CN103114270A - Pneumatic arc striking device of vacuum cathode arc evaporation source - Google Patents
Pneumatic arc striking device of vacuum cathode arc evaporation source Download PDFInfo
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- CN103114270A CN103114270A CN2012105145597A CN201210514559A CN103114270A CN 103114270 A CN103114270 A CN 103114270A CN 2012105145597 A CN2012105145597 A CN 2012105145597A CN 201210514559 A CN201210514559 A CN 201210514559A CN 103114270 A CN103114270 A CN 103114270A
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Abstract
The invention discloses a pneumatic arc striking device of a vacuum cathode arc evaporation source. The pneumatic arc striking device comprises an arc striking needle, a piston extension rod, a piston assembly, a sealing and insulating element, a movable seal, a movable seal pressing pad and a piston assembly supporting element, wherein the movable seal pressing pad is pressed on the movable seal by the piston assembly supporting element, the pneumatic arc striking device further comprises a metallic arc starter pedestal, the arc starter pedestal is sleeved on the piston extension rod through a sleeving hole in the middle part and is fixedly connected with a connecting flange of an electric arc evaporation source, the sealing and insulating element is clamped between the arc starter pedestal and the connecting flange of electric arc evaporation source, a projection stretched between the sealing and insulating element and the piston extension rod for isolating the sealing and insulating element and the piston extension rod is arranged on the bottom surface of the back end of the arc starter pedestal, the piston assembly supporting element is fixed on the front end face of the arc starter pedestal, and the movable seal is embedded in the front end face of the arc starter pedestal. The pneumatic arc striking device provided by the invention can be used for reducing the defect rate and lowering the production cost.
Description
Technical field
The present invention relates to a kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source.
Background technology
The vacuum cathode arc deposited is that one of mainstream technology with the hard protective film is used and decorated to current ion plating tool and mould.Concrete coating process is as follows: the vacuum cathode arc evaporation source is arranged on the vacuum film coating chamber sidewall, it is indoor that the evaporation source front end penetrates Vacuum Deposition, plating material on it--target piece is facing the indoor workpiece to be plated of Vacuum Deposition, by the vacuum arc differential of the arc spot of arc initiation device at target piece surface ignition cluster, the high temperature of arc macular area and field cause the effect effect allows the target evaporation generate metal vapors, and be ionized into plasma body to spatial emission, be deposited as film at workpiece surface.
Arc initiation device is the indispensable integral part in cathodic arc evaporation source.At present the mechanical contact arc initiation device is adopted in domestic cathodic arc evaporation source mostly, has pneumatic and electronic two kinds.Fig. 1 is the structural representation of the present pneumatic arc initiation device of commonly using, and mainly is comprised of piston component 1-11, piston extension rod 1-4, striking pin 1-2, sealing insulator 1-6, dynamic seal 1-7, dynamic seal pressure pad 1-8 and piston component supporting member 1-10.Piston component 1-11 mostly is outsourcing piece.As shown in Figure 1, piston component supporting member 1-10 is vertically fixed on the arc evaporation source joint flange 1-5 outside to piston component 1-11, and piston extension rod 1-4 and the coaxial setting of piston component 1-11 are fixedly connected with both by connecting screw rod 1-9 on relative end face.Piston extension rod 1-4 front end passes the inboard that the upper perforate of arc evaporation source joint flange 1-5 enters arc evaporation source joint flange 1-5.Dynamic seal pressure pad 1-8, dynamic seal 1-7, sealing insulator 1-6 are sleeved on piston extension rod 1-4 successively.Wherein, sealing insulator 1-6 is arranged on arc evaporation source joint flange 1-5 outside tapping, dynamic seal 1-7 is inlaid in the outer face of sealing insulator 1-6, dynamic seal pressure pad 1-8 is fitted on described dynamic seal 1-7 and sealing insulator 1-6 by piston component strut member 1-10, to guarantee the stopping property between piston extension rod 1-4 and arc evaporation source joint flange 1-5.Striking pin 1-2 is installed in the front end of piston extension rod 1-4 by thrust screw 1-3, shaft-like with piston extension rod 1-4 form right angle, the front end of striking pin has the elbow towards target piece 1-1 surface.
