CN103018830B - Terahertz wave polarization beam splitter of double serial connection ring structure - Google Patents
Terahertz wave polarization beam splitter of double serial connection ring structure Download PDFInfo
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- CN103018830B CN103018830B CN201210564214.2A CN201210564214A CN103018830B CN 103018830 B CN103018830 B CN 103018830B CN 201210564214 A CN201210564214 A CN 201210564214A CN 103018830 B CN103018830 B CN 103018830B
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Abstract
The invention discloses a terahertz wave polarization beam splitter of a double serial connection ring structure. The terahertz wave polarization beam splitter comprises a signal input end, a first signal output end, a second signal output end, a matrix, a first straight waveguide, a second straight waveguide, a first serial connection ring waveguide, a second serial connection ring waveguide, and a serial connection diamond waveguide. The first serial connection ring waveguide, the serial connection diamond waveguide and the second serial connection ring waveguide are sequentially disposed between the first straight waveguide and the second straight waveguide. A terahertz wave signal is input from the signal input end. A TE (transverse electric) wave is output directly from the first signal output end through the first straight waveguide, and a TM (transverse magnetic) wave is output from the second signal output end through the second straight waveguide by the aid of coupling among the first serial connection ring waveguide, the serial connection diamond waveguide and the second serial connection ring waveguide. The terahertz wave polarization beam splitter is simple in structure, low in space occupation, easy to integrate, high in splitting efficiency and the like, and the requirements for fields such as terahertz medical imaging and terahertz communication can be well met.
Description
Technical field
The present invention relates to THz wave beam splitter, relate in particular to a kind of terahertz polarization beam splitter of two serial connection circular ring structures.
Background technology
THz wave (THz, 1THz=10
12hz) typically refer to the electromagnetic wave of frequency within the scope of 0.1THz-10THz, on electromagnetic wave spectrum between far infrared light wave and microwave.With the electromagnetic wave phase ratio of other frequency ranges, THz wave has its unique advantage: rotational energy level and the vibrational energy level of cosmic background radiation, many organic macromolecules, particularly biomacromolecule are positioned at terahertz wave band.Ultrafast terahertz pulse, because of advantages such as its transient state, broadband property, coherence, low energy, has represented good application prospect in fields such as imaging, lossless detection, safety check, instrumental analysis.Therefore compact conformation, the efficient THz wave function element of good stability will contribute to promote the application of THz wave technology.
The function element of current THz wave is the Focal point and difficult point in the application of THz wave science and technology, also launches gradually both at home and abroad for the function element research of THz wave.Existing THz wave function element is also little, and their complex structures, volume are larger, expensive conventionally, and therefore miniaturization, THz wave device is the key of THz wave technology application cheaply.Lot of domestic and international scientific research institution is all devoted to the research of this respect and makes some progress at present, but to the rare report of the research of terahertz polarization beam splitter.Terahertz polarization beam splitter is a kind of very important THz wave device, can be used for THz wave system, realizes the control to THz wave.Therefore be necessary to design a kind of simple in structure, take up room little, be convenient to terahertz polarization beam splitter integrated, that beam splitting efficiency is high to meet following THz wave technology application needs.
Summary of the invention
The object of the invention is that prior art beam splitting efficiency is low in order to overcome, complex structure, volume are large, actual fabrication process difficulty, be difficult to integrated deficiency, and a kind of terahertz polarization beam splitters of two serial connection circular ring structures of beam splitting rate simple in structure, high are provided.
