CN106756822B - A kind of electric arc target striking needle fixation device that position is continuously adjustable - Google Patents
A kind of electric arc target striking needle fixation device that position is continuously adjustable Download PDFInfo
- Publication number
- CN106756822B CN106756822B CN201710027334.1A CN201710027334A CN106756822B CN 106756822 B CN106756822 B CN 106756822B CN 201710027334 A CN201710027334 A CN 201710027334A CN 106756822 B CN106756822 B CN 106756822B
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- Prior art keywords
- striking
- needle
- striking needle
- slot
- electric arc
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
Abstract
The present invention relates to the electric arc target striking needle fixation devices that a kind of position is continuously adjusted, which includes a locating rod and two internally threaded sleeves being auxiliarily fixed.One end of the locating rod is provided with through slot in the direction parallel with axis, is externally threaded in this side pole section, and the other end is provided with counterbore and tapping thread, and the diameter of no external screw thread rod segment is than there is the diameter of external screw thread rod segment small.Internal thread one end is threadedly secured on cylinder piston, and two internally threaded sleeves, which are screwed on bar, externally threaded part, striking needle is placed in through slot, and in the middle position of two screwed pipes.Two internally threaded sleeves being auxiliarily fixed, wherein one is hollow thread casing, another is semiclosed threaded sleeve, and the total length of two casings, which is slightly larger than, is provided with externally threaded shaft length.The device can realize continuously adjusting for arc needle and target surface distance, improve working efficiency.It the composite can be widely applied in arc ion plating apparatus.
Description
Technical field
The present invention relates to the electric arc target striking needle fixation devices that a kind of position is continuously adjusted.
Background technique
In arc ion plating film device coating process, touches target material surface by striking needle point and generate to discharge and drawn
Arc.In coating process, striking pin position and target material surface hypotelorism, striking needle tip temperature will be increased constantly, continue ablation
Electric arc tip portion can be made to fuse, cause plated film work after arc extinguishing that can not continue；Striking pin position and target are apart from mistake
Far, arc needle needle point cannot be contacted with target surface, so that can not discharge opens arc.With the continuous consumption of target, striking before each plated film
The position of needle needs to adjust, and makes arc needle needle point and target surface contact discharge in arc process, smoothly opens arc and the arc needle that will not fuse, by
It is difficult to measure in target consumption degree, gives each integral demounting striking needle, take mechanical bend method adjustment position to increase very big
Difficulty wastes disassembly and assembly time.To improve working efficiency, a kind of fixed dress of the striking needle convenient for continuously adjusting arc pin position is needed
It sets.
Summary of the invention
Present invention solves the technical problem that being to overcome the deficiencies of existing technologies, a kind of drawing convenient for adjusting arc pin position is provided
Arc needle fixation device, realize striking needle point and electric arc target identity distance from it is continuously adjustable, save and striking be bent using mechanical means
Needle adjusts needle point to the time of target surface distance, improves work efficiency.
The technical solution adopted by the present invention to solve the technical problems are as follows: a kind of striking needle of arc ion plating film device is solid
Determine device, including a locating rod and two threaded sleeves being auxiliarily fixed, described positioning shaft one end and arc cathode striking
The piston of cylinder is connected, and the other end screws in the internally threaded sleeve of two auxiliary positionings, and striking needle handle portion is placed in two fixed sleevings
In the through slot in middle position, and two auxiliary casings are tightened, to fix striking needle.Each part in the fixed device passes through one
The mechanical engagement of series, striking needle is fixed on the piston of arc cathode striking cylinder, while realizing striking needle needle point to electricity
Arc target surface distance continuously adjusts, and guarantee electric arc target normally opens arc.
It is further used as the improvement of technical solution of the present invention, the shaft be connected with arc cathode striking cylinder piston one
End is provided with threaded hole, and by the threaded engagement with external thread column on cylinder piston, shaft is fixed on striking cylinder piston.
