CN103076495B - Frequency detection device based on indirect-type micro-mechanical microwave power sensor - Google Patents
Frequency detection device based on indirect-type micro-mechanical microwave power sensor Download PDFInfo
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- 239000013598 vector Substances 0.000 claims abstract description 19
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 12
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims description 15
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 12
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 12
- 238000003466 welding Methods 0.000 claims description 11
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 7
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims description 5
- 229910052785 arsenic Inorganic materials 0.000 claims description 5
- 239000010408 film Substances 0.000 description 11
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 230000010363 phase shift Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
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- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
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- 238000009713 electroplating Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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- 238000004544 sputter deposition Methods 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
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Abstract
The invention discloses a frequency detection device based on an indirect-type micro-mechanical microwave power sensor, and the frequency detection device is characterized in that a signal (Vx) to be detected is applied to an input port (7) of a power divider, the signal (Vx) to be detected is evenly divided into a first path of signal (Vx1) and a second path of signal (Vx2) with identical power, frequency and phase, the first path of signal (Vx10) is applied to an input port (14) of a transmission line phase shifter and applied to an input port A (17) of a power synthesizer after being phase shifted, the second path of signal (Vx2) is applied to an input port (11) of an adjustable digital phase shifter and applied to an input port B (18) of the power synthesizer after being shifted by the adjustable digital phase shifter (12) for a certain phase angle; and the two paths of signals reach an output port (20) of the power synthesizer after the vector synthesis through a power synthesizer (19). Due to the adoption of the frequency detection device, a purpose for precisely detecting the frequency of a microwave signal can be realized.
Description
Technical Field
The invention provides a microwave frequency detection device based on a micro-electro-mechanical system (MEMS) technology, belonging to the technical field of MEMS.
Background
In the research of microwave technology, microwave frequency is an important parameter for characterizing microwave signals, and microwave frequency detectors are widely applied to the field of microwave communication. With the application of microwave technology, the microwave band is becoming more and more crowded and busy nowadays, and higher requirements are put on the real-time performance, capture bandwidth and dynamic range of the microwave frequency detection system. The microwave frequency detector using the heterodyne method, which is widely used at present, has the disadvantages that the microwave signal itself is likely to have harmonic waves, and the harmonic waves are easily generated after the signal passes through the mixer, so that an accurate measurement result is not easy to obtain. The development and development of the RF MEMS technology, starting from the end of the last century, have made possible the implementation of microwave frequency detection devices with low noise and low power consumption, i.e. detection devices based on this technology.
Disclosure of Invention
The technical problem is as follows: the invention aims to provide a microwave frequency detection device based on an indirect micro-mechanical microwave power sensor, which realizes the purpose of accurately detecting the frequency of a microwave signal by adopting a method for judging the phase shift of a transmission line phase shifter to the microwave signal to be detected by adopting the microwave power sensor and an adjustable digital phase shifter.
The technical scheme is as follows: in order to solve the technical problem, the invention discloses a microwave frequency detection device based on an indirect micro-mechanical microwave power sensor, which comprises
The device comprises an indirect micro-mechanical microwave power sensor, a power divider, a power combiner, a transmission line phase shifter and an adjustable digital phase shifter; wherein,
the signal to be measured is added to an input port of the power divider, the signal to be measured is equally divided into a first path of signal and a second path of signal which are identical in power, frequency and phase, the first path of signal is added to an input port of the transmission line phase shifter and added to an input port I of the power combiner after phase shifting, the second path of signal is added to an input port of the adjustable digital phase shifter and added to an input port II of the power combiner after being moved by a certain phase angle through the adjustable digital phase shifter; the two paths of signals are subjected to vector synthesis by the power synthesizer and then reach an output port of the power synthesizer, and then are added to an input port of the indirect micro-mechanical microwave power sensor.
Preferably, the indirect micro-mechanical microwave power sensor comprises a coplanar waveguide transmission line, a resistor, a thermopile, a pressure welding block, a thin film and a gallium arsenide substrate; wherein,
the film is arranged on the surface of the substrate, the coplanar waveguide transmission line, the resistor, the thermopile and the pressure welding block are respectively arranged on the surface of the film, the coplanar waveguide transmission line is connected with the resistor, the thermopile is connected with the pressure welding block, and the resistor and the thermopile are oppositely arranged and are at a certain distance.
