CN102928916B - Symmetrical structure terahertz wave polarization beam splitter - Google Patents
Symmetrical structure terahertz wave polarization beam splitter Download PDFInfo
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- CN102928916B CN102928916B CN201210449774.3A CN201210449774A CN102928916B CN 102928916 B CN102928916 B CN 102928916B CN 201210449774 A CN201210449774 A CN 201210449774A CN 102928916 B CN102928916 B CN 102928916B
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Abstract
The invention discloses a symmetrical structure terahertz wave polarization beam splitter which comprises a signal input end, a first signal output end, a second signal output end, an upper end groove-shaped waveguide, a polarization beam splitting waveguide area, a lower end groove-shaped waveguide and a base body. The central bottom end of a groove of the upper end groove-shaped waveguide is connected with the central top end of the polarization beam splitting waveguide area, and the central bottom end of the polarization beam splitting waveguide area is connected with the central top end of a groove of the lower end groove-shaped waveguide. The polarization beam splitting waveguide area comprises a ring waveguide, a symmetrical rectangular ring waveguide, a symmetrical ring waveguide and a symmetrical column waveguide. Signals can be input from the signal input end, and beam splitting wave is respectively output from the first signal output end and the second signal output end. The symmetrical structure terahertz wave polarization beam splitter has the advantages of being simple in structure, high in beam splitting rate, small in size, low in cost, convenient to manufacture and the like and meeting application requirement of fields of terahertz wave communication and the like.
Description
Technical field
The present invention relates to beam splitter, relate in particular to a kind of terahertz polarization beam splitter of symmetrical structure.
Background technology
Terahertz (Terahertz, be called for short THz) ripple refers to the electromagnetic wave of frequency in 0.1THz～10THz scope, because Terahertz is in the specific position of electromagnetic wave spectrum, makes it have a lot of advantageous characteristic.In recent years, various countries, the whole world researcher given very big concern to Terahertz Technology, makes generation, detection and the application technology etc. of THz wave all obtain very much progress, formed an emerging interdisciplinary field---Terahertz science and technology.Because Terahertz can provide the wireless transmission rate up to 10Gb/s, Terahertz communication becomes one of key areas of Terahertz Technology application.The THz wave communication system be unable to do without the performance guarantee of various THz wave function elements.Although the research for the THz wave function element launches gradually both at home and abroad, but the THz wave function element is as the Focal point and difficult point in the application of THz wave science and technology, compare the fast development of THz wave generation and pick-up unit and THz wave transmission waveguide, still need to drop into a large amount of man power and materials and carry out deep exploration and research.
Terahertz polarization beam splitter is a kind of very important THz wave device, for controlling the THz wave transmission of THz wave system.Lot of domestic and international scientific research institution all is devoted to the research of this respect at present, and makes some progress.Existing terahertz polarization beam splitter often complex structure, volume is larger and expensive, miniaturization, the THz wave device is the key of THz wave technology application cheaply, therefore be necessary to design a kind of simple in structure, the high terahertz polarization beam splitter of beam splitting efficiency is to meet following THz wave technology application needs.
Summary of the invention
The objective of the invention is in order to overcome prior art polarization beam splitting rate lower, complex structure, the actual fabrication difficulty, the deficiency that cost is high, provide a kind of terahertz polarization beam splitter of symmetrical structure.
In order to achieve the above object, technical scheme of the present invention is as follows:
The terahertz polarization beam splitter of symmetrical structure comprises signal input part, first signal output terminal, secondary signal output terminal, upper end groove-shaped waveguide, polarization beam splitting waveguide region, lower end groove-shaped waveguide, matrix, matrix is provided with the upper end groove-shaped waveguide, the polarization beam splitting waveguide region, the lower end groove-shaped waveguide, bottom, groove-shaped waveguide groove center, upper end is connected with the top, center of polarization beam splitting waveguide region, the bottom, center of polarization beam splitting waveguide region is connected with the top, groove center of lower end groove-shaped waveguide, the polarization beam splitting waveguide region comprises the annulus waveguide, two straight-flanked ring waveguides, two annulus waveguides and two rectangular column waveguides, the outer left-right symmetric of annulus waveguide is provided with the straight-flanked ring waveguide, the straight-flanked ring waveguide is connected with the outer shroud of annulus waveguide, in the annulus waveguide, left-right symmetric is provided with the rectangular column waveguide in turn, the annulus waveguide, the annulus waveguide is connected with the interior ring of annulus waveguide by the rectangular column waveguide, terahertz wave signal is inputted from signal input part, and the beam splitting wavelength-division is not from the first signal output terminal, and the secondary signal output terminal is exported.
