CN103063918B - Based on the phase detection device of clamped beam capacitance type micro mechanical microwave power detector - Google Patents
Based on the phase detection device of clamped beam capacitance type micro mechanical microwave power detector Download PDFInfo
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- CN103063918B CN103063918B CN201210576046.9A CN201210576046A CN103063918B CN 103063918 B CN103063918 B CN 103063918B CN 201210576046 A CN201210576046 A CN 201210576046A CN 103063918 B CN103063918 B CN 103063918B
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- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
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Abstract
The invention discloses a kind of microwave phase detector device based on clamped beam capacitance type micro mechanical microwave power detector, this pick-up unit comprises clamped beam capacitance type micro mechanical microwave power detector, power combiner, adjustable digital formula phase shifter and electric capacity-digital quantizer; Wherein, will with measured signal (V
x) reference microwave signal (V that frequency is identical
ref) be added to the input port one (10) of power combiner, by microwave signal (V to be measured
x) be added to the input port (7) of adjustable digital formula phase shifter, after adjustable digital formula phase shifter (8) phase shift, be added to the input port two (11) of power combiner; This two paths of signals arrives the output port (13) of power combiner after power combiner (12) carries out Vector modulation, is then added in the input port (14) of clamped beam capacitance type micro mechanical microwave power detector.The present invention realizes the object accurately detecting microwave signal phase.
Description
Technical Field
The invention provides a microwave phase detection device based on a micro-electro-mechanical system (MEMS) technology, belonging to the technical field of MEMS.
Background
In the research of microwave technology, the microwave phase is an important parameter for characterizing microwave signals. The phase detection device has extremely wide application in the aspects of phase-locked loops (PLL) and the like, a Gilbert multiplier formed by field effect transistors is the most widely applied microwave phase detector, a reference signal and a signal to be detected are respectively connected to two input ends of the multiplier, a high-frequency term and a low-frequency term can be obtained, and the high-frequency term is filtered by a low-pass filter to obtain the phase difference between the high-frequency term and the low-frequency term, but in the process, non-negligible noise and power consumption are brought, so that the detection accuracy is influenced. Since the end of the twentieth century, with the generation and development of RF MEMS technology, the realization of a microwave phase detection device with low noise and low power consumption is possible, and the present invention is a detection device based on this technology.
Disclosure of Invention
The invention aims to provide a phase detection device based on a clamped beam capacitive micro-mechanical microwave power sensor, which achieves the aim of accurately detecting the phase of a microwave signal by a method for measuring the signal power of a synthesized reference signal and a signal to be detected which is subjected to phase shifting by a digital phase shifter.
The technical scheme is as follows: the invention relates to a microwave phase detection device based on a clamped beam capacitance type micro-mechanical microwave power sensor, which comprises
The system comprises a clamped beam capacitance type micro-mechanical microwave power sensor, a power synthesizer, an adjustable digital phase shifter and a capacitance-digital converter; wherein,
adding a reference microwave signal with the same frequency as a signal to be detected to a first input port of the power synthesizer, adding the microwave signal to be detected to an input port of the adjustable digital phase shifter, and adding the microwave signal to be detected to a second input port of the power synthesizer after phase shifting by the adjustable digital phase shifter; the two paths of signals are subjected to vector synthesis through the power synthesizer and then reach an output port of the power synthesizer, and then are added to an input port of the clamped beam capacitive micro-mechanical microwave power sensor.
Preferably, the clamped beam capacitive micro-mechanical microwave power sensor comprises a coplanar waveguide transmission line, a ground plane of the coplanar waveguide transmission line, a film, a clamped beam, a lower electrode of the clamped beam and a substrate; wherein,
the coplanar waveguide transmission line is arranged on the surface of the substrate, the ground plane of the coplanar waveguide transmission line is arranged on the coplanar waveguide transmission line, the clamped beam which is arranged opposite to the coplanar waveguide transmission line and is insulated, a space is kept between the coplanar waveguide transmission line and the clamped beam, the lower electrode of the clamped beam which is arranged on the coplanar waveguide transmission line and is opposite to the clamped beam, and the film which covers the surface of the lower electrode of the clamped beam.