Preferably, the substrate is a gallium arsenide substrate, the resistor is a tantalum nitride resistor, and the film is an aluminum gallium arsenic film.
Preferably, an additional phase angle related to the length Δ L of the signal to be measured is added to the phase of the signal to be measured by the transmission line phase shifterThe shifted phase angle is linear with frequency,is a unique value.
Preferably, the relationship among the frequency of the signal passing through the transmission line phase shifter, the length of the transmission line and the degree of phase shift is defined as
The frequency f, f of the signal to be measured can be obtained0A particular center frequency of the transmission line phase shifter, c the speed of light,erΔ L is one-half wavelength, which is the effective dielectric constant of the transmission line phase shifter.
Has the advantages that: compared with the existing microwave frequency detection device, the frequency detection device based on the indirect micro-mechanical microwave power sensor has the following remarkable advantages:
1. the indirect micro-mechanical microwave power sensor can measure the power of a synthesized signal accurately controlled by the adjustable digital phase shifter and has higher linearity;
2. the preparation of the sensor is completely compatible with a Monolithic Microwave Integrated Circuit (MMIC) process, and can be integrated with an information processing circuit;
because the detection device is based on the MEMS technology, the detection device has a series of advantages of light weight, low power consumption and the like commonly shared by MEMS, which are incomparable with the traditional microwave phase detection device, so the detection device has extremely high values of scientific research and industrial application.
Drawings
Fig. 1 is a schematic diagram of a microwave frequency detection device based on an indirect micromechanical microwave power sensor.
Fig. 2 is a front plan view of the indirect micromechanical microwave power sensor.
Fig. 3 is a front plan view of a transmission line phase shifter.
Fig. 4 is a circuit connection diagram of a microwave frequency detection device based on an indirect micromechanical microwave power sensor.
Fig. 5 is a power combiner and power divider.
Fig. 6 is a schematic diagram of two vector compositions.
The figure includes: the device comprises a coplanar waveguide transmission line 1, a tantalum nitride (TaN) resistor 2, a thermopile 3, a pressure welding block 4, an aluminum gallium arsenic film 5, a gallium arsenide substrate 6, an input port 7 of a power divider, a power divider 8, a first output port 9 of the power divider, a second output port 10 of the power divider, an input port 11 of an adjustable digital phase shifter, an adjustable digital phase shifter 12, an output port 13 of the adjustable digital phase shifter, an input port 14 of the transmission line phase shifter, a transmission line phase shifter 15, an output port 16 of the transmission line phase shifter, a first input port 17 of a power combiner, a second input port 18 of the power combiner, a power combiner 19, an output port 20 of the power combiner, an input port 21 of an indirect micro-mechanical microwave power sensor, an indirect micro-mechanical microwave power sensor 22 and.
Detailed Description
The invention will be further explained with reference to the drawings.
The microwave phase detection device based on the indirect micro-mechanical microwave power sensor utilizes a power divider, a transmission line phase shifter, an adjustable digital phase shifter, a power combiner and the indirect micro-mechanical microwave power sensor:
will be the signal V to be measuredxApplied to the input port of the power divider, the signal V to be measuredxIs equally divided into power P, frequency f and phaseTwo identical signals Vx1And Vx2，Vx1Phase shifter by transmission line, Vx2The two paths of signals are moved by a certain phase angle through an adjustable digital phase shifter and then are added to an input port of a power synthesizer for vector synthesis, and the signals after vector synthesis are added to an input port of an indirect micro-mechanical microwave power sensor.
