CN103114270B - A kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source - Google Patents
A kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source Download PDFInfo
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- CN103114270B CN103114270B CN201210514559.7A CN201210514559A CN103114270B CN 103114270 B CN103114270 B CN 103114270B CN 201210514559 A CN201210514559 A CN 201210514559A CN 103114270 B CN103114270 B CN 103114270B
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Abstract
A kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source,Including striking pin,Piston extension rod,Piston component,Sealing insulator,Dynamic sealing,Dynamic sealing pressure pad,Piston component support member,The dynamic sealing pressure pad is pressed in the dynamic sealing by the piston component support member,Also include the Igniting unit base of metal,The Igniting unit base is sleeved on the piston extension rod by its middle part sets of holes and is fixedly connected with arc evaporation source adpting flange,The sealing insulator is installed between the Igniting unit base and arc evaporation source adpting flange,Have on the Igniting unit base rear end bottom surface and stretch between the sealing insulator and the piston extension rod,For separating their projection,The piston component support member is fixed on the front end face of the Igniting unit base,The dynamic sealing is inlaid in the front end face of the Igniting unit base.The present invention can reduce defective products rate, reduce production cost.
Description
Technical field
The present invention relates to a kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source.
Background technology
Vacuum cathode arc deposition be current ion plating tool and mould use and the mainstream technology of decoration hard protective film it
One.Specific coating process is as follows：Vacuum cathode arc evaporation source is arranged in vacuum film coating chamber side wall, and evaporation source front end penetrates
In Vacuum Deposition room, plating material thereon -- target block face toward the workpiece to be plated in Vacuum Deposition room, be drawn by arc initiation device on target block surface
The vacuum arc differential of the arc spot of cluster is fired, the high temperature of arc macular area and field cause effect effect to allow target evaporation to generate metal vapors, and electricity
From into plasma to spatial emission, film is deposited into workpiece surface.
Arc initiation device is the indispensable part in cathodic arc evaporation source.Cathodic arc evaporation source domestic at present is big
Use mechanical contact arc initiation device more, have pneumatic and electronic two kinds.Fig. 1 is that the structure of existing frequently-used pneumatic arc initiation device is shown
It is intended to, mainly by piston component 1-11, piston extension rod 1-4, striking pin 1-2, sealing insulator 1-6, dynamic sealing 1-7, dynamic close
Seal pressure pad 1-8 and piston component supporting member 1-10 compositions.Piston component 1-11 is mostly outsourcing piece.As shown in figure 1, piston component branch
Bearing member 1-10 is vertically fixed on piston component 1-11 on the outside of arc evaporation source adpting flange 1-5, piston extension rod 1-4 and piston
Component 1-11 is coaxially disposed, and is fixedly connected with both by connecting screw 1-9 on relative end face.Piston extension rod 1-4 front ends
Perforate enters arc evaporation source adpting flange 1-5 inner side on through arc evaporation source adpting flange 1-5.Dynamic sealing pressure pad 1-8,
Dynamic sealing 1-7, sealing insulator 1-6 are sleeved on piston extension rod 1-4 successively.Wherein, sealing insulator 1-6 is arranged on electric arc
Tapping on the outside of evaporation source adpting flange 1-5, dynamic sealing 1-7 are inlaid in sealing insulator 1-6 outer face, dynamic sealing pressure pad
1-8 is fitted on the dynamic sealing 1-7 and sealing insulator 1-6 by piston component support member 1-10, to ensure that piston extends
Sealing between bar 1-4 and arc evaporation source adpting flange 1-5.Striking pin 1-2 is installed in piston by housing screw 1-3 and prolonged
Boom 1-4 front end, shaft-like with piston extension rod 1-4 form right angles, the front end of striking pin has towards the curved of target block 1-1 surfaces
Head.