Arc process is as follows: when piston component 1-11 setback, drive piston extension rod 1-4 and retreat, the elbow of the striking pin 1-2 that piston extension rod 1-4 front end connects touches target piece 1-1 surface.The target piece 1-1 in cathodic arc evaporation source connects the power cathode of evaporation source, and piston component 1-11 and striking pin 1-2 connect positive source, at striking pin 1-2 and target piece 1-11 Contact, flows through Short-Circuit High Current; Immediately, piston component 1-11 reversing motion, driving piston extension rod 1-4 and striking pin 1-2 travels forward, striking pin 1-2 front end elbow leaves target piece 1-1 surface, in this time of releasing, the place is concentrating very high current density in some protrusion tip of striking pin 1-2 and the former contact surface of target piece 1-1, and the electric arc that can ignite generates the electric arc differential of the arc spot of cluster.More than complete the arc process that once ignites.
Now there is following shortcoming in use in arc initiation device commonly used: 1) piston extension rod 1-4 can generate heat by large electric current when striking, especially be subject to for a long time thermal radiation temperature and raise in vacuum chamber, the temperature rise of piston extension rod directly conduction is sealing insulator 1-6, dynamic seal 1-7 and dynamic seal pressure pad 1-8 to the insulated enclosure assembly that is set with on it.That stand in the breach is sealing insulator 1-6, and it is generally made with tetrafluoroethylene, the lower normal appearance distortion of being heated for a long time, and the vacuum-sealing between destructible arc evaporation source joint flange 1-5 and piston extension rod 1-4, problem leaks air.
2) piston extension rod 1-4 is longer, and interfix only by the sealing insulator 1-6 of rubber or plastics, does not play good collimating effect, and the swing on the space can appear in piston extension rod 1-4, thereby causes the contact displacement of striking pin 1-2 and target piece 1-1.
3) be connected by connecting screw rod 1-9 between piston extension rod 1-4 and piston component 1-11, under the vibratory impulse that piston component 1-11 seesaws, can cause connecting screw rod 1-9 loosening, be that piston extension rod 1-4 can rotate and move forward, and then drive striking pin 1-2 rotation and move, cause the skew of striking pin 1-2 position and increased the distance of striking pin 1-2 from target piece 1-1 surface, make striking pin 1-2 elbow can't be with target piece 1-1 Surface Contact can't striking, must adjust by vacuum breaker.
Summary of the invention
Technical problem to be solved by this invention is, provides a kind of and can reduce the defective products rate, enhance productivity, and the pneumatic type arc initiation device that reduces production costs.
the present invention solves its technical problem by following technical solution, a kind of pneumatic type arc initiation device of vacuum cathode arc evaporation source, comprise the striking pin, the piston extension rod, piston component, sealing insulator, dynamic seal, the dynamic seal pressure pad, the piston component strut member, described dynamic seal pressure pad is pressed in described dynamic seal by described piston component strut member, it is characterized in that, the striking device base that also comprises metal, described striking device base is sleeved on described piston extension rod and with the arc evaporation source joint flange by its middle part trepanning and is fixedly connected with, described sealing insulator is installed between described striking device base and arc evaporation source joint flange, have on described striking device base rear end bottom surface and stretch between described sealing insulator and described piston extension rod, be used for separating their projection, described piston component strut member is fixed on the front end face of described striking device base, described dynamic seal is inlaid in the front end face of described striking device base.
The present invention separates sealing insulator and piston extension rod by the striking device base of metal herein, sealing insulator is not directly contacted with the piston extension rod of higher temperatures, be difficult under the effect of the piston extension rod of higher temperatures, deformation occuring and destroy stopping property between arc evaporation source joint flange and piston extension rod, thereby causing the problem of gas leakage; In addition, dynamic seal of the present invention is to be inlaid in the striking device base of metal, due to striking device base volume and thermal capacitance all larger, therefore dynamic seal is subjected to the impact of piston extension rod of higher temperatures not too large, can keep good vacuum leakproofness; And keep the vacuum leakproofness of arc evaporation source joint flange inboard, and be conducive to reduce the defective products rate of product, enhance productivity, reduce production costs.