The material of described matrix is silicon dioxide, and the length of matrix is 2000 μ m ~ 2200 μ m, and width is 1800 μ m ~ 2000 μ m, and thickness is 200 μ m ~ 300 μ m; The material of described waveguide is silicon, and thickness is 40 μ m ~ 50 μ m.Described upper end groove-shaped waveguide is comprised of two horizontal waveguide and a ridge waveguide, the length of ridge waveguide is 900 μ m ~ 1000 μ m, width is 40 μ m ~ 80 μ m, the degree of depth of ridge waveguide is 80 μ m ~ 100 μ m, article two, the length of horizontal waveguide is 400 μ m ~ 500 μ m, and width is 40 μ m ~ 80 μ m.Described lower end groove-shaped waveguide is comprised of left side horizontal waveguide, right side horizontal waveguide and ridge waveguide, the length of ridge waveguide is 900 μ m ~ 1000 μ m, width is 40 μ m ~ 80 μ m, the degree of depth of ridge waveguide is 80 μ m ~ 100 μ m, the length of left side horizontal waveguide is 200 μ m ~ 300 μ m, and width is 40 μ m ~ 80 μ m; The length of right side horizontal waveguide is 400 μ m ~ 500 μ m, and width is 40 μ m ~ 80 μ m.The duct width of described annulus waveguide is 40 μ m ~ 80 μ m, and the radius of outmost turns is 500 μ m ~ 600 μ m.The outer ring length of described straight-flanked ring waveguide is 150 μ m ~ 300 μ m, and outer ring width is 400 μ m ~ 600 μ m, and the width of waveguide is 40 μ m ~ 80 μ m.The outer shroud radius of described annulus waveguide is 200 μ m ~ 250 μ m, and duct width is 40 μ m ~ 80 μ m.The length of described rectangular column waveguide is 80 μ m ~ 100 μ m, and width is 50 μ m ~ 60 μ m.
The terahertz polarization beam splitter of symmetrical structure of the present invention, have simple in structurely, and the beam splitting rate is high, and size is little, and cost is low, is convenient to the advantages such as making, meets the requirement of the field application such as THz wave communication.
The accompanying drawing explanation:
Fig. 1 is the perspective view of the terahertz polarization beam splitter of symmetrical structure;
Fig. 1 is the planar structure schematic diagram of the terahertz polarization beam splitter of symmetrical structure;
Fig. 3 is TE, the TM ripple output power curve of terahertz polarization beam splitter first signal output terminal;
Fig. 4 is TM, the TE ripple output power curve of terahertz polarization beam splitter secondary signal output terminal.
Embodiment
As shown in Figure 1 and 2, the terahertz polarization beam splitter of symmetrical structure comprises signal input part 1, first signal output terminal 2, secondary signal output terminal 3, upper end groove-shaped waveguide 4, polarization beam splitting waveguide region 5, lower end groove-shaped waveguide 6, matrix 7, matrix 7 is provided with upper end groove-shaped waveguide 4, polarization beam splitting waveguide region 5, lower end groove-shaped waveguide 6, groove-shaped waveguide 4 bottoms, groove center in upper end are connected with the top, center of polarization beam splitting waveguide region 5, the bottom, center of polarization beam splitting waveguide region 5 is connected with the top, groove center of lower end groove-shaped waveguide 6, polarization beam splitting waveguide region 5 comprises annulus waveguide 8, two straight-flanked ring waveguides 9, two annulus waveguides 10 and two rectangular column waveguides 11, the outer left-right symmetric of annulus waveguide 8 is provided with straight-flanked ring waveguide 9, straight-flanked ring waveguide 9 is connected with the outer shroud of annulus waveguide 8, the interior left-right symmetric of annulus waveguide 8 is provided with rectangular column waveguide 11 in turn, annulus waveguide 10, annulus waveguide 10 is connected with the interior ring of annulus waveguide 8 by rectangular column waveguide 11, terahertz wave signal is from signal input part 1 input, and the beam splitting wavelength-division is not from first signal output terminal 2, and secondary signal output terminal 3 is exported.
