CN102928928B - Terahertz wave polarization beam splitter of spiral waveguide coil structure - Google Patents
Terahertz wave polarization beam splitter of spiral waveguide coil structure Download PDFInfo
- Publication number
- CN102928928B CN102928928B CN 201210449769 CN201210449769A CN102928928B CN 102928928 B CN102928928 B CN 102928928B CN 201210449769 CN201210449769 CN 201210449769 CN 201210449769 A CN201210449769 A CN 201210449769A CN 102928928 B CN102928928 B CN 102928928B
- Authority
- CN
- China
- Prior art keywords
- waveguide
- shape
- beam splitter
- coil
- polarization beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a terahertz wave polarization beam splitter of a spiral waveguide coil structure. The terahertz wave polarization beam splitter of the spiral waveguide coil structure comprises a signal input end, a first signal output end, a second signal output end, a reversed Omega-shaped input waveguide, a vertical Omega-shaped output waveguide, a Tai ji-shaped waveguide zone and a horizontal reversed L-shaped waveguide coil. The Tai ji-shaped waveguide zone is composed of a spiral waveguide coil which spirals out from the center. The exit end of the Tai ji-shaped waveguide zone is connected with the horizontal reversed L-shaped waveguide coil. The horizontal reversed L-shaped waveguide coil is in coupling connection with a dent of the reversed Omega-shaped input waveguide. And the exit end of the Tai ji-shaped waveguide zone is in coupling connection with the vertical Omega-shaped output waveguide. A signal is input from the signal input end and split waves are respectively output from the first signal output end and the second signal output end. The terahertz wave polarization beam splitter of the spiral waveguide coil structure has the advantages of being simple in structure, high in beam splitting rate, small in size, low in cost, convenient to manufacture and the like and meeting requirements for application in fields such as terahertz telecommunication.
Description
Technical field
The present invention relates to beam splitter, relate in particular to a kind of terahertz polarization beam splitter of helicon wave loop structure.
Background technology
After hertz in 1888 is found electromagnetic existence, through the developmental research of centuries, known to electromagnetic frequency spectrum non-constant width, be short to gamma-rays, grow to radiowave.But a blank in the electromagnetic wave spectrum scope has all been ignored in people's research always, i.e. Terahertz, its frequency range (1THz=10 between 0.1 ~ 10THz
12hz), wavelength coverage is 30
between ~ 3mm, this wave band, between microwave and infrared radiation, is the fringe region of electromagnetics and optical research.At the beginning of in early days for the research of terahertz emission, can tracing back to last century, before the eighties in 20th century, scarcity due to the electromagnetic production method of Terahertz frequency range and the approach of detection, cause the electromagnetic wave research and development of this frequency range very slow, scientist also limits to the understanding of this wave band properties of electromagnetic radiation very much.And in recent decades, along with developing rapidly of ultrafast photoelectron technology, for the generation of terahertz pulse provides stable excitation source, along with the generation of terahertz emission, its application has also obtained developing rapidly.Because THz wave is in the specific position of electromagnetic wave spectrum, it has many advantages.For example, THz wave has the advantages such as frequency range is wide, energy is low, transmittance is strong, makes it in fields such as terahertz imaging, safety detection, terahertz time-domain spectroscopic technology, Terahertz communications, important application prospect be arranged.The whole world has given great concern to THz wave, and it is a very important intersection Disciplinary Frontiers that this research field of Terahertz science and technology is known as by international scientific circle.
Terahertz polarization beam splitter is a kind of very important THz wave device, for controlling the THz wave transmission of THz wave system.Terahertz polarization beam splitter research is to promoting the THz wave system applies that indispensable significance is arranged.Lot of domestic and international scientific research institution all is devoted to the research of this respect and makes some progress at present, but existing terahertz polarization beam splitter often complex structure, volume is larger and expensive, miniaturization, the THz wave device is the key of THz wave technology application cheaply, therefore be necessary to design a kind of simple in structure, the high terahertz polarization beam splitter of beam splitting efficiency is to meet following THz wave technology application needs.
