEG C of conditions, annealing in hydrogen atmosphere 20 minutes, cools for subsequent use;
The two wedge elongated rectangular shape window 8 of processing, metallizes in the respective surfaces of described pair of wedge elongated rectangular shape window 8; The metallization face of described pair of wedge elongated rectangular shape window 8 plates copper film and golden film successively; Be placed in hydrogen stove by completing described pair of gold-plated wedge elongated rectangular shape window 8, under 900 DEG C of conditions, annealing in hydrogen atmosphere 20 minutes, cools for subsequent use;
Mfg. moulding die, described mould is processed with the fixture can fixing two wedge elongated rectangular shape window delivery of energy windows 6 that described half waveguide plate 7 and the described pair of wedge elongated rectangular shape window 8 are assembled into;
Get half waveguide plate 7 described in two pieces and one described pair wedge elongated rectangular shape window 8, the justify align of half waveguide plate 7 described in two pieces and fluting are relatively, described fluting is embedded in described pair of wedge elongated rectangular shape window 8, thus is assembled into described pair of wedge elongated rectangular shape window delivery of energy window 6;
The described pair of wedge elongated rectangular shape window delivery of energy window 6 obtained is assembled in described mould also fixing;
Described mould is inserted in hydrogen stove, under dry hydrogen atmosphere and 950 DEG C of temperature, be incubated 10 minutes;
Described mould is taken out from hydrogen stove, dismantles described mould and namely obtain described pair of wedge elongated rectangular shape window delivery of energy window 6 finished product.
Wherein, described half waveguide plate 7 is before copper plating film, and described pair of wedge elongated rectangular shape window 8 is before metalized, has carried out clean respectively.
Wherein, when described pair of wedge elongated rectangular shape window 8 carries out metalized, the thickness of metal layer is 1 ~ 2 μm; And the thickness of the described copper film plated and golden film is respectively 1 ~ 2 μm.
Wherein, the material that described mould adopts thermal coefficient of expansion different, can inwardly extrude the workpiece be fixed in described mould under the high temperature conditions.
Known based on technique scheme, tool of the present invention has the following advantages:
(1) core of the present invention is the employing of two wedge elongated rectangular shape window.For the delivery of energy window that the present invention proposes, the width a of window middle part and thickness b is subject to the restriction of the electromagnetic wavelength of working frequency range, but the total length 2 × L1+L of window is not by the restriction of wavelength, longer length can be selected as required, such as, in 0.3THz frequency range, the total length 2 × L1+L of window can be designed as 5 ~ 6mm, therefore ensure to carry out the techniques such as follow-up metallization, and obtain delivery of energy window finished product.And in 0.3THz frequency range, the size having mentioned traditional Pill-Box Window window above has narrowed down to as φ 2.32mm × 0.06mm, can not carry out the techniques such as follow-up metallization, also just can not obtain delivery of energy window finished product.
(2) the present invention is according to proposed new structure, designs corresponding manufacturing process.In this process, utilize the additional solder wire in one deck copper film and one deck gold film replacement conventional bonding technique plated and additional solder sheet, decrease the part deformation in welding procedure.In addition, the present invention propose technique in, by mould to institute for weld delivery of energy window be applied with thermal pressure from outside, ensure that the close contact of solder side, improve air-tightness and reliability.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing Pill-Box Window;
Fig. 2 is the structural representation of of the present invention pair of wedge elongated rectangular shape window delivery of energy window;
Fig. 3 is the structural representation of half waveguide plate of the present invention;
Fig. 4 is the structural representation of of the present invention pair of wedge elongated rectangular shape window;
Fig. 5 is the manufacturing process flow diagram of of the present invention pair of wedge elongated rectangular shape window delivery of energy window;
Fig. 6 is the installation diagram of of the present invention pair of wedge elongated rectangular shape window delivery of energy window and weld mold;
Fig. 7 is the schematic diagram of mould of the present invention.
Description of reference numerals:
Waveguide before 1-window, waveguide after 2-window, 3-first conductor outside window, 4-second conductor outside window, 5-window, the two wedge elongated rectangular shape window delivery of energy window of 6-, 7-half waveguide plate, the two wedge elongated rectangular shape window of 8-, 9-bed die, 10-expanding block, 11-briquetting, 12 1 screws.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The present invention relates to a kind of new structure of terahertz electromagnetic wave delivery of energy window, namely two wedge elongated rectangular shape window delivery of energy window construction, can be described by composition graphs 2 ~ Fig. 4.