The microwave signal V can be made by a transmission line phase shifterx1By shifting a phase angle related to its length Δ LSince this is a corresponding fixed center frequency f0For a half-wavelength transmission line phase shifter having the center frequency f0The phase shifter shifts its phase angle by 180 degrees for the microwave signal at the center frequency f0Around and below the center frequency f0Of microwave signals ofThe bit angle is shifted by less than 180 degrees for the frequency f at the center0Around and above the center frequency f0The phase angle of the microwave signal is shifted by more than 180 degrees, and the shifted phase angle has a linear relationship with the frequency. The microwave signal V can be enabled by an adjustable digital phase shifterx2Adding a phase which can be accurately set on the basis of the original phaseAs a result, the phase difference between the two signals is 180 degrees or 0 degrees, i.e. the phase difference between the two signals is
Or
If the phase difference is 180 degrees, the two paths of signals are subtracted in the vector direction, and the signal power at the output port of the power synthesizer is the minimum value after vector synthesis; if the phase difference becomes 0 degree, the two paths of signals are added in the vector direction, the signal power at the output port of the power synthesizer is the maximum value after vector synthesis, wherein the phase angle is added twiceThe difference must be 180 degrees, thus ensuring the estimated signal Vx1Is/are as followsIs a unique value.
The indirect micro-mechanical microwave power sensor based on the thermoelectric conversion principle can convert microwave power into heat through a load resistor, and then converts the heat into thermoelectric force output based on the Seebeck effect of a thermopile. Measuring the minimum value and the maximum value of the output port voltage of the indirect micro-mechanical microwave power sensor through a digital multimeter, and respectively corresponding to the signals at the output port of the power synthesizerThe minimum and maximum values of the sign power, and thus whether the angle is 180 degrees or 0 degrees can be determined. If the angle is 180 degrees, it means the reading of the adjustable digital phase shifterSubtracting 180 degrees to obtain a signal V to be measured after passing through the transmission line phase shifterx1Phase ofIf the angle is 0 degrees, it means the reading of the adjustable digital phase shifterI.e. the signal V to be measured after passing through the transmission line phase shifterx1Phase ofIn which two additional phase angles are presentThe difference must be 180 degrees, thus ensuring the estimated signal Vx1Is/are as followsIs a unique value. Phase angle change after transmission line phase shifter of known signal to be measuredBased on the relationship among the signal frequency passing through the transmission line phase shifter, the length of the transmission line and the phase shifting degree, i.e.
The frequency f of the signal to be measured can be known. In the above formula, c is the speed of light,eris the effective dielectric constant of the transmission line phase shifter.
The invention relates to a microwave frequency detection device based on micro-electro-mechanical system (MEMS) technology, which is a microwave frequency detection device using a vector synthesis principle, and the specific implementation scheme is as follows:
the system utilizes indirect micromechanical microwave power sensors, power dividers, power combiners, transmission line phase shifters, tunable digital phase shifters, and capacitance-to-digital converters. The indirect micro-mechanical microwave power sensor consists of a coplanar waveguide transmission line 1, a tantalum nitride (TaN) resistor 2, a thermopile 3, a pressure welding block 4, an aluminum gallium arsenic film 5 and a gallium arsenide substrate 6. The film 5 is arranged on the surface of the substrate 6, the coplanar waveguide transmission line 1, the resistor 2, the thermopile 3 and the press welding block 4 are respectively arranged on the surface of the film 5, the coplanar waveguide transmission line 1 is connected with the resistor 2, the thermopile 3 is connected with the press welding block 4, and the resistor 2 and the thermopile 3 are oppositely arranged and are at a certain distance.
The substrate 6 is a gallium arsenide substrate, the resistor 2 is a tantalum nitride resistor, and the film 5 is an aluminum gallium arsenic film.
Will be the signal V to be measuredxApplied to the input port 7 of the power divider, the signal V to be measuredxIs equally divided into power P, frequency f and phaseTwo identical signals Vx1And Vx2，Vx1An input port 14 of the transmission line phase shifter is added to an input port I17, V of the power combiner after phase shiftingx2The signal is applied to an input port 11 of the adjustable digital phase shifter, is moved by a certain phase angle through an adjustable digital phase shifter 12, and is applied to an input port two 18 of the power combiner. The two paths of signals are subjected to vector synthesis by a power synthesizer 19 and then reach an output port 20 of the power synthesizer, and then are added on an input port 21 of an indirect type micro-mechanical microwave power sensor, and a digital multimeter 23 is connected with a pressure welding block 4.
