CN106793444B - Electron beam control method - Google Patents
Electron beam control method Download PDFInfo
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- CN106793444B CN106793444B CN201611131711.8A CN201611131711A CN106793444B CN 106793444 B CN106793444 B CN 106793444B CN 201611131711 A CN201611131711 A CN 201611131711A CN 106793444 B CN106793444 B CN 106793444B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
- H05H2007/008—Arrangements for beam delivery or irradiation for measuring beam parameters
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses an electron beam control method, which comprises the following steps: the electron accelerator generates corresponding electron beams which are led out through the grid and the titanium film; the electron beam current to be detected is led out through a plurality of groups of through holes arranged on the grid; detecting whether the real-time extracted electron beam exceeds a scanning boundary or not by a scanning boundary detection device matched with each group of through holes; the parameters of the scanning coil are adjusted through a scanning control system which is in communication connection with the scanning boundary detection device, so that the scanning boundary of the electronic speed is adjusted; the beam flow control system connected with the detection device is used for adjusting the beam flow, so that the beam flow real-time stable extraction effect is achieved, and the real-time dynamic monitoring effect is achieved. The invention provides an electron beam control method, which controls scanning parameters by measuring electron beam scanning boundaries on line, thereby realizing the full-automatic debugging of the size of an electron beam extraction scanning window and the aim of stabilizing beam current.
Description
Technical Field
The invention relates to a calibrating method used under the condition of high-energy physical electron accelerator calibration. More particularly, the present invention relates to an electron beam control method for use in the case of high energy physical electron accelerator tuning.
Background
The electron accelerator for industry and experiment needs to adjust the scanning boundary of electron beam before practical use to achieve the best irradiation effect. The general method is to adjust the current parameters of the scanning coil in the electron accelerator device multiple times so as to adjust the effective scanning boundary of the electron beam. The scanning boundary of the electron beam is too small to reach the optimal irradiation effect; the electron beam scanning boundary is too large, so that the irradiation dose is changed, the abnormal temperature rise of the scanning box is caused, the vacuum system is influenced, the service life of a window is shortened, safety accidents are seriously caused, personal safety is threatened, and irreversible damage is caused to accelerator equipment.
The existing debugging method is that developing photographic paper is placed below an electron beam extraction window, an image is presented after the developing photographic paper is irradiated by an electron beam, and then the boundary or window size of electron beam scanning is determined according to the position size of the image presented by the developing photographic paper. The scanning current parameter can be adjusted once only according to the specific condition of the developing photographic paper in such a way, and the efficiency is very low; in addition, after debugging, the stable control and protection of the scanning boundary of the electron beam can only be indirectly controlled by the scanning current, but the scanning current can not completely locate the scanning boundary of the electron beam.
Disclosure of Invention
It is an object of the present invention to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
The invention also aims to provide an electron beam control method, which is simple and reliable, has low cost and further obtains better debugging effect by measuring the electron beam scanning boundary on line so as to control the scanning parameters and realize the full-automatic debugging and stabilization of the electron beam extraction scanning window.
The invention also aims to realize the on-line adjustment of the electron beam by providing the device applying the electron beam control method, and has the effects of high automation degree and high adjustment stability.
To achieve these objects and other advantages and in accordance with the purpose of the invention, there is provided an electron beam control method including:
detecting whether the real-time extracted electron beam reaches or exceeds a scanning boundary setting range by a scanning boundary detection device;
the parameters of the scanning coil are adjusted through a scanning control system which is in communication connection with the scanning boundary detection device, and then the scanning boundary of the electronic speed is adjusted, so that the scanning boundary is controlled within a set range.
Preferably, wherein the electron beam is generated by an electron accelerator and extracted through a grid and a titanium film; and the electron beam to be detected is led out to the scanning boundary detection device through a plurality of groups of through holes arranged on the grid; and each group of through holes is respectively arranged at two ends of the grille.
Preferably, the scanning boundary detection device includes a control circuit board and a plurality of probes disposed on the control circuit board to cooperate with the groups of through holes.
Preferably, the plurality of probes are configured as a plurality of probe groups divided according to the length and width regions of the grid, so as to detect the extracted electron beam current of each group of through holes in the length direction and the width direction of the grid, and further realize the detection of the scanning boundary of the extracted electron beam generated by the electron accelerator according to whether the probe groups detect corresponding electronic signals.
