CN103093851A - Guiding control device for electric beam current size - Google Patents
Guiding control device for electric beam current size Download PDFInfo
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- CN103093851A CN103093851A CN2013100208185A CN201310020818A CN103093851A CN 103093851 A CN103093851 A CN 103093851A CN 2013100208185 A CN2013100208185 A CN 2013100208185A CN 201310020818 A CN201310020818 A CN 201310020818A CN 103093851 A CN103093851 A CN 103093851A
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- beam current
- control device
- accelerating tube
- current size
- electric beam
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Abstract
The invention discloses a guiding control device for electric beam current size. The guiding control device for the electric beam current size comprises an accelerating tube, a scanning box is connected at the lower end of the accelerating tube, a guiding coil used for current offset adjustment is installed on the accelerating tube, a diaphragm plate is arranged at the connecting position of the accelerating tube and the scanning box, and a round hole is formed in the center of the diaphragm plate. The guiding control device for the electric beam current size solves the problems that the size adjustment of electric beam of microampere order of magnitude is difficult and unachievable in the prior art. Due to the fact that the diaphragm plate is additionally arranged between the scanning box of a prior device and the accelerating tube of the prior device, the round hole is formed in the center of the diaphragm plate, the beam current amount when electric beam current passes through the round hole is adjusted through control over the guiding coil, and therefore the control over the size of the electric beam current is achieved. The guiding control device for the electric beam current size is simple in structure, convenient to operate, large in adjustment magnitude, and capable of enabling the beam current amount to be reduced by two orders of amplitude conveniently.
Description
Technical field
The present invention relates to a kind of guide control device of electronic beam current size, belonged to accelerator line control technology field.
Background technology
At present, both at home and abroad the minimum work line of accelerator is all at the milliampere order of magnitude, and usually is operated in fixedly under line.Same accelerator when different occasions work, the line adjustable extent also in an order of magnitude, as to be adjusted to stably, reposefully tens microamperes with interior be almost impossible realize.
By the improvement of filament, line is realized steadily adjustable in the microampere order of magnitude, but will received in the amperage magnitude steadily adjustable can't the realization.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of guide control device of electronic beam current size, by changing the size of current of guidance coil, regulates line by the line amount of circular hole, thereby realizes the control to the electronic beam current size.
In order to solve the problems of the technologies described above, the technical solution adopted in the present invention is:
A kind of guide control device of electronic beam current size, comprise accelerating tube, the lower end of described accelerating tube is connected with scan box, be equipped with on described accelerating tube for the guidance coil of adjusting the beam excursion amount, the junction of described accelerating tube and scan box is provided with aperture plate, and the center of described aperture plate has circular hole.
The guide control device of aforesaid electronic beam current size is characterized in that: described aperture plate edge surrounding is hollow form, and is provided with the limbers.
The guide control device of aforesaid electronic beam current size is characterized in that: be provided with focusing coil on the accelerating tube above described guidance coil.
The guide control device of aforesaid electronic beam current size is characterized in that: the top of described scan box is provided with Y scanning yoke and X scanning yoke.
The invention has the beneficial effects as follows: by install an aperture plate additional between the scan box of original device and accelerating tube, and open a circular hole in the center of aperture plate, regulate electronic beam current by the line amount of circular hole by the electric current of controlling guidance coil, thereby realized the control to the electronic beam current size, this apparatus structure is simple, easy to operate, and the amplitude of accommodation is large, can easily line be reduced by 2 orders of magnitude.
Description of drawings
Fig. 1 is the structural representation of the guide control device of electronic beam current size of the present invention.
Embodiment
Below in conjunction with Figure of description, the present invention is described further.
As shown in Figure 1, a kind of guide control device of electronic beam current size, comprise accelerating tube 1, the lower end of described accelerating tube 1 is connected with scan box 7, be equipped with on described accelerating tube 1 for the guidance coil 3 of adjusting the beam excursion amount, described accelerating tube 1 is provided with aperture plate 4 with the junction of scan box 7, and the center of described aperture plate 4 has circular hole 41.By install an aperture plate 4 additional between the scan box 7 of original device and accelerating tube 1, and open a circular hole 41 in the center of aperture plate 4, regulate electronic beam current by the line amount of circular hole 41 by the electric current of controlling guidance coil 3, thereby realized the control to the electronic beam current size, the size of described circular hole 41 is for allowing the line of 70% left and right smoothly by being advisable, and the edge of line is blocked, absorbs by aperture plate 4.
Described aperture plate 4 edge surroundings are hollow form, and are provided with limbers 42, add water by limbers 42 in aperture plate 4, so that the heat that the cooling electron beam that is blocked is sent out is avoided temperature rise.
Be provided with focusing coil 2 on the accelerating tube 1 of described guidance coil 3 tops, the top of described scan box is provided with Y scanning yoke 5 and X scanning yoke 6.
The guide control device of a kind of electronic beam current size provided by the invention by changing the size of current of guidance coil, is regulated line by the line amount of circular hole, thereby realizes the control to the electronic beam current size.
