CN103063867A - Capacitance type wind speed and wind direction transducer - Google Patents
Capacitance type wind speed and wind direction transducer Download PDFInfo
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- CN103063867A CN103063867A CN2012105590966A CN201210559096A CN103063867A CN 103063867 A CN103063867 A CN 103063867A CN 2012105590966 A CN2012105590966 A CN 2012105590966A CN 201210559096 A CN201210559096 A CN 201210559096A CN 103063867 A CN103063867 A CN 103063867A
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Abstract
The invention discloses a capacitance type wind speed and wind direction transducer. The capacitance type wind speed and wind direction transducer comprises a substrate (1), an insulator (2) arranged at the surface of the substrate (1), a first capacitor bottom electrode (3) and a second capacitor bottom electrode (4) which are respectively arranged at the surface of the insulator and are separated by a certain distance, a supporting anchor area (5) connected with the insulator (2), an elastic film (6) connected with the supporting anchor area, a rigid sheet (7) connected with the elastic film and a wind rod (8) arranged on the rigid sheet (7). The wind rod (8) is arranged at the center of the rigid sheet (7), the first capacitor bottom electrode (3) and the second capacitor bottom electrode (4) are symmetrically arranged relative to the center of the rigid sheet (7), and the first capacitor bottom electrode (3) and the second capacitor bottom electrode (4) constitute differential capacitor pair. The capacitance type wind speed and wind direction transducer has the advantages of being high in detection sensitivity, low in power dissipation, small in size and temperature excursion and the like.
Description
Technical field
The present invention relates to a kind of structure of capacitor type air velocity transducer, especially adopt the output of electric capacity difference to realize the small-sized wind speed sensor construction of measuring wind speed.
Background technology
Wind speed wind direction sensor is widely used at aspects such as environmental monitoring, field works.Such sensor is generally by traditional vane and weathervane structure, pure solid-state heated filament or hotting mask structure and Ultrasonic wind velocity measurement system etc.Tradition vane and weathervane structural volume more greatly, generally tens of centimetres or more than, and have rotatable parts, easily wearing and tearing; Although it is very little that the hot type air velocity transducer can be done, it is its intrinsic problem that temperature is floated with power consumption, needs to improve; Ultrasonic air velocity transducer obtains very large development in recent years, and it is high that this sensor has precision, and measurement range is large, and many outstanding advantages such as long service life.Its unfavorable factor is volume large (more than 10 centimetres), and is on the high side.The measurement aspects such as operation in the open air need small-sized test macro.Therefore the portable wind speed and direction measuring system of microminiature still obtains people's concern and attempts to develop novel product.
Summary of the invention
Technical matters: invention has proposed a kind of capacitive type wind velocity and has measured structure.This measurement structure is comprised of deformable conductive plate and the symmetrical fixed electorde of placing of its lower two or four of a middle fixed vertical wind bar.Vertically-supplying air bar wind-engaging pressure zone moving conductive thin plate produces distortion, cause the size of the electric capacity of this film and the composition of the two or four electrode under it to change, by the size of measuring this two or four electric capacity and the capacitance difference of calculating relative position, also calibrate the information that just can reflect wind speed and direction according to certain algorithm.
Technical scheme: for solving the problems of the technologies described above, the invention discloses a kind of capacitance type anemometer, it comprises substrate, be arranged on the insulator of substrate surface, be located at respectively insulator surface and in a distance the first electric capacity hearth electrode and the second electric capacity hearth electrode, the support anchor district that links to each other with insulator, with support the elastic membrane that the anchor district links to each other, the stiff sheet that links to each other with elastic membrane, with the wind bar that is arranged on the stiff sheet
The wind bar is positioned at the stiff sheet center, and the first electric capacity hearth electrode and the second electric capacity hearth electrode relative stiffness thin plate Central Symmetry are placed, and the first electric capacity hearth electrode and the second electric capacity hearth electrode, consists of differential capacitance pair.
Link to each other with support anchor district by elastic membrane around the stiff sheet, elastic membrane and stiff sheet are arranged to enclosed construction, avoid dust and moisture to enter capacitance gap.
This wind transducer also comprises the 3rd end capacitance electrode and the 4th end capacitance electrode that arranges with respect to the stiff sheet Central Symmetry, the stiff sheet centrosymmetric structure, the first electric capacity hearth electrode, the second electric capacity hearth electrode, the 3rd end capacitance electrode and the 4th end capacitance electrode are about the Central Symmetry setting of stiff sheet, thus the detection of realization two-D wind speed and wind direction.