Preferably, the scanning detection device is further connected with a beam control system in a communication manner, so that the size of the beam extracted by the electron accelerator in real time is judged according to the size of the beam received by the scanning detection device, and a corresponding control signal is sent out by the beam control system, so that the size of the beam extracted by the electron accelerator in real time is controlled.
Preferably, a signal measurement system is further arranged between the scanning control system, the beam control system and the scanning boundary detection device, so that the electronic signals detected by the scanning detection device are converted into corresponding current and/or voltage signals, and the scanning control system and the beam control system can further measure the sizes of the passing current and/or voltage signals, so that whether the scanning boundary exceeds the range or not and whether the beam size is within the preset range or not can be judged.
An apparatus for applying an electronic speed control method, comprising:
an electron accelerator;
the grid is arranged below the electron beam extraction window of the electron accelerator, and a plurality of groups of through holes capable of extracting electron beam flow are respectively arranged at two ends of the grid in the length direction;
the scanning boundary detection device is arranged below the grid and matched with the through hole to realize electron beam detection;
the scanning boundary detection device is connected with the scanning control system and the beam control system of the electron accelerator in a communication mode.
Preferably, the grid is arranged on the fixed plate through the matched mounting holes, and one end of the fixed plate is provided with a cooling water outlet and inlet.
The invention at least comprises the following beneficial effects: first, the invention irradiates the electron beam on the scanning boundary detection device through the grid holes on the electron beam, so as to detect corresponding electronic signals through the signal measurement system and feed back the corresponding electronic signals to the scanning control system. The scanning control system judges the boundary of scanning (long direction and short direction) according to the signals, so that the scanning control system adjusts the parameters of the scanning coil, and then adjusts the size of the scanning boundary of the electron beam in the scanning direction.
The method is simple and reliable, has low cost, and further obtains better debugging effect
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a schematic perspective view of an application device according to an embodiment of the present invention;
FIG. 2 is a schematic top view of an application device according to another embodiment of the present invention;
fig. 3 is a schematic cross-sectional view of an application device according to another embodiment of the present invention.
Detailed Description
The present invention is described in further detail below with reference to the drawings to enable those skilled in the art to practice the invention by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
Fig. 1 shows an implementation form of an electron beam control method according to the present invention, comprising:
detecting whether the real-time extracted electron beam reaches or exceeds a scanning boundary setting range by a scanning boundary detection device;
the parameters of the scanning coil are adjusted through a scanning control system which is in communication connection with the scanning boundary detection device, and then the scanning boundary of the electronic speed is adjusted, so that the scanning boundary is controlled within a set range.
The invention generates corresponding electron beams through the electron accelerator and leads out the electron beams through the grid and the titanium film; detecting whether the real-time extracted electron beam exceeds a scanning boundary or not by a scanning boundary detection device; the scanning control system is in communication connection with the scanning boundary detection device to adjust parameters of the scanning coil, so that the scanning boundary of the electron speed is adjusted, specifically, if the scanning boundary detection device monitors signals at two ends in the scanning short direction, the scanning control system adjusts the parameters of the scanning coil to adjust the scanning boundary of the electron beam in the scanning short direction, wherein the scanning boundary is indicated to be oversized in the scanning short direction; if the scanning boundary detection device monitors signals at the scanning long-direction end, the scanning control system adjusts parameters of the scanning coil to adjust the size of the scanning boundary of the electron beam in the scanning long-direction. The scheme has the advantages of high automation degree, shortened debugging time, strong practicability, good adaptability and good adjustment stability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
In another example, the electron beam is generated by an electron accelerator and extracted through a grid and a titanium film; electron beam current to be detected is led out to a scanning boundary detection device through a plurality of groups of through holes arranged on the grid; and each group of through holes is respectively arranged at two ends of the grille. By adopting the scheme, holes are punched at the two ends of the scanning grille in the long direction, and other detection equipment and facilities are not added. And irradiating the grid holes on the electron beam to the scanning boundary detection device so as to detect corresponding electronic signals through the signal measurement system and feed back the corresponding electronic signals to the scanning control system. The scanning control system judges the boundary of scanning (long direction and short direction) according to the signals, so that the scanning control system adjusts the parameters of the scanning coil, and further adjusts the size of the scanning boundary of the electron beam in the scanning direction, and a plurality of rows of small holes are formed at two ends of the grid, so that the intensity and the structure of the grid are not influenced and changed, and the purpose is to reduce the current of the electron beam passing through the grid, and thus the effect of sampling is achieved; meanwhile, the receiving power of the sampling detection device is reduced, so that the sampling detection device only needs simple air cooling or water cooling, even natural cooling, and only the detection holes are added on the original grille. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