Described sealing insulator is one to have the insulating sleeve of flanging, on the external diameter of described insulating sleeve and described arc evaporation source joint flange, the perforate aperture is suitable, after installation, the flanging of described insulating sleeve is installed between described striking device base end face and described arc evaporation source joint flange, and described insulating sleeve stretches into the inboard of perforate on described arc evaporation source joint flange.
As to a modification of the present invention, projection on striking device base rear end bottom surface is annular protrusion, described annular protrusion is the extension of trepanning hole wall on described striking device base, consist of the collimating aperture of described piston extension rod on described striking device base, described collimating aperture length range is 50-75mm.But above-mentioned collimating aperture limited piston extension rod makes striking pin elbow can touch more accurately target piece surface location in the swing in space.
As to further improvement of the present invention, the piston rod of described piston extension rod and the described arc initiation device of the one-body molded formation of piston component, so can avoid due to connect between former piston extension rod and former piston component the striking pin position skew become flexible, cause or striking pin from target piece surface distance increase the striking pin elbow that occurs can't with target piece Surface Contact can't striking, the problem must vacuum breaker adjusted.
Described piston rod tail end has the axial mouth of splitting, make the piston rod tail end form non-circular rod-like structure, described arc initiation device also comprises anti-rotation sheet, have on described anti-rotation sheet with the piston rod tail end and split mouthful non-circular perforate that section is suitable, described anti-rotation sheet is parallel to be fixed on described piston component strut member, and be sleeved on splitting on mouthful section of piston rod tail end by the non-circular perforate on it, thereby guarantee that piston rod only does reciprocating linear motion and do not rotate, further prevent from rotating due to piston rod the problem of the striking pin displacement that causes.
Described piston component strut member is to be fixed on being used between described anti-rotation sheet and described striking device base to drive the cylinder that described piston rod does reciprocating linear motion.
described cylinder comprises lower cylinder lid, cylinder wall cover and upper cylinder lid, also comprises the stroke adjustment packing ring for the regulating piston throw of lever, on described, the lower cylinder lid is all to cover shape, has cover rim, wherein said lower cylinder lid is upwards inboard, described upper cylinder lid is downwards inboard, described cylinder wall cover is tubular, on described, upper from described cylinder wall cover respectively of lower cylinder lid, the lower end is fastened on described cylinder wall and puts, the outer wall at cylinder wall cover two ends is respectively by sealing-ring and upper, the cover rim inner seal of lower cylinder lid, described stroke adjustment packing ring is supported on, between the opposite face of lower cylinder cover rim, the lower cylinder lid is fixed on described striking device base, described arc initiation device also comprises be used to making described anti-rotation sheet be sleeved on all the time the compensation pad that the piston rod tail end is split mouth section correct position place, described compensation is leveled up row and is located between described upper cylinder lid and described anti-rotation sheet, on described, lower cylinder lid middle part all has mesopore, described piston rod to pass described cylinder wall cover and on, the mesopore of lower cylinder lid, and respectively by sealing-ring and described on, the inwall of the mesopore of lower cylinder lid is realized slidably being tightly connected, has the integrated ring wing on described piston rod, the described ring wing is the annulus that radially protrudes on piston rod, the described ring wing be in described on, in the space that lower cylinder lid and cylinder wall cover enclose, the sidewall of the described ring wing is realized slidably being tightly connected by sealing-ring and described cylinder wall cover inwall equally, on described, lower cylinder covers and also has respectively the turnover air flue, on described, the turnover air flue that lower cylinder covers upper with the described ring wing respectively, downside is communicated with.
Between described striking device base end face and sealing insulator, be respectively equipped with the sealing-ring for the stopping property of strengthening them between the flanging of described sealing insulator and arc evaporation source joint flange.
Described piston rod tail end bottom surface is provided with female screwhole, is provided with the thrust screw of being convenient to piston rod and arc source line in female screwhole.
