CN103115720A - 一种硅基单岛结构石英梁谐振式微压力传感器芯片 - Google Patents
一种硅基单岛结构石英梁谐振式微压力传感器芯片 Download PDFInfo
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- CN103115720A CN103115720A CN2013100162726A CN201310016272A CN103115720A CN 103115720 A CN103115720 A CN 103115720A CN 2013100162726 A CN2013100162726 A CN 2013100162726A CN 201310016272 A CN201310016272 A CN 201310016272A CN 103115720 A CN103115720 A CN 103115720A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 61
- 239000010703 silicon Substances 0.000 title claims abstract description 61
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 239000010453 quartz Substances 0.000 title claims abstract description 19
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 16
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- 239000007772 electrode material Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
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- 229910052709 silver Inorganic materials 0.000 claims description 3
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103557967A (zh) * | 2013-11-22 | 2014-02-05 | 中国电子科技集团公司第四十九研究所 | 一种硅微谐振式压力传感器芯体及制作方法 |
CN103557970A (zh) * | 2013-11-22 | 2014-02-05 | 中国电子科技集团公司第四十九研究所 | 一种静电激励/压阻检测硅微谐振式压力传感器及其制作方法 |
CN104316255A (zh) * | 2014-10-14 | 2015-01-28 | 秦川机床集团宝鸡仪表有限公司 | 压力传感器限载保护装置 |
CN105301344A (zh) * | 2015-09-24 | 2016-02-03 | 西安电子科技大学 | 基于驱动梁阵列的石英谐振式直流电压传感器芯片 |
CN107976274A (zh) * | 2018-01-18 | 2018-05-01 | 吉林大学 | 一种基于同步共振的压力检测装置及检测方法 |
CN109485011A (zh) * | 2018-11-23 | 2019-03-19 | 北京遥测技术研究所 | 基于Si-Si-Si-玻璃晶圆键合技术的MEMS谐振压力传感器及制造工艺 |
CN109883581A (zh) * | 2019-03-19 | 2019-06-14 | 西安交通大学 | 一种悬臂梁式差动谐振压力传感器芯片 |
CN111579147A (zh) * | 2020-05-29 | 2020-08-25 | 中国科学院半导体研究所 | 谐振式mems差压压力传感器及其制备方法 |
CN112857276A (zh) * | 2021-03-21 | 2021-05-28 | 中北大学 | 声表面波应变传感器及其制备方法 |
CN112964417A (zh) * | 2021-04-09 | 2021-06-15 | 揣荣岩 | 一种双动极板电容式压力敏感芯片 |
CN114199418A (zh) * | 2021-11-29 | 2022-03-18 | 北京晨晶电子有限公司 | 石英音叉压力传感器 |
CN116380330A (zh) * | 2023-05-31 | 2023-07-04 | 成都凯天电子股份有限公司 | 一种用于高温的无液体压阻式碳化硅压力传感器 |
CN117928416A (zh) * | 2024-03-22 | 2024-04-26 | 上海拜安传感技术有限公司 | 一种mems光纤表面式应变计 |
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JP2004132913A (ja) * | 2002-10-11 | 2004-04-30 | Toyo Commun Equip Co Ltd | 感圧素子、及びこれを用いた圧力センサ |
CN101281071A (zh) * | 2008-05-29 | 2008-10-08 | 北京航空航天大学 | 一种双谐振梁式微机械压力传感器 |
CN102419227A (zh) * | 2011-09-13 | 2012-04-18 | 河南省电力公司信阳供电公司 | 新型微压力传感器芯片 |
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2013