Preferably, the substrate is a gallium arsenide substrate and the film is a silicon nitride film.
Preferably, the first testing port and the second testing port of the capacitance-digital converter are respectively connected with the lower electrode of the clamped beam and the ground plane of the coplanar waveguide transmission line.
Preferably, the original phase of the signal to be measured is a unique value.
Has the advantages that: compared with the existing microwave phase detection device, the phase detection device based on the clamped beam capacitive micro-mechanical microwave power sensor has the following remarkable advantages:
1. the adjustable digital phase shifter can accurately control the power of the synthesized signal so as to improve the measurement precision;
2. the preparation of the sensor is completely compatible with a Monolithic Microwave Integrated Circuit (MMIC) process, and can be integrated with an information processing circuit;
the phase detection device based on the clamped beam capacitive micro-mechanical microwave power sensor has a series of advantages of light weight, low power consumption and the like commonly shared by MEMS, which are incomparable with the traditional microwave phase detection device, so that the phase detection device has extremely high scientific research and industrial application values.
Drawings
Fig. 1 is a schematic diagram of a phase detection device based on a clamped beam capacitive micro-machined microwave power sensor.
Fig. 2 is a front plan view of a clamped beam capacitive micromachined microwave power sensor.
Fig. 3 is a circuit connection diagram of a phase detection device based on a clamped beam capacitive micro-machined microwave power sensor.
Fig. 4 is a power combiner.
Fig. 5 is a schematic diagram of two vector compositions.
The figure includes: the device comprises a coplanar waveguide transmission line 1, a ground plane 2 of the coplanar waveguide transmission line, a silicon nitride film 3, an MEMS clamped beam 4, a lower electrode 5 of the MEMS clamped beam, a gallium arsenide substrate 6, an input port 7 of an adjustable digital phase shifter, an adjustable digital phase shifter 8, an output port 9 of the adjustable digital phase shifter, an input port I10 of a power combiner, an input port II 11 of the power combiner, a power combiner 12, an output port 13 of the power combiner, an input port 14 of a clamped beam capacitive micro-mechanical microwave power sensor, a clamped beam capacitive micro-mechanical microwave power sensor 15, a test port I16 of a capacitance-digital converter, a test port II 17 of the capacitance-digital converter and a capacitance-digital converter 18.
Detailed Description
The invention will be further explained with reference to the drawings.
The phase detection device based on the clamped beam capacitance type micro-mechanical microwave power sensor utilizes an adjustable digital phase shifter, a power synthesizer and the clamped beam capacitance type micro-mechanical microwave power sensor:
the microwave signal V to be measuredxThe phase of the phase-shifted reference microwave signal is added to an input port of a power synthesizer to obtain a reference microwave signal V with the same frequency as the signal to be detectedrefTo the other port of the power combiner. The two paths of signals are subjected to vector synthesis through a power synthesizer and then are added to an input port of the clamped beam capacitive micro-mechanical microwave power sensor.
Signal to be measured VxWill be in the original phase after passing through the adjustable digital phase shifterAdd extra additional phase angle on the basis ofBy adjusting the phase shift degree of the adjustable digital phase shifter, the phase angle of the signal can be adjusted relative to the reference signal which is to be vector-synthesized with the signalTo 180 or 0 degrees, i.e.
Or
If the angle is 180 degrees, the signal power at the output port of the power combiner after signal synthesis is the minimum value due to vector subtraction; if the angle is 0 degrees, the signal power at the output port of the power combiner is at a maximum due to vector addition, with two additional phase anglesThe difference must be 180 degrees, thus ensuring the estimated signal V to be measuredxIn original phase ofIs a unique value.