Beneficial effect: 1) insulating sealer of the present invention does not directly contact with the piston rod that is heated, therefore insulating sealer can under the high temperature of piston rod, deformation not occur and cause stopping property destroyed; In addition, dynamic seal of the present invention is not to be inlaid in insulating sealer, but embed in the striking device base of metal, because base has larger thermal capacitance, allow dynamic seal that good heat dissipation environment is arranged, unlikely temperature rise is too high and destroy vacuum, therefore the present invention has overcome the often shortcoming of gas leakage of existing arc initiation device commonly used, be conducive to reduce the defective products rate of product, enhance productivity, reduce production costs;
2) piston extension rod of the present invention and piston component are one-body molded, overcome the striking pin position skew that causes due to the screw bolt loosening that connects piston extension rod and piston component in the prior art even cause can't striking problem;
3) the present invention designs the striking device base of metal, and makes piston rod pass collimating aperture long on striking device base, can play the effect that the limited piston bar spatially swings, and makes the striking pin can touch more accurately the correct position on target piece surface;
4) the present invention arranges anti-rotation sheet, has effectively overcome the problem of rotating the striking pin position skew that causes due to piston rod;
Above-mentioned every improved comprehensive, make the present invention can reduce effectively casualty ratio of accidents in vacuum cathode arc evaporation source operation, reduce fault power time, reduce the defective products rate, thereby enhance productivity, reduce production costs.
Description of drawings
Fig. 1 is the structural representation of the present pneumatic arc initiation device of commonly using;
Fig. 2 is that the striking pin of the arc initiation device of preferred embodiment of the present invention touches the target piece structural representation in when surface;
Fig. 3 is that the striking pin of the arc initiation device of preferred embodiment of the present invention leaves the target piece structural representation in when surface;
Fig. 4 is the enlarged view of the arc initiation device cylinder portion of preferred embodiment of the present invention.
Embodiment
The pneumatic type arc initiation device of the vacuum cathode arc evaporation source of preferred embodiment of the present invention is called for short as Fig. 2,3,4 striking device base 10, sealing insulator 5, dynamic seal 11, dynamic seal pressure pad 12, piston component strut member, the anti-rotation sheet 23 that arc initiation device comprises striking pin 2, piston rod 4, firm system.Striking device base 10 also can be made by other metallic substance, as copper etc.
Piston rod 4 is processed by the piston extension rod of front end and the piston component one of rear end.So can avoid the striking pin 2 positions skews that cause because the connection between piston extension rod of the prior art and piston component is loosening or striking pin 2 to increase from target piece 1 surface distance striking pin 2 elbows that occur and can't cause with target piece 1 Surface Contact the problem of can't striking, must vacuum breaker adjusting.
Piston rod 4 front ends pass the inboard that perforate on arc evaporation source joint flange 6 enters arc evaporation source joint flange 6.Striking pin 2 is installed in the front end of piston rod 4 by thrust screw 3, shaft-like with piston rod 4 form right angles, and striking pin 2 front end elbows are towards target piece 1 surface.
Dynamic seal pressure pad 12, dynamic seal 11, striking device base 10, sealing insulator 5 are sleeved on piston rod 4 successively.Wherein, sealing insulator 5 is arranged on arc evaporation source joint flange 6 outside tappings.Striking device base 10 has the middle part trepanning, striking device base 10 is sleeved on piston rod 4 by its middle part trepanning, striking device base 10 is fixedly connected with arc evaporation source joint flange 6 by trip bolt 7, and the flanging 51 of sealing insulator 5 is installed between striking device base 10 bottom surfaces and arc evaporation source joint flange 6.Has between the insulating sleeve and piston rod 4 that stretches into sealing insulator 5, be used for separating their annular protrusion 101 on striking device base 10 bottom surfaces, rear end, annular protrusion 101 is the extension of trepanning hole wall on striking device base 10, consist of the collimating aperture of piston rod 4 on striking device base 10, be used for limited piston bar 4 swing spatially, make striking pin 2 elbows can touch more accurately the surface of target piece 1.Sealing insulator 5 is generally made by polytetrafluoroethylmaterial material, the present invention adopts striking device base 10 to isolate thoroughly direct contact the between piston rod 4 and insulating sealer 5, thereby makes insulating sealer 5 can not destroy its vacuum-sealing because piston rod 4 heat conduction excess Temperatures make it that deformation occur.The recommended range of collimating aperture length is 50-75mm.