Summary of the invention
The objective of the invention is in order to overcome prior art polarization beam splitting rate lower, complex structure, the actual fabrication difficulty, the deficiency that cost is high, provide a kind of terahertz polarization beam splitter of helicon wave loop structure.
In order to achieve the above object, technical scheme of the present invention is as follows:
The terahertz polarization beam splitter of helicon wave loop structure comprises signal input part, first signal output terminal, secondary signal output terminal, is inverted Ω shape input waveguide, and vertically Ω shape output waveguide, Tai Ji shape waveguide region, level are inverted L shaped waveguide coil; The helicon wave loop that Tai Ji shape waveguide region Shi Youcong center lays out forms, the endpiece of Tai Ji shape waveguide region is inverted L shaped waveguide coil with level and is connected, level is inverted L shaped waveguide coil and is of coupled connections with the recess of being inverted Ω shape input waveguide, the endpiece of Tai Ji shape waveguide region is of coupled connections with the recess of vertical Ω shape output waveguide, signal is inputted from signal input part, the beam splitting wavelength-division is not from the first signal output terminal, and the secondary signal output terminal is exported.
The material of described waveguide is silicon, and the thickness of waveguide is 20 μ m ~ 30 μ m.Described inversion Ω shape input waveguide is comprised of two of left and right horizontal waveguide and a ridge waveguide, the length of left side horizontal waveguide is 200 μ m ~ 300 μ m, width is 30 μ m ~ 50 μ m, and the length of right side horizontal waveguide is 100 μ m ~ 200 μ m, and width is 30 μ m ~ 50 μ m; The length of ridge waveguide is 100 μ m ~ 200 μ m, and width is 30 μ m ~ 50 μ m, and the degree of depth of ridge waveguide is 20 μ m ~ 30 μ m.Described vertical Ω shape output waveguide is comprised of upper and lower two vertical waveguides and a ridge waveguide, the length of the vertical waveguide of upside is 100 μ m ~ 200 μ m, width is 30 μ m ~ 50 μ m, and the length of the vertical waveguide of downside is 200 μ m ~ 300 μ m, and width is 30 μ m ~ 50 μ m; The length of ridge waveguide is 200 μ m ~ 300 μ m, and width is 30 μ m ~ 50 μ m, and the degree of depth of ridge waveguide is 20 μ m ~ 30 μ m.The wide of the helicon wave loop of described Tai Ji shape waveguide region is 30 μ m ~ 50 μ m, and the spacing between waveguide coil is 100 μ m ~ 150 μ m, and the radius of outmost turns is 1200 μ m ~ 1500 μ m.The length that described level is inverted L shaped waveguide coil is 1600 μ m ~ 2000 μ m, and width is 800 μ m ~ 1200 μ m, and the width of waveguide coil is 30 μ m ~ 50 μ m, and the spacing between waveguide coil is 200 μ m ~ 300 μ m.
The terahertz polarization beam splitter of helicon wave loop structure of the present invention, have simple in structurely, and the beam splitting rate is high, and size is little, and cost is low, is convenient to the advantages such as making, meets the requirement of the field application such as THz wave communication.
The accompanying drawing explanation:
Fig. 1 is the structural representation of the terahertz polarization beam splitter of helicon wave loop structure;
Fig. 2 is TE, the TM ripple transmittance graph of terahertz polarization beam splitter first signal output terminal;
Fig. 3 is TM, the TE ripple transmittance graph of terahertz polarization beam splitter secondary signal output terminal.
Embodiment
As shown in Figure 1, the terahertz polarization beam splitter of helicon wave loop structure comprises signal input part 1, first signal output terminal 2, secondary signal output terminal 3, is inverted Ω shape input waveguide 4, and vertically Ω shape output waveguide 5, Tai Ji shape waveguide region 6, level are inverted L shaped waveguide coil 7; The helicon wave loop that Tai Ji shape waveguide region 6 Shi Youcong centers lay out forms, the endpiece of Tai Ji shape waveguide region 6 is inverted L shaped waveguide coil 7 with level and is connected, level is inverted L shaped waveguide coil 7 and is of coupled connections with the recess of being inverted Ω shape input waveguide 4, the endpiece of Tai Ji shape waveguide region 6 is of coupled connections with the recess of vertical Ω shape output waveguide 5, signal is from signal input part 1 input, the beam splitting wavelength-division is not from first signal output terminal 2, and secondary signal output terminal 3 is exported.