The material of described matrix 7 is silicon dioxide, and the length of matrix 7 is 2000 μ m ~ 2200 μ m, and width is 1800 μ m ~ 2000 μ m, and thickness is 200 μ m ~ 300 μ m; The material of described waveguide is silicon, and thickness is 40 μ m ~ 50 μ m.Described upper end groove-shaped waveguide 4 is comprised of two horizontal waveguide and a ridge waveguide, the length of ridge waveguide is 900 μ m ~ 1000 μ m, width is 40 μ m ~ 80 μ m, the degree of depth of ridge waveguide is 80 μ m ~ 100 μ m, article two, the length of horizontal waveguide is 400 μ m ~ 500 μ m, and width is 40 μ m ~ 80 μ m.Described lower end groove-shaped waveguide 6 is comprised of left side horizontal waveguide, right side horizontal waveguide and ridge waveguide, the length of ridge waveguide is 900 μ m ~ 1000 μ m, width is 40 μ m ~ 80 μ m, the degree of depth of ridge waveguide is 80 μ m ~ 100 μ m, the length of left side horizontal waveguide is 200 μ m ~ 300 μ m, and width is 40 μ m ~ 80 μ m; The length of right side horizontal waveguide is 400 μ m ~ 500 μ m, and width is 40 μ m ~ 80 μ m.The duct width of described annulus waveguide 8 is 40 μ m ~ 80 μ m, and the radius of outmost turns is 500 μ m ~ 600 μ m.The outer ring length of described straight-flanked ring waveguide 9 is 150 μ m ~ 300 μ m, and outer ring width is 400 μ m ~ 600 μ m, and the width of waveguide is 40 μ m ~ 80 μ m.The outer shroud radius of described annulus waveguide 10 is 200 μ m ~ 250 μ m, and duct width is 40 μ m ~ 80 μ m.The length of described rectangular column waveguide 11 is 80 μ m ~ 100 μ m, and width is 50 μ m ~ 60 μ m.
The material of matrix is silicon dioxide, and length is 2000 μ m, and wide is 1800 μ m, and thick is 200 μ m; The material of waveguide is silicon, and thickness is 40 μ m.The upper end groove-shaped waveguide is comprised of two horizontal waveguide and a ridge waveguide, the ridge waveguide line length be 1000 μ m, width is 80 μ m, the degree of depth of ridge waveguide is 80 μ m, the length of two horizontal waveguide is 500 μ m, width is 80 μ m.The lower end groove-shaped waveguide is comprised of left side horizontal waveguide, right side horizontal waveguide and ridge waveguide, and the length of ridge waveguide is 1000 μ m, and width is 80 μ m, and the degree of depth of ridge waveguide is 80 μ m, and the length of left side horizontal waveguide is 300 μ m, and width is 80 μ m; The length of right side horizontal waveguide is 500 μ m, and width is 80 μ m.The duct width of annulus waveguide is 80 μ m, and the radius of outmost turns is 600 μ m.The outer ring length of straight-flanked ring waveguide is 300 μ m, and outer ring width is 600 μ m, and the width of waveguide is 80 μ m.The outer shroud radius of annulus waveguide is 250 μ m, and duct width is 80 μ m.The length of rectangular column waveguide is 100 μ m, and width is 60 μ m.As shown in Figure 3, in 0.8 ~ 1.0THz frequency range, TE ripple minimum output power is that 99.79%, TM ripple peak power output is 0.13% for the TE ripple of the first signal output terminal of the terahertz polarization beam splitter of symmetrical structure, TM ripple output power curve; As shown in Figure 4, in 0.8 ~ 1.0THz frequency range, TM ripple minimum output power is that 99.36%, TE ripple peak power output is 0.17% for the TM ripple of the secondary signal output terminal of the terahertz polarization beam splitter of symmetrical structure, TE ripple output power curve.