Between striking device base 10 bottom surfaces and sealing insulator 5, be respectively equipped with the sealing- ring 9,8 for the stopping property of strengthening them between the flanging 51 of sealing insulator 5 and arc evaporation source joint flange 6.The piston component strut member is fixed on the front end face of striking device base, dynamic seal 11, dynamic seal pressure pad 12 all are inlaid in the front end face of striking device base 10, wherein dynamic seal pressure pad 12 covers in dynamic seal 11 and by the piston component strut member and compresses, to guarantee the stopping property between piston rod 4 and arc evaporation source joint flange 6.The dynamic seal 11 of piston rod 4 embeds in the striking device pedestal 10 of steel, because striking device base 10 volumes are larger, thermal capacitance is also larger, therefore dynamic seal 11 has good heat dissipation environment, be subjected to the impact of piston rod 4 heat conduction temperature rises not too large, can keep good vacuum leakproofness.
As shown in Figure 4, the piston component strut member is the cylinder that piston rod 4 does reciprocating linear motion that is used for that is fixed on striking device base 10.cylinder comprises lower cylinder lid 14, cylinder wall cover 16 and upper cylinder lid 21 also comprise the stroke adjustment packing ring 28 for regulating piston bar 4 strokes, on, lower cylinder lid 21, 14 is all to cover shape, has cover rim 211 and 141, and wherein lower cylinder lid 14 is upwards inboard, and upper cylinder lid 21 is downwards inboard, and cylinder wall cover 16 is tubular, on, lower cylinder lid 21, 14 upper from cylinder wall cover 16 respectively, the lower end is fastened on cylinder wall cover 16, and cylinder wall overlaps the outer wall at 16 two ends respectively by sealing-ring 27 and upper, lower cylinder lid 21, 14 cover rim 211, 141 inner seals, stroke adjustment packing ring 28 is supported on, lower cylinder 21, 14 cover rims 211, between 141 opposite face, lower cylinder lid 14 is fixed on striking device base 10 by screw 13, on, lower cylinder lid 21, 14 middle parts all have mesopore, and piston rod 4 axially passes cylinder wall cover 16 and upper, lower cylinder lid 21, 14 mesopore, and respectively by sealing- ring 20, 15 with upper, lower cylinder lid 21, on 14, the inwall of mesopore realizes that slidable sealing connects.Have the integrated ring wing 18 on piston rod 4, the ring wing 18 is the annulus that radially protrudes on piston rod 4.The ring wing 18 be in upper and lower cylinder head 21,14 and cylinder wall cover 16 spaces that enclose in, the sidewall of the ring wing 18 overlaps 16 inwalls by sealing-ring 17 and cylinder wall equally and realizes that slidable sealing is connected.The turnover air flue that also has respectively on upper and lower cylinder head 21,14 on turnover air flue 19(lower cylinder lid 14 does not draw), the turnover air flue 19 on upper and lower cylinder head 21,14 is communicated with the upper and lower side of the ring wing 18 respectively.Arc initiation device also comprises compensation pad 22, and compensation pad 22 is set in parallel on upper cylinder lid 21, the parallel anti-rotation sheet 23 that is fixed with on compensation pad 22.
The stroke of piston rod 4 is determined by the shift length of the piston rod 4 pressed on ring wings 18 linear reciprocating motion in cylinder, it is subjected to the restriction of ultimate range between upper and lower cylinder head 21,14 in cylinder inner cavity, and stroke adjustment packing ring 28 can suitably be regulated the distance between upper and lower cylinder head 21,14.Compensation pad 22 pad of aluminum is anti-rotation sheet 23 times, and after adjusting with fitting piston bar 4 strokes, anti-rotation sheet 23 is split mouthful section needs that coordinate with piston rod 4 tail ends.
The corresponding position at above-mentioned anti-rotation sheet 23, compensation pad 22, upper and lower cylinder head 21,14 edges all is provided with perforate, and pass successively from top to bottom the inner ring hole of anti-rotation sheet 23, compensation pad 22, upper cylinder lid 21 edges perforate and stroke adjustment packing ring 28 and the perforate that lower cylinder covers 14 corresponding positions, edge by long spiro nail 26, they are fixed on striking device base 10.Certainly, the fixed form between them is restriction not, only need make to keep stable position relationship to get final product between them.
