CN106793444A - A kind of electron beam control method - Google Patents
A kind of electron beam control method Download PDFInfo
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- CN106793444A CN106793444A CN201611131711.8A CN201611131711A CN106793444A CN 106793444 A CN106793444 A CN 106793444A CN 201611131711 A CN201611131711 A CN 201611131711A CN 106793444 A CN106793444 A CN 106793444A
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- scanning
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
- H05H2007/008—Arrangements for beam delivery or irradiation for measuring beam parameters
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a kind of electron beam control method, including：Electron accelerator produces corresponding electron beam to be drawn by grid and titanium film；Electronic beam current to be detected is drawn by the multigroup through hole being arranged on grid；Whether detected beyond scanning boundary with to extraction electron beam in real time by the scanning boundary detection means being engaged with each group through hole；The parameter of scanning coil is adjusted by the scanning control system communicated to connect with scanning boundary detection means, and then adjusts the scanning boundary size of electronics speed；Line size is adjusted by the beam-control(led) system being connected with detection means, line real-time stabilization is reached and is drawn effect, while reaching real-time dynamic monitoring effect.The present invention provides a kind of electron beam control method, by on-line measurement electron beam scanning border, so as to control sweep parameter, so as to realize that electron beam draws scanning window size automatically debugging and line stabilization purpose, the method is simple and reliable, and with low cost, and then obtains preferably debugging effect.
Description
Technical field
The present invention relates to a kind of adjusting process used in the case of the electron accelerator adjustment of high-energy physics.More specifically
Say, the present invention relates to the electron beam control method in the case of a kind of electron accelerator adjustment used in high-energy physics.
Background technology
Industry and experiment electron accelerator, need the scanning boundary of adjustment electron beam to reach most before actual use
Good irradiation effect.Conventional method is the current parameters of scanning coil in multiple adjustment electron accelerator equipment and then adjusts electron beam
Effective scanning border.Electron beam scanning border is too small, does not reach optimal irradiation effect；Electron beam scanning border is excessive, causes
Irradiation dose changes, and also results in scan box mid-winter, influences vacuum system, causes the window lost of life, serious meeting
Security incident is produced, personal safety is threatened, irreversible damage is caused to accelerator facility.
And existing adjustment method is that development printing paper is placed on into electron beam extraction window lower section, the development that electron beam irradiation is crossed
Image can be presented after printing paper, the position dimension that image is presented further according to development printing paper determines that the border of electron beam scanning or window are big
It is small.Such mode can only be very low according to the concrete condition adjustment sweep current parameter again and again of development printing paper, efficiency；
In addition after debug, the stability contorting of the scanning boundary of electron beam and protect also can only by sweep current come indirect control,
But sweep current can not positioning electronic beam scanning border completely.
The content of the invention
It is an object of the invention to solve at least the above and/or defect, and provide at least will be described later excellent
Point.
A further object of the invention is by providing a kind of electron beam control method, by on-line measurement electron beam scanning
Border, so that sweep parameter is controlled, so as to realize that electron beam draws scanning window automatically debugging and stabilization purpose, the method letter
It is single reliable and with low cost, and then obtain preferably debugging effect.
A further object of the invention is by providing a kind of device of the application electron beam control method, realizing to electronics
The adjusting and measuring on line of beam, with high degree of automation, the strong effect of adjustment stability.
In order to realize these purposes of the invention and further advantage, there is provided a kind of electron beam control method, including：
By scanning boundary detection means with to drawing whether electron beam reaches or beyond scanning boundary setting range in real time
Detected；
The parameter of scanning coil is adjusted by the scanning control system communicated to connect with scanning boundary detection means, and then is adjusted
The scanning boundary size of whole electronics speed, by scanning boundary control in the range of setting.
Preferably, wherein, the electron beam is generated by grid and titanium film and draws by electron accelerator；And pass through
The multigroup through hole being arranged on grid draws electronic beam current to be detected to surface sweeping boundary detecting apparatus；And each group through hole is distinguished
It is arranged on the both ends of grid.
