CN102928920B - Double-right-angle corner waveguide-shaped terahertz wave polarization beam splitter - Google Patents
Double-right-angle corner waveguide-shaped terahertz wave polarization beam splitter Download PDFInfo
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- CN102928920B CN102928920B CN 201210449973 CN201210449973A CN102928920B CN 102928920 B CN102928920 B CN 102928920B CN 201210449973 CN201210449973 CN 201210449973 CN 201210449973 A CN201210449973 A CN 201210449973A CN 102928920 B CN102928920 B CN 102928920B
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Abstract
The invention discloses a double-right-angle corner waveguide-shaped terahertz wave polarization beam splitter. The double-right-angle corner waveguide-shaped terahertz wave polarization beam splitter comprises a terahertz wave input end, a first signal output end, a second signal output end, a basal body, a branch-shaped input waveguide, a first straight corner waveguide, a second straight corner waveguide, two cylindrical columns and two square frames, wherein the branch-shaped input waveguide, the first straight corner waveguide, the second straight corner waveguide, the two cylindrical columns and the two square frames are arranged on the basal body; terahertz waves are input from the terahertz wave input end; TE (transverse electric) waves are output from the first signal output end;and TM (transverse magnetic) waves are output from the second signal output end, so that the polarization beam splitting function is achieved. The double-right-angle corner waveguide-shaped terahertzwave polarization beam splitter has the advantages of simple structure, high beam splitting efficiency, small size, low cost, convenience in manufacture, easiness in integration and the like.
Description
Technical field
The present invention relates to beam splitter, relate in particular to a kind of pair of corner waveguide shape terahertz polarization beam splitter.
Background technology
Terahertz Technology is a kind of new and high technology that grows up late 1980s, and is quite concerned in the last few years, and it has broad application prospects in fields such as biomedicine, product detection, radio communications.Terahertz emission was familiar with by people in 19th century, the people such as Ao Sidun of U.S.'s Bell Laboratory are when the ultrafast semiconductor phenomenon of research, found gallium arsenide photoconduction detection effect, nineteen eighty-two, related results delivered at U.S. authority magazine " science ", cause the extensive concern of scientific circles, become the heat subject in 20 end of the centurys.But, owing to do not have stable radiation source and detector, and terahertz wave band is at the present specific position of electromagnetic wave, so that terahertz wave band becomes scientific circles " no-man's-land ".THz wave is in macroscopic classical theories to the zone of transition of Bcs Theory at frequency domain, be in electronics to the transitional region of photonics, THz wave has unique character, advantage such as its integrated microwave communication and optical communication, the bandwidth more much bigger than microwave communication can be obtained, the problem of increasingly serious band resource shortage can be effectively solved.At present, the THz wave science and technology has obtained the extensive concern of international academic community, and the research institution about THz wave emerges in multitude in the world, and has obtained a lot of achievements in research.The THz wave science and technology is described as 21 century affects one of ten large technology of human future.
The THz wave function element is the Focal point and difficult point in the THz wave scientific and technical research, existing THz wave function element complex structure, volume is larger and expensive, so miniaturization, the THz wave device is the key that THz wave is used cheaply.Terahertz polarization beam splitter is a kind of very important THz wave function element, and it can be applicable to the THz wave system, realizes the control to THz wave.At present lot of domestic and international scientific research institution all is devoted to the research of terahertz polarization beam splitter and makes some progress, but they often complex structure, cost is high, volume is large, be difficult to make.Therefore be necessary to design a kind of simple in structure, the terahertz polarization beam splitter that size is little, beam splitting efficient is high satisfies the needs that following THz wave technology is used.
Summary of the invention
The objective of the invention is in order to overcome prior art beam splitting rate lower, complex structure, the deficiency of actual fabrication process difficulty provides a kind of two corner waveguide shape terahertz polarization beam splitters of high beam splitting rate.
In order to achieve the above object, technical scheme of the present invention is as follows:
Two corner waveguide shape terahertz polarization beam splitters comprise THz wave input end, first signal output terminal, secondary signal output terminal, matrix, branch shape input waveguide, the first straight turning waveguide, the second straight turning waveguide, two annular posts, two square frames; Matrix is provided with branch shape input waveguide, the first straight turning waveguide, the second straight turning waveguide, two annular posts, two square frames; The branch shape input waveguide is symmetrical structure up and down, it is comprised of two corner waveguides that share a limit, be placed on the left side of matrix, the first straight turning waveguide, the second straight turning waveguide be the symmetrical right side that is placed on matrix up and down, be provided with two annular posts between branch shape input waveguide upside branch and the first straight turning waveguide, be provided with two square frames between branch shape input waveguide downside branch and the second straight turning waveguide; THz wave is from the input of THz wave input end, and the TE ripple is from the output of first signal output terminal, and the TM ripple obtains the function of polarization beam splitting from the output of secondary signal output terminal.