As shown in Figure 2, this delivery of energy window is made up of two pieces half waveguide plate 7 and a two wedge elongated rectangular shape window 8.Two wedge elongated rectangular shape window 8 is assembled between two pieces half waveguide plate 7, and is embedded in the fluting of two pieces half waveguide plate 7, the contact-making surface between three will be welded to each other, to ensure air-tightness.
As shown in Figure 3, half waveguide plate 7 is the flat boards having groove.The position of groove can by designer's arbitrary decision, but in figure 3, the center line of this groove overlaps with the long axis centerline in face, place.In the top view of Fig. 3 (c), the width having marked groove is a, and the degree of depth is b/2, and their margin of tolerance is all taken as 0 ~+0.01mm.Wherein, a, b are length and the width of standard rectangular waveguide cavities corresponding to delivery of energy window working frequency range.Such as, a and the b parameter of CNS waveguide BJ2600 (being equivalent to EIA standard waveguide WR3) is respectively 0.8636mm and 0.4318mm, and corresponding working frequency range is 217 ~ 330GHz.This is the most high band having defined standard waveguide size, at more high band, and all also undefined respective standard both at home and abroad, but designer can determine according to knowledge waveguide parameter a and b being suitable for oneself application completely.Other physical dimensions do not relate to core content of the present invention, and designer can decide in its sole discretion according to embody rule.
As shown in Figure 4, two wedge elongated rectangular shape window 8 is one and respectively has the rectangular slat of a wedge at upper and lower two ends.In the top view of Fig. 4 (c), marked width a and the thickness b of window middle part, their margin of tolerance is all taken as-0.01 ~ 0mm, and the defining method of the nominal value of a and b is with above-mentioned.In Fig. 4 (b), mark middle part length L and the wedge length L1 of two wedge elongated rectangular shape window 8.
Be appreciated that the object that the present invention designs wedge is to utilize the transitional function of wedge to improve the matching performance of delivery of energy window according to knowledge, and L1 is longer, then the matching performance of delivery of energy window is better.But oversize wedge is too sharp-pointed, is unfavorable for processing, also easily damages, be also unfavorable for the small size that some application require in addition.Certainly, L1 can not be too short, otherwise can not ensure MIN performance requirement.Author of the present invention utilizes commercial large-scale electromagnetic computing software to calculate to work in the standing-wave ratio of two wedge elongated rectangular shape windows of 0.22THz and 0.3THz, when finding that L1 gets 1 ~ 3mm, standing-wave ratio all can arrive less than 1.2, mean that this delivery of energy window is very not strict to the requirement of L1, easily reach good matching performance.
From the angle of matching performance, due to the transitional function of wedge, the middle part length L of two wedge elongated rectangular shape window 8 is very little on matching performance impact.If but from the angle of manufacturing process, L is longer, the contact-making surface area between two wedge elongated rectangular shape window 8 and two pieces half waveguide plate 7 is also larger, means that available solder side area is also larger, so more easily ensures the air-tightness of delivery of energy window.Certainly, L is long is unfavorable for small size requirement equally, also may introduce larger electromagnetic consumable.Therefore, the minimum value of L should can ensure that air-tightness is as the criterion.Under existing technology condition, L gets 1 ~ 3mm can meet air-tightness requirement.
The invention still further relates to a kind of manufacture method manufacturing above-mentioned pair of wedge elongated rectangular shape window delivery of energy window, can the method be described composition graphs 5 ~ Fig. 7.