Preferably, wherein, the scanning boundary detection means includes control board and being arranged on control board
On multiple probes to be engaged with each group through hole.
Preferably, wherein, multiple probes are configured as multiple probes divided by grid length, width regions
Group, detects with to the extraction electronic beam current on each group through hole plaid matching gate length direction and width, and then according to spy
Whether pin group detects corresponding electronic signal, realizes producing the inspection for drawing electron beam scanning boundary sizes to electron accelerator
Survey.
Preferably, wherein, the scanning detection apparatus also communication link is connected to beam-control(led) system, with by Scanning Detction
The line size that device is received judges the size of the real-time educt beaming flow of electron accelerator, and then is sent by beam-control(led) system
Corresponding control signal, real-time control is carried out with to the line size for drawing electron beam.
Preferably, wherein, also set between the scanning control system, beam-control(led) system and scanning boundary detection means
Signal Measurement System is equipped with, the electronic signal that scanning detection apparatus are detected is converted into corresponding electric current and/or voltage letter
Number, and then cause that scanning control system, beam-control(led) system survey the size by electric current and/or voltage signal, realize to scanning
Whether border goes beyond the scope, line size whether preset range judgement.
A kind of device of applying electronic speed control method, including：
Electron accelerator；
The grid below electron accelerator electron beam extraction window is arranged on, the grid length direction two ends are respectively arranged with many
Group can draw the through hole of electronic beam current；
Grid lower section is arranged on to be engaged the scanning boundary detection means for realizing that electronic beam current is detected with through hole；
The scanning boundary detection means is communicatively connected to the scanning control system of electron accelerator, beam-control(led) system.
Preferably, wherein, the grid passes through the mounting hole that is engaged to be arranged in fixed plate, the fixed plate
One end is provided with cooling water entry and exit.
The present invention at least includes following beneficial effect：First, the present invention is by by the grate opening on electron beam so that electronics
Beam is irradiated on surface sweeping boundary detecting apparatus, and corresponding electronic signal is detected with by Signal Measurement System, feeds back to scanning control
System processed.Scanning control system judges to scan the border in (length direction and short direction) according to signal, with by scan control system
The parameter of system regulation scanning coil, and then to adjust the size of scanning boundary on electron beam scanning length direction, with automation journey
Degree is high, and practical, adaptability is good, the effect of adjustment good stability.
Secondly by on-line measurement electron beam scanning border, so as to control sweep parameter, being swept so as to realize that electron beam is drawn
Window size automatically debugging and line stabilization purpose are retouched, the method is simple and reliable and with low cost, and then acquisition is preferably adjusted
Examination effect
Further advantage of the invention, target and feature embody part by following explanation, and part will also be by this
The research and practice of invention and be understood by the person skilled in the art.
Brief description of the drawings
Fig. 1 is the perspective structure schematic diagram of application apparatus in one embodiment of the present of invention；
Fig. 2 is the overlooking the structure diagram of application apparatus in an alternative embodiment of the invention；
Fig. 3 is the cross section structure schematic diagram of application apparatus in an alternative embodiment of the invention.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings, to make those skilled in the art with reference to specification text
Word can be implemented according to this.
It should be appreciated that it is used herein such as " have ", "comprising" and " including " term do not allot one or many
The presence or addition of individual other elements or its combination.
Fig. 1 shows a kind of way of realization of electron beam control method of the invention, including：
By scanning boundary detection means with to drawing whether electron beam reaches or beyond scanning boundary setting range in real time
Detected；
The parameter of scanning coil is adjusted by the scanning control system communicated to connect with scanning boundary detection means, and then is adjusted
The scanning boundary size of whole electronics speed, by scanning boundary control in the range of setting.