The material of described matrix is silicon dioxide, and length is 2560 μ m ~ 2600 μ m, and width is 1500 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m.The material of described branch shape input waveguide, the first straight turning waveguide, the second straight turning waveguide, two annular posts, two square frames is silicon, and thickness is 50 μ m ~ 100 μ m.The common edge length of described branch shape input waveguide is 200 μ m ~ 300 μ m, and the length of both sides branch is 500 μ m ~ 600 μ m up and down, and the circular arc exradius is 100 μ m ~ 150 μ m, and duct width is 50 μ m ~ 100 μ m.Distance between the described first straight turning waveguide and the second straight turning waveguide is 50 μ m ~ 100 μ m; The size of the first straight turning waveguide, the second straight turning waveguide is identical, and the circular arc exradius is 100 μ m ~ 150 μ m, and duct width is 50 μ m ~ 100 μ m; Vertical branch of the first straight turning waveguide and the length of transverse branch are 500 μ m ~ 600 μ m.Described two annular post spacing distances are 20 μ m ~ 30 μ m, and exradius is 350 μ m ~ 400 μ m, and interior radius of circle is 300 μ m ~ 350 μ m.Described two square frame spacing distances are 20 μ m ~ 30 μ m, and the outboard square-like length of side is 700 μ m ~ 750 μ m, and the inboard square length of side is 600 μ m ~ 750 μ m.
It is simple in structure that the of the present invention pair of corner waveguide shape terahertz polarization beam splitter has, and the beam splitting rate is high, and size is little, and cost is low, is convenient to make, be easy to the advantages such as integrated.
Description of drawings:
Fig. 1 is two corner waveguide shape terahertz polarization beam splitter perspective view;
Fig. 2 is two corner waveguide shape terahertz polarization beam splitter two-dimensional structure synoptic diagram;
Fig. 3 is TE ripple, the TM ripple transmission curve of first signal output terminal;
Fig. 4 is TM ripple, the TE ripple transmission curve of secondary signal output terminal.
Embodiment
Shown in Fig. 1 ~ 2, two corner waveguide shape terahertz polarization beam splitters comprise THz wave input end 1, first signal output terminal 2, secondary signal output terminal 3, matrix 4, branch shape input waveguide 5, the first straight turning waveguide 6, the second straight turning waveguide 7, two annular posts 8, two square frames 9; Matrix 4 is provided with branch shape input waveguide 5, the first straight turning waveguide 6, the second straight turning waveguide 7, two annular posts 8, two square frames 9; Branch shape input waveguide 5 is symmetrical structure up and down, it is comprised of two corner waveguides that share a limit, be placed on the left side of matrix 4, the first straight turning waveguide 6, the second straight turning waveguide be the symmetrical right side that is placed on matrix 4 about in the of 7, be provided with two annular posts 8 between branch shape input waveguide 5 upside branches and the first straight turning waveguide 6, be provided with two square frames 9 between branch shape input waveguide 5 downside branches and the second straight turning waveguide 7; THz wave is from 1 input of THz wave input end, and the TE ripple is from 2 outputs of first signal output terminal, and the TM ripple obtains the function of polarization beam splitting from 3 outputs of secondary signal output terminal.
The material of described matrix 4 is silicon dioxide, and length is 2560 μ m ~ 2600 μ m, and width is 1500 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m.The material of described branch shape input waveguide 5, the first straight turning waveguide 6, the second straight turning waveguide 7, two annular posts 8, two square frames 9 is silicon, and thickness is 50 μ m ~ 100 μ m.The common edge length of described branch shape input waveguide 5 is 200 μ m ~ 300 μ m, and the length of both sides branch is 500 μ m ~ 600 μ m up and down, and the circular arc exradius is 100 μ m ~ 150 μ m, and duct width is 50 μ m ~ 100 μ m.Distance between the described first straight turning waveguide 6 and the second straight turning waveguide 7 is 50 μ m ~ 100 μ m; The size of the first straight turning waveguide 6, the second straight turning waveguide 7 is identical, and the circular arc exradius is 100 μ m ~ 150 μ m, and duct width is 50 μ m ~ 100 μ m; Vertical branch of the first straight turning waveguide 6 and the length of transverse branch are 500 μ m ~ 600 μ m.Described two annular post 8 spacing distances are 20 μ m ~ 30 μ m, and exradius is 350 μ m ~ 400 μ m, and interior radius of circle is 300 μ m ~ 350 μ m.Described two square frame 9 spacing distances are 20 μ m ~ 30 μ m, and the outboard square-like length of side is 700 μ m ~ 750 μ m, and the inboard square length of side is 600 μ m ~ 750 μ m.