In another example, the scanning boundary detection apparatus includes a control circuit board and a plurality of probes disposed on the control circuit board to cooperate with the sets of through holes. The scanning boundary detection device structure adopting the scheme achieves the aim of realizing online detection on the scanning boundary of the electron beam in two directions (long direction and short direction), and in the debugging process, the electronic signals received by the probe in the detection device are converted into corresponding current or voltage for analysis and fed back to the scanning control system, so that the window sizes of the two scanning directions are automatically controlled, the aim of automatically and quickly controlling and adjusting the scanning boundary of the electron beam is realized, the once adjustment of developing photographic paper is avoided, and the debugging working efficiency is improved; in long-term work, the stability of the scanning length of the electron beam in the irradiation processing process is ensured, thereby ensuring the consistency of the irradiation processing material and ensuring the benefit of production quality. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
In another example, the plurality of probes are configured into a plurality of probe groups divided according to the length and width regions of the grid, so as to detect the extracted electron beam current in the length direction and the width direction of the grid by each group of through holes, and further realize the detection of the scanning boundary of the extracted electron beam generated by the electron accelerator according to whether the probe groups detect corresponding electronic signals. The adoption of the scheme is only one of the preferable modes, and the probe is divided according to the areas, so that the probe is beneficial to distinguishing the scanning long direction from the scanning short direction, and has the advantages of good adaptability and high stability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
In another example, the scanning detection device is also connected with a beam control system in a communication manner, so that the size of the beam extracted by the electron accelerator in real time is judged according to the size of the beam received by the scanning detection device, and a corresponding control signal is sent out by the beam control system, so that the size of the extracted electron beam is controlled in real time. The beam flow control system connected with the detection device is used for adjusting the beam flow, so that the beam flow real-time stable extraction effect is achieved, and the real-time dynamic monitoring effect is achieved. The adoption of the scheme can judge the size of the beam which is led out by the accelerator in real time by receiving the size of the beam by the on-line detection device, and simultaneously feeds back the size of the beam to the beam control system of the equipment, so that the stability of the beam is ensured, and the method has the advantages of good implementation effect and good stability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
As shown in fig. 1, in another example, a signal measurement system 7 is further disposed between the scanning control system 5, the beam control system 6 and the scanning boundary detection device 3, so as to convert the electronic signals detected by the scanning detection device into corresponding current and/or voltage signals, and further enable the scanning control system and the beam control system to measure the passing current or voltage signals, so as to realize the judgment of whether the scanning boundary is out of range and whether the beam size is within a predetermined range. The electron beam adopting the scheme irradiates on the scanning boundary detection device through the grid holes, and the signal measurement system detects the electronic signal and converts the electronic signal into a corresponding signal and feeds the corresponding signal back to the beam control system and the scanning control system. The scanning control system judges the boundary of scanning (long direction and short direction) according to the signals, and the beam control system judges the size of the extracted beam according to the signals, so that the method has the advantages of good manuscript-enabling effect and strong operability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
As shown in fig. 1 to 3, an apparatus for applying an electronic speed control method includes:
an electron accelerator (not shown);
a grid 1 arranged below an electron beam extraction window of the electron accelerator, wherein a plurality of groups of through holes 2 capable of extracting electron beam flow are respectively arranged at two ends of the grid in the length direction;
a scanning boundary detection device 3 arranged below the grid to cooperate with the through holes to realize electron beam detection;
the scanning boundary detection means are communicatively connected to a scanning control system 4 of the electron accelerator, a beam control system 5. The electron beam adopting the scheme irradiates on the scanning boundary detection device through the grid holes, and the signal measurement system detects the signal and feeds back the signal to the beam control system and the scanning control system. The scanning control system judges the boundary of scanning (long direction and short direction) according to the signal, if the signal is monitored at two ends of the scanning short direction, the scanning control system adjusts the parameters of the scanning coil to adjust the size of the scanning boundary of the electron beam in the scanning short direction, if the signal measuring system monitors the signal at the end of the scanning long direction, the scanning control system adjusts the parameters of the scanning coil to adjust the size of the scanning boundary of the electron beam in the scanning long direction; the beam control system judges the size of the electron beam based on the detected signal, and correspondingly adjusts the size of the extracted electron beam based on the detected signal in real time; has the advantages of good implementation effect, strong operability, good adaptability and good stability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
In another example, the grille is provided on the fixed plate 6 by means of cooperating mounting holes 9, one end of the fixed plate being provided with a cooling water outlet, inlet 8. By adopting the scheme, the heat dissipation area is increased through the fixing plate, and meanwhile, the working environment is cooled through a water cooling mode so as to increase the working time of the window film, so that the window film has the advantages of longer service life of equipment and better stability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, appropriate substitutions and/or modifications may be made according to the needs of the user.