Arc process is as follows：When piston component 1-11 setbacks, band piston extension rod 1-4 is retreated, piston extension
The striking pin 1-2 of bar 1-4 front ends connection elbow touches target block 1-1 surfaces.The target block 1-1 in cathodic arc evaporation source connects evaporation
The power cathode in source, piston component 1-11 and striking pin 1-2 connect positive source, in striking pin 1-2 and target block 1-11 Contacts,
Flow through Short-Circuit High Current；Immediately, piston component 1-11 counter motions, band piston extension rod 1-4 and striking pin 1-2 are transported forward
Dynamic, striking pin 1-2 front ends elbow leaves target block 1-1 surfaces, in this time of releasing, in striking pin 1-2 and target block 1-1 original contact surfaces
Very high current density is concentrated at some protrusion tips, can ignite electric arc, generate the electric arc differential of the arc spot of cluster.It is complete above
Into the arc process that once ignites.
Now conventional arc initiation device has the disadvantage that when in use：1）Piston extension rod 1-4 passes through big electricity in striking
Stream can generate heat, and be raised for a long time by thermal radiation temperature especially in vacuum chamber, the temperature rise of piston extension rod is directly conducted to set
The insulated enclosure component of dress thereon is sealing insulator 1-6, dynamic sealing 1-7 and dynamic sealing pressure pad 1-8.What is stood in the breach is sealing
Insulating part 1-6, it is usually made of polytetrafluoroethylene (PTFE), is often deformed under heated for a long time, destructible arc evaporation source
Vacuum sealing between adpting flange 1-5 and piston extension rod 1-4, leak air problem.
2）Piston extension rod 1-4 is longer, and interfix does not rise very only by rubber or the sealing insulator 1-6 of plastics
Good collimating effect, swing spatially occurs in piston extension rod 1-4, so as to cause striking pin 1-2 and target block 1-1 contact
Displacement.
3）Connecting screw 1-9 connections are leaned between piston extension rod 1-4 and piston component 1-11, before and after piston component 1-11
Under the vibratory impulse of motion, connecting screw 1-9 can be caused to loosen, i.e., piston extension rod 1-4 can rotate and move forward, and then drives and draw
Arc pin 1-2 is rotated and migration, causes striking pin 1-2 positions to offset and increases the distance on striking pin 1-2 off-target block 1-1 surfaces,
Striking pin 1-2 elbows can not be contacted with target block 1-1 surfaces and can not striking, it is necessary to vacuum breaker is adjusted.
The content of the invention
The technical problem to be solved by the invention is to provide one kind can reduce defective products rate, improve production efficiency, reduce life
Produce the pneumatic type arc initiation device of cost.
The present invention solves its technical problem by following technical solution, and a kind of pneumatic type of vacuum cathode arc evaporation source is drawn
Arc device, including striking pin, piston extension rod, piston component, sealing insulator, dynamic sealing, dynamic sealing pressure pad, piston component branch
Support member, the dynamic sealing pressure pad are pressed in the dynamic sealing by the piston component support member, it is characterised in that also include gold
The Igniting unit base of category, the Igniting unit base is sleeved on by its middle part sets of holes on the piston extension rod and and arc evaporation
Source adpting flange is fixedly connected, the sealing insulator be installed in the Igniting unit base and arc evaporation source adpting flange it
Between, on the Igniting unit base rear end bottom surface have stretch between the sealing insulator and the piston extension rod, for every
Their projection is opened, the piston component support member is fixed on the front end face of the Igniting unit base, the dynamic sealing setting-in
In the front end face of the Igniting unit base.
The present invention separates sealing insulator and piston extension rod here by the Igniting unit base of metal, makes sealing insulator
It is not direct to be contacted with the piston extension rod of higher temperatures, it is not easy to deform upon and destroy in the presence of the piston extension rod of higher temperatures
Sealing between arc evaporation source adpting flange and piston extension rod, the problem of so as to cause gas leakage；In addition, the present invention's is dynamic
Sealing is inlaid in the Igniting unit base of metal, and because Igniting unit base volume and thermal capacitance are all larger, therefore dynamic sealing is by higher
The influence of the piston extension rod of temperature is not too large, can keep good vacuum leakproofness；And keep arc evaporation source adpting flange
The vacuum leakproofness of inner side, the defective products rate of product is advantageously reduced, improve production efficiency, reduce production cost.
