CN103117269B - Fuse wire assembly, fuse wire assembly manufacturing method and equipment - Google Patents
Fuse wire assembly, fuse wire assembly manufacturing method and equipment Download PDFInfo
- Publication number
- CN103117269B CN103117269B CN201110362885.6A CN201110362885A CN103117269B CN 103117269 B CN103117269 B CN 103117269B CN 201110362885 A CN201110362885 A CN 201110362885A CN 103117269 B CN103117269 B CN 103117269B
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- width
- fuse
- metal fuse
- dielectric layer
- metal
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- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Fuses (AREA)
Abstract
The invention discloses a fuse wire assembly which is used for improving mechanical properties of metal fuse wires. The fuse wire assembly comprises a substrate layer and a metal fuse wire, wherein the metal fuse wire is arranged on the upper surface of the substrate layer and is provided with four side faces, and the metal fuse wire is divided into two portions including a first portion and a second portion according to the width of the metal fuse wire, the width of the first portion is a first width value, and the width of the second portion is a second width value. The fuse wire assembly is characterized in that protective layers are covered on the upper surface of the first portion and the four side faces, the second portion is arranged in a protective cavity body, and a through hole is formed in the protective cavity body which is arranged above the second portion. The invention further discloses a fuse wire assembly manufacturing method and equipment.
Description
Technical field
The present invention relates to electricity and mechanical field, particularly a kind of fuse assembly, fuse assembly manufacture method and equipment.
Background technology
In integrated circuit design, designer needs the resistance value being carried out some resistance in regulating circuit by the metal fuse (Metal fuse) increasing some in circuit, make the resistance of some resistance in circuit adjustable, thus meet the specific function of circuit.In concrete process for making, the metal fuse of some need be produced, then when IC chip test, can regulate by blowing or retaining the resistance of these metal fuses to resistance.Therefore metal fuse is needed to possess following feature: can be easy to when needs blow metal fuse blow, and need when not needing to blow to keep preferably connecting, namely metal fuse is needed to have certain mechanical stress, avoid the existence due to external force to cause metal fuse to rupture, thus affect the performance of circuit.
Present inventor, in the process realizing the embodiment of the present application technical scheme, at least finds to there is following technical problem in prior art:
Due to the defect of this body structure of metal fuse, cause metal fuse and be easy to rupture due to the impact of external force in the course of processing of integrated circuit (IC) chip.And in prior art, also do not solve the method for this problem.
Summary of the invention
The embodiment of the present invention provides a kind of fuse assembly, fuse assembly manufacture method and equipment, for improving the mechanical performance of metal fuse.
A kind of fuse assembly; comprise: dielectric layer; be positioned at the metal fuse that one of described dielectric layer upper surface has four sides; described metal fuse is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width; three sides belonging to described Part I in the upper surface of described Part I and described four sides are coated with protective layer; described Part II is arranged in a protection cavity, is positioned on the described protection cavity above described Part II and is provided with a through hole.
A kind of fuse assembly manufacture method, comprises the following steps:
Generate dielectric layer;
At described dielectric layer upper surface, the metal fuse that has four sides is set; Described metal fuse is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width;
Three side protective mulches of described Part I are belonged in the upper surface and described four sides of described Part I;
Make described Part II be arranged in a protection cavity, be wherein positioned on the described protection cavity above described Part II and be provided with a through hole.
A kind of fuse assembly manufacturing equipment, comprising:
Generating apparatus, for generating dielectric layer;
First operating means, for arranging at described dielectric layer upper surface the metal fuse that has four sides; Described metal fuse is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width;
Processing unit, for belonging to three side protective mulches of described Part I in the upper surface and described four sides of described Part I;
Second operating means, for making described Part II be arranged in a protection cavity, being wherein positioned on the described protection cavity above described Part II and being provided with a through hole.
Make metallic fuse portion be arranged in protective layer in the embodiment of the present invention, in the course of processing of integrated circuit (IC) chip, metal fuse is just not easily out of shape because of the impact of external force or ruptures, thus ensures the normal work of circuit.
Accompanying drawing explanation
Fig. 1 is the profile of fuse assembly in the embodiment of the present invention;
Fig. 2 is the profile of fuse assembly in prior art;
Fig. 3 is the primary structure figure of fuse assembly manufacturing equipment in the embodiment of the present invention;
Fig. 4 is the main flow figure of fuse assembly manufacture method in the embodiment of the present invention.