The main body of the clamped beam capacitive micro-mechanical microwave power sensor is an MEMS clamped beam. After microwave signals enter the sensor through the coplanar waveguide transmission line, electrostatic force is generated between the MEMS clamped beam and the coplanar waveguide signal line, the electrostatic force enables the MEMS clamped beam to generate displacement, so that capacitance between the MEMS clamped beam and a lower electrode is changed, the minimum value and the maximum value of the capacitance are measured through a 24-bit capacitance-digital converter AD7747EBZ of ADI company, the minimum value and the maximum value correspond to the minimum value and the maximum value of signal power at an output port of a power combiner respectively, and therefore the angle is judged to be 180 degrees or 0 degree.
The invention discloses a phase detection device based on a clamped beam capacitance type micro-mechanical microwave power sensor, which is a microwave phase detection device using a vector synthesis principle, and the specific implementation scheme is as follows:
the detection device uses a clamped beam capacitance type micro-mechanical microwave power sensor, a power synthesizer, an adjustable digital phase shifter and a capacitance-digital converter. The clamped beam capacitive micro-mechanical microwave power sensor comprises a coplanar waveguide transmission line 1, a silicon nitride film 3, an MEMS clamped beam 4, a lower electrode 5 of the MEMS clamped beam and a gallium arsenide substrate 6. The coplanar waveguide transmission line 1 is arranged on the surface of a substrate 6, the ground plane 2 of the coplanar waveguide transmission line is arranged on the coplanar waveguide transmission line 1, a clamped beam 4 which is arranged opposite to the coplanar waveguide transmission line 1 and is insulated, a distance is kept between the coplanar waveguide transmission line 1 and the clamped beam 4, a lower electrode 5 of the clamped beam which is arranged on the coplanar waveguide transmission line 1 and is opposite to the clamped beam 4, and a film 3 which covers the surface of the lower electrode 5 of the clamped beam 4.
Will and the signal V to be measuredxReference microwave signal V with same frequencyrefApplied to the input port I10 of the power combiner and used for transmitting the microwave signal V to be measuredxThe phase of the input signal is added to an input port 7 of the adjustable digital phase shifter, and the input signal is added to a second input port 11 of the power combiner after being subjected to phase shifting by an adjustable digital phase shifter 8. The two paths of signals are subjected to vector synthesis through a power synthesizer 12 and then reach an output port 13 of the power synthesizer, then are added to an input port 14 of the clamped beam capacitive micro-mechanical microwave power sensor, and a first testing port 16 and a second testing port 17 of a capacitance-digital converter are respectively connected to a lower electrode 5 of the MEMS clamped beam and a ground plane 2 of the coplanar waveguide transmission line.
The signal V to be measured can be measured by the adjustable digital phase shifter 8xPhase ofAdd extra additional phase angle on the basis ofAs a result, the phase angle of the path of signal is relative to the reference signal V to be vector-synthesized therewithrefPhase angle ofTo 180 or 0 degrees, i.e.
Or
If the angle becomes 180 degrees, the signal power at the output port 13 of the power combiner is at a minimum value due to vector subtraction; if the angle becomes 0 degrees, the signal power at the output port 13 of the power combiner is at a maximum due to the vector addition, with two additional phase anglesThe difference must be 180 degrees, thus ensuring the estimated signal V to be measuredxIn original phase ofIs a unique value.