Stiff sheet is regular polygon or circular centrosymmetric structure.
Beneficial effect: based on the air velocity transducer of the capacitance detecting principle of checking the mark, can adopt miromaching to make in batches, with low cost.What structure can be done simultaneously is very little, such as in 5 centimetres.Can satisfy portable needs; Adopt the capacitance detecting principle to realize that wind speed and direction is responsive, because the electric capacity spacing changes and electric capacity is inversely proportional to, so the comparable pressure drag of sensitivity detects; Capacitance principle detected temperatures effect is little, so the temperature of sensor is floated little; Same, adopting capacitance detecting, it is low that power consumption is compared hot blast speed sensor.
Description of drawings
Fig. 1 is diagrammatic cross-section of the present invention.
Wherein: backing material 1, insulating material 2, the first hearth electrodes 3, the second hearth electrodes 4 support anchor district 5, elastic membrane 6, stiff sheet 7 and wind bar 8.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
The small-sized capacitance type anemometer that the present invention proposes utilizes capacitance principle measuring wind and wind direction.It comprises substrate 1, be arranged on the insulator 2 on substrate 1 surface, be located at respectively insulator 2 surfaces and in a distance the first electric capacity hearth electrode 3 and the second electric capacity hearth electrode 4, the support anchor district 5 that links to each other with insulator 2, the elastic membrane 6 that links to each other with support anchor district 5, the stiff sheet 7 that links to each other with elastic membrane 6, with the wind bar 8 that is arranged on the stiff sheet 7
Link to each other with support anchor district 5 by elastic membrane 6 around the stiff sheet 7, elastic membrane 6 and stiff sheet 7 are arranged to enclosed construction, avoid dust and moisture to enter capacitance gap.
This wind transducer also comprises the 3rd end capacitance electrode and the 4th end capacitance electrode that arranges with respect to stiff sheet 7 Central Symmetries, stiff sheet 7 centrosymmetric structures, the first electric capacity hearth electrode 3, the second electric capacity hearth electrode 4, the 3rd end capacitance electrode and the 4th end capacitance electrode are about the Central Symmetry setting of stiff sheet, thus the detection of realization two-D wind speed and wind direction.
The diagrammatic cross-section of sensor as shown in Figure 1, total is by backing material 1, insulating material 2, hearth electrode 3,4 and support anchor district 5, elastic membrane 6, stiff sheet 7 and wind bar 8 and form among the figure.Placement one deck insulating medium material 2 on the backing material 1, two edges arrange and support anchor district 5 on it, place hearth electrode 3,4 by the center Central Symmetry, the bottom electrode of two electric capacity of respectively conduct symmetry, the very stiff sheet 7 that powers on of electric capacity.Wind bar 8 is placed in the central vertical of stiff sheet 7, and the limit of stiff sheet 7 links to each other with support anchor district 5 by elastic membrane 6.Wind bar 8 is perpendicular to substrate 1 when calm, consistent with 4 two capacitance size that form with stiff sheet 7 by electrode material 3, when there being wind levels to blow over sensor surface, cause the wind bar to tilt, driving stiff sheet 7 produces under the stretching of elastic membrane 6 and extruding, cause above-mentioned two electric capacity to change, the electric capacity pitch smaller in wind downstream, electric capacity increases, it is large that the electric capacity spacing of upstream becomes, electric capacity reduces, and has dull relation between the difference of two electric capacity and the wind speed, and poor symbol is relevant with wind direction.Therefore.Just can obtain wind speed information by follow-up calibration.
The invention provides a kind of differential capacitance and realize the air velocity transducer of measuring wind speed.Formed by backing material 1, insulating material 2, electric capacity hearth electrode 3 and 4, support anchor district 5, elastic membrane 6, stiff sheet 7 and wind bar 8.Wherein hearth electrode 3,4 relative stiffness thin plates, 7 Central Symmetries are placed, and wind bar 8 also need be installed in the center of stiff sheet 7.Being provided for of elastic membrane 6 makes things convenient for stiff sheet 7 distortion under wind bar 8 drives, and elastic membrane 6, supports anchor district 5 and stiff sheet 7 can be made of same material.If stiff sheet 7, elastic membrane 6 and anchor district 5 are designed to the complete closure structure, can avoid ambient dust and humidity on the impact of electric capacity.