The material of described waveguide is silicon, and the thickness of waveguide is 20 μ m ~ 30 μ m.Described inversion Ω shape input waveguide 4 is comprised of two of left and right horizontal waveguide and a ridge waveguide, the length of left side horizontal waveguide is 200 μ m ~ 300 μ m, width is 30 μ m ~ 50 μ m, and the length of right side horizontal waveguide is 100 μ m ~ 200 μ m, and width is 30 μ m ~ 50 μ m; The length of ridge waveguide is 100 μ m ~ 200 μ m, and width is 30 μ m ~ 50 μ m, and the degree of depth of ridge waveguide is 20 μ m ~ 30 μ m.Described vertical Ω shape output waveguide 5 is comprised of upper and lower two vertical waveguides and a ridge waveguide, the length of the vertical waveguide of upside is 100 μ m ~ 200 μ m, width is 30 μ m ~ 50 μ m, and the length of the vertical waveguide of downside is 200 μ m ~ 300 μ m, and width is 30 μ m ~ 50 μ m; The length of ridge waveguide is 200 μ m ~ 300 μ m, and width is 30 μ m ~ 50 μ m, and the degree of depth of ridge waveguide is 20 μ m ~ 30 μ m.The wide of the helicon wave loop of described Tai Ji shape waveguide region 6 is 30 μ m ~ 50 μ m, and the spacing between waveguide coil is 100 μ m ~ 150 μ m, and the radius of outmost turns is 1200 μ m ~ 1500 μ m.The length that described level is inverted L shaped waveguide coil 7 is 1600 μ m ~ 2000 μ m, and width is 800 μ m ~ 1200 μ m, and the width of waveguide coil is 30 μ m ~ 50 μ m, and the spacing between waveguide coil is 200 μ m ~ 300 μ m.
embodiment 1
The material of waveguide is silicon, and the thickness of waveguide is 30 μ m.Be inverted Ω shape input waveguide and be comprised of two of left and right horizontal waveguide and a ridge waveguide, the length of left side horizontal waveguide is 300 μ m, and width is 50 μ m, and the length of right side horizontal waveguide is 200 μ m, and width is 50 μ m; The length of ridge waveguide is 200 μ m, and width is 50 μ m, and the degree of depth of ridge waveguide is 30 μ m.Vertically Ω shape output waveguide is comprised of upper and lower two vertical waveguides and a ridge waveguide, and the length of the vertical waveguide of upside is 200 μ m, and width is 50 μ m, and the length of the vertical waveguide of downside is 300 μ m, and width is 50 μ m; The length of ridge waveguide is 300 μ m, and width is 50 μ m, and the degree of depth of ridge waveguide is 30 μ m.The wide of the helicon wave loop of Tai Ji shape waveguide region is 50 μ m, and the spacing between waveguide coil is 100 μ m, and the radius of outmost turns is 1200 μ m.The length that level is inverted L shaped waveguide coil is 2000 μ m, and width is 1200 μ m, and the width of waveguide coil is 50 μ m, and the spacing between waveguide coil is 200 μ m.The TE ripple of the first signal output terminal of the terahertz polarization beam splitter of helicon wave loop structure, TM ripple transmittance graph as shown in Figure 2, are that 0.992, TM ripple maximum transmission rate is 0.013 in 0.60 ~ 1.15THz frequency range TE ripple minimum transmittance.The TM ripple of the secondary signal output terminal of the terahertz polarization beam splitter of helicon wave loop structure, TE ripple transmittance graph as shown in Figure 3, are that 0.989, TE ripple maximum transmission rate is 0.012 in 0.60 ~ 1.15THz frequency range TM ripple minimum transmittance.
