CN103058512B - 一种光纤预制棒制造时控制气态原料流量的装置和方法 - Google Patents
一种光纤预制棒制造时控制气态原料流量的装置和方法 Download PDFInfo
- Publication number
- CN103058512B CN103058512B CN201210554293.9A CN201210554293A CN103058512B CN 103058512 B CN103058512 B CN 103058512B CN 201210554293 A CN201210554293 A CN 201210554293A CN 103058512 B CN103058512 B CN 103058512B
- Authority
- CN
- China
- Prior art keywords
- pressure
- liquid
- chemical
- valve
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210554293.9A CN103058512B (zh) | 2012-12-19 | 2012-12-19 | 一种光纤预制棒制造时控制气态原料流量的装置和方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210554293.9A CN103058512B (zh) | 2012-12-19 | 2012-12-19 | 一种光纤预制棒制造时控制气态原料流量的装置和方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103058512A CN103058512A (zh) | 2013-04-24 |
CN103058512B true CN103058512B (zh) | 2015-04-08 |
Family
ID=48101448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210554293.9A Active CN103058512B (zh) | 2012-12-19 | 2012-12-19 | 一种光纤预制棒制造时控制气态原料流量的装置和方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103058512B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111153590B (zh) * | 2019-12-31 | 2022-03-25 | 江苏通鼎光棒有限公司 | 一种高精度的四氯化锗鼓泡装置 |
CN115505899A (zh) * | 2022-08-16 | 2022-12-23 | 湖南顶立科技有限公司 | 一种沉积设备的工艺气源输入装置及其使用方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6698240B1 (en) * | 1999-06-03 | 2004-03-02 | Shin-Etsu Chemical Co., Ltd. | Apparatus for manufacturing glass base material and a method for manufacturing glass base material |
CN102230571A (zh) * | 2011-05-19 | 2011-11-02 | 上海正帆科技有限公司 | 液态源汽化装置及其汽化方法 |
CN202074230U (zh) * | 2011-05-19 | 2011-12-14 | 上海正帆科技有限公司 | 液态源汽化装置 |
CN202380079U (zh) * | 2011-11-25 | 2012-08-15 | 上海至纯洁净系统科技股份有限公司 | 蒸汽输送装置及其蒸发器 |
CN202452106U (zh) * | 2012-02-27 | 2012-09-26 | 上海正帆科技有限公司 | 一种液态源的汽化装置 |
CN203007127U (zh) * | 2012-12-19 | 2013-06-19 | 江苏亨通光电股份有限公司 | 一种光纤预制棒制造时控制气态原料流量的装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3175862D1 (en) * | 1980-05-20 | 1987-02-26 | Schumacher Co J C | Chemical vapor delivery system and method for controlling the flow of vapor in a chemical vapor delivery system |
KR100402678B1 (ko) * | 2000-12-29 | 2003-10-22 | 주식회사 세미텔 | 광섬유 및 광소자용 기상 증착 기화 시스템 |
JP4809401B2 (ja) * | 2008-07-18 | 2011-11-09 | 信越化学工業株式会社 | 石英ガラスの製造方法及び装置 |
-
2012
- 2012-12-19 CN CN201210554293.9A patent/CN103058512B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6698240B1 (en) * | 1999-06-03 | 2004-03-02 | Shin-Etsu Chemical Co., Ltd. | Apparatus for manufacturing glass base material and a method for manufacturing glass base material |
CN102230571A (zh) * | 2011-05-19 | 2011-11-02 | 上海正帆科技有限公司 | 液态源汽化装置及其汽化方法 |
CN202074230U (zh) * | 2011-05-19 | 2011-12-14 | 上海正帆科技有限公司 | 液态源汽化装置 |
CN202380079U (zh) * | 2011-11-25 | 2012-08-15 | 上海至纯洁净系统科技股份有限公司 | 蒸汽输送装置及其蒸发器 |
CN202452106U (zh) * | 2012-02-27 | 2012-09-26 | 上海正帆科技有限公司 | 一种液态源的汽化装置 |
CN203007127U (zh) * | 2012-12-19 | 2013-06-19 | 江苏亨通光电股份有限公司 | 一种光纤预制棒制造时控制气态原料流量的装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103058512A (zh) | 2013-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101525142B1 (ko) | 원료 농도 검출 기구를 구비한 원료 기화 공급 장치 | |
CN101760727B (zh) | 材料气体浓度控制装置 | |
CA1152183A (en) | Vapor delivery control system and method | |
US6631334B2 (en) | Pressure-based mass flow controller system | |
US6161398A (en) | Methods of and systems for vapor delivery control in optical preform manufacture | |
WO2013018265A1 (ja) | 原料気化供給装置 | |
JP5703114B2 (ja) | 原料の気化供給装置 | |
JP2008089575A5 (zh) | ||
CN103058512B (zh) | 一种光纤预制棒制造时控制气态原料流量的装置和方法 | |
JP2012234860A5 (zh) | ||
JPH1194603A (ja) | 真空設備への実際のガスの流れを監視するための方法および真空処理装置 | |
CN103305797B (zh) | 蒸镀装置 | |
CN105659359B (zh) | 连续蒸馏式三氯氢硅气化供给装置 | |
WO2004066048A1 (ja) | クラスター化する流体の流量制御方法及びこれに用いるクラスター化する流体用の流量制御装置 | |
CN203782033U (zh) | 一种四氯化锗高精度供应设备 | |
CN103803790A (zh) | 一种四氯化锗高精度供应方法及其设备 | |
CN203007127U (zh) | 一种光纤预制棒制造时控制气态原料流量的装置 | |
CN105203190A (zh) | 质量流量计的标定方法和使用该标定方法的气体流量计 | |
CN215525680U (zh) | 一种呼出气体酒精含量检测仪检定装置 | |
CN209485504U (zh) | 一种自适应恒液位稳流装置 | |
KR20130005896A (ko) | 유체 누설 공급 장치 | |
CN113030389A (zh) | 一种呼出气体酒精含量检测仪检定装置及其检定方法 | |
CN109253780A (zh) | 油耗仪校准装置 | |
CN116164881B (zh) | 一种气压测量仪的校准系统及校准方法 | |
JP2004226144A (ja) | 差圧流量計 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180613 Address after: 215000 Hengtong Avenue, seven Town, Wujiang District, Jiangsu Province, No. 88 Co-patentee after: Jiangsu Hengtong Intelligent Technology Co., Ltd. Patentee after: Jiangsu Hengtong Photoelectric Co., Ltd. Address before: 215200 Jiangsu Heng Tong Au Optronics Co, Wujiang Economic Development Zone, Suzhou, Jiangsu 100 Patentee before: Jiangsu Hengtong Photoelectric Co., Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 215000 Hengtong Avenue, seven Town, Wujiang District, Jiangsu Province, No. 88 Patentee after: HENGTONG OPTIC-ELECTRIC Co.,Ltd. Patentee after: Jiangsu Hengxin quartz Technology Co., Ltd Address before: 215000 Hengtong Avenue, seven Town, Wujiang District, Jiangsu Province, No. 88 Patentee before: HENGTONG OPTIC-ELECTRIC Co.,Ltd. Patentee before: Jiangsu Hengtong Intelligent Technology Co., Ltd |