CN103056889A - 石英晶片抓取用多孔金属吸头 - Google Patents
石英晶片抓取用多孔金属吸头 Download PDFInfo
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- CN103056889A CN103056889A CN2013100395779A CN201310039577A CN103056889A CN 103056889 A CN103056889 A CN 103056889A CN 2013100395779 A CN2013100395779 A CN 2013100395779A CN 201310039577 A CN201310039577 A CN 201310039577A CN 103056889 A CN103056889 A CN 103056889A
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- CN
- China
- Prior art keywords
- mandrel body
- cylinder
- suction nozzle
- diameter
- quartz wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- Crystals, And After-Treatments Of Crystals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
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Claims (6)
Priority Applications (1)
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CN201310039577.9A CN103056889B (zh) | 2013-02-01 | 2013-02-01 | 石英晶片抓取用多孔金属吸头 |
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CN201310039577.9A CN103056889B (zh) | 2013-02-01 | 2013-02-01 | 石英晶片抓取用多孔金属吸头 |
Publications (2)
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CN103056889A true CN103056889A (zh) | 2013-04-24 |
CN103056889B CN103056889B (zh) | 2015-04-01 |
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CN201310039577.9A Active CN103056889B (zh) | 2013-02-01 | 2013-02-01 | 石英晶片抓取用多孔金属吸头 |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05208390A (ja) * | 1992-01-29 | 1993-08-20 | Sony Corp | 吸着ノズル |
CN101276759A (zh) * | 2007-03-26 | 2008-10-01 | 矽品精密工业股份有限公司 | 焊球植球设备及其撷取装置 |
CN101390457A (zh) * | 2006-02-28 | 2009-03-18 | 南都精密株式会社 | 电子部件的吸附管嘴构件 |
CN201252093Y (zh) * | 2008-08-04 | 2009-06-03 | 林进达 | 晶片抓取手臂 |
CN101677077A (zh) * | 2008-09-18 | 2010-03-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 机械手及晶片处理系统 |
CN201736230U (zh) * | 2010-07-02 | 2011-02-09 | 上海申和热磁电子有限公司 | 一种钼质真空吸头 |
US20120139192A1 (en) * | 2010-12-02 | 2012-06-07 | Fuji Electric Co., Ltd. | Chucking device and chucking method |
CN203031612U (zh) * | 2013-02-01 | 2013-07-03 | 浙江大学台州研究院 | 石英晶片抓取用多孔金属吸头 |
-
2013
- 2013-02-01 CN CN201310039577.9A patent/CN103056889B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05208390A (ja) * | 1992-01-29 | 1993-08-20 | Sony Corp | 吸着ノズル |
CN101390457A (zh) * | 2006-02-28 | 2009-03-18 | 南都精密株式会社 | 电子部件的吸附管嘴构件 |
CN101276759A (zh) * | 2007-03-26 | 2008-10-01 | 矽品精密工业股份有限公司 | 焊球植球设备及其撷取装置 |
CN201252093Y (zh) * | 2008-08-04 | 2009-06-03 | 林进达 | 晶片抓取手臂 |
CN101677077A (zh) * | 2008-09-18 | 2010-03-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 机械手及晶片处理系统 |
CN201736230U (zh) * | 2010-07-02 | 2011-02-09 | 上海申和热磁电子有限公司 | 一种钼质真空吸头 |
US20120139192A1 (en) * | 2010-12-02 | 2012-06-07 | Fuji Electric Co., Ltd. | Chucking device and chucking method |
CN203031612U (zh) * | 2013-02-01 | 2013-07-03 | 浙江大学台州研究院 | 石英晶片抓取用多孔金属吸头 |
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CN103056889B (zh) | 2015-04-01 |
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C06 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Address after: Truman town Yuhuan County Taizhou city Zhejiang province 317605 Hu Xing Industrial Park (Wu Jiaduan) Chu Chau talent dream factory Applicant after: Research Institute of Zhejiang University-Taizhou Address before: 317600 Yuhuan County Zhejiang Automobile & Motorcycle Industrial Zone Zhejiang Taizhou Motorcycle & motorcycle Research Institute Applicant before: Research Institute of Zhejiang University-Taizhou |
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C53 | Correction of patent of invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Wang Weirui Inventor after: Liu Mulin Inventor after: Zheng Jianming Inventor before: Wang Weirui Inventor before: Liu Mulin |
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COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: WANG WEIRUI LIU MULIN TO: WANG WEIRUI LIU MULIN ZHENG JIANMING |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20130424 Assignee: Taizhou tillage Electronic Technology Co., Ltd. Assignor: Research Institute of Zhejiang University-Taizhou Contract record no.: 2016330000143 Denomination of invention: Porous metal suction head for grabbing quartz crystal wafer Granted publication date: 20150401 License type: Exclusive License Record date: 20160927 |
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LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model |