The sealing insulator is an insulating sleeve with flanging, and the external diameter of the insulating sleeve steams with the electric arc
The open pore size on adpting flange that rises is adapted, and after installation, the flanging of the insulating sleeve is installed in the Igniting unit base
Between bottom surface and the arc evaporation source adpting flange, the insulating sleeve stretches into perforate on the arc evaporation source adpting flange
Inner side.
As to a modification of the present invention, the projection on Igniting unit base rear end bottom surface is annular protrusion, the annular
Projection is the extension of sets of holes hole wall on the Igniting unit base, forms standard of the piston extension rod on the Igniting unit base
Straight hole, the collimating aperture length range are 50-75mm.Above-mentioned collimating aperture can limit swing of the piston extension rod in space, make to draw
Arc pin elbow can more accurately touch target block surface location.
As a further refinement of the present invention, the piston extension rod and piston component are integrally formed to form the striking
The piston rod of device, can so avoid due between former piston extension rod and former piston component connection loosen, caused by striking
The striking pin elbow that pin position is offset or striking pin off-target block surface distance increases and occurred can not contact with target block surface can not
Striking, must vacuum breaker the problem of being adjusted.
The plunger end splits mouth with axial direction, plunger end is formed non-circular rod-like structure, the striking
Device also includes anti-rotation sheet, has on the anti-rotation sheet and splits the non-circular aperture that mouth section is adapted with plunger end, described anti-
Rotor is parallel to be fixed on the piston component support member, and is sleeved on splitting for plunger end by non-circular aperture thereon
In mouth section, so as to ensure that piston rod only does reciprocating linear motion without rotating, further prevent because piston rod turns
It is dynamic and caused by striking pin the problem of shifting.
Described piston component support member is to be fixed between the anti-rotation sheet and the Igniting unit base to be used to drive
The cylinder that the piston rod does reciprocating linear motion.
The cylinder includes lower cylinder lid, cylinder wall set and upper cylinder lid, in addition to the row for the regulating piston throw of lever
Journey adjusting washer (disk)；The upper and lower cylinder head is all cap-shaped, has cover rim, wherein, the upper gas. in the lower cylinder lid on the side
On the inside of cylinder cap downwards, the cylinder wall set is tubular, and the upper and lower cylinder head is respectively from the upper and lower end button of cylinder wall set
Close on cylinder wall set, the outer wall at cylinder wall set both ends is close by sealing ring and the cover rim inner side of upper and lower cylinder head respectively
Envelope, the stroke adjustment packing ring are supported between the opposite face on upper and lower cylinder head edge, and lower cylinder lid is fixed on the Igniting unit base
On, the arc initiation device also includes being used for making the anti-rotation sheet be sleeved on plunger end all the time splitting benefit at mouth section correct position
Pad is repaid, the compensation is leveled up row and is located between the upper cylinder lid and the anti-rotation sheet, is all provided with the middle part of the upper and lower cylinder head
Mesopore, the piston rod axially across the cylinder wall set and upper and lower cylinder head mesopore, and respectively by sealing ring with it is described
The inwall of the mesopore of upper and lower cylinder head realizes slidable sealed connection, has the integrally formed ring wing, institute on the piston rod
State annulus of the ring wing for radially protruding on piston rod, the sky that the ring wing is in the upper and lower cylinder head and cylinder wall set encloses
In, the side wall of the ring wing is realized and is slidably tightly connected again by sealing ring and cylinder wall set inwall, described
Also be provided with into gas off-take respectively in upper and lower cylinder head, in the upper and lower cylinder head enter gas off-take respectively with the ring wing
Upper and lower side connection.