Embodiment 1
Two corner waveguide shape terahertz polarization beam splitters:
The material of matrix is silicon dioxide, and length is 2560 μ m, and width is 1500 μ m, and thickness is 300 μ m.The material of branch shape input waveguide, the first straight turning waveguide, the second straight turning waveguide, two annular posts, two square frames is silicon, and thickness is 100 μ m.The common edge length of branch shape input waveguide is 300 μ m, and the length of both sides branch is 500 μ m up and down, and the circular arc exradius is 150 μ m, and duct width is 50 μ m.Distance between the first straight turning waveguide and the second straight turning waveguide is 100 μ m; The size of the first straight turning waveguide, the second straight turning waveguide is identical, and the circular arc exradius is 150 μ m, and duct width is 50 μ m; Vertical branch of the first straight turning waveguide and the length of transverse branch are 500 μ m.Two annular post spacing distances are 20 μ m, and exradius is 350 μ m, and interior radius of circle is 300 μ m.Two square frame spacing distances are 20 μ m, and the outboard square-like length of side is 700 μ m, and the inboard square length of side is 600 μ m.The TE ripple of first signal output terminal, TM ripple transmission curve as shown in Figure 3, TE ripple minimum transfer rate is that 99.2%, TM ripple maximum transfer rate is 0.21%, this explanation TE ripple is exported from the first signal output terminal; The TM ripple of secondary signal output terminal, TE ripple transmission curve as shown in Figure 4, TM minimum transfer rate is that 99.1%, TE ripple maximum transfer rate is 0.23%, this explanation TM ripple is exported from the secondary signal output terminal.
Claims (7)
1. a two corner waveguide shape terahertz polarization beam splitter is characterized in that comprising THz wave input end (1), first signal output terminal (2), secondary signal output terminal (3), matrix (4), branch shape input waveguide (5), the first straight turning waveguide (6), the second straight turning waveguide (7), two annular posts (8), two square frames (9); Matrix (4) is provided with branch shape input waveguide (5), the first straight turning waveguide (6), the second straight turning waveguide (7), two annular posts (8), two square frames (9); Branch shape input waveguide (5) is symmetrical structure up and down, it is comprised of two corner waveguides that share a limit, be placed on the left side of matrix (4), the first straight turning waveguide (6), the second straight turning waveguide (7) up and down symmetry are placed on the right side of matrix (4), be provided with two annular posts (8) between branch shape input waveguide (5) upside branch and the first straight turning waveguide (6), be provided with two square frames (9) between branch shape input waveguide (5) downside branch and the second straight turning waveguide (7); THz wave is inputted from THz wave input end (1), the TE ripple is exported from first signal output terminal (2), the TM ripple obtains the function of polarization beam splitting from secondary signal output terminal (3) output, and the material of described two annular posts (8), two square frames (9) is silicon.
2. a kind of pair of corner waveguide shape terahertz polarization beam splitter according to claim 1, the material that it is characterized in that described matrix (4) is silicon dioxide, length is 2560 μ m ~ 2600 μ m, and width is 1500 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m.
3. a kind of pair of corner waveguide shape terahertz polarization beam splitter according to claim 1, the material that it is characterized in that described branch shape input waveguide (5), the first straight turning waveguide (6), the second straight turning waveguide (7) is silicon, and thickness is 50 μ m ~ 100 μ m.
4. a kind of pair of corner waveguide shape terahertz polarization beam splitter according to claim 1, the common edge length that it is characterized in that described branch shape input waveguide (5) is 200 μ m ~ 300 μ m, the length of both sides branch is 500 μ m ~ 600 μ m up and down, the circular arc exradius is 100 μ m ~ 150 μ m, and duct width is 50 μ m ~ 100 μ m.
5. a kind of pair of corner waveguide shape terahertz polarization beam splitter according to claim 1 is characterized in that the distance between the described first straight turning waveguide (6) and the second straight turning waveguide (7) is 50 μ m ~ 100 μ m; The size of the first straight turning waveguide (6), the second straight turning waveguide (7) is identical, and the circular arc exradius is 100 μ m ~ 150 μ m, and duct width is 50 μ m ~ 100 μ m; Vertical branch of the first straight turning waveguide (6) and the length of transverse branch are 500 μ m ~ 600 μ m.
6. a kind of pair of corner waveguide shape terahertz polarization beam splitter according to claim 1, it is characterized in that described two annular posts (8) spacing distance is 20 μ m ~ 30 μ m, exradius is 350 μ m ~ 400 μ m, and interior radius of circle is 300 μ m ~ 350 μ m.
7. a kind of pair of corner waveguide shape terahertz polarization beam splitter according to claim 1, it is characterized in that described two square frames (9) spacing distance is 20 μ m ~ 30 μ m, the outboard square-like length of side is 700 μ m ~ 750 μ m, and the inboard square length of side is 600 μ m ~ 750 μ m.
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CN102156327A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Terahertz wave polarizing beam splitter with dual resonance cavity structure |
CN102200613A (en) * | 2011-05-24 | 2011-09-28 | 北京邮电大学 | Method for realizing integration of polarizing beam splitter and slow light device by using bend waveguide |
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CN102156327A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Terahertz wave polarizing beam splitter with dual resonance cavity structure |
CN102200613A (en) * | 2011-05-24 | 2011-09-28 | 北京邮电大学 | Method for realizing integration of polarizing beam splitter and slow light device by using bend waveguide |
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