Embodiment
Make metallic fuse portion be arranged in protective layer in the embodiment of the present invention, in the course of processing of integrated circuit (IC) chip, metal fuse is just not easily out of shape because of the impact of external force or ruptures, thus ensures the normal work of circuit.
See Fig. 1, be the profile of fuse assembly in the embodiment of the present invention, comprising metal fuse 101, dielectric layer 102 and protective layer 103.Part relative with metal fuse 101 on described protective layer 103 can have a through hole.
In Fig. 1, dielectric layer 102 is positioned at bottom, can take ground level as the plane of reference in the embodiment of the present invention, and dielectric layer 102 can think that being parallel to ground level places.The material manufacturing dielectric layer 102 can be silicon dioxide (SiO
2), dielectric layer 102 can by silicon directly and oxygen reaction generation, and its quality is comparatively fine and close.
Metal fuse 101 is positioned at dielectric layer 102 upper surface.Preferably, a metal fuse 101 can be comprised in a fuse assembly.A metal fuse 101 can be a bonding jumper, and metal used can be the good metals of electric conductivity such as aluminium (Al), copper (Cu), silver (Ag).Metal fuse 101 can have four sides.In prior art, as shown in Figure 2, the size of metal fuse is probably equal with the size of through hole on protective layer, and namely metal fuse is just in time oppositely arranged with described through hole.And in the embodiment of the present invention as shown in Figure 1, be divided into metal fuse 101 width be the Part I of the first width value and width being the Part II of the second width value by its width, the first width value and the second width value sum are the width of metal fuse 101.Described Part I is arranged in protective layer 103; even three sides belonging to described Part I in the upper surface of described Part I and described four sides are coated with protective layer 103; this first width value can be greater than zero, and is less than the width of metal fuse 101.Make described Part II be arranged in a protection cavity, be positioned on the described protection cavity above described Part II and be provided with a through hole.In Fig. 1, the Part I of metal fuse 101 is represented by dashed line.Described protection cavity can be made up of protective layer 103; namely protective layer 103 position be positioned at above described Part II is provided with a through hole; after metal fuse 101 is blown; the metal blown can drop from described through hole or volatilize; original position can not be remained in, the metal fuse 101 blown also can not be made to couple together again.Preferably, as shown in Figure 1, the first width value can equal the second width value.Like this when not needing to blow metal fuse 101, these metal fuses 101 are difficult to cause distortion or fracture because of the impact of external force again, affect the normal function of circuit.And when needs blow metal fuse 101, metal fuse 101 also still can normally be blown, and can drop from described through hole or volatilize.
Protective layer 103 can have part to cover on the Part I of metal fuse 101, and remainder composition one protection cavity, in being coated on by the Part II of metal fuse 101, described through hole is positioned at above metal fuse 101.Protective layer 103 can by silicon dioxide (SiO
2) make; with manufacture dielectric layer 102 unlike; protective layer 103 can adopt chemical vapor deposition (Chemical Vapor Deposition; CVD) principle manufacture forms; its quality is comparatively loose relative to dielectric layer 102, and the method adopting CVD is also in order to cost-saving.Protective layer 103 and dielectric layer 102 are all the good materials of insulating capacity.
See Fig. 3, the embodiment of the present invention also provides a kind of fuse assembly manufacturing equipment, and it comprises generating apparatus 301, the first operating means 302, processing unit 303 and the second operating means 304.
Generating apparatus 301 is for generating dielectric layer 102.
First operating means 302 is for arranging at described dielectric layer 102 upper surface the metal fuse 101 that has four sides.Described metal fuse 101 is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width.A metal fuse 101 can be a bonding jumper, and it can be covered on dielectric layer 102 upper surface.
Processing unit 303 for belonging to three side protective mulches 103 of described Part I in the upper surface and described four sides of described Part I.Processing unit 303 is at the upper surface of the Part I of metal fuse 101 and each side protective mulch 103.Protective layer 103 tightly can be covered on upper surface and each side of described Part I.
Second operating means 304 is arranged in a protection cavity for making described Part II, is wherein positioned on the described protection cavity above described Part II and is provided with a through hole.Described protection cavity can be a part for protective layer 103.
See Fig. 4, the main method flow process that in the embodiment of the present invention, fuse assembly manufactures is as follows:
Step 401: generate dielectric layer 102.
Step 402: the metal fuse 101 that has four sides is set at described dielectric layer 102 upper surface; Described metal fuse 101 is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width.