Above demonstration and described ultimate principle of the present invention, principal character and advantage.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in above-described embodiment and instructions just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is by appending claims and equivalent circle thereof.
Claims (4)
1. the guide control device of an electronic beam current size, comprise accelerating tube (1), the lower end of described accelerating tube (1) is connected with scan box (7), it is characterized in that: be equipped with on described accelerating tube (1) for the guidance coil (3) of adjusting the beam excursion amount, described accelerating tube (1) is provided with aperture plate (4) with the junction of scan box (7), and the center of described aperture plate (4) has circular hole (41).
2. the guide control device of electronic beam current size according to claim 1 is characterized in that: described aperture plate (4) edge surrounding is hollow form, and is provided with limbers (42).
3. the guide control device of electronic beam current size according to claim 1 and 2, is characterized in that: be provided with focusing coil (2) on the accelerating tube (1) above described guidance coil (3).
4. the guide control device of electronic beam current size according to claim 3, it is characterized in that: the top of described scan box is provided with Y scanning yoke (5) and X scanning yoke (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100208185A CN103093851A (en) | 2013-01-21 | 2013-01-21 | Guiding control device for electric beam current size |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100208185A CN103093851A (en) | 2013-01-21 | 2013-01-21 | Guiding control device for electric beam current size |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103093851A true CN103093851A (en) | 2013-05-08 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013100208185A Pending CN103093851A (en) | 2013-01-21 | 2013-01-21 | Guiding control device for electric beam current size |
Country Status (1)
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| CN (1) | CN103093851A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103929873A (en) * | 2014-04-22 | 2014-07-16 | 中国科学院上海应用物理研究所 | Detecting system and method and correcting system and method for beam central orbit deviation |
| CN105355254A (en) * | 2015-10-19 | 2016-02-24 | 中国科学院近代物理研究所 | Accelerator operation on-line continuous adjustable circular hole beam-limiting diaphragm |
| CN106793444A (en) * | 2016-12-09 | 2017-05-31 | 四川智研科技有限公司 | A kind of electron beam control method |
| CN107148140A (en) * | 2017-06-30 | 2017-09-08 | 中广核达胜加速器技术有限公司 | The beam spot automatic straightening device and accelerator of a kind of accelerator |
Citations (4)
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| CN1540707A (en) * | 2003-04-21 | 2004-10-27 | 佳能株式会社 | Electron gun |
| EP1544895A2 (en) * | 2003-12-18 | 2005-06-22 | Sony Corporation | Exposure apparatus, exposure method and semiconductor device production method |
| JP2005207880A (en) * | 2004-01-22 | 2005-08-04 | Ebara Corp | Electron beam device which modifies property of sample and method for manufacturing device by using such electron beam device |
| CN203085194U (en) * | 2013-01-21 | 2013-07-24 | 江苏达胜加速器制造有限公司 | Guiding controller for regulating size of electronic beam |
-
2013
- 2013-01-21 CN CN2013100208185A patent/CN103093851A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1540707A (en) * | 2003-04-21 | 2004-10-27 | 佳能株式会社 | Electron gun |
| EP1544895A2 (en) * | 2003-12-18 | 2005-06-22 | Sony Corporation | Exposure apparatus, exposure method and semiconductor device production method |
| JP2005207880A (en) * | 2004-01-22 | 2005-08-04 | Ebara Corp | Electron beam device which modifies property of sample and method for manufacturing device by using such electron beam device |
| CN203085194U (en) * | 2013-01-21 | 2013-07-24 | 江苏达胜加速器制造有限公司 | Guiding controller for regulating size of electronic beam |
Non-Patent Citations (1)
| Title |
|---|
| 王发芽: "一种新型、紧凑、高效电子直线加速器加速管的设计研究", 《高能物理与核物理》, vol. 28, no. 10, 31 October 2004 (2004-10-31), pages 1109 - 1115 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103929873A (en) * | 2014-04-22 | 2014-07-16 | 中国科学院上海应用物理研究所 | Detecting system and method and correcting system and method for beam central orbit deviation |
| CN103929873B (en) * | 2014-04-22 | 2016-10-12 | 中国科学院上海应用物理研究所 | The detecting system of beam center orbit displacement and method and correction system and method |
| CN105355254A (en) * | 2015-10-19 | 2016-02-24 | 中国科学院近代物理研究所 | Accelerator operation on-line continuous adjustable circular hole beam-limiting diaphragm |
| CN106793444A (en) * | 2016-12-09 | 2017-05-31 | 四川智研科技有限公司 | A kind of electron beam control method |
| CN106793444B (en) * | 2016-12-09 | 2023-09-19 | 四川智研科技有限公司 | Electron beam control method |
| CN107148140A (en) * | 2017-06-30 | 2017-09-08 | 中广核达胜加速器技术有限公司 | The beam spot automatic straightening device and accelerator of a kind of accelerator |
| CN107148140B (en) * | 2017-06-30 | 2023-08-08 | 中广核达胜加速器技术有限公司 | Automatic beam spot corrector of accelerator and accelerator |
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Application publication date: 20130508 |