The manufacturing process of this sensor construction is: at first choose glass substrate 1, because glass substrate is insulating material, so itself also can be used as insulating material 2, then adopt the upper surface growth layer of metal film of the principle substrate 1 of magnetron sputtering, such as aluminium etc.This layer metal carried out the hearth electrode 3 and 4 of photoetching and corrosion formation electric capacity; Select another plain edition silicon chip again, carry out photoetching on its surface, adopt reactive ion etching technology to etch away the 2-8 micron silicon outside the anchor district 5 dark, this gap is exactly the initial separation of differential capacitance after deducting the thickness of metal electrode 3 and 4.Then the silicon with elastic membrane 6 positions adopts the reactive ion technology to etch away the 3-5 micron.Like this, add front etching once, the etching depth of the silicon of this position reaches the 5-13 micron.Then the glass of silicon face and upper a slice having been made electrode carries out anode linkage, the method that adopts again chemically mechanical polishing with wafer thinning to about the 15-20 micron.Adopt the bonding plastics wind of epoxy glue bar 8 just to finish the making of whole device in the center of chip at last.
The above only is better embodiment of the present invention; protection scope of the present invention is not limited with above-mentioned embodiment; as long as the equivalence that those of ordinary skills do according to disclosed content is modified or changed, all should include in the protection domain of putting down in writing in claims.
Claims (4)
1. capacitance type anemometer, it is characterized in that, it comprises substrate (1), be arranged on the insulator (2) on substrate (1) surface, be located at respectively insulator (2) surface and in a distance the first electric capacity hearth electrode (3) and the second electric capacity hearth electrode (4), the support anchor district (5) that links to each other with insulator (2), the elastic membrane (6) that links to each other with support anchor district (5), the stiff sheet (7) that links to each other with elastic membrane (6), with the wind bar (8) that is arranged on the stiff sheet (7)
Wind bar (8) is positioned at stiff sheet (7) center, and the first electric capacity hearth electrode (3) and the second electric capacity hearth electrode (4) relative stiffness thin plate (7) Central Symmetry are placed, and the first electric capacity hearth electrode (3) and the second electric capacity hearth electrode (4) formation differential capacitance pair.
2. capacitance type anemometer according to claim 1 is characterized in that, stiff sheet (7) links to each other with support anchor district (5) by elastic membrane (6) on every side, and elastic membrane (6) and stiff sheet (7) are arranged to enclosed construction.
3. capacitance type anemometer according to claim 1 and 2, it is characterized in that, stiff sheet (7) centrosymmetric structure, this wind transducer also comprises the 3rd end capacitance electrode and the 4th end capacitance electrode that arranges with respect to stiff sheet (7) Central Symmetry, and the first electric capacity hearth electrode (3), the second electric capacity hearth electrode (4), the 3rd end capacitance electrode and the 4th end capacitance electrode are about the Central Symmetry setting of stiff sheet.
4. capacitance type anemometer according to claim 3 is characterized in that, stiff sheet (7) is regular polygon or circular centrosymmetric structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2012105590966A CN103063867A (en) | 2012-12-20 | 2012-12-20 | Capacitance type wind speed and wind direction transducer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012105590966A CN103063867A (en) | 2012-12-20 | 2012-12-20 | Capacitance type wind speed and wind direction transducer |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424567A (en) * | 2013-09-02 | 2013-12-04 | 东南大学 | Capacitive micro-machine wind speed and direction sensor |
| CN106353531A (en) * | 2016-08-25 | 2017-01-25 | 阜阳师范学院 | Wind velocity transducer |
| CN108152531A (en) * | 2017-11-21 | 2018-06-12 | 东南大学 | A kind of condenser type tri-dimensional wind speed wind direction sensor |
| CN109164270A (en) * | 2018-06-21 | 2019-01-08 | 东南大学 | A kind of super-wide range anemobiagraph and manufacturing method |
| CN110018324A (en) * | 2019-05-20 | 2019-07-16 | 田广朋 | A kind of ion wind velocity wind direction mensuration and ion wind velocity registering weather vane |