The present invention produces corresponding electron beam to pass through grid and titanium film extraction by electron accelerator；And by scanning boundary
Detection means with to drawing whether electron beam detects beyond scanning boundary in real time；Communicated by with scanning boundary detection means
The scanning control system of connection adjusts the parameter of scanning coil, and then adjusts the fast scanning boundary size of electronics, specifically, if
Surface sweeping boundary detecting apparatus monitor signal at the short direction two of scanning, illustrate that electron beam is excessive on the short direction border of scanning, sweep
The parameter of control system regulation scanning coil is retouched to adjust the size of scanning boundary on the short direction of electron beam scanning；If surface sweeping side
Boundary's detection means monitors signal in scanning length direction termination, illustrates that electron beam length direction border is excessive, and scanning control system is adjusted
The parameter of scanning coil is saved to adjust the size of scanning boundary on electron beam scanning length direction.Had using this scheme automatic
Change degree is high, shortens debug time, and practical, adaptability is good, the effect benefit of adjustment good stability.Also, it is this
Mode is a kind of explanation of preferred embodiments, but is not limited thereto.When the present invention is implemented, can be entered according to user's demand
Row appropriate replacement and/or modification.
In another example, the electron beam is generated by grid by electron accelerator and titanium film is drawn；Pass through
The multigroup through hole being arranged on grid draws electronic beam current to be detected to surface sweeping boundary detecting apparatus；And each group through hole is distinguished
It is arranged on the both ends of grid.It is to scan grid length direction punching two ends using this scheme, other testing equipments is not increased
And facility.By the grate opening on electron beam so that electron beam irradiation on surface sweeping boundary detecting apparatus, with by signal measurement system
System detects corresponding electronic signal, feeds back to scanning control system.Scanning control system judges to scan (length direction according to signal
With short direction) border, it is and then rectangular to adjust electron beam scanning to adjust the parameter of scanning coil by scanning control system
The size on border is scanned up, a few row's apertures is beaten in grid two ends, do not influence and change the intensity and structure of grid, it is therefore an objective to
Reduce electron beam through the electric current of grid, so as to play the effect of sampling；The receiving power of sampling detecting device is reduced simultaneously,
So that sampling detecting device only needs to simple air-cooled or water-cooled, or even natural cooling, it is to increase on original grid
Detection hole, with simple structure, can implementation result it is good, the benefit of high degree of automation.Also, this mode is one kind
The explanation of preferred embodiments, but be not limited thereto.When the present invention is implemented, appropriate replacement can be carried out according to user's demand
And/or modification.
In another example, the scanning boundary detection means includes control board and is arranged on control board
On multiple probes to be engaged with each group through hole.Surveyed using this scheme scanning boundary structure of the detecting device and reached in electron beam
Both direction (length direction and short direction) surface sweeping border on, realize the purpose of on-line checking, in debugging process, by inspection
The electronic signal that survey device middle probe is received is converted into corresponding curtage and is analyzed, and feeds back to scan control system
System, so as to automatically control the window size of long and short two scanning direction, realizes that electron beam scanning border quickly controls to adjust automatically
Purpose, it is to avoid the artificial adjustment using development printing paper again and again, lift the operating efficiency of debugging；In long-term work, protect
The stability of electron beam scanning length during card irradiation processing, so as to ensure the uniformity of irradiation processing material, it is ensured that production
The benefit of quality.Also, this mode is a kind of explanation of preferred embodiments, but is not limited thereto.Implementing this hair
When bright, appropriate replacement and/or modification can be carried out according to user's demand.
In another example, multiple probes are configured as multiple probes divided by grid length, width regions
Group, detects with to the extraction electronic beam current on each group through hole plaid matching gate length direction and width, and then according to spy
Whether pin group detects corresponding electronic signal, realizes producing the inspection for drawing electron beam scanning boundary sizes to electron accelerator
Survey.It is one of which compare Jia Turban modes using this scheme, it, by the division in region, is conducive to it to sweeping by by probe
Retouch length direction and scan the difference in short direction, stability high benefit good with adaptability.Also, this mode is
A kind of explanation of preferred embodiments, but be not limited thereto.When the present invention is implemented, it is appropriate to be carried out according to user's demand
Replace and/or change.