In order to achieve the above object, technical scheme of the present invention is as follows:
The terahertz polarization beam splitter of two serial connection circular ring structures comprises signal input part, first signal output terminal, secondary signal output terminal, matrix, the first straight wave guide, the second straight wave guide, the first serial connection annular waveguide, the second serial connection annular waveguide, the waveguide of serial connection rhombus; Matrix is provided with the first straight wave guide, the second straight wave guide, the first serial connection annular waveguide, the second serial connection annular waveguide, the waveguide of serial connection rhombus, between the first straight wave guide and the second straight wave guide, be provided with successively first and be connected in series annular waveguide, serial connection rhombus waveguide and the second serial connection annular waveguide, the first serial connection annular waveguide and the second serial connection annular waveguide are formed by connecting in turn by three annular waveguides, and the waveguide of serial connection rhombus is connected to form in turn by left half rhombus waveguide, two rhombus waveguides, right half rhombus waveguide; Terahertz wave signal is inputted from signal input part, TE ripple is directly exported from first signal output terminal through the first straight wave guide, by the coupling between the first serial connection annular waveguide, the waveguide of serial connection rhombus, the second serial connection annular waveguide, TM ripple from the output of secondary signal output terminal, reaches the object of beam splitting through the second straight wave guide.
The material of described matrix is silicon dioxide, and the length of matrix is 2200 μ m ~ 2400 μ m, and width is 1800 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m; The material of described waveguide is silicon, and duct thickness is 20 μ m ~ 40 μ m.The first described straight wave guide and the length of the second straight wave guide are respectively 2200 μ m ~ 2400 μ m, 1900 μ m ~ 2000 μ m; The width of the first straight wave guide and the second straight wave guide is 50 μ m ~ 80 μ m.The width of described annular waveguide is 50 μ m ~ 80 μ m, and the exradius of annular waveguide is 300 μ m ~ 400 μ m.The described size of the half rhombus waveguide in a left side and the right half part of rhombus waveguide are measure-alike; The right size of half rhombus waveguide and the left-half of rhombus waveguide are measure-alike; The length of described rhombus waveguide is 600 μ m ~ 800 μ m, and width is 150 μ m ~ 200 μ m.The spacing distance that the first described straight wave guide and first is connected in series between annular waveguide is 10 μ m ~ 20 μ m; The spacing distance that the second straight wave guide and second is connected in series between annular waveguide is 10 μ m ~ 20 μ m.Spacing distance between described serial connection rhombus waveguide and the first serial connection annular waveguide equates with the spacing distance between serial connection rhombus waveguide and the second serial connection annular waveguide, is 5 μ m ~ 10 μ m.
That the terahertz polarization beam splitter of two serial connection circular ring structures of the present invention has is simple in structure, it is little to take up room, be easy to integrated, beam splitting efficiency advantages of higher, can meet well the demand in the field such as Terahertz medical imaging, Terahertz communication.
Brief description of the drawings
Fig. 1 is the terahertz polarization beam splitter schematic diagram of two serial connection circular ring structures;
Fig. 2 is the first serial connection annular waveguide composition structural representation;
Fig. 3 is serial connection rhombus waveguide composition structural representation;
Fig. 4 is the TE of the first signal output terminal output of the terahertz polarization beam splitter of two serial connection circular ring structures, the transmission curve of TM ripple;
Fig. 5 is the TM of the secondary signal output terminal output of the terahertz polarization beam splitter of two serial connection circular ring structures, the transmission curve of TE ripple.
Embodiment
As shown in Fig. 1 ~ 3, the terahertz polarization beam splitter of two serial connection circular ring structures comprises signal input part 1, first signal output terminal 2, secondary signal output terminal 3, matrix 4, the first straight wave guide 5, the second straight wave guide 6, the first serial connection annular waveguide 7, the second serial connection annular waveguide 8, serial connection rhombus waveguide 9; Matrix 4 is provided with the first straight wave guide 5, the second straight wave guide 6, the first serial connection annular waveguide 7, the second serial connection annular waveguide 8, serial connection rhombus waveguide 9, between the first straight wave guide 5 and the second straight wave guide 6, be provided with successively first and be connected in series annular waveguide 7, serial connection rhombus waveguide 9 and the second serial connection annular waveguide 8, the first serial connection annular waveguide 7 and the second serial connection annular waveguide 8 are formed by connecting in turn by three annular waveguides 10, and the waveguide 9 of serial connection rhombus is connected to form in turn by left half rhombus waveguide 11, two rhombus waveguides 12, right half rhombus waveguide 13; Terahertz wave signal is inputted from signal input part 1, TE ripple is directly exported from first signal output terminal 2 through the first straight wave guide 5, by the coupling between the first serial connection annular waveguide 7, serial connection rhombus waveguide 9, the second serial connection annular waveguide 8, TM ripple is exported from secondary signal output terminal 3 through the second straight wave guide, reaches the object of beam splitting.