It is further used as the improvement of technical solution of the present invention, and parallel with rod piece axial direction lead to is milled on the shaft
Slot, striking needle needle handle are inserted into through slot, and striking needle can be axially moveable in through slot, realize striking needle needle point and electric arc target identity distance from
Continuously adjust.
It is further used as the improvement of technical solution of the present invention, and the shaft is provided in the rod segment of through slot one end and is tapped with outer spiral shell
Line, screwing cooperation and fix the position of striking needle by the threaded sleeve with auxiliary positioning.
It is further used as the improvement of technical solution of the present invention, does not have externally threaded polished rod diameter ratio to have outer spiral shell on the shaft
The diameter of rasp bar section is smaller, cover a part of internally threaded sleeve can on no externally threaded polished rod, with guard bar
External screw thread.
It is further used as the improvement of technical solution of the present invention, the internally threaded sleeve of two auxiliary positionings, wherein one
Shaft is first screwed on for being threadedly engaged on hollow bushing, with shaft, another is semi-closed casing, is screwed into the outermost of locating rod
End, and have escape in sleeve closure one end, the total length of two loop bars is slightly larger than the total length of external screw thread shaft, guarantees in work
Always there is the protection of casing during work on shaft external screw thread.
It is further used as the improvement of technical solution of the present invention, and one end of the internally threaded sleeve of two auxiliary positionings mills
There is a pair of facet being parallel to each other, so that spanner clamping realizes to the tightening of two threaded sleeves, dismantles.
Beneficial effects of the present invention: the inner screw sheath that the present invention passes through external screw thread and two auxiliary positionings with locating rod
Threaded engagement between pipe is placed in the striking needle in locating rod through slot with fixed handle, by between two threaded sleeves
Turn can continuously adjust the distance between striking needle needle point and electric arc target surface, and two threaded sleeves direction to each other simultaneously
Turn can clamp striking needle, guarantee the fixation of striking pin position.After multiple plated film, with the consumption of target, rotation can be passed through
Two threaded sleeves are moved to adjust the position of striking needle, i.e. the need of striking needle needle point and target surface keep a certain range, closely easily make very much
At the fusing of striking needle, it is too far can not carry out electric discharge open arc.Present invention eliminates repeated disassembled and assembled striking needle, take mechanical means curved
Bent striking needle adjusts the trouble of needle point Yu target surface distance, and the time of plated film is greatly saved, improve work efficiency and
The service life of striking needle.And two threaded sleeve overall lengths are prevented slightly larger than having externally threaded rod segment in locating rod due to outer spiral shell
It deposited coating on line and destroy, extend the service life of the device.
The present invention is applicable on various arc ion plating film devices as striking needle fixation device.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the device in the present invention after the new target of installation.
Fig. 2 is the structural schematic diagram of the device in the present invention after certain loss occurs for target.
Specific embodiment
Below by example, invention is further described in detail.
Embodiment 1
Referring to Fig.1, the continuously adjustable electric arc target striking needle fixation device in a kind of position, including a locating rod and two it is auxiliary
Fixed threaded sleeve is helped, described positioning shaft one end is connected with the piston of arc cathode striking cylinder, and the other end screws in two
Striking needle handle portion is placed in the through slot in two fixed sleeving middle positions by the internally threaded sleeve of auxiliary positioning.Rotate two auxiliary
Fixed threaded sleeve makes striking needle needle point at a distance from target surface always at one, it can be achieved that striking pin position continuously adjusts
In suitable range, it is ensured that the normal striking of striking needle.Striking needle is fixed by opposite directions screwing for two internally threaded sleeves simultaneously
In through slot on the securing lever.
As a preferred embodiment of the present invention, referring to Fig.1, when target 14 does not consume, described 1 one end of positioning shaft is opened
There is an internal thread hole 6, the threaded hole 6, by screwing cooperation with the external thread column on arc cathode striking cylinder piston, by bar
Body is fixed on cylinder piston.
As a preferred embodiment of the present invention, it is milled in the rod segment 7 of described positioning shaft one end parallel with center line of the bar
The through slot 4 in direction, the shank of striking needle 8 are inserted into through slot 4, and striking needle can axially move in through slot, realize arc needle needle point with
Electric arc target identity distance from continuously adjust.