Examples:
as shown in fig. 1, when the electron beam irradiates on the grid, the size of the scanning boundary of the electron beam can be adjusted by adjusting the parameters of the scanning coil, for example, when the oversized signal of the scanning boundary detecting device 3 is detected, the scanning boundary is oversized, and the parameters of the scanning coil need to be adjusted; when detecting that the scanning boundary detecting device 3 has too small a signal, the scanning boundary is too small; the scanning boundary is optimal only if it is detected singly that the signal of the scanning boundary detecting means 3 is within a predetermined range.
The number of equipment and the scale of processing described herein are intended to simplify the description of the present invention. The application, modification and variation of the electron beam control method of the present invention will be apparent to those skilled in the art.
Although embodiments of the invention have been disclosed above, they are not limited to the use listed in the specification and embodiments. It can be applied to various fields suitable for the present invention. Additional modifications will readily occur to those skilled in the art. Therefore, the invention is not to be limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (6)
1. An electron beam control method, comprising:
detecting whether the real-time extracted electron beam reaches or exceeds a scanning boundary setting range by a scanning boundary detection device;
the parameters of the scanning coil are adjusted through a scanning control system which is in communication connection with the scanning boundary detection device, so that the scanning boundary of the electronic speed is adjusted to control the scanning boundary within a set range;
the electron beam is generated by an electron accelerator and is led out by a grid and a titanium film;
then, electron beams to be detected are led out to a scanning boundary detection device through a plurality of groups of through holes arranged on the grid;
and each group of through holes are respectively arranged at two ends of the grille;
the scanning boundary detection device comprises a control circuit board and a plurality of probes which are arranged on the control circuit board and matched with the groups of through holes.
2. The electron beam control method according to claim 1, wherein the plurality of probes are configured as a plurality of probe groups divided by the length and width regions of the grid, so as to detect the outgoing electron beam current in the length direction and the width direction of the grid by each group of through holes, and further realize the detection of the scanning boundary size of the outgoing electron beam generated by the electron accelerator according to whether the probe groups detect corresponding electron signals.
3. The method of claim 1, wherein the scanning and detecting device is further communicatively connected to a beam control system, so as to determine the size of the beam extracted from the electron accelerator in real time according to the size of the beam received by the scanning and detecting device, and further send a corresponding control signal through the beam control system, so as to control the size of the beam extracted from the electron beam in real time.
4. The electron beam control method according to claim 3, wherein a signal measurement system is further provided between the scanning control system, the beam control system and the scanning boundary detection device to convert the electronic signal detected by the scanning detection device into a corresponding current or voltage signal, so that the scanning control system and the beam control system can measure the passing current or voltage signal, and the judgment and control on whether the scanning boundary is out of range or not and whether the beam size is in a predetermined range or not can be realized.
5. An apparatus for applying the electron beam control method according to claim 1, characterized in that: comprising the following steps:
an electron accelerator;
the grid is arranged below the electron beam extraction window of the electron accelerator, and a plurality of groups of through holes capable of extracting electron beam flow are respectively arranged at two ends of the grid in the length direction;
the scanning boundary detection device is arranged below the grid and matched with the through hole to realize electron beam detection;
the scanning boundary detection device is connected with the scanning control system and the beam control system of the electron accelerator in a communication mode.
6. The application device according to claim 5, wherein the grille is provided on a fixed plate through the fitting holes, and one end of the fixed plate is provided with a cooling water outlet and inlet.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201611131711.8A CN106793444B (en) | 2016-12-09 | 2016-12-09 | Electron beam control method |
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| CN201611131711.8A CN106793444B (en) | 2016-12-09 | 2016-12-09 | Electron beam control method |
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| CN106793444A CN106793444A (en) | 2017-05-31 |
| CN106793444B true CN106793444B (en) | 2023-09-19 |
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