Claims (8)
1. the terahertz polarization beam splitter of a symmetrical structure, is characterized in that comprising signal input part (1), first signal output terminal (2), secondary signal output terminal (3), upper end groove-shaped waveguide (4), polarization beam splitting waveguide region (5), lower end groove-shaped waveguide (6), matrix (7), matrix (7) is provided with upper end groove-shaped waveguide (4), polarization beam splitting waveguide region (5), lower end groove-shaped waveguide (6), bottom, upper end groove-shaped waveguide (4) groove center is connected with the top, center of polarization beam splitting waveguide region (5), the bottom, center of polarization beam splitting waveguide region (5) is connected with the top, groove center of lower end groove-shaped waveguide (6), polarization beam splitting waveguide region (5) comprises annulus waveguide (8), two straight-flanked ring waveguides (9), two small circle ring waveguides (10) and two rectangular column waveguides (11), the outer left-right symmetric of annulus waveguide (8) is provided with straight-flanked ring waveguide (9), straight-flanked ring waveguide (9) is connected with the outer shroud of annulus waveguide (8), the interior left-right symmetric of annulus waveguide (8) is provided with rectangular column waveguide (11) in turn, small circle ring waveguide (10), small circle ring waveguide (10) is connected with the interior ring of annulus waveguide (8) by rectangular column waveguide (11), signal input part (1) is positioned at the left position of upper end groove-shaped waveguide (4), first signal output terminal (2) is positioned at the right end position of upper end groove-shaped waveguide (4), secondary signal output terminal (3) is positioned at the right end position of lower end groove-shaped waveguide (6), terahertz wave signal is inputted from signal input part (1), the beam splitting wavelength-division is not from first signal output terminal (2), and secondary signal output terminal (3) is exported.
2. the terahertz polarization beam splitter of a kind of symmetrical structure according to claim 1, the material that it is characterized in that described matrix (7) is silicon dioxide, the length of matrix (7) is 2000 μ m ~ 2200 μ m, and width is 1800 μ m ~ 2000 μ m, and thickness is 200 μ m ~ 300 μ m; The material of described waveguide is silicon, and thickness is 40 μ m ~ 50 μ m.
3. the terahertz polarization beam splitter of a kind of symmetrical structure according to claim 1, it is characterized in that described upper end groove-shaped waveguide (4) is comprised of two horizontal waveguide and a ridge waveguide, the length of ridge waveguide is 900 μ m ~ 1000 μ m, width is 40 μ m ~ 80 μ m, the degree of depth of ridge waveguide is 80 μ m ~ 100 μ m, article two, the length of horizontal waveguide is 400 μ m ~ 500 μ m, and width is 40 μ m ~ 80 μ m.
4. the terahertz polarization beam splitter of a kind of symmetrical structure according to claim 1, it is characterized in that described lower end groove-shaped waveguide (6) is comprised of left side horizontal waveguide, right side horizontal waveguide and ridge waveguide, the length of ridge waveguide is 900 μ m ~ 1000 μ m, width is 40 μ m ~ 80 μ m, the degree of depth of ridge waveguide is 80 μ m ~ 100 μ m, the length of left side horizontal waveguide is 200 μ m ~ 300 μ m, and width is 40 μ m ~ 80 μ m; The length of right side horizontal waveguide is 400 μ m ~ 500 μ m, and width is 40 μ m ~ 80 μ m.
5. the terahertz polarization beam splitter of a kind of symmetrical structure according to claim 1, the duct width that it is characterized in that described annulus waveguide (8) is 40 μ m ~ 80 μ m, the radius of outmost turns is 500 μ m ~ 600 μ m.
6. the terahertz polarization beam splitter of a kind of symmetrical structure according to claim 1, the outer ring length that it is characterized in that described straight-flanked ring waveguide (9) is 150 μ m ~ 300 μ m, outer ring width is 400 μ m ~ 600 μ m, and the width of waveguide is 40 μ m ~ 80 μ m.
7. the terahertz polarization beam splitter of a kind of symmetrical structure according to claim 1, the outer shroud radius that it is characterized in that described small circle ring waveguide (10) is 200 μ m ~ 250 μ m, duct width is 40 μ m ~ 80 μ m.
8. the terahertz polarization beam splitter of a kind of symmetrical structure according to claim 1, the length that it is characterized in that described rectangular column waveguide (11) is 80 μ m ~ 100 μ m, width is 50 μ m ~ 60 μ m.
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| CN101630040B (en) * | 2009-08-13 | 2011-08-24 | 中国计量学院 | Method for adjusting birefringence coefficient of high double-refraction elliptical porous terahertz waveguide |
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