CN103076724B - 基于双光束干涉的投影物镜波像差在线检测装置和方法 - Google Patents
基于双光束干涉的投影物镜波像差在线检测装置和方法 Download PDFInfo
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CN105022232B (zh) * | 2014-04-15 | 2017-12-29 | 上海微电子装备(集团)股份有限公司 | 波像差测量装置的误差校准方法 |
CN105807573B (zh) | 2014-12-31 | 2017-12-29 | 上海微电子装备(集团)股份有限公司 | 用于套刻误差检测的装置和方法 |
CN106895963B (zh) * | 2017-04-09 | 2024-01-26 | 南京东利来光电实业有限责任公司 | 大数值孔径浸油镜头检测装置及方法 |
CN113049224B (zh) * | 2019-12-27 | 2023-02-17 | 上海微电子装备(集团)股份有限公司 | 测量装置及其测量方法 |
CN116819884B (zh) * | 2023-08-31 | 2023-11-14 | 光科芯图(北京)科技有限公司 | 掩模倾斜角度测量装置及曝光设备 |
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JP2000315642A (ja) * | 1999-04-30 | 2000-11-14 | Nec Corp | 収差による位置ずれ及びディストーションの計測方法と装置並びにレチクル |
JP2006332586A (ja) * | 2005-04-25 | 2006-12-07 | Canon Inc | 測定装置、露光装置及び方法、並びに、デバイス製造方法 |
CN101299132B (zh) * | 2008-05-27 | 2010-06-02 | 上海微电子装备有限公司 | 一种用于光刻设备对准系统的对准标记及其使用方法 |
JP2010206033A (ja) * | 2009-03-04 | 2010-09-16 | Nikon Corp | 波面収差計測装置、該装置の校正方法、及び露光装置 |
CN101551594B (zh) * | 2009-04-30 | 2011-01-26 | 中国科学院上海光学精密机械研究所 | 基于二极照明的光刻机投影物镜奇像差的检测系统和方法 |
CN102768471B (zh) * | 2011-05-05 | 2014-11-12 | 上海微电子装备有限公司 | 测量投影物镜波像差的装置及方法 |
JP2012253163A (ja) * | 2011-06-02 | 2012-12-20 | Nikon Corp | 波面収差計測装置、波面収差計測方法、露光装置、露光方法、およびデバイス製造方法 |
JP2013004547A (ja) * | 2011-06-11 | 2013-01-07 | Nikon Corp | 波面収差計測装置およびその校正方法、露光装置、露光方法、並びにデバイス製造方法 |
CN102368139B (zh) * | 2011-11-07 | 2013-07-03 | 中国科学院长春光学精密机械与物理研究所 | 一种高精度系统波像差检测方法 |
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