Step 403: three the side protective mulches 103 belonging to described Part I in the upper surface and described four sides of described Part I.
Step 404: make described Part II be arranged in a protection cavity, is wherein positioned on the described protection cavity above described Part II and is provided with a through hole.
Make metal fuse 101 part be arranged in protective layer 103 in the embodiment of the present invention, in the course of processing of integrated circuit (IC) chip, metal fuse 101 is just not easily out of shape because of the impact of external force or ruptures, thus ensures the normal work of circuit.When needs fuse, metal fuse 101 can normally fuse, and when not needing it to fuse, it can have stronger anti-pressure ability, not yielding.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (8)
1. a fuse assembly; comprise: dielectric layer; be positioned at the metal fuse that one of described dielectric layer upper surface has four sides; described metal fuse is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width; it is characterized in that; three sides belonging to described Part I in the upper surface of described Part I and described four sides are coated with protective layer; described Part II is arranged in a protection cavity, is positioned on the described protection cavity above described Part II and is provided with a through hole.
2. fuse assembly as claimed in claim 1, it is characterized in that, described first width value is greater than zero, and is less than the width of described metal fuse; Described first width value and described second width value sum are the width of described metal fuse.
3. fuse assembly as claimed in claim 1, it is characterized in that, described protective layer is made up of silicon dioxide.
4. fuse assembly as claimed in claim 1, it is characterized in that, described protection cavity is made up of silicon dioxide.
5. fuse assembly as claimed in claim 1, it is characterized in that, described dielectric layer is made up of silicon dioxide.
6. fuse assembly as claimed in claim 1, it is characterized in that, manufacturing described metal fuse metal used is aluminium, copper or silver.
7. a fuse assembly manufacture method, is characterized in that, comprises the following steps:
Generate dielectric layer;
At described dielectric layer upper surface, the metal fuse that has four sides is set; Described metal fuse is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width;
Three side protective mulches of described Part I are belonged in the upper surface and described four sides of described Part I;
Make described Part II be arranged in a protection cavity, be wherein positioned on the described protection cavity above described Part II and be provided with a through hole.
8. a fuse assembly manufacturing equipment, is characterized in that, comprising:
Generating apparatus, for generating dielectric layer;
First operating means, for arranging at described dielectric layer upper surface the metal fuse that has four sides; Described metal fuse is divided into width to be the Part I of the first width value and width being the Part II of the second width value by its width;
Processing unit, for belonging to three side protective mulches of described Part I in the upper surface and described four sides of described Part I;
Second operating means, for making described Part II be arranged in a protection cavity, being wherein positioned on the described protection cavity above described Part II and being provided with a through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110362885.6A CN103117269B (en) | 2011-11-16 | 2011-11-16 | Fuse wire assembly, fuse wire assembly manufacturing method and equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110362885.6A CN103117269B (en) | 2011-11-16 | 2011-11-16 | Fuse wire assembly, fuse wire assembly manufacturing method and equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103117269A CN103117269A (en) | 2013-05-22 |
| CN103117269B true CN103117269B (en) | 2015-07-15 |
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ID=48415601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110362885.6A Expired - Fee Related CN103117269B (en) | 2011-11-16 | 2011-11-16 | Fuse wire assembly, fuse wire assembly manufacturing method and equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103117269B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1228608A (en) * | 1998-03-09 | 1999-09-15 | 西门子公司 | Guard cell for etching |
| CN1726592A (en) * | 2002-12-16 | 2006-01-25 | 皇家飞利浦电子股份有限公司 | Poly-silicon stringer fuse |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4825559B2 (en) * | 2006-03-27 | 2011-11-30 | 富士通セミコンダクター株式会社 | Semiconductor device |
| US7741721B2 (en) * | 2007-07-31 | 2010-06-22 | International Business Machines Corporation | Electrical fuses and resistors having sublithographic dimensions |
-
2011
- 2011-11-16 CN CN201110362885.6A patent/CN103117269B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1228608A (en) * | 1998-03-09 | 1999-09-15 | 西门子公司 | Guard cell for etching |
| CN1726592A (en) * | 2002-12-16 | 2006-01-25 | 皇家飞利浦电子股份有限公司 | Poly-silicon stringer fuse |
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| Publication number | Publication date |
|---|---|
| CN103117269A (en) | 2013-05-22 |
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Granted publication date: 20150715 Termination date: 20171116 |