Piston rod 4 tail end bottom surfaces are provided with female screwhole, are provided with the thrust screw 25 of piston rod 4 and arc source line in female screwhole, are used for facilitating the wiring of piston rod 4 and arc source.
The installation of above-mentioned each sealing-ring is all to offer groove on respective side walls, and sealing-ring is inlaid in described groove, so not only facilitates the installation of sealing-ring, and can prevent that sealing-ring from unnecessary displacement occuring when the device motion.
Below in conjunction with accompanying drawing, specifically tell about the process of work of the present invention: as shown in Fig. 2,3,4, the running-active status when Fig. 2 represents that the striking pin touches the target piece surface in cathodic arc evaporation source.At this moment, open air inlet with the operated pneumatic valve that turnover air flue on lower cylinder lid 14 connects outward, import pressurized air to lower part of cylinder, the ring wing 18 of gaseous tension pushing piston bar 4 moves upward piston rod 4, encircle simultaneously the gas in the wing 18 upside cylinders, by the turnover air flue 19 on upper cylinder lid 21 by discharging with the venting port of its outer operated pneumatic valve of opening that connects.The ring wing 18 rises to cylinder head under compressed-air actuated air pressure promotes, drive striking pin 2 mobile and just touch target piece 1 surface to target piece 1 surface.It is anodal that piston rod 4 tail ends connect the striking source, and target piece 1 connects striking source negative pole, and striking pin 2 touches the formation short circuit with target piece 1 surface, and moment has Short-Circuit High Current to pass through.This Short-Circuit High Current of the perception of pilot circuit meeting subsequently, the working order that changes immediately the outer operated pneumatic valve that connects makes it instead, namely the turnover air flue 19 to upper cylinder lid 21 imports pressurized air, make the turnover air flue of lower cylinder lid 14 be communicated with venting port, pressurized air enters from cylinder upper part, thereby the ring wing 18 on pushing piston bar 4 moves downward, and the pressurized air of cylinder lower part is discharged.At this moment, piston rod 4 moves downward, drive striking pin 2 and hightail target piece 1 surface, between the contact surface of the former striking pin 2 that flows through Short-Circuit High Current and target piece 1, there is high current density district in spur place in injustice, in the moment that striking pin 2 separates with target piece 1, the electric arc that can ignite, the electric arc differential of the arc spot of generation cluster.The ring wing 18 drops to cylinder bottom under the compressed-air actuated promotion on cylinder top, move downward and leave the surperficial segment distance of target piece 1 thereby piston rod 4 drives striking pins 2, and namely as shown in Figure 3 state, namely complete the action of the electric arc that once ignites.
The present invention can come the ring wing 18 on regulating piston bar 4 to move up and down distance by the thickness of adjusting stroke adjustment packing ring 28, thereby adjust the distance that striking pin 2 moves up and down, on allow when moving the elbow of striking pin 2 touch target piece surface and have certain pressure, allow striking pin 2 leave the target piece 1 suitable distance in surface when moving down.
Claims (10)
1. the pneumatic type arc initiation device of a vacuum cathode arc evaporation source, comprise the striking pin, the piston extension rod, piston component, sealing insulator, dynamic seal, the dynamic seal pressure pad, the piston component strut member, described dynamic seal pressure pad is pressed in described dynamic seal by described piston component strut member, it is characterized in that, the striking device base that also comprises metal, described striking device base is sleeved on described piston extension rod and with the arc evaporation source joint flange by its middle part trepanning and is fixedly connected with, described sealing insulator is installed between described striking device base and arc evaporation source joint flange, have on described striking device base rear end bottom surface and stretch between described sealing insulator and described piston extension rod, be used for separating their projection, described piston component strut member is fixed on the front end face of described striking device base, described dynamic seal is inlaid in the front end face of described striking device base.
2. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 1, it is characterized in that, described sealing insulator is one to have the insulating sleeve of flanging, on the external diameter of described insulating sleeve and described arc evaporation source joint flange, the perforate aperture is suitable, after installation, the flanging of described insulating sleeve is installed between described striking device base end face and described arc evaporation source joint flange, and described insulating sleeve stretches into the inboard of perforate on described arc evaporation source joint flange.
3. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 2, it is characterized in that, between described striking device base end face and sealing insulator, be respectively equipped with the sealing-ring for the stopping property of strengthening them between the flanging of described sealing insulator and arc evaporation source joint flange.
4. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 1, it is characterized in that, projection on striking device base rear end bottom surface is annular protrusion, described annular protrusion is the extension of trepanning hole wall on described striking device base, consist of the collimating aperture of described piston extension rod on described striking device base, described collimating aperture length range is 50-75mm.
5. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 3, it is characterized in that, projection on striking device base rear end bottom surface is annular protrusion, described annular protrusion is the extension of trepanning hole wall on described striking device base, consist of the collimating aperture of described piston extension rod on described striking device base, described collimating aperture length range is 50-75mm.
6. the pneumatic type arc initiation device of the described vacuum cathode arc evaporation source of according to claim 1 to 5 any one, is characterized in that, the piston rod of described piston extension rod and the described arc initiation device of the one-body molded formation of piston component.
7. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 6, it is characterized in that, described piston rod tail end has the axial mouth of splitting, make the piston rod tail end form non-circular rod-like structure, described arc initiation device also comprises anti-rotation sheet, have on described anti-rotation sheet with the piston rod tail end and split mouthful non-circular perforate that section is suitable, described anti-rotation sheet is parallel to be fixed on described piston component strut member, and is sleeved on splitting on mouthful section of piston rod tail end by the non-circular perforate on it.
8. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 7, it is characterized in that, described piston component strut member is to be fixed on being used between described anti-rotation sheet and described striking device base to drive the cylinder that described piston rod does reciprocating linear motion.
9. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 8, is characterized in that, described cylinder comprises lower cylinder lid, cylinder wall cover and upper cylinder lid, also comprises the stroke adjustment packing ring for the regulating piston throw of lever, on described, the lower cylinder lid is all to cover shape, has cover rim, wherein said lower cylinder lid is upwards inboard, the upper cylinder lid is downwards inboard, described cylinder wall cover is tubular, on described, upper from described cylinder wall cover respectively of lower cylinder lid, the lower end is fastened on described cylinder wall and puts, the outer wall at cylinder wall cover two ends is respectively by sealing-ring and upper, the cover rim inner seal of lower cylinder lid, described stroke adjustment packing ring is supported on, between the opposite face of lower cylinder cover rim, the lower cylinder lid is fixed on described striking device base, described arc initiation device also comprises be used to making described anti-rotation sheet be sleeved on all the time the compensation pad that the piston rod tail end is split mouth section correct position place, described compensation is leveled up row and is located between described upper cylinder lid and described anti-rotation sheet, on described, lower cylinder lid middle part all has mesopore, described piston rod to pass described cylinder wall cover and on, the mesopore of lower cylinder lid, and respectively by sealing-ring and described on, the inwall of the mesopore of lower cylinder lid is realized slidably being tightly connected, has the integrated ring wing on described piston rod, the described ring wing is the annulus that radially protrudes on piston rod, the described ring wing be in described on, in the space that lower cylinder lid and cylinder wall cover enclose, the sidewall of the described ring wing is realized slidably being tightly connected by sealing-ring and described cylinder wall cover inwall equally, on described, lower cylinder covers and also has respectively the turnover air flue, on described, the turnover air flue that lower cylinder covers upper with the described ring wing respectively, downside is communicated with.
10. the pneumatic type arc initiation device of vacuum cathode arc evaporation source according to claim 9, is characterized in that, described piston rod tail end bottom surface is provided with female screwhole, is provided with the thrust screw of being convenient to piston rod and arc source line in female screwhole.
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| CN106756822A (en) * | 2017-01-16 | 2017-05-31 | 天津职业技术师范大学 | A kind of electric arc target striking needle fixation device of position continuously adjustabe |
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| CN109338310A (en) * | 2018-11-26 | 2019-02-15 | 上海子创镀膜技术有限公司 | One kind being used for multi-arc ion plating equipment circular flat multi sphere target assembly |
| CN110565055A (en) * | 2019-10-28 | 2019-12-13 | 北京泰科诺科技有限公司 | arc striking device for ion plating and ion plating device |
| CN110565055B (en) * | 2019-10-28 | 2024-05-03 | 北京泰科诺科技有限公司 | Arc striking device for ion plating and ion plating device |
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