| CN112362898A (en) * | 2020-11-03 | 2021-02-12 | 重庆大学 | Wide-range wind speed and direction sensor based on wind-induced vibration suppression mechanism and preparation method thereof |
| CN112777462A (en) * | 2021-02-07 | 2021-05-11 | 杭州西奥电梯有限公司 | Control method of door closing resistance self-adaptive elevator door motor |
| CN112924717A (en) * | 2021-02-02 | 2021-06-08 | 山东交通学院 | Wind direction recognition device for rescue at sea |
| CN115508578A (en) * | 2022-10-20 | 2022-12-23 | 南方电网数字电网研究院有限公司 | Wind speed and direction sensor based on differential thermosensitive capacitor and detection device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1012577C1 (en) * | 1999-07-13 | 2001-01-16 | Ingbureauir W Piggen Wi V O F | Device and arrangement involve two or more electrodes, with capacity differences between them, which are dimension of two magnitudes which are unconnected and are to great extent independent, such as wind direection and wind force |
| CN1479858A (en) * | 2000-11-30 | 2004-03-03 | ������������ʽ���� | Static capacitive sensor |
| US7268691B2 (en) * | 2005-05-02 | 2007-09-11 | Delphi Technologies, Inc. | Weather/environment communications node |
| CN101655569A (en) * | 2008-08-20 | 2010-02-24 | 中国科学院电子学研究所 | Micro-mechanical capacitance type anemometer |
| CN201697932U (en) * | 2009-11-05 | 2011-01-05 | 浙江运达风力发电工程有限公司 | Capacitance type anemoclinograph of wind turbine generator set |
| CN102103013A (en) * | 2010-12-10 | 2011-06-22 | 中北大学 | Three-dimensional vector hydrophone |
| CN102768093A (en) * | 2011-05-04 | 2012-11-07 | Nxp股份有限公司 | MEMS capacitive pressure sensor, operating method and manufacturing method |
-
2012
- 2012-12-20 CN CN2012105590966A patent/CN103063867A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1012577C1 (en) * | 1999-07-13 | 2001-01-16 | Ingbureauir W Piggen Wi V O F | Device and arrangement involve two or more electrodes, with capacity differences between them, which are dimension of two magnitudes which are unconnected and are to great extent independent, such as wind direection and wind force |
| CN1479858A (en) * | 2000-11-30 | 2004-03-03 | ������������ʽ���� | Static capacitive sensor |
| US7268691B2 (en) * | 2005-05-02 | 2007-09-11 | Delphi Technologies, Inc. | Weather/environment communications node |
| CN101655569A (en) * | 2008-08-20 | 2010-02-24 | 中国科学院电子学研究所 | Micro-mechanical capacitance type anemometer |
| CN201697932U (en) * | 2009-11-05 | 2011-01-05 | 浙江运达风力发电工程有限公司 | Capacitance type anemoclinograph of wind turbine generator set |
| CN102103013A (en) * | 2010-12-10 | 2011-06-22 | 中北大学 | Three-dimensional vector hydrophone |
| CN102768093A (en) * | 2011-05-04 | 2012-11-07 | Nxp股份有限公司 | MEMS capacitive pressure sensor, operating method and manufacturing method |
Non-Patent Citations (1)
| Title |
|---|
| 韩有君，等: "基于MEMS的悬板式风速传感器的研制", 《纳米技术与精密工程》, vol. 7, no. 5, 30 September 2009 (2009-09-30) * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424567A (en) * | 2013-09-02 | 2013-12-04 | 东南大学 | Capacitive micro-machine wind speed and direction sensor |
| CN106353531A (en) * | 2016-08-25 | 2017-01-25 | 阜阳师范学院 | Wind velocity transducer |
| CN108152531A (en) * | 2017-11-21 | 2018-06-12 | 东南大学 | A kind of condenser type tri-dimensional wind speed wind direction sensor |
| CN109164270A (en) * | 2018-06-21 | 2019-01-08 | 东南大学 | A kind of super-wide range anemobiagraph and manufacturing method |
| CN110018324A (en) * | 2019-05-20 | 2019-07-16 | 田广朋 | A kind of ion wind velocity wind direction mensuration and ion wind velocity registering weather vane |
| CN110018324B (en) * | 2019-05-20 | 2024-05-14 | 陈红 | Ion anemometry and ion anemometer |
| CN112362898A (en) * | 2020-11-03 | 2021-02-12 | 重庆大学 | Wide-range wind speed and direction sensor based on wind-induced vibration suppression mechanism and preparation method thereof |
| CN112362898B (en) * | 2020-11-03 | 2022-09-23 | 重庆大学 | Wide-range wind speed and direction sensor based on wind-induced vibration suppression mechanism and preparation method thereof |
| CN112924717A (en) * | 2021-02-02 | 2021-06-08 | 山东交通学院 | Wind direction recognition device for rescue at sea |
| CN112777462A (en) * | 2021-02-07 | 2021-05-11 | 杭州西奥电梯有限公司 | Control method of door closing resistance self-adaptive elevator door motor |
| CN115508578A (en) * | 2022-10-20 | 2022-12-23 | 南方电网数字电网研究院有限公司 | Wind speed and direction sensor based on differential thermosensitive capacitor and detection device |
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Application publication date: 20130424 |