Claims (6)
1. the terahertz polarization beam splitter of a helicon wave loop structure, comprise signal input part (1), first signal output terminal (2), secondary signal output terminal (3), characterized by further comprising and be inverted Ω shape input waveguide (4), vertically Ω shape output waveguide (5), Tai Ji shape waveguide region (6), level are inverted L shaped waveguide coil (7); The helicon wave loop that Tai Ji shape waveguide region (6) Shi Youcong center lays out forms, the endpiece of Tai Ji shape waveguide region (6) is inverted L shaped waveguide coil (7) with level and is connected, level is inverted L shaped waveguide coil (7) and is of coupled connections with the recess of being inverted Ω shape input waveguide (4), the endpiece of Tai Ji shape waveguide region (6) is of coupled connections with the recess of vertical Ω shape output waveguide (5), signal is inputted from signal input part (1), the beam splitting wavelength-division is not from first signal output terminal (2), and secondary signal output terminal (3) is exported.
2. the terahertz polarization beam splitter of a kind of helicon wave loop structure according to claim 1, the material that it is characterized in that described inversion Ω shape input waveguide (4) and vertical Ω shape output waveguide (5) is silicon, and the thickness of waveguide is 20 μ m ~ 30 μ m.
3. the terahertz polarization beam splitter of a kind of helicon wave loop structure according to claim 1, it is characterized in that described inversion Ω shape input waveguide (4) is comprised of two of left and right horizontal waveguide and a ridge waveguide, the length of left side horizontal waveguide is 200 μ m ~ 300 μ m, width is 30 μ m ~ 50 μ m, the length of right side horizontal waveguide is 100 μ m ~ 200 μ m, and width is 30 μ m ~ 50 μ m; The length of ridge waveguide is 100 μ m ~ 200 μ m, and width is 30 μ m ~ 50 μ m, and the degree of depth of ridge waveguide is 20 μ m ~ 30 μ m.
4. the terahertz polarization beam splitter of a kind of helicon wave loop structure according to claim 1, it is characterized in that described vertical Ω shape output waveguide (5) is comprised of upper and lower two vertical waveguides and a ridge waveguide, the length of the vertical waveguide of upside is 100 μ m ~ 200 μ m, width is 30 μ m ~ 50 μ m, the length of the vertical waveguide of downside is 200 μ m ~ 300 μ m, and width is 30 μ m ~ 50 μ m; The length of ridge waveguide is 200 μ m ~ 300 μ m, and width is 30 μ m ~ 50 μ m, and the degree of depth of ridge waveguide is 20 μ m ~ 30 μ m.
5. the terahertz polarization beam splitter of a kind of helicon wave loop structure according to claim 1, the wide of helicon wave loop that it is characterized in that described Tai Ji shape waveguide region (6) is 30 μ m ~ 50 μ m, spacing between waveguide coil is 100 μ m ~ 150 μ m, and the radius of outmost turns is 1200 μ m ~ 1500 μ m.