The material of described matrix 4 is silicon dioxide, and the length of matrix 4 is 2200 μ m ~ 2400 μ m, and width is 1800 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m; The material of described waveguide is silicon, and duct thickness is 20 μ m ~ 40 μ m.The first described straight wave guide 5 and the length of the second straight wave guide 6 are respectively 2200 μ m ~ 2400 μ m, 1900 μ m ~ 2000 μ m; The width of the first straight wave guide 5 and the second straight wave guide 6 is 50 μ m ~ 80 μ m.The width of described annular waveguide 10 is 50 μ m ~ 80 μ m, and the exradius of annular waveguide 10 is 300 μ m ~ 400 μ m.The described size of the half rhombus waveguide 11 in a left side and the right half part of rhombus waveguide 12 are measure-alike; The right size of half rhombus waveguide 13 and the left-half of rhombus waveguide 12 are measure-alike; The length of described rhombus waveguide 12 is 600 μ m ~ 800 μ m, and width is 150 μ m ~ 200 μ m.The spacing distance that described the first straight wave guide 5 and first is connected in series between annular waveguide 7 is 10 μ m ~ 20 μ m; The spacing distance that the second straight wave guide 6 and second is connected in series between annular waveguide 8 is 10 μ m ~ 20 μ m.Spacing distance between described serial connection rhombus waveguide 9 and the first serial connection annular waveguide 7 equates with the spacing distance between serial connection rhombus waveguide 9 and the second serial connection annular waveguide 7, is 5 μ m ~ 10 μ m.
embodiment 1
The terahertz polarization beam splitter of two serial connection circular ring structures:
The material of matrix is silicon dioxide, and length is 2200 μ m, and width is 1800 μ m, and thickness is 400 μ m; The material of waveguide is silicon, and refractive index is 3.42, and duct thickness is 40 μ m.The length of the first straight wave guide and the second straight wave guide is respectively 2200 μ m, 2000 μ m; The width of the first straight wave guide and the second straight wave guide is 80 μ m.The width of annular waveguide is 80 μ m, and the exradius of annular waveguide is 300 μ m.The left size of half rhombus waveguide and the right half part of rhombus waveguide are measure-alike; The right size of half rhombus waveguide and the left-half of rhombus waveguide are measure-alike; The length of described rhombus waveguide is 600 μ m, and width is 200 μ m.The spacing distance that the first straight wave guide and first is connected in series between annular waveguide is 10 μ m; The spacing distance that the second straight wave guide and second is connected in series between annular waveguide is 10 μ m.Spacing distance between serial connection rhombus waveguide and the first serial connection annular waveguide equates with the spacing distance between serial connection rhombus waveguide and the second serial connection annular waveguide, is 10 μ m.The TE of the terahertz polarization beam splitter first signal output terminal output of two serial connection circular ring structures, the transmission curve of TM ripple are as shown in Figure 4, be within the scope of 0.10THz ~ 0.50THz in frequency, the minimum transfer rate of TE ripple is that the maximum transfer rate of 0.987, TM ripple is 0.023; The TM of the terahertz polarization beam splitter secondary signal output terminal output of two serial connection circular ring structures, the transmission curve of TE ripple are as shown in Figure 5, be within the scope of 0.10THz ~ 0.50THz in frequency, the minimum transfer rate of TE ripple is that the maximum transfer rate of 0.985, TM ripple is 0.025.This explanation TE ripple is directly exported from first signal output terminal; And by the coupling between the first serial connection annular waveguide, the waveguide of serial connection rhombus, the second serial connection annular waveguide, TM ripple from the output of secondary signal output terminal, has reached the object of beam splitting through the second straight wave guide, and beam splitting efficiency is high.