As a preferred embodiment of the present invention, it is externally threaded in the rod segment 7, passes through the spiral shell with two auxiliary positionings
The threaded engagement of line casing 2,3, fixes the position of striking needle 8.
As a preferred embodiment of the present invention, not having the diameter ratio of external screw thread rod segment 5 on the shaft has external thread rod
The diameter of section 7 is smaller, and doing so can be such that a part of internally threaded sleeve 2 covers on no externally threaded polished rod 1, avoids outer
Screw thread destroys in coating process because depositing upper coating.
As a preferred embodiment of the present invention, the annoying internally threaded sleeve 2,3 of two auxiliary positionings, wherein one is
Hollow bushing 2 has first screwed on external screw thread rod segment 7, and another is semiclosed threaded sleeve 3, is equally screwed into rod segment 7, with casing 2
Striking needle 8 is fixed in through slot 4 by cooperation, and escape is provided on casing 3 and facilitates processing, is designed in 7 outermost end of rod segment semiclosed
Casing 3 can play a certain protective role bar, and the total length of casing 2,3 should be bigger than the total length of external screw thread rod segment 7, guarantee
There is the protection of casing on shaft external screw thread always during the work time, extends the service life of fixed device.
As a preferred embodiment of the present invention, one end of the internally threaded sleeve 2,3 of two auxiliary positionings is milled with
The facet 9,10 and 11,12 that a pair is parallel to each other mills out the interior spiral shell that these planes are easy to use spanner to be auxiliarily fixed two
Line casing is tightened and is dismantled.
Embodiment 2
As a preferred embodiment of the present invention, it in conjunction with Fig. 2, is further described when some consumption occur for target, it is described
The course of work of the continuously adjustable electric arc target striking needle fixation device in position.When target 14 is consumed into situation as shown in Figure 2, it is
Guarantee striking needle 8 smooth striking, the internally threaded sleeve 2,3 of two auxiliary positionings of turn, makes striking needle 8 in rod segment 7 respectively
Through slot 4 in move, can normally open the range of arc until arc needle needle point 13 reaches at a distance from target surface.At this point, hollow thread set
Some set of 2 right end of pipe shields to screw thread in no externally threaded light bar segment 5.Whole process is convenient and efficient, saves
The trouble for having removed integral disassembly, assembly striking needle device is greatly saved using mechanical bend striking needle method and adjusts needle point and target surface
The time of distance can make the positioning of striking needle more solid and reliable using two screwing in opposite directions for internally threaded sleeve.
Particularly, the striking needle 8 to match with the present invention must have certain technical requirements, and 8 section of striking needle is circle
Shape, overall structure are in question mark shape, that section that arc needle can be made parallel with target surface avoids temperature is excessively high from causing arc needle far from target surface
Softening, the deposition of material that target evaporates on arc needle can also be reduced.The needle point 13 of the arc needle 8 is by a bit of molybdenum filament
It does, due to the higher thawing that can prevent arc needle in coating process of molybdenum fusing point.One should be milled out at the shank 15 of the arc needle 8
The plane that section is parallel to each other, to ensure that two threaded sleeves to the clamping of arc needle, keep the fixation of arc needle more firm.
The invention is not limited to above embodiment, and those skilled in the art are smart without prejudice to the present invention
Equivalent deformation or replacement can be also made under the premise of mind, these equivalent deformations or replacement are all contained in the claim of this application institute
In the range of restriction.
