CN102902018B - Terahertz wave polarization beam splitter with trapezoidal structures loaded on borders - Google Patents
Terahertz wave polarization beam splitter with trapezoidal structures loaded on borders Download PDFInfo
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- CN102902018B CN102902018B CN201210385674.9A CN201210385674A CN102902018B CN 102902018 B CN102902018 B CN 102902018B CN 201210385674 A CN201210385674 A CN 201210385674A CN 102902018 B CN102902018 B CN 102902018B
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Abstract
The invention discloses a terahertz wave polarization beam splitter with trapezoidal structures loaded on the borders. The terahertz wave polarization beam splitter comprises a signal input terminal, a first signal output terminal, a second signal output terminal, a far infrared quartz glass matrix and a polarization beam splitting piece; the polarization beam splitting piece is arranged on the far infrared quartz glass matrix; the polarization beam splitting piece comprises a left side narrow rectangular polarization silicon waveguide, a right side wide rectangular polarization silicon waveguide, an upper side rectangular polarization silicon waveguide, a lower side rectangular polarization silicon waveguide, a long trapezoidal polarization silicon waveguide and a short trapezoidal polarization silicon waveguide; signals are vertically emitted from the signal input terminal and pass through the polarization beam splitting piece; the first signal output terminal outputs TE waves; and the second signal output terminal outputs TM waves, so that polarization beam splitting performance is obtained. The terahertz wave polarization beam splitter has the advantages of simple structure, high beam splitting rate, small dimension, low cost, convenience in manufacture and the like.
Description
Technical field
The present invention relates to beam splitter, relate in particular to the terahertz polarization beam splitter that a kind of frame loads trapezium structure.
Background technology
THz wave is frequency range electromagnetic wave of (wavelength coverage is 30 μ m ~ 3mm) between 0.1 ~ 10THz, and this wave band, between microwave and infrared radiation, is the fringe region of electromagnetics and optical research.At the beginning of the early stage research of terahertz emission can be traced back to last century, before the eighties in 20th century, owing to lacking the electromagnetic production method of Terahertz frequency range and detection approach effectively, cause the electromagnetic wave research and development of this frequency range very slow, scientist is very limited to the understanding of this wave band properties of electromagnetic radiation, and in recent decades, along with developing rapidly of ultrafast photoelectron technology, also the generation for terahertz pulse provides stable excitation source, be accompanied by the generation of terahertz emission, its application has also obtained developing rapidly.
Polarization beam apparatus is exactly a road input light to be divided into to the flashlight output of two bundle quadratures, fast development along with optical fiber communication and Fibre Optical Sensor measuring technique, it is more and more important that polarization beam apparatus becomes, and especially has the polarization beam apparatus of High Extinction Ratio and high beam splitting rate.Existing THz wave device has THz wave to produce and pick-up unit, the THz wave transmission waveguide, but these device architectures are complicated, volume is larger and expensive, so miniaturization, the THz wave device is the key of THz wave technology application cheaply.Lot of domestic and international scientific research institution all is devoted to the research of this respect and makes some progress at present, but the rare report of the research of terahertz polarization beam splitter.Terahertz polarization beam splitter is a kind of very important THz wave device, can be used for the THz wave system, realizes the control to THz wave.Therefore be necessary to design a kind of simple in structure, the high terahertz polarization beam splitter of beam splitting efficiency is to meet following THz wave technology application needs
Summary of the invention
The present invention is lower in order to overcome prior art beam splitting rate, complex structure, and actual fabrication process difficulty, the deficiency that cost is higher, provide a kind of frame to load the terahertz polarization beam splitter of trapezium structure.
In order to achieve the above object, technical scheme of the present invention is as follows:
The terahertz polarization beam splitter that frame loads trapezium structure comprises signal input part, first signal output terminal, secondary signal output terminal, far infrared quartz glass basis, polarization beam splitter, the far infrared quartz glass basis is provided with polarization beam splitter, polarization beam splitter comprises left side narrow rectangle polarization silicon waveguide, right side wide rectangle polarization silicon waveguide, the waveguide of upside rectangle polarization silicon, the waveguide of downside rectangle polarization silicon, long trapezoidal polarization silicon waveguide, the waveguide of short trapezoidal polarization silicon, left side narrow rectangle polarization silicon waveguide, right side wide rectangle polarization silicon waveguide, the silicon waveguide of upside rectangle polarization and the waveguide of downside rectangle polarization silicon form asymmetric rectangle frame, upside rectangle polarization silicon waveguide upper, lower both sides connect respectively the bottom of long trapezoidal polarization silicon waveguide, downside rectangle polarization silicon waveguide upper, lower both sides connect respectively the bottom of short trapezoidal polarization silicon waveguide, signal passes through polarization beam splitter from signal input part with vertical incidence, first signal output terminal output TE ripple, secondary signal output terminal output TM ripple, obtain the polarization beam splitting performance.