The signal V to be measured can be measured by the transmission line phase shifter 15x1Is added with an additional phase angle related to the length DeltaL of the phaseThe shifted phase angle is linear with frequency, if the frequency of the microwave signal is equal to the center frequency f0Then it is shifted by 180 degrees in phase after passing through the transmission line phase shifter 15 if the frequency of the microwave signal is equal to the center frequency f0Around and below the center frequency f0Is shifted by a phase angle of less than 180 degrees if the microwave signal is equal to the center frequency f0Around and above the center frequency f0Is shifted by more than 180 degrees. This causes the phase of the signal to be added with an additional phase angle after passing through the adjustable digital phase shifter 12Another signal Vx2The phase difference of (a) is 180 degrees or 0 degrees,
or
If the phase difference becomes 180 degrees, the signal power at the output port 20 of the power combiner after vector synthesis is the minimum value due to vector subtraction; if the phase difference becomes 0 degrees, the signal power at the output port 20 of the power combiner after vector combination is at the maximum due to vector addition, where the phase angle is added twiceThe difference must be 180 degrees, thus ensuring the estimated signal Vx1Is/are as followsIs a unique value.
Master of indirect micromechanical microwave power sensor 22The body is a thermopile 3. When microwave signals enter the sensor through the coplanar waveguide transmission line 1, the microwave signals are absorbed by a tantalum nitride (TaN) resistor 2 to generate heat, the heat is converted into thermoelectric potential output based on the Seebeck effect of a thermopile, the minimum value and the maximum value of the voltage of an output port of the indirect type micro-mechanical microwave power sensor can be measured through an adjustable digital multimeter 23, the minimum value and the maximum value correspond to the signal power at the output port 20 of the power combiner 19 respectively, and therefore the angle between the two combined vectors is judged to be 180 degrees or 0 degree. If the angle is 180 degrees, this means the reading of the adjustable digital phase shifter 12Subtracting 180 degrees to obtain the signal V to be measured after passing through the transmission line phase shifter 15x1Phase ofIf the angle is 0 degrees, this means the reading of the adjustable digital phase shifter 12I.e. the signal V to be measured after passing through the transmission line phase shifter 15x1Phase ofIn which two additional phase angles are presentThe difference must be 180 degrees, thus ensuring the estimated signal Vx1Is/are as followsIs a unique value. Phase change after transmission line phase shifter of known signal to be measuredBased on the relationship among the signal frequency passing through the transmission line phase shifter, the length of the transmission line and the phase shifting degree, i.e.
The frequency f of the signal to be measured can be known. In the above formula, c is the speed of light,eris the effective dielectric constant of the transmission line phase shifter.
The transmission line phase shifter 15 and the indirect micromechanical microwave power sensor 22 are realized by a MEMS processing process compatible with a gallium arsenide Microwave Monolithic Integrated Circuit (MMIC) process, the specific process steps are as follows:
a) a gallium arsenide substrate was prepared, using undoped gallium arsenide, having a thickness of 500 μm,
b) epitaxially growing an AlGaAs film as an etch self-stop layer,
c) epitaxially growing n + gallium arsenide, gallium arsenide arm of thermopile
d) Evaporating gold, germanium, nickel or gold to be used as a thermopile metal arm,
e) tantalum nitride is deposited and lithographically patterned to form a resistor,
f) sputtering and photoetching titanium/gold/titanium to be used as a coplanar waveguide transmission line,
g) electroplating gold to form the coplanar waveguide transmission line,
h) the substrate was thinned to 100 μm.