Between the Igniting unit base end face and sealing insulator, the flanging and arc evaporation source of the sealing insulator
The sealing ring for strengthening their sealing is respectively provided between adpting flange.
The plunger end bottom surface is provided with female screwhole, and the pressure for being easy to piston rod and arc source line is provided with female screwhole
Tight screw.
Beneficial effect：1) insulating sealer of the invention does not contact directly with heated piston rod, therefore insulating sealer is not
It can be deformed upon at a high temperature of piston rod and cause sealing to be destroyed；In addition, the dynamic sealing of the present invention is not to be inlaid in absolutely
In edge seal, but in the Igniting unit base of embedded metal, because base has larger thermal capacitance, dynamic sealing is allowed to have good
Heat dissipation environment, unlikely temperature rise is too high and destroys vacuum, therefore lacking instant invention overcomes the now conventional frequent gas leakage of arc initiation device
Point, the defective products rate of product is advantageously reduced, improve production efficiency, reduce production cost；
2）The piston extension rod and piston component of the present invention is integrally formed, and is overcome in the prior art because connection piston prolongs
Caused by the screw bolt loosening of boom and piston component striking pin position skew even cause can not striking the problem of；
3）The Igniting unit base of present invention design metal, and piston rod is passed through collimating aperture longer on Igniting unit base,
Limitation piston rod can be played a part of spatially to swing, striking pin is more accurately touched the suitable position on target block surface
Put；
4）The present invention sets anti-rotation sheet, effectively overcomes because what striking pin position caused by piston rod rotation was offset asks
Topic；
The above-mentioned improved synthesis of items, the present invention is set effectively to reduce in vacuum cathode arc evaporation source operation
Accident rate, fault power time is reduced, reduce defective products rate, so as to improve production efficiency, reduce production cost.
Brief description of the drawings
Fig. 1 is the structural representation of existing frequently-used pneumatic arc initiation device；
Fig. 2 touches structural representation during target block surface for the striking pin of the arc initiation device of present pre-ferred embodiments；
Fig. 3 leaves structural representation during target block surface for the striking pin of the arc initiation device of present pre-ferred embodiments；
Fig. 4 is the enlarged drawing of the arc initiation device cylinder portion of present pre-ferred embodiments.
Embodiment
The pneumatic type arc initiation device of the vacuum cathode arc evaporation source of present pre-ferred embodiments, as the abbreviation of Fig. 2,3,4 draws
Arc device includes striking pin 2, piston rod 4, the Igniting unit base 10 just made, sealing insulator 5, dynamic sealing 11, dynamic sealing pressure pad
12nd, piston component support member, anti-rotation sheet 23.Igniting unit base 10 can also be made up of other metal materials, such as copper.
Piston rod 4 is integrally machined and formed by the piston extension rod of front end and the piston component of rear end.Can so avoid by
The skew of the position of striking pin 2 or striking pin caused by connection between piston extension rod of the prior art and piston component loosens
The surface distance of 2 off-target block 1 increase and occur the elbow of striking pin 2 can not contact with the surface of target block 1 cause can not striking, must break very
The problem of sky is adjusted.
The front end of piston rod 4 enters the interior of arc evaporation source adpting flange 6 through perforate on arc evaporation source adpting flange 6
Side.Striking pin 2 is installed in the front end of piston rod 4 by housing screw 3, shaft-like with the form right angle of piston rod 4, the front end of striking pin 2
Elbow is towards the surface of target block 1.
Sealing insulator 5 is an insulating sleeve with flanging 51, and the external diameter of insulating sleeve is connected with arc evaporation source
The aperture of perforate 61 is adapted on flange 6, and insulating sleeve stretches into the inner side of perforate 61 on arc evaporation source adpting flange 6.