The length of described signal input part is 500 μ m ~ 650 μ m, and wide is 200 μ m ~ 450 μ m, and thickness is 150 μ m ~ 200 μ m.The length of described first signal output terminal, secondary signal output terminal is 500 μ m ~ 650 μ m, the wide 200 μ m ~ 450 μ m that are, and thickness is 150 μ m ~ 200 μ m.The length of described far infrared quartz glass basis is 2000 μ m ~ 3000 μ m, and wide is 1600 μ m ~ 1800 μ m, and thickness is 500 μ m ~ 950 μ m.The thickness of described polarization beam splitter is 150 μ m ~ 200 μ m.The width of described left side narrow rectangle polarization silicon waveguide is 300 μ m ~ 600 μ m, and length is 500 μ m ~ 800 μ m; The width of described right side wide rectangle polarization silicon waveguide is 400 μ m ~ 800 μ m, and length is 500 μ m ~ 800 μ m.The width of described upside rectangle polarization silicon waveguide is 300 μ m ~ 600 μ m, and length is 800 μ m ~ 1000 μ m; The width of described downside rectangle polarization silicon waveguide is 300 μ m ~ 600 μ m, and length is 800 μ m ~ 1000 μ m.The upper bottom side length of the trapezoidal polarization silicon of described length waveguide is 600 μ m ~ 800 μ m, and the length of side of going to the bottom is 800 μ m ~ 1000 μ m, and height is 300 μ m ~ 500 μ m.The upper bottom side length of described short trapezoidal polarization silicon waveguide is 200 μ m ~ 250 μ m, and the length of side of going to the bottom is 300 μ m ~ 400 μ m, and height is 200 μ m ~ 300 μ m.
The terahertz polarization beam splitter of frame loading trapezium structure of the present invention has simple in structure, and the beam splitting rate is high, and size is little, and cost is low, is convenient to the advantages such as making.
The accompanying drawing explanation:
Fig. 1 is the terahertz polarization beam splitter schematic diagram that frame loads trapezium structure; .
Fig. 2 is the sizing specification figure of polarization beam splitter;
Fig. 3 is TE, the TM ripple transmittance graph of first signal output terminal;
Fig. 4 is TM, the TE ripple transmittance graph of secondary signal output terminal.
Embodiment
As shown in Figure 1 and 2, the terahertz polarization beam splitter of frame loading trapezium structure comprises signal input part 1, first signal output terminal 2, secondary signal output terminal 3, far infrared quartz glass basis 4, polarization beam splitter 5, far infrared quartz glass basis 4 is provided with polarization beam splitter 5, polarization beam splitter 5 comprises left side narrow rectangle polarization silicon waveguide 6, right side wide rectangle polarization silicon waveguide 7, upside rectangle polarization silicon waveguide 8, downside rectangle polarization silicon waveguide 9, long trapezoidal polarization silicon waveguide 10, short trapezoidal polarization silicon waveguide 11, left side narrow rectangle polarization silicon waveguide 6, right side wide rectangle polarization silicon waveguide 7, upside rectangle polarization silicon waveguide 8 and downside rectangle polarization silicon waveguide 9 form asymmetric rectangle frame, upside rectangle polarization silicon waveguide 8 upper, lower both sides connect respectively the bottom of long trapezoidal polarization silicon waveguide 10, downside rectangle polarization silicon waveguide 9 upper, lower both sides connect respectively the bottom of short trapezoidal polarization silicon waveguide 11, signal passes through polarization beam splitter 5 from signal input part 1 with vertical incidence, first signal output terminal 2 output TE ripples, secondary signal output terminal 3 output TM ripples, obtain the polarization beam splitting performance.
The length of described signal input part 1 is 500 μ m ~ 650 μ m, and wide is 200 μ m ~ 450 μ m, and thickness is 150 μ m ~ 200 μ m.The length of described first signal output terminal 2, secondary signal output terminal 3 is 500 μ m ~ 650 μ m, the wide 200 μ m ~ 450 μ m that are, and thickness is 150 μ m ~ 200 μ m.The length of described far infrared quartz glass basis 4 is 2000 μ m ~ 3000 μ m, and wide is 1600 μ m ~ 1800 μ m, and thickness is 500 μ m ~ 950 μ m.The thickness of described polarization beam splitter 5 is 150 μ m ~ 200 μ m.The width of described left side narrow rectangle polarization silicon waveguide 6 is 300 μ m ~ 600 μ m, and length is 500 μ m ~ 800 μ m; The width of described right side wide rectangle polarization silicon waveguide 7 is 400 μ m ~ 800 μ m, and length is 500 μ m ~ 800 μ m.The width of described upside rectangle polarization silicon waveguide 8 is 300 μ m ~ 600 μ m, and length is 800 μ m ~ 1000 μ m; The width of described downside rectangle polarization silicon waveguide 9 is 300 μ m ~ 600 μ m, and length is 800 μ m ~ 1000 μ m.The upper bottom side length of the trapezoidal polarization silicon of described length waveguide 10 is 600 μ m ~ 800 