Fig. 5 is the manufacturing process flow that the present invention proposes, and this manufacturing process flow can be decomposed into following steps:
Step 1: according to Fig. 3, processes half waveguide plate 7 with CNC milling machine, and as specific embodiment, the present invention preferentially advises using molybdenum (Mo1) material;
With hairbrush and cleanser, half waveguide plate 7 machined is scrubbed, then carry out chemical cleaning with known chemical cleaning method;
On half waveguide plate 7 cleaned, one deck copper film is plated, thickness 1 ~ 2 μm with chemical plating method or vacuum sputtering methods;
On copper-plated half waveguide plate 7, one deck gold film is plated, thickness 1 ~ 2 μm with chemical plating method or vacuum sputtering methods;
Copper facing and half gold-plated waveguide plate 7 are placed in hydrogen stove, annealing in hydrogen atmosphere 20 minutes under 900 DEG C of conditions, half obtained waveguide plate 7 are stored in dry environment for subsequent use;
Step 2: according to Fig. 4, utilize emery wheel cutting equipment able to programme or laser cutting device able to programme to process described pair of wedge elongated rectangular shape window 8, as an embodiment, window materials are quartz crystal;
First utilize known physical cleaning method, utilize known chemical cleaning method to carry out chemical cleaning to described window afterwards;
Utilize known metalization technological process, metallize in the relevant surfaces of described window, metallization layer thickness 1 ~ 2 μm, require that metallized face is that several surface contacted with half waveguide plate 7 on two wedge elongated rectangular shape window 8, mark with " metallization face " printed words in Fig. 4 (c);
One deck copper film is plated in the metallization face of above-mentioned pair of wedge elongated rectangular shape window 8, thickness 1 ~ 2 μm with chemical plating method;
Also can complete the work of this step with vacuum sputtering methods, but at this moment need need not to shelter from other surfaces metallized with suitable mould;
One deck gold film is plated in the metallization face of above-mentioned window, thickness 1 ~ 2 μm with chemical plating method;
Also can complete the work of this step with vacuum sputtering methods, but at this moment need need not to shelter from his surface of metallized tool with suitable mould;
Will metallize and complete copper facing and gold-plated above-mentioned window is placed in hydrogen stove, under 900 DEG C of conditions and under dry hydrogen atmospheric condition, insulation 20 minutes, is stored in dry environment by obtained above-mentioned window for subsequent use;
Step 3: as Fig. 7, with Mo processing bed die 9, with stainless steel processing expanding block 10 and briquetting 11 that label is 1Cr18Ni9Ti, bed die has groove, bed die 9 along groove direction length slightly larger than or the length of two wedge elongated rectangular shape window delivery of energy windows 6 that equals for manufacturing, the degree of depth of groove is slightly shallower than the width of half waveguide plate 7, the width of groove equals two thickness of wedge elongated rectangular shape window delivery of energy window 6 and the thickness sum of expanding block 10 and gets the tolerance of 0 ~ 0.03mm, bed die 9 is processed with the screw of 4 M4 × 8, briquetting 11 is processed with the through hole of 4 φ 4.2, on bed die 9, the centre-to-centre spacing of screw is equal with the centre-to-centre spacing of the through hole on briquetting 11, the length of briquetting 11 and width are substantially equal to length and the width of the grooved surface of bed die 9, the length of expanding block equals or slightly larger than the length of the groove on bed die 9, the nominal value of the width of expanding block 10 is taken as the width of half waveguide plate 7 and gets the tolerance of-0.05mm ~-0.03mm,
Bed die 9, expanding block 10 and briquetting 11 is carried out physical cleaning;
Expanding block 10 and briquetting 11 are placed in hydrogen stove, annealing in hydrogen atmosphere 10 minutes under 450 DEG C of conditions, after taking out, their surface color should become black from silvery white, as nondiscolouring, should be that material therefor is incorrect, correct material should be used again to process and re-start the operation of this step;
Bed die 9, expanding block 10 and briquetting 11 are saved backup;
Step 4: get two pieces half waveguide plate 7 and a two wedge elongated rectangular shape window 8, assemble up according to such as Fig. 2, the justify align of two pieces half waveguide plate 7 and fluting are relatively, their fluting pieces together the inner chamber of the standard waveguide of designed frequency range jointly, this inner chamber is embedded in a two wedge elongated rectangular shape window 8, distance between the wedge end face of two wedge elongated rectangular shape window 8 and the end face of two pieces half waveguide plate 7 can by designer's arbitrary decision, and can control with appropriate mould, because this point is apparent for skilled addressee, therefore repeat no more,
This step assembled after two wedge elongated rectangular shape window delivery of energy windows 6 wait axle graphics as Fig. 2 (c);
Step 5: embedded in the groove of ready bed die 9 in step 3 by the two wedge elongated rectangular shape window delivery of energy windows 6 obtained in step 4, makes the end face of pair wedge elongated rectangular shape window delivery of energy window 6 align with the end face of bed die 9, and near the side of groove;
Expanding block 10 is embedded this groove from the opposite side of groove, the end face of expanding block 10 is also alignd with the end face of bed die 9;
Briquetting 11 is covered on bed die 9, the former through hole is alignd with the screw of the latter, load onto and tighten 4 screws 12;
Two wedge elongated rectangular shape window delivery of energy window 6 after assembling and the structure of related die are as shown in Figure 6;
Step 6: ready for step 5 workpiece and mould are inserted in hydrogen stove, 10 minutes are incubated at 950 DEG C of temperature, now be plated in golden film on half waveguide plate 7 and copper film and the golden film be plated on the metal layer of two wedge elongated rectangular shape window 8 and copper film and all at high temperature form gold-copper congruent melting film, simultaneously, expanding block 10 and briquetting 11 at high temperature can expand, but any expansion of expanding block 10 and briquetting 11 is limited with the bed die 9 of the lower material manufacture of the coefficient of expansion, but impel expanding block 10 and the briquetting 11 inwardly two wedge elongated rectangular shape window delivery of energy window 6 of extruding, two pieces half waveguide plate 7 and the two wedge elongated rectangular shape window 8 that make to form two wedge elongated rectangular shape window delivery of energy window 6 closely contact, at this moment golden copper eutectic surveys diffusion to two of contact-making surface, good infiltration is all formed to two pieces half waveguide plate 7 and a two wedge elongated rectangular shape window 8.Close hydrogen stove thermal source subsequently, workpiece and mould are cooled naturally with hydrogen stove.At this moment, golden copper eutectic is solidified at normal temperatures, two pieces half waveguide plate 7 and a two wedge elongated rectangular shape window 8 is welded closely.