In another example, the scanning detection apparatus also communication link is connected to beam-control(led) system, with by scanning inspection
The line size that survey device is received judges the size of the real-time educt beaming flow of electron accelerator, and then is sent out by beam-control(led) system
Go out corresponding control signal, real-time control is carried out with to the size for drawing electron beam.It is by the line control that is connected with detection means
System fading margin line size processed, reaches line real-time stabilization and draws effect, while reaching real-time dynamic monitoring effect.Using this
Scheme can also judge the size of the real-time educt beaming flow of accelerator by the size to on-line measuring device reception line, together
When feed back to the beam-control(led) system of equipment, it is ensured that the stability of line, with can implementation result it is good, good stability it is favourable it
Place.Also, this mode is a kind of explanation of preferred embodiments, but is not limited thereto.When the present invention is implemented, can basis
User's demand carries out appropriate replacement and/or modification.
As shown in figure 1, in another example, the scanning control system 5, beam-control(led) system 6 are examined with scanning boundary
Signal Measurement System 7 is additionally provided between survey device 3, the electronic signal that scanning detection apparatus are detected is converted into corresponding
Electric current and/or voltage signal, and then cause that scanning control system, beam-control(led) system are surveyed by the big of curtage signal
It is small, realization whether scanning boundary is gone beyond the scope, line size whether preset range judgement.Using the electronics of this scheme
Beam is irradiated on surface sweeping boundary detecting apparatus by grate opening, and Signal Measurement System detects electronic signal, is made corresponding letter
Number conversion after, feed back to beam-control(led) system and scanning control system.Scanning control system judges that scanning is (rectangular according to signal
To with short direction) border, beam-control(led) system judges the size of educt beaming flow according to signal, with can first draft effect it is good,
Workable benefit.Also, this mode is a kind of explanation of preferred embodiments, but is not limited thereto.In reality
When applying the present invention, appropriate replacement and/or modification can be carried out according to user's demand.
As Figure 1-3, a kind of device of applying electronic speed control method, including：
Electron accelerator (not shown)；
The grid 1 below electron accelerator electron beam extraction window is arranged on, the grid length direction two ends are respectively arranged with
Multigroup through hole 2 for drawing electronic beam current；
Grid lower section is arranged on to be engaged the scanning boundary detection means 3 for realizing that electronic beam current is detected with through hole；
The scanning boundary detection means is communicatively connected to the scanning control system 4, beam-control(led) system of electron accelerator
5.Irradiated on surface sweeping boundary detecting apparatus by grate opening using the electron beam of this scheme, Signal Measurement System detects letter
Number, feed back to beam-control(led) system and scanning control system.Scanning control system judges scanning (length direction and short according to signal
Direction) border, if monitoring signal short direction two is scanned, illustrate that electron beam to scan short direction border excessive, is scanned
The parameter of control system regulation scanning coil adjusts the size of scanning boundary on the short direction of electron beam scanning, if signal measurement
System monitors signal in scanning length direction termination, illustrates that electron beam length direction border is excessive, scanning control system regulation scanning
The parameter of coil adjusts the size of scanning boundary on electron beam scanning length direction；Beam-control(led) system is based on the letter for detecting
Number judge the size of electronic beam current, and corresponding adjustment is carried out based on this size in real time to drawing electronic beam current；With can be real
Apply effect good, workable, adaptability is good, the benefit of good stability.Also, this mode is a kind of preferred embodiments
Explanation, but be not limited thereto.When the present invention is implemented, appropriate replacement can be carried out according to user's demand and/or repaiied
Change.
In another example, the grid passes through the mounting hole 9 being engaged to be arranged in fixed plate 6, the fixation
One end of plate is provided with cooling water entry and exit 8.Area of dissipation is increased by fixed plate using this scheme, while passing through water-cooled
But mode, is cooled down to its working environment to increase the fenestrated membrane working time, and longer with service life of equipment, stability is more
Good benefit.Also, this mode is a kind of explanation of preferred embodiments, but is not limited thereto.Implementing the present invention
When, appropriate replacement and/or modification can be carried out according to user's demand.