The clamped beam capacitive micro-mechanical microwave power sensor 15 has a main body of the MEMS clamped beam 4. After microwave signals enter the sensor through the coplanar waveguide transmission line 1, electrostatic force is generated between the MEMS clamped beam 4 and the coplanar waveguide transmission line 1, the electrostatic force enables the MEMS clamped beam 4 to generate displacement, so that capacitance between the MEMS clamped beam 4 and the lower electrode 5 of the MEMS clamped beam changes, the minimum value and the maximum value of the capacitance are measured through the capacitance-digital converter 18 and respectively correspond to the minimum value and the maximum value of signal power at the output port of the power combiner, and therefore the angle between the two combined vectors is judged to be 180 degrees or 0 degree. If the angle becomes 180 degrees, it means the phase angle of the reference signalPlus 180 degrees and minus the degree of phase shift indicated by the digital phase shifter 8Then the phase of the signal to be measured is obtainedIf the angle becomes 0 degree, it means the phase angle of the reference signalMinus degree of phase shift of digital phase shifter 8Then the signal V to be measured is obtainedxPhase ofIn which two additional phase angles are presentThe difference must be 180 degrees, thus ensuring the estimated signal V to be measuredxIn original phase ofIs a unique value.
The clamped beam capacitive micro-mechanical microwave power sensor 15 is manufactured by adopting an MEMS processing technology compatible with a gallium arsenide Microwave Monolithic Integrated Circuit (MMIC) technology, and the specific process steps are as follows:
a) the gold-germanel/gold layer is evaporated onto a 500 μm thick gallium arsenide substrate,
b) depositing silicon nitride as a dielectric layer,
c) a polyimide sacrificial layer is spin-coated on the substrate,
d) electroplating a titanium/gold/titanium seed layer,
e) removing the top titanium layer, electroplating the gold layer,
f) the titanium/gold/titanium is etched to form holes,
g) the polyimide sacrificial layer is etched to form a polyimide sacrificial layer,
h) the substrate was thinned to 100 μm.
The criteria for distinguishing whether this structure is present are as follows:
the microwave phase detection device adopts a measurement reference signal VrefWith the signal V to be measured phase-shifted by an adjustable digital phase shifterxThe method of the synthesized signal power realizes the accurate measurement of the microwave phase and comprises three parts of phase shift, power synthesis and power detection. I.e. a reference microwave signal V having the same frequency as the signal to be measuredrefApplied to the input port I10 of the power combiner and used for transmitting the microwave signal V to be measuredxAnd the phase angle is shifted by a certain phase angle through an adjustable digital phase shifter 8 and then the phase angle is added to the second input port 11 of the power combiner. The two paths of signals are subjected to vector synthesis through a power synthesizer 12 and then are added to an input port 14 of the clamped beam capacitance type micro-mechanical microwave power sensor, the minimum value and the maximum value of capacitance are accurately detected through a detection part (a capacitance-digital converter 18) of the device, and the minimum value and the maximum value of signal power at an output port 13 of the power synthesizer 12 correspond to each other respectively, so that whether the angle between the two synthesized vectors is 180 degrees or 0 degree is judged. If the angle becomes 180 degrees, it means the phase angle of the reference signalPlus 180 degrees and minus the degree of phase shift indicated by the digital phase shifter 8Then the phase of the signal to be measured is obtainedIf the angle becomes 0 degree, it means the phase angle of the reference signalMinus degree of phase shift of digital phase shifter 8Then the signal V to be measured is obtainedxPhase ofIn which two additional phase angles are presentThe difference must be 180 degrees, thus ensuring the estimated signal V to be measuredxIn original phase ofIs a unique value.
The structure meeting the above conditions is regarded as the microwave phase detection device based on the clamped beam capacitive micro-mechanical microwave power sensor.
The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiment, but equivalent modifications or changes made by those skilled in the art according to the present disclosure should be included in the scope of the present invention as set forth in the appended claims.