The criteria for distinguishing whether this structure is present are as follows:
the microwave frequency detection system adopts the measurement of the signal V to be detectedxIs equally divided into power (P), frequency (f) and phaseTwo identical signals Vx1And Vx2The method for synthesizing signal power after phase shifting by the transmission line phase shifter and the adjustable digital phase shifter respectively realizes the accurate measurement of microwave frequencyThe device comprises four parts of rate distribution, phase shift, power synthesis and power detection. I.e. the signal V to be measuredxEqually divided into two paths of signals V with same power, frequency and phasex1And Vx2And the phase-shifted signals are respectively applied to a first input port 17 and a second input port 18 of the power combiner after being subjected to phase shifting through a transmission line phase shifter 15 and a tunable digital phase shifter 12. The two paths of signals are subjected to vector synthesis through a power synthesizer 19 and then are added to an input port 21 of the indirect micro-mechanical microwave power sensor, the minimum value and the maximum value of the voltage of an output port of the indirect micro-mechanical microwave power sensor are accurately detected through a detection part (a digital multimeter 23) of the system, and the minimum value and the maximum value of the signal power at the output port 20 of the power synthesizer 19 correspond to each other, so that whether the angle between the two synthesized vectors is 180 degrees or 0 degree is judged. If the angle is 180 degrees, this means the reading of the adjustable digital phase shifter 12Subtracting 180 degrees to obtain the signal V to be measured after passing through the transmission line phase shifter 15x1Phase ofIf the angle is 0 degrees, this means the reading of the adjustable digital phase shifter 12I.e. the signal V to be measured after passing through the transmission line phase shifter 15x1Phase ofIn which two additional phase angles are presentThe difference must be 180 degrees, thus ensuring the estimated signal Vx1Is/are as followsIs a unique value. Based on the known phase change of the signal to be measured after passing through the transmission line phase shifterThe relationship among the signal frequency, the length of the transmission line and the phase shift degree of the transmission line phase shifter can obtain the frequency f of the signal to be measured.
The structure satisfying the above conditions is regarded as the microwave frequency detection device based on the indirect micro-mechanical microwave power sensor of the present invention.
The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiment, but equivalent modifications or changes made by those skilled in the art according to the present disclosure should be included in the scope of the present invention as set forth in the appended claims.
Claims (5)
1. A microwave frequency detection device based on indirect type micro-mechanical microwave power sensor is characterized in that the detection device comprises
The device comprises an indirect micro-mechanical microwave power sensor, a power divider, a power combiner, a transmission line phase shifter and an adjustable digital phase shifter; wherein,
to be tested signal (V)x) Applied to the input port (7) of the power divider, the signal (V) to be measuredx) Is equally divided into a first path of signal (V) with the same power, frequency and phasex1) And a second signal (V)x2) Of 1 atOne-way signal (V)x1) Is applied to an input port (14) of the transmission line phase shifter, is applied to an input port I (17) of the power combiner after phase shifting, and is applied to a second path of signal (V)x2) The input port (11) is added to the adjustable digital phase shifter, and the input port is moved by a certain phase angle through the adjustable digital phase shifter (12) and then is added to the second input port (18) of the power combiner; the two paths of signals are subjected to vector synthesis through a power synthesizer (19) and then reach an output port (20) of the power synthesizer, and then are added to an input port (21) of the indirect micro-mechanical microwave power sensor.
2. The microwave frequency detection device based on the indirect-type micro-mechanical microwave power sensor of claim 1, wherein the indirect-type micro-mechanical microwave power sensor comprises a coplanar waveguide transmission line (1), a resistor (2), a thermopile (3), a pressure welding block (4), a film (5) and a gallium arsenide substrate (6); wherein,
the film (5) is arranged on the surface of the substrate (6), the coplanar waveguide transmission line (1), the resistor (2), the thermopile (3) and the press welding block (4) are respectively arranged on the surface of the film (5), the coplanar waveguide transmission line (1) is connected with the resistor (2), the thermopile (3) is connected with the press welding block (4), and the resistor (2) and the thermopile (3) are oppositely arranged and are separated by a certain distance.
3. The microwave frequency detection device based on the indirect-type micro-mechanical microwave power sensor is characterized in that the substrate (6) is a gallium arsenide substrate, the resistor (2) is a tantalum nitride resistor, and the film (5) is an aluminum gallium arsenic film.
4. The microwave frequency detection device based on the indirect-type micro-mechanical microwave power sensor of claim 1, wherein the first signal (V) is transmitted through a transmission line phase shifterx1) Is added with an additional phase angle related to the length DeltaL of the phaseThe shifted phase angle is linear with frequencyRelation, phase angleIs a unique value.
5. The microwave frequency detection device based on the indirect-type micro-mechanical microwave power sensor of claim 4,
by the frequency, length and phase angle of the signal passing through the transmission line phase shifterThe relationship between the three, i.e.
Can obtain the signal (V) to be measuredx) Frequency f, f of0A particular center frequency of the transmission line phase shifter, c the speed of light,eris the effective dielectric constant of the transmission line phase shifter.
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