6. the terahertz polarization beam splitter of a kind of helicon wave loop structure according to claim 1, it is characterized in that it is 1600 μ m ~ 2000 μ m that described level is inverted the length of L shaped waveguide coil (7), width is 800 μ m ~ 1200 μ m, the width of waveguide coil is 30 μ m ~ 50 μ m, and the spacing between waveguide coil is 200 μ m ~ 300 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201210449769 CN102928928B (en) | 2012-11-12 | 2012-11-12 | Terahertz wave polarization beam splitter of spiral waveguide coil structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201210449769 CN102928928B (en) | 2012-11-12 | 2012-11-12 | Terahertz wave polarization beam splitter of spiral waveguide coil structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102928928A CN102928928A (en) | 2013-02-13 |
| CN102928928B true CN102928928B (en) | 2013-12-25 |
Family
ID=47643766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201210449769 Expired - Fee Related CN102928928B (en) | 2012-11-12 | 2012-11-12 | Terahertz wave polarization beam splitter of spiral waveguide coil structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102928928B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050058386A1 (en) * | 2003-09-15 | 2005-03-17 | Little Brent Everett | Integrated optics polarization beam splitter using form birefringence |
| JP2006184617A (en) * | 2004-12-28 | 2006-07-13 | Kyoto Univ | Two-dimensional photonic crystal and optical device using the same |
| CN102156327A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Terahertz wave polarizing beam splitter with dual resonance cavity structure |
-
2012
- 2012-11-12 CN CN 201210449769 patent/CN102928928B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050058386A1 (en) * | 2003-09-15 | 2005-03-17 | Little Brent Everett | Integrated optics polarization beam splitter using form birefringence |
| JP2006184617A (en) * | 2004-12-28 | 2006-07-13 | Kyoto Univ | Two-dimensional photonic crystal and optical device using the same |
| CN102156327A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Terahertz wave polarizing beam splitter with dual resonance cavity structure |
Non-Patent Citations (5)
| Title |
|---|
| Compact terahertz wave polarizing beam splitter;Jiu-Sheng Li,etc.;《APPLIFD OPTICS》;20100820;第49卷(第24期);全文 * |
| Jiu-Sheng Li,etc..Compact terahertz wave polarizing beam splitter.《APPLIFD OPTICS》.2010,第49卷(第24期), |
| JP特开2006184617A 2006.07.13 |
| 太赫兹通信技术的研究和展望;姚建栓 等;《中国激光》;20090930;第36卷(第9期);全文 * |
| 姚建栓 等.太赫兹通信技术的研究和展望.《中国激光》.2009,第36卷(第9期), |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102928928A (en) | 2013-02-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102156327B (en) | Terahertz wave polarizing beam splitter with dual resonance cavity structure | |
| CN102928926B (en) | Slotted branch type terahertz wave polarization beam splitter | |
| CN105044841B (en) | Terahertz polarization beam splitter based on medium rod structure | |
| CN102928928B (en) | Terahertz wave polarization beam splitter of spiral waveguide coil structure | |
| CN204925441U (en) | Adjustable frequency terahertz is branching unit now | |
| CN103682542B (en) | Symmetrical multi-grid THz wave power splitter | |
| CN105372758A (en) | Bar-type terahertz wave polarization beam splitter | |
| CN102902018B (en) | Terahertz wave polarization beam splitter with trapezoidal structures loaded on borders | |
| CN102928920B (en) | Double-right-angle corner waveguide-shaped terahertz wave polarization beam splitter | |
| CN102928927B (en) | Terahertz wave polarization beam splitter with polygonal liquid crystal pool structure | |
| CN202033495U (en) | Terahertz wave polarization beam splitter of structure of double resonant cavities | |
| CN102928917B (en) | Double-fan-shaped terahertz wave polarization beam splitter | |
| CN103675998B (en) | Ginseng shape terahertz polarization beam splitter | |
| CN102928916A (en) | Symmetrical structure terahertz wave polarization beam splitter | |
| CN102928998B (en) | Square spiral-type terahertz wave switch | |
| CN103018829B (en) | Double-stepped terahertz wave polarization beam splitter | |
| CN102937730B (en) | Terahertz wave polarization beam splitter of L-shaped slot structure | |
| CN102902012B (en) | Terahertz wave polarization beam splitter connected in series with three semi-arc structures | |
| CN102937731B (en) | Terahertz wave polarization beam splitter based on porous hollow structure | |
| CN103018830B (en) | Terahertz wave polarization beam splitter of double serial connection ring structure | |
| CN203707292U (en) | Terahertz wave bandpass filter in multi-elliptical structure | |
| CN102928918B (en) | Trapezoid terahertz wave polarization beam splitter | |
| CN103018831B (en) | Terahertz wave polarization beam splitter with multiple banded structures | |
| CN103018828B (en) | Terahertz wave polarization beam splitter of crossed F-shaped structure | |
| CN102928929B (en) | Three-triangular structure terahertz wave polarization beam splitter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131225 Termination date: 20171112 |