Dynamic sealing pressure pad 12, dynamic sealing 11, Igniting unit base 10, sealing insulator 5 are sleeved on piston rod 4 successively.Its
In, sealing insulator 5 is arranged on the outside tapping of arc evaporation source adpting flange 6.Igniting unit base 10 has middle part sets of holes, draws
Arc device base 10 is to be sleeved on by its middle part sets of holes on piston rod 4, and Igniting unit base 10 is steamed by trip bolt 7 and electric arc
The adpting flange 6 that rises is fixedly connected, and the flanging 51 of sealing insulator 5 is installed in into the bottom surface of Igniting unit base 10 and arc evaporation
Between source adpting flange 6.There is the insulating sleeve and piston rod 4 for stretching into sealing insulator 5 on the rear end bottom surface of Igniting unit base 10
Between, the annular protrusion 101 for separating them, annular protrusion 101 be Igniting unit base 10 on sets of holes hole wall extension, form
Collimating aperture of the piston rod 4 on Igniting unit base 10, for limiting the swing of piston rod 4 spatially, enable the elbow of striking pin 2
More accurately touch the surface of target block 1.Sealing insulator 5 is typically made up of polytetrafluoroethylmaterial material, and the present invention uses striking
Device base 10 has thoroughly isolated directly contacting between piston rod 4 and insulating sealer 5, makes insulating sealer 5 will not be because of work
The heat conduction temperature of stopper rod 4 is too high and brings it about deformation so as to destroy its vacuum sealing.Collimate the recommended range of hole length for 50-
75mm。
Between the bottom surface of Igniting unit base 10 and sealing insulator 5, the flanging 51 of sealing insulator 5 and arc evaporation source connect
The sealing ring 9,8 for strengthening their sealing is respectively provided between acting flange 6.Piston component support member is fixed on Igniting unit
On the front end face of base, dynamic sealing 11, dynamic sealing pressure pad 12 are all inlaid in the front end face of Igniting unit base 10, wherein dynamic sealing
Pressure pad 12 is covered in dynamic sealing 11 and compressed by piston component support member, to ensure piston rod 4 and arc evaporation source connection method
Sealing between orchid 6.The dynamic sealing 11 of piston rod 4 is embedded in the Igniting unit pedestal 10 of steel, due to the body of Igniting unit base 10
Product is larger, and thermal capacitance is also larger, therefore dynamic sealing 11 has good heat dissipation environment, and being influenceed by the heat conduction temperature rise of piston rod 4 will not be too
Greatly, good vacuum leakproofness can be kept.
As shown in figure 4, piston component support member be fixed on Igniting unit base 10 be used for drive piston rod 4 to make back and forth
The cylinder of linear motion.Cylinder includes lower cylinder lid 14, cylinder wall set 16 and upper cylinder lid 21, in addition to is used for regulating piston bar
The stroke adjustment packing ring 28 of 4 strokes, upper and lower cylinder head 21,14 are all cap-shaped, have cover rim 211 and 141, wherein lower cylinder lid
In 14 on the side, downwards, cylinder wall set 16 is tubular to the inner side of upper cylinder lid 21, and upper and lower cylinder head 21,14 is respectively from cylinder wall set
16 upper and lower end is fastened on cylinder wall set 16, and the outer wall that cylinder wall covers 16 both ends passes through sealing ring 27 and upper and lower cylinder respectively
Cover rim 211,141 inner seals of lid 21,14, stroke adjustment packing ring 28 are supported on upper and lower cylinder 21,14 cover rims 211,141
Between opposite face, lower cylinder lid 14 is fixed on Igniting unit base 10 by screw 13, and the upper and lower middle part of cylinder head 21,14 is all provided with
Mesopore, piston rod 4 pass through sealing ring 20,15 respectively axially across cylinder wall set 16 and the mesopore of upper and lower cylinder head 21,14
Realize that slidable sealing is connected with the inwall of mesopore in upper and lower cylinder head 21,14.There is the integrally formed ring wing on piston rod 4
18, the ring wing 18 is the annulus of radially protruding on piston rod 4.The ring wing 18 is in upper and lower cylinder head 21,14 and cylinder wall set 16 encloses
Space in, the side wall of the ring wing 18 covers 16 inwalls with cylinder wall again by sealing ring 17 and realizes that slidable sealing is connected.It is upper and lower
Also it is provided with respectively into gas off-take 19 in cylinder head 21,14（The gas off-take that enters on lower cylinder lid 14 is not drawn into）, upper and lower cylinder head
21st, the gas off-take 19 that enters on 14 connects with the upper and lower side of the ring wing 18 respectively.Arc initiation device also includes compensation pad 22, compensates pad 22
It is set in parallel on upper cylinder lid 21, it is parallel on compensation pad 22 to be fixed with anti-rotation sheet 23.