- 2013-01-16 CN CN201310016272.6A patent/CN103115720B/zh active Active
Patent Citations (3)
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JP2004132913A (ja) * | 2002-10-11 | 2004-04-30 | Toyo Commun Equip Co Ltd | 感圧素子、及びこれを用いた圧力センサ |
CN101281071A (zh) * | 2008-05-29 | 2008-10-08 | 北京航空航天大学 | 一种双谐振梁式微机械压力传感器 |
CN102419227A (zh) * | 2011-09-13 | 2012-04-18 | 河南省电力公司信阳供电公司 | 新型微压力传感器芯片 |
Non-Patent Citations (1)
Title |
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潘安宝等: "石英晶体谐振式绝对压力传感器研制", 《传感器与微系统》 * |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103557970A (zh) * | 2013-11-22 | 2014-02-05 | 中国电子科技集团公司第四十九研究所 | 一种静电激励/压阻检测硅微谐振式压力传感器及其制作方法 |
CN103557970B (zh) * | 2013-11-22 | 2015-05-13 | 中国电子科技集团公司第四十九研究所 | 一种静电激励/压阻检测硅微谐振式压力传感器及其制作方法 |
CN103557967B (zh) * | 2013-11-22 | 2015-06-10 | 中国电子科技集团公司第四十九研究所 | 一种硅微谐振式压力传感器芯体及制作方法 |
CN103557967A (zh) * | 2013-11-22 | 2014-02-05 | 中国电子科技集团公司第四十九研究所 | 一种硅微谐振式压力传感器芯体及制作方法 |
CN104316255A (zh) * | 2014-10-14 | 2015-01-28 | 秦川机床集团宝鸡仪表有限公司 | 压力传感器限载保护装置 |
CN105301344A (zh) * | 2015-09-24 | 2016-02-03 | 西安电子科技大学 | 基于驱动梁阵列的石英谐振式直流电压传感器芯片 |
CN105301344B (zh) * | 2015-09-24 | 2018-04-13 | 西安电子科技大学 | 基于驱动梁阵列的石英谐振式直流电压传感器芯片 |
CN107976274B (zh) * | 2018-01-18 | 2023-05-23 | 吉林大学 | 一种基于同步共振的压力检测装置及检测方法 |
CN107976274A (zh) * | 2018-01-18 | 2018-05-01 | 吉林大学 | 一种基于同步共振的压力检测装置及检测方法 |
CN109485011A (zh) * | 2018-11-23 | 2019-03-19 | 北京遥测技术研究所 | 基于Si-Si-Si-玻璃晶圆键合技术的MEMS谐振压力传感器及制造工艺 |
CN109883581A (zh) * | 2019-03-19 | 2019-06-14 | 西安交通大学 | 一种悬臂梁式差动谐振压力传感器芯片 |
CN109883581B (zh) * | 2019-03-19 | 2020-12-08 | 西安交通大学 | 一种悬臂梁式差动谐振压力传感器芯片 |
CN111579147A (zh) * | 2020-05-29 | 2020-08-25 | 中国科学院半导体研究所 | 谐振式mems差压压力传感器及其制备方法 |
CN112857276B (zh) * | 2021-03-21 | 2023-05-16 | 中北大学 | 声表面波应变传感器及其制备方法 |
CN112857276A (zh) * | 2021-03-21 | 2021-05-28 | 中北大学 | 声表面波应变传感器及其制备方法 |
CN112964417A (zh) * | 2021-04-09 | 2021-06-15 | 揣荣岩 | 一种双动极板电容式压力敏感芯片 |
CN114199418A (zh) * | 2021-11-29 | 2022-03-18 | 北京晨晶电子有限公司 | 石英音叉压力传感器 |
CN114199418B (zh) * | 2021-11-29 | 2024-05-10 | 北京晨晶电子有限公司 | 石英音叉压力传感器 |
CN116380330A (zh) * | 2023-05-31 | 2023-07-04 | 成都凯天电子股份有限公司 | 一种用于高温的无液体压阻式碳化硅压力传感器 |
CN116380330B (zh) * | 2023-05-31 | 2023-10-24 | 成都凯天电子股份有限公司 | 一种用于高温的无液体压阻式碳化硅压力传感器 |
CN117928416A (zh) * | 2024-03-22 | 2024-04-26 | 上海拜安传感技术有限公司 | 一种mems光纤表面式应变计 |
CN117928416B (zh) * | 2024-03-22 | 2024-06-07 | 上海拜安传感技术有限公司 | 一种mems光纤表面式应变计 |
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