Claims (7)
1. a terahertz polarization beam splitter for two serial connection circular ring structures, is characterized in that comprising signal input part (1), first signal output terminal (2), secondary signal output terminal (3), matrix (4), the first straight wave guide (5), the second straight wave guide (6), the first serial connection annular waveguide (7), the second serial connection annular waveguide (8), serial connection rhombus waveguide (9), matrix (4) is provided with the first straight wave guide (5), the second straight wave guide (6), the first serial connection annular waveguide (7), the second serial connection annular waveguide (8), serial connection rhombus waveguide (9), between the first straight wave guide (5) and the second straight wave guide (6), be provided with successively first and be connected in series annular waveguide (7), serial connection rhombus waveguide (9) and the second serial connection annular waveguide (8), the first serial connection annular waveguide (7) and the second serial connection annular waveguide (8) are formed by connecting in turn by three annular waveguides (10), serial connection rhombus waveguide (9) is by left half rhombus waveguide (11), two rhombus waveguides (12), right half rhombus waveguide (13) connects to form in turn, terahertz wave signal is from being positioned at signal input part (1) input of one end of the first straight wave guide (5), TE ripple is through first signal output terminal (2) output of the other end of the first straight wave guide (5), by the coupling between the first serial connection annular waveguide (7), serial connection rhombus waveguide (9), the second serial connection annular waveguide (8), TM ripple from secondary signal output terminal (3) output, reaches the object of beam splitting through the second straight wave guide.
2. the terahertz polarization beam splitter of a kind of two serial connection circular ring structures according to claim 1, the material that it is characterized in that described matrix (4) is silicon dioxide, the length of matrix (4) is 2200 μ m ~ 2400 μ m, and width is 1800 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m; The material of described waveguide is silicon, and duct thickness is 20 μ m ~ 40 μ m.
3. the terahertz polarization beam splitter of a kind of two serial connection circular ring structures according to claim 1, is characterized in that described the first straight wave guide (5) and the length of the second straight wave guide (6) are respectively 2200 μ m ~ 2400 μ m, 1900 μ m ~ 2000 μ m; The width of the first straight wave guide (5) and the second straight wave guide (6) is 50 μ m ~ 80 μ m.
4. the terahertz polarization beam splitter of a kind of two serial connection circular ring structures according to claim 1, is characterized in that the width of described annular waveguide (10) is 50 μ m ~ 80 μ m, and the exradius of annular waveguide (10) is 300 μ m ~ 400 μ m.
5. the terahertz polarization beam splitter of a kind of two serial connection circular ring structures according to claim 1, is characterized in that the described size of the half rhombus waveguide in a left side (11) and the right half part of rhombus waveguide (12) are measure-alike; The size of right half rhombus waveguide (13) and the left-half of rhombus waveguide (12) are measure-alike; The length of described rhombus waveguide (12) is 600 μ m ~ 800 μ m, and width is 150 μ m ~ 200 μ m.
6. the terahertz polarization beam splitter of a kind of two serial connection circular ring structures according to claim 1, is characterized in that the spacing distance that described the first straight wave guide (5) and first is connected in series between annular waveguide (7) is 10 μ m ~ 20 μ m; The spacing distance that the second straight wave guide (6) and second is connected in series between annular waveguide (8) is 10 μ m ~ 20 μ m.
7. the terahertz polarization beam splitter of a kind of two serial connection circular ring structures according to claim 1, it is characterized in that the spacing distance between described serial connection rhombus waveguide (9) and the first serial connection annular waveguide (7) equates with the spacing distance between serial connection rhombus waveguide (9) and the second serial connection annular waveguide (8), is 5 μ m ~ 10 μ m.
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