The tail end of piston rod 4 splits mouth 24 with axial direction, plunger end is formed non-circular rod-like structure, as illustrated,
Have on anti-rotation sheet 23 and split the non-circular aperture that mouth section is adapted with the tail end of piston rod 4, and pass through non-circular aperture set thereon
Mounted in splitting in mouth section for the tail end of piston rod 4, above-mentioned compensation pad 22 be for ensure anyway adjust cylinder stroke, can
By changing the compensation pad 22 with different-thickness so that anti-rotation sheet 23 is sleeved on the tail end of piston rod 4 and splits the suitable position of mouth section all the time
Place is put, so as to ensure that piston rod 4 only does reciprocating linear motion without rotating, is further prevented due to 4 turns of piston rod
It is dynamic and caused by striking pin 2 the problem of shifting.
By the ring wing 18 on piston rod 4, the shift length of linear reciprocating motion in cylinder determines the stroke of piston rod 4, it by
In cylinder inner cavity between upper and lower cylinder head 21,14 ultimate range limitation, stroke adjustment packing ring 28 can suitably adjust upper and lower
Cylinder head 21, the distance between 14.The compensation pad 22 of aluminum is padded under anti-rotation sheet 23, after coordinating the Traffic control system of piston rod 4, is prevented
Rotor 23 splits the needs of mouth section cooperation with the tail end of piston rod 4.
Above-mentioned anti-rotation sheet 23, compensation pad 22, upper and lower cylinder head 21, the corresponding position at 14 edges are designed with perforate, and by long spiral shell
Nail 26 sequentially passes through anti-rotation sheet 23, compensation pad 22, the edge perforate of upper cylinder lid 21 and stroke adjustment packing ring 28 from top to bottom
They are fixed on Igniting unit base 10 by inner ring hole and the perforate of the edge corresponding position of lower cylinder lid 14.Certainly, between them
Fixed form do not limit, need to only make that stable position relationship can be kept between them.
The tail end bottom surface of piston rod 4 is provided with female screwhole, and the housing screw of piston rod 4 and arc source line is provided with female screwhole
25, for facilitating the wiring of piston rod 4 and arc source.
The installation of above-mentioned each sealing ring is all that groove is opened up in respective side walls, and sealing ring is inlaid in the groove
, so not only facilitate the installation of sealing ring, and can prevent sealing ring from unnecessary displacement occurring when device moves.