Embodiment：
As shown in figure 1, electron beam irradiation is on grid, electron beam can be adjusted by adjusting the parameter of scanning coil and swept
The size on border is retouched, such as when the excessive signal of scanning boundary detection means 3 is detected, illustrates that scanning boundary is excessive, scanning need to be adjusted
Coil parameter；When detecting, the too small explanation scanning boundary of the signal of scanning boundary detection means 3 is too small；Only singly detect scanning side
Within a predetermined range, scanning boundary is only most preferably the signal of boundary's detection means 3.
Number of devices described herein and treatment scale are for simplifying explanation of the invention.To electron beam of the invention
The application of control method, modifications and variations will be readily apparent to persons skilled in the art.
Although embodiment of the present invention is disclosed as above, it is not restricted to listed in specification and implementation method
With.It can be applied to various suitable the field of the invention completely.For those skilled in the art, can be easily
Realize other modification.Therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited
In specific details and shown here as the legend with description.
Claims (8)
1. a kind of electron beam control method, it is characterised in that including：
Whether reach or carried out beyond scanning boundary setting range with to extraction electron beam in real time by scanning boundary detection means
Detection；
The parameter of scanning coil is adjusted by the scanning control system communicated to connect with scanning boundary detection means, and then adjusts electricity
The scanning boundary size of sub- speed, by scanning boundary control in the range of setting.
2. electron beam control method as claimed in claim 1, it is characterised in that the electron beam is produced by electron accelerator
And drawn by grid and titanium film；
And then electronic beam current to be detected to surface sweeping boundary detecting apparatus is drawn by the multigroup through hole being arranged on grid；
And each group through hole is separately positioned on the both ends of grid.
3. electron beam control method as claimed in claim 1, it is characterised in that the scanning boundary detection means includes control
Circuit board and multiple probes to be engaged with each group through hole are arranged in control board.
4. electron beam control method as claimed in claim 3, it is characterised in that multiple probes are configured as multiple by lattice
The probe groups that gate length, width regions are divided, with to the extraction electricity on each group through hole plaid matching gate length direction and width
Whether beamlet stream is detected, and then detects corresponding electronic signal according to probe groups, is realized producing electron accelerator and is drawn
Go out the detection of electron beam scanning boundary sizes.
5. electron beam control method as claimed in claim 1, it is characterised in that the scanning detection apparatus also communication link is connected to
Beam-control(led) system, the big of the real-time educt beaming flow of electron accelerator is judged with the line size received by scanning detection apparatus
It is small, and then corresponding control signal is sent by beam-control(led) system, carry out real-time control with to the line size for drawing electron beam.
6. electron beam control method as claimed in claim 5, it is characterised in that the scanning control system, line control system
Signal Measurement System is additionally provided between system and scanning boundary detection means, the electronic signal that scanning detection apparatus are detected
Corresponding curtage signal is converted into, and then causes that scanning control system, beam-control(led) system are surveyed by curtage
The size of signal, realization whether scanning boundary is gone beyond the scope, line size whether preset range judgement and control.
7. a kind of device for applying electron beam control method as claimed in claim 1, it is characterised in that：Including：
Electron accelerator；
Be arranged on the grid below electron accelerator electron beam extraction window, the grid length direction two ends be respectively arranged with it is multigroup can
Draw the through hole of electronic beam current；
Grid lower section is arranged on to be engaged the scanning boundary detection means for realizing that electronic beam current is detected with through hole；
The scanning boundary detection means is communicatively connected to the scanning control system of electron accelerator, beam-control(led) system.
8. application apparatus as claimed in claim 7, it is characterised in that the grid passes through the mounting hole being engaged to be arranged on
In fixed plate, one end of the fixed plate is provided with cooling water entry and exit.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611131711.8A CN106793444B (en) | 2016-12-09 | 2016-12-09 | Electron beam control method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611131711.8A CN106793444B (en) | 2016-12-09 | 2016-12-09 | Electron beam control method |
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| CN106793444A true CN106793444A (en) | 2017-05-31 |
| CN106793444B CN106793444B (en) | 2023-09-19 |
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| CN106793444B (en) | 2023-09-19 |
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