Step 7: workpiece and mould are taken out from hydrogen stove, pulls down from mould the two wedge elongated rectangular shape window delivery of energy windows 6 welded, and it is qualified to detect through special airtight detecting apparatus, both obtains finished product.
Structure of the present invention and manufacture method can have following alternative structure or alternative method:
(1) in the structure shown in Fig. 2, half waveguide plate 7 that two pieces can be replaced equivalent with two pieces of aniso-half waveguide plates, such as the groove depth of wherein one and half waveguide plates 7 can be increased to original 2 times, and be designated half waveguide plate 7a, and the fluting cancelled in other one and half waveguides half, and be designated half waveguide plate 7b, so half waveguide plate 7a and half waveguide plate 7b also can piece together required rectangular waveguide inner chamber, does not therefore affect the manufacture of two wedge elongated rectangular shape window delivery of energy windows proposed by the invention.In a word, the method that the present invention proposes is equivalent to rectangular waveguide subdivision be identical or not identical two halves, they be embedded in two wedge elongated rectangular shape window after, then they to be welded again.As for the concrete mode of subdivision waveguide, the professional and technical personnel of this specialty can make any selection of oneself completely.
(2) material of half waveguide plate 7 shown in shop drawings 3 can also be any suitable materials such as molybdenum-copper, monel and oxygen-free copper, when using oxygenless copper material, can remove the copper-plating technique in above-mentioned manufacturing step 1 from.
(3) shown in shop drawings 4, the material of two wedge elongated rectangular shape window 8 can also be 99%Al
2o
3pottery, 99%BeO is ceramic, BN is ceramic and sapphire.When the material of two wedge elongated rectangular shape window 8 is different, different for carrying out metallized creme composition to it, metallized concrete technology condition is different, but all belongs within the scope of knowledge, need not repeat at this.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave, comprise two pieces half waveguide plate (7) and a two wedge elongated rectangular shape window (8), wherein said pair of wedge elongated rectangular shape window (8) is assemblied between described two pieces half waveguide plate (7), and be embedded in the fluting of described two pieces half waveguide plate (7), contact-making surface between three is welded to each other, to ensure air-tightness.
2. the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 1, wherein said half waveguide plate (7) is a flat board having groove, the width of described groove is a, the degree of depth is b/2, and wherein a, b are length and the width of standard rectangular waveguide cavities corresponding to described delivery of energy window working frequency range.
3. the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 2, wherein when working frequency range is 217 ~ 330GHz, a and b parameter is respectively 0.8636mm and 0.4318mm.
4. the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 1, the material of wherein said half waveguide plate (7) is selected from Mo, molybdenum-copper, monel or oxygen-free copper.
5. the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 1, wherein said pair of wedge elongated rectangular shape window (8) is one and respectively has the rectangular slat of a wedge at upper and lower two ends, the middle part length of described pair of wedge elongated rectangular shape window (8) is L, wedge length is L1, and L is 1 ~ 3mm, L1 is 1 ~ 3mm.
6. the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 1, the material of wherein said pair of wedge elongated rectangular shape window (8) is selected from quartz crystal, 99%Al
2o
3pottery, 99%BeO is ceramic, BN is ceramic or sapphire.