Claims (3)
1. A microwave phase detection device based on clamped beam capacitance type micro-mechanical microwave power sensor is characterized in that the detection device comprises
The system comprises a clamped beam capacitance type micro-mechanical microwave power sensor, a power synthesizer, an adjustable digital phase shifter and a capacitance-digital converter; wherein,
will be compared with the signal (V) to be measuredx) Reference microwave signal (V) of the same frequencyref) Is applied to the input port I (10) of the power combiner and is used for measuring a microwave signal (V)x) Input port to a tuneable digital phase shifter(7) The phase of the power combiner is shifted by an adjustable digital phase shifter (8) and then is added to a second input port (11) of the power combiner; the two paths of signals are subjected to vector synthesis through a power synthesizer (12) and then reach an output port (13) of the power synthesizer, and then are added to an input port (14) of the clamped beam capacitive micro-mechanical microwave power sensor, and a first test port (16) and a second test port (17) of the capacitance-digital converter are respectively connected with a lower electrode (5) of the clamped beam and a ground plane (2) of the coplanar waveguide transmission line;
to be tested signal (V)x) The phase-shifted signal is applied to an input port of the power combiner and is compared with a signal to be measured (V)x) Reference microwave signal (V) of the same frequencyref) The two signals are added to the other port of the power synthesizer, subjected to vector synthesis by the power synthesizer and then added to an input port of the clamped beam capacitive micro-mechanical microwave power sensor;
signal to be measured (V)x) After passing through the adjustable digital phase shifter, the phase position is in the original phaseAdd extra additional phase angle on the basis ofBy adjusting the phase shift degree of the adjustable digital phase shifter, the phase angle of the signal can be adjusted relative to the reference signal which is to be vector-synthesized with the signalTo 180 or 0 degrees, i.e.
Or
Wherein,in order to obtain the original phase position,to add an additional phase angle on the basis of the original phase,is the phase angle of the reference signal;
if the angle is 180 degrees, the signal power at the output port of the power combiner after signal synthesis is the minimum value due to vector subtraction; if the angle is 0 degrees, the signal power at the output port of the power combiner is at a maximum due to vector addition, with two additional phase anglesThe difference must be 180 degrees, thus ensuring the estimated signal (V) to be measuredx) In original phase ofIs a unique value.
2. The clamped beam capacitive micromachined microwave power sensor-based microwave phase detection apparatus of claim 1, wherein the clamped beam capacitive micromachined microwave power sensor comprises a coplanar waveguide transmission line (1), a ground plane (2) of the coplanar waveguide transmission line, a thin film (3), a clamped beam (4), a lower electrode (5) of the clamped beam and a substrate (6); wherein,
the coplanar waveguide transmission line (1) is arranged on the surface of a substrate (6), a ground plane (2) of the coplanar waveguide transmission line is arranged on the coplanar waveguide transmission line (1), a clamped beam (4) which is arranged opposite to the coplanar waveguide transmission line (1) and is insulated, a space is kept between the coplanar waveguide transmission line (1) and the clamped beam (4), a lower electrode (5) of the clamped beam which is arranged on the coplanar waveguide transmission line (1) and is opposite to the clamped beam (4), and a film (3) which covers the surface of the lower electrode (5) of the clamped beam (4).
3. The clamped beam capacitive micromachined microwave power sensor-based microwave phase detection device of claim 2, characterized in that the substrate (6) is a gallium arsenide substrate and the membrane (3) is a silicon nitride membrane (3).
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| CN103336175B (en) * | 2013-06-19 | 2015-05-13 | 东南大学 | Phase detector based on micro-machinery clamped beam capacitance type power sensor and manufacture method thereof |
| CN106841798A (en) * | 2017-01-24 | 2017-06-13 | 东南大学 | Gap structure couples online microwave phase detector device |
| CN106841803A (en) * | 2017-01-24 | 2017-06-13 | 东南大学 | Clamped beam couples online microwave phase detector device |
| CN106841801A (en) * | 2017-01-24 | 2017-06-13 | 东南大学 | Online microwave phase detector device based on gap structure |
| CN109307801B (en) * | 2018-11-13 | 2020-12-18 | 西安空间无线电技术研究所 | Phase balancing method based on dispersion characteristic of electrically-tunable phase shifter |
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| CN101034122A (en) * | 2007-03-30 | 2007-09-12 | 东南大学 | Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor |
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