Claims (4)
1. a kind of continuously adjustable electric arc target striking needle fixation device in position, including a locating rod and two internally threaded sleeves,
It is characterized by: described shaft one end is connected with the piston of striking cylinder, the other end screws in the inner screw sheath of two auxiliary positionings
Pipe, striking needle is placed in the through slot in two fixed sleeving middle positions；The internally threaded sleeve of two auxiliary positionings, wherein one
Root is that being threadedly engaged on hollow bushing, with shaft first screws on shaft, and another is semi-closed casing, screws on the outermost of locating rod
It holds, there is escape in sleeve closure end, the total length of two loop bars is slightly larger than the total length of external screw thread shaft；
Striking needle is fixed on arc cathode striking cylinder by a series of mechanical engagement by each part in the fixed device
Piston on, realize striking needle point to electric arc target identity distance from be continuously adjusted；
One end that the shaft is connected with the piston of arc cathode striking cylinder is provided with internal thread hole, by on cylinder piston rod
External thread column threaded engagement, shaft is fixed on striking cylinder piston.
2. the continuously adjustable electric arc target striking needle fixation device in position according to claim 1, it is characterised in that: the bar
It is milled with the through slot parallel with center line of the bar with it, after striking needle needle handle is inserted into through slot, striking needle can be along rod piece axis in through slot
To movement.
3. the continuously adjustable electric arc target striking needle fixation device in position according to claim 1, it is characterised in that: the bar
It is externally threaded on the rod piece for being provided with through slot one end, without externally threaded polished rod diameter than there is the diameter of external screw thread rod segment
Smaller, a part of external thread sleeve can cover on no externally threaded polished rod.
4. the continuously adjustable electric arc target striking needle fixation device in position according to claim 1, it is characterised in that: described two
A pair of facet being parallel to each other is milled on one end of the internally threaded sleeve of root auxiliary positioning respectively, so as to spanner to casing into
Row screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710027334.1A CN106756822B (en) | 2017-01-16 | 2017-01-16 | A kind of electric arc target striking needle fixation device that position is continuously adjustable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710027334.1A CN106756822B (en) | 2017-01-16 | 2017-01-16 | A kind of electric arc target striking needle fixation device that position is continuously adjustable |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106756822A CN106756822A (en) | 2017-05-31 |
| CN106756822B true CN106756822B (en) | 2019-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710027334.1A Active CN106756822B (en) | 2017-01-16 | 2017-01-16 | A kind of electric arc target striking needle fixation device that position is continuously adjustable |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815651B (en) * | 2017-11-30 | 2023-08-15 | 天津职业技术师范大学 | Arc ion plating arc striking needle adjusting device with buffer function |
| CN107740055B (en) * | 2017-11-30 | 2019-11-01 | 天津职业技术师范大学 | A kind of spring arc ion plating striking needle regulating device |
| CN107761061B (en) * | 2017-11-30 | 2019-11-01 | 天津职业技术师范大学 | A kind of arc ion plating striking needle regulating device |
| CN109338310A (en) * | 2018-11-26 | 2019-02-15 | 上海子创镀膜技术有限公司 | One kind being used for multi-arc ion plating equipment circular flat multi sphere target assembly |
| CN112359329B (en) * | 2020-11-05 | 2022-11-18 | 广东鼎泰高科技术股份有限公司 | Arc striking needle and arc striking method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103114270A (en) * | 2012-12-04 | 2013-05-22 | 东莞市汇成真空科技有限公司 | Pneumatic arc striking device of vacuum cathode arc evaporation source |
| CN103469166A (en) * | 2013-10-12 | 2013-12-25 | 武汉大学 | Integrated cathode arc target |
| CN206970708U (en) * | 2017-01-16 | 2018-02-06 | 天津职业技术师范大学 | A kind of arc ion plating power traction arc needle device |
-
2017
- 2017-01-16 CN CN201710027334.1A patent/CN106756822B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103114270A (en) * | 2012-12-04 | 2013-05-22 | 东莞市汇成真空科技有限公司 | Pneumatic arc striking device of vacuum cathode arc evaporation source |
| CN103469166A (en) * | 2013-10-12 | 2013-12-25 | 武汉大学 | Integrated cathode arc target |
| CN206970708U (en) * | 2017-01-16 | 2018-02-06 | 天津职业技术师范大学 | A kind of arc ion plating power traction arc needle device |
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| CN106756822A (en) | 2017-05-31 |
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