7. a manufacture method for the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave, comprises the following steps:
Process half waveguide plate (7), described half waveguide plate (7) plates copper film and golden film successively; Described half waveguide plate (7) of copper facing, gold is placed in hydrogen stove, and under 900 DEG C of conditions, annealing in hydrogen atmosphere 20 minutes, cools for subsequent use;
The two wedge elongated rectangular shape window (8) of processing, metallizes in the respective surfaces of described pair of wedge elongated rectangular shape window (8); The metallization face of described pair of wedge elongated rectangular shape window (8) plates copper film and golden film successively; Be placed in hydrogen stove by completing described pair of gold-plated wedge elongated rectangular shape window (8), under 900 DEG C of conditions, annealing in hydrogen atmosphere 20 minutes, cools for subsequent use;
Mfg. moulding die, described mould is processed with the fixture can fixing two wedge elongated rectangular shape windows delivery of energy window (6) that described half waveguide plate (7) and the described pair of wedge elongated rectangular shape window (8) are assembled into;
Get half waveguide plate (7) described in two pieces and one described pair wedge elongated rectangular shape window (8), the justify align of half waveguide plate (7) described in two pieces and fluting are relatively, described fluting is embedded in described pair of wedge elongated rectangular shape window (8), thus is assembled into described pair of wedge elongated rectangular shape window delivery of energy window (6);
Described pair of wedge elongated rectangular shape window delivery of energy window (6) obtained is assembled in described mould also fixing;
Described mould is inserted in hydrogen stove, under dry hydrogen atmosphere and 950 DEG C of temperature, be incubated 10 minutes;
Described mould is taken out from hydrogen stove, dismantles described mould and namely obtain described pair of wedge elongated rectangular shape window delivery of energy window (6) finished product.
8. the manufacture method of the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 7, wherein said half waveguide plate (7) is before copper plating film, and described pair of wedge elongated rectangular shape window (8) is before metalized, has carried out clean respectively.
9. the manufacture method of the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 7, when wherein said pair of wedge elongated rectangular shape window (8) carries out metalized, the thickness of metal layer is 1 ~ 2 μm; And the thickness of the described copper film plated and golden film is respectively 1 ~ 2 μm.
10. the manufacture method of the two wedge elongated rectangular shape window delivery of energy window of terahertz electromagnetic wave as claimed in claim 7, the material that wherein said mould adopts thermal coefficient of expansion different, can inwardly extrude the workpiece be fixed in described mould under the high temperature conditions.
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| CN109545639A (en) * | 2018-11-06 | 2019-03-29 | 北京大学 | A kind of Terahertz travelling-wave tubes ultra wide band quasi-optical output system and preparation method thereof |
| CN109637918A (en) * | 2018-12-18 | 2019-04-16 | 中国电子科技集团公司第十二研究所 | A kind of delivery of energy window improving reliability |
| CN109742005A (en) * | 2019-02-27 | 2019-05-10 | 电子科技大学 | A kind of coaxial delivery of energy window suitable for wideband high-power |
| CN111243920A (en) * | 2020-01-21 | 2020-06-05 | 电子科技大学 | Planar microwave energy transmission window |
| CN113773059A (en) * | 2021-09-24 | 2021-12-10 | 宜宾红星电子有限公司 | Manufacturing process of miniaturized ceramic window sheet for high-frequency electric vacuum device |
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| CN109545639A (en) * | 2018-11-06 | 2019-03-29 | 北京大学 | A kind of Terahertz travelling-wave tubes ultra wide band quasi-optical output system and preparation method thereof |
| CN109545639B (en) * | 2018-11-06 | 2019-12-13 | 北京大学 | terahertz traveling wave tube ultra-wideband quasi-optical output system and preparation method thereof |
| CN109637918A (en) * | 2018-12-18 | 2019-04-16 | 中国电子科技集团公司第十二研究所 | A kind of delivery of energy window improving reliability |
| CN109742005A (en) * | 2019-02-27 | 2019-05-10 | 电子科技大学 | A kind of coaxial delivery of energy window suitable for wideband high-power |
| CN109742005B (en) * | 2019-02-27 | 2020-06-12 | 电子科技大学 | Coaxial energy transmission window suitable for broadband high power |
| CN111243920A (en) * | 2020-01-21 | 2020-06-05 | 电子科技大学 | Planar microwave energy transmission window |
| CN111243920B (en) * | 2020-01-21 | 2021-07-13 | 电子科技大学 | Planar microwave energy transmission window |
| CN113773059A (en) * | 2021-09-24 | 2021-12-10 | 宜宾红星电子有限公司 | Manufacturing process of miniaturized ceramic window sheet for high-frequency electric vacuum device |
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