CN103058512A - 一种光纤预制棒制造时控制气态原料流量的装置和方法 - Google Patents
一种光纤预制棒制造时控制气态原料流量的装置和方法 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111153590A (zh) * | 2019-12-31 | 2020-05-15 | 江苏通鼎光棒有限公司 | 一种高精度的四氯化锗鼓泡装置 |
CN115505899A (zh) * | 2022-08-16 | 2022-12-23 | 湖南顶立科技有限公司 | 一种沉积设备的工艺气源输入装置及其使用方法 |
Citations (9)
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JPS5710323A (en) * | 1980-05-20 | 1982-01-19 | Schumacher Co J C | Chemical vapor distributing system |
KR20020056480A (ko) * | 2000-12-29 | 2002-07-10 | 이병문 | 광섬유 및 광소자용 기상 증착 기화 시스템 |
US6698240B1 (en) * | 1999-06-03 | 2004-03-02 | Shin-Etsu Chemical Co., Ltd. | Apparatus for manufacturing glass base material and a method for manufacturing glass base material |
US20100011813A1 (en) * | 2008-07-18 | 2010-01-21 | Shin-Etsu Chemical Co., Ltd. | Quartz glass manufacturing method and quartz glass manufacturing apparatus |
CN102230571A (zh) * | 2011-05-19 | 2011-11-02 | 上海正帆科技有限公司 | 液态源汽化装置及其汽化方法 |
CN202074230U (zh) * | 2011-05-19 | 2011-12-14 | 上海正帆科技有限公司 | 液态源汽化装置 |
CN202380079U (zh) * | 2011-11-25 | 2012-08-15 | 上海至纯洁净系统科技股份有限公司 | 蒸汽输送装置及其蒸发器 |
CN202452106U (zh) * | 2012-02-27 | 2012-09-26 | 上海正帆科技有限公司 | 一种液态源的汽化装置 |
CN203007127U (zh) * | 2012-12-19 | 2013-06-19 | 江苏亨通光电股份有限公司 | 一种光纤预制棒制造时控制气态原料流量的装置 |
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Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5710323A (en) * | 1980-05-20 | 1982-01-19 | Schumacher Co J C | Chemical vapor distributing system |
US6698240B1 (en) * | 1999-06-03 | 2004-03-02 | Shin-Etsu Chemical Co., Ltd. | Apparatus for manufacturing glass base material and a method for manufacturing glass base material |
KR20020056480A (ko) * | 2000-12-29 | 2002-07-10 | 이병문 | 광섬유 및 광소자용 기상 증착 기화 시스템 |
US20100011813A1 (en) * | 2008-07-18 | 2010-01-21 | Shin-Etsu Chemical Co., Ltd. | Quartz glass manufacturing method and quartz glass manufacturing apparatus |
CN102230571A (zh) * | 2011-05-19 | 2011-11-02 | 上海正帆科技有限公司 | 液态源汽化装置及其汽化方法 |
CN202074230U (zh) * | 2011-05-19 | 2011-12-14 | 上海正帆科技有限公司 | 液态源汽化装置 |
CN202380079U (zh) * | 2011-11-25 | 2012-08-15 | 上海至纯洁净系统科技股份有限公司 | 蒸汽输送装置及其蒸发器 |
CN202452106U (zh) * | 2012-02-27 | 2012-09-26 | 上海正帆科技有限公司 | 一种液态源的汽化装置 |
CN203007127U (zh) * | 2012-12-19 | 2013-06-19 | 江苏亨通光电股份有限公司 | 一种光纤预制棒制造时控制气态原料流量的装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111153590A (zh) * | 2019-12-31 | 2020-05-15 | 江苏通鼎光棒有限公司 | 一种高精度的四氯化锗鼓泡装置 |
CN111153590B (zh) * | 2019-12-31 | 2022-03-25 | 江苏通鼎光棒有限公司 | 一种高精度的四氯化锗鼓泡装置 |
CN115505899A (zh) * | 2022-08-16 | 2022-12-23 | 湖南顶立科技有限公司 | 一种沉积设备的工艺气源输入装置及其使用方法 |
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Effective date of registration: 20180613 Address after: 215000 Hengtong Avenue, seven Town, Wujiang District, Jiangsu Province, No. 88 Co-patentee after: Jiangsu Hengtong Intelligent Technology Co., Ltd. Patentee after: Jiangsu Hengtong Photoelectric Co., Ltd. Address before: 215200 Jiangsu Heng Tong Au Optronics Co, Wujiang Economic Development Zone, Suzhou, Jiangsu 100 Patentee before: Jiangsu Hengtong Photoelectric Co., Ltd. |
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Address after: 215000 Hengtong Avenue, seven Town, Wujiang District, Jiangsu Province, No. 88 Patentee after: HENGTONG OPTIC-ELECTRIC Co.,Ltd. Patentee after: Jiangsu Hengxin quartz Technology Co., Ltd Address before: 215000 Hengtong Avenue, seven Town, Wujiang District, Jiangsu Province, No. 88 Patentee before: HENGTONG OPTIC-ELECTRIC Co.,Ltd. Patentee before: Jiangsu Hengtong Intelligent Technology Co., Ltd |