CN103114273A - 一种利用磁控溅射镀膜机镀外缘全封闭带的工艺 - Google Patents
一种利用磁控溅射镀膜机镀外缘全封闭带的工艺 Download PDFInfo
- Publication number
- CN103114273A CN103114273A CN2013100740232A CN201310074023A CN103114273A CN 103114273 A CN103114273 A CN 103114273A CN 2013100740232 A CN2013100740232 A CN 2013100740232A CN 201310074023 A CN201310074023 A CN 201310074023A CN 103114273 A CN103114273 A CN 103114273A
- Authority
- CN
- China
- Prior art keywords
- plated film
- shielding plate
- film sheet
- coating
- magnetron sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 26
- 238000000576 coating method Methods 0.000 title claims abstract description 23
- 239000011248 coating agent Substances 0.000 title abstract description 19
- 238000007689 inspection Methods 0.000 claims abstract description 4
- 238000007747 plating Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 6
- 230000003746 surface roughness Effects 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 238000005240 physical vapour deposition Methods 0.000 abstract description 4
- 230000000903 blocking effect Effects 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000003070 Statistical process control Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 206010053615 Thermal burn Diseases 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310074023.2A CN103114273B (zh) | 2013-03-08 | 2013-03-08 | 一种利用磁控溅射镀膜机镀外缘全封闭带的工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310074023.2A CN103114273B (zh) | 2013-03-08 | 2013-03-08 | 一种利用磁控溅射镀膜机镀外缘全封闭带的工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103114273A true CN103114273A (zh) | 2013-05-22 |
CN103114273B CN103114273B (zh) | 2015-01-28 |
Family
ID=48412690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310074023.2A Active CN103114273B (zh) | 2013-03-08 | 2013-03-08 | 一种利用磁控溅射镀膜机镀外缘全封闭带的工艺 |
Country Status (1)
Country | Link |
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CN (1) | CN103114273B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107645579A (zh) * | 2017-09-20 | 2018-01-30 | 东莞市鸿茂五金制品有限公司 | 一种sus444的制备工艺及其在手机支架上的应用 |
CN112063972A (zh) * | 2020-09-08 | 2020-12-11 | 宁波江丰电子材料股份有限公司 | 一种半导体部件的拼接镀膜方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19755837A1 (de) * | 1997-12-16 | 1999-06-17 | Leybold Ag | Sputteranlage |
JP3398452B2 (ja) * | 1994-01-19 | 2003-04-21 | 株式会社ソニー・ディスクテクノロジー | スパッタリング装置 |
CN102242336A (zh) * | 2011-06-24 | 2011-11-16 | 清华大学 | 一种降低硬质薄膜应力的薄膜制备方法 |
-
2013
- 2013-03-08 CN CN201310074023.2A patent/CN103114273B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3398452B2 (ja) * | 1994-01-19 | 2003-04-21 | 株式会社ソニー・ディスクテクノロジー | スパッタリング装置 |
DE19755837A1 (de) * | 1997-12-16 | 1999-06-17 | Leybold Ag | Sputteranlage |
CN102242336A (zh) * | 2011-06-24 | 2011-11-16 | 清华大学 | 一种降低硬质薄膜应力的薄膜制备方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107645579A (zh) * | 2017-09-20 | 2018-01-30 | 东莞市鸿茂五金制品有限公司 | 一种sus444的制备工艺及其在手机支架上的应用 |
CN112063972A (zh) * | 2020-09-08 | 2020-12-11 | 宁波江丰电子材料股份有限公司 | 一种半导体部件的拼接镀膜方法 |
CN112063972B (zh) * | 2020-09-08 | 2022-07-15 | 宁波江丰电子材料股份有限公司 | 一种半导体部件的拼接镀膜方法 |
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Publication number | Publication date |
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CN103114273B (zh) | 2015-01-28 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Process for coating strip with fully-closed outer edge by utilizing magnetron sputtering coating machine Effective date of registration: 20180110 Granted publication date: 20150128 Pledgee: Agricultural Bank of China Limited by Share Ltd. Jiaxing science and Technology Branch Pledgor: ZHEJIANG LANTE OPTICS Co.,Ltd. Registration number: 2017330000334 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20150128 Pledgee: Agricultural Bank of China Limited by Share Ltd. Jiaxing science and Technology Branch Pledgor: ZHEJIANG LANTE OPTICS Co.,Ltd. Registration number: 2017330000334 |