Below in conjunction with the accompanying drawings, the process that the present invention works specifically is told about：As shown in Figure 2,3, 4, Fig. 2 represents that striking pin touches
Running-active status during the target block surface in cathodic arc evaporation source.Now, connect with entering outside gas off-take on lower cylinder lid 14 pneumatic
Valve opens air inlet, imports compressed air and promotes the ring wing 18 of piston rod 4 to make piston rod to the latter half of cylinder, gas pressure
4 motions upwards, while the gas in the upside cylinder of the ring wing 18, by entering gas off-take 19 by outer connecting with it on upper cylinder lid 21
The exhaust outlet discharge of the operated pneumatic valve of opening.The ring wing 18 rises to cylinder head in the case where the air pressure of compressed air promotes, and drive is drawn
Arc pin 2 moves to the surface of target block 1 and just touches the surface of target block 1.The tail end of piston rod 4 connection striking source positive pole, target block 1, which connects, to be drawn
Arc source negative pole, striking pin 2 touch to form short circuit with the surface of target block 1, and moment has Short-Circuit High Current to pass through.Subsequent control circuit can be felt
Know this Short-Circuit High Current, changing the working condition of the outer operated pneumatic valve connected immediately makes it instead, i.e., to upper cylinder lid 21
Enter gas off-take 19 and import compressed air, make lower cylinder lid 14 enters gas off-take connection exhaust outlet, then compressed air is from cylinder upper half
Part enters, and so as to promote the ring wing 18 on piston rod 4 to move downward, and the compressed air of cylinder the latter half is discharged.This
When, piston rod 4 moves downward, and drives striking pin 2 to depart from the surface of target block 1 rapidly, and original flows through the striking pin 2 and target of Short-Circuit High Current
Between the contact surface of block 1, high current density area be present at the spur of injustice, in the moment that striking pin 2 separates with target block 1,
Can have been ignited electric arc, generate the electric arc differential of the arc spot of cluster.The ring wing 18 drops to gas under the promotion of the compressed air on cylinder top
Cylinder bottom portion, piston rod 4 drive striking pin 2 to move downward so as to leave the segment distance of 1 surface of target block one, i.e., shape as shown in Figure 3
State, that is, the action for electric arc of completing once to ignite.
The present invention can be by adjusting the thickness of stroke adjustment packing ring 28 come the 18 upper and lower shifting of the ring wing on regulating piston bar 4
Dynamic distance, allows the elbow of striking pin 2 to touch target block surface and have so as to adjust the distance that striking pin 2 moves up and down, when moving up
There is certain pressure, allow striking pin 2 to leave the surface appropriately distance of target block 1 when moving down.
Claims (9)
1. a kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source, including striking pin, piston extension rod, piston component,
Sealing insulator, dynamic sealing, dynamic sealing pressure pad, piston component support member；
The sealing insulator is an insulating sleeve with flanging, and the external diameter of the insulating sleeve is connected with arc evaporation source
Open pore size is adapted on flange, and the insulating sleeve stretches into the inner side of perforate on the arc evaporation source adpting flange；
Characterized in that, also including the Igniting unit base of metal, the Igniting unit base is sleeved on described by its middle part sets of holes
It is fixedly connected on piston extension rod and with arc evaporation source adpting flange, the flanging of the sealing insulator is installed in described draw
Have between arc device base and arc evaporation source adpting flange, on the Igniting unit base rear end bottom surface and stretch into the insulating sleeve
Projection between the piston extension rod, for separating them, the piston component support member are fixed on the Igniting unit bottom
On the front end face of seat, the dynamic sealing is inlaid in the front end face of the Igniting unit base, and the dynamic sealing pressure pad is by the work
Plug assembly support member is pressed in the dynamic sealing.
2. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 1, it is characterised in that described to draw
Divide between arc device base end face and sealing insulator, between the flanging of the sealing insulator and arc evaporation source adpting flange
The sealing ring for strengthening their sealing She You be used for.
3. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 1, it is characterised in that Igniting unit
Projection on base rear end bottom surface is annular protrusion, and the annular protrusion is the extension of sets of holes hole wall on the Igniting unit base,
Collimating aperture of the piston extension rod on the Igniting unit base is formed, the collimating aperture length range is 50-75mm.
4. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 2, it is characterised in that Igniting unit
Projection on base rear end bottom surface is annular protrusion, and the annular protrusion is the extension of sets of holes hole wall on the Igniting unit base,
Collimating aperture of the piston extension rod on the Igniting unit base is formed, the collimating aperture length range is 50-75mm.
5. the pneumatic type arc initiation device of the vacuum cathode arc evaporation source according to any one of Claims 1-4, its feature exist
In the piston extension rod and piston component are integrally formed the piston rod to form the arc initiation device.
6. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 5, it is characterised in that the work
Stopper rod tail end splits mouth with axial direction, plunger end is formed non-circular rod-like structure, the arc initiation device also includes anti-rotation
Piece, have on the anti-rotation sheet and split the non-circular aperture that mouth section is adapted with plunger end, the anti-rotation sheet is parallel to be fixed on
On the piston component support member, and the splitting in mouth section of plunger end is sleeved on by non-circular aperture thereon.
7. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 6, it is characterised in that described
Piston component support member is to be fixed between the anti-rotation sheet and the Igniting unit base to be used for that to drive the piston rod to make past
The cylinder of linear motion.
8. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 7, it is characterised in that the gas
Cylinder includes lower cylinder lid, cylinder wall set and upper cylinder lid, in addition to the stroke adjustment packing ring for the regulating piston throw of lever；It is described
Upper and lower cylinder head is all cap-shaped, has cover rim, wherein, on the inside of upper cylinder lid downwards, the gas. in the lower cylinder lid on the side
Casing wall set is tubular, and the upper and lower cylinder head is fastened on the cylinder wall set from the upper and lower end of cylinder wall set respectively,
The outer wall at cylinder wall set both ends passes through sealing ring and the cover rim inner seal of upper and lower cylinder head, the stroke adjustment packing ring respectively
It is supported between the opposite face on upper and lower cylinder head edge, lower cylinder lid is fixed on the Igniting unit base, and the arc initiation device also wraps
Include and split compensation pad at mouth section correct position for making the anti-rotation sheet be sleeved on plunger end all the time, row is leveled up in the compensation
Between the upper cylinder lid and the anti-rotation sheet, be all provided with mesopore in the middle part of the upper and lower cylinder head, the piston rod to
Through cylinder wall set and the mesopore of upper and lower cylinder head, and pass through sealing ring and the mesopore of the upper and lower cylinder head respectively
Inwall realizes slidable sealed connection, has the integrally formed ring wing on the piston rod, and the ring wing is footpath on piston rod
To the annulus of protrusion, in the space that the ring wing is in the upper and lower cylinder head and cylinder wall set encloses, the side wall of the ring wing
Realize and be slidably tightly connected again by sealing ring and cylinder wall set inwall, in the upper and lower cylinder head respectively also
It is provided with into gas off-take, upper and lower side of the gas off-take respectively with the ring wing of entering in the upper and lower cylinder head connects.
9. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 8, it is characterised in that the work
Stopper rod tail end bottom surface is provided with female screwhole, and the housing screw for being easy to piston rod and arc source line is provided with female screwhole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210514559.7A CN103114270B (en) | 2012-12-04 | 2012-12-04 | A kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210514559.7A CN103114270B (en) | 2012-12-04 | 2012-12-04 | A kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source |
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| CN103114270A CN103114270A (en) | 2013-05-22 |
| CN103114270B true CN103114270B (en) | 2018-01-05 |
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| CN106756822B (en) * | 2017-01-16 | 2019-07-02 | 天津职业技术师范大学 | A kind of electric arc target striking needle fixation device that position is continuously adjustable |
| CN107881478B (en) * | 2017-11-30 | 2024-02-27 | 嘉兴岱源真空科技有限公司 | Arc ignition device and nano material manufacturing equipment |
| CN109338310A (en) * | 2018-11-26 | 2019-02-15 | 上海子创镀膜技术有限公司 | One kind being used for multi-arc ion plating equipment circular flat multi sphere target assembly |
| CN110565055A (en) * | 2019-10-28 | 2019-12-13 | 北京泰科诺科技有限公司 | arc striking device for ion plating and ion plating device |
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| CN201427990Y (en) * | 2009-06-25 | 2010-03-24 | 深圳市振恒昌实业有限公司 | Novel hot cathodic arc device |
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| US4448799A (en) * | 1983-04-21 | 1984-05-15 | Multi-Arc Vacuum Systems Inc. | Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems |
| CN202968680U (en) * | 2012-12-04 | 2013-06-05 | 东莞市汇成真空科技有限公司 | Pneumatic type arc striking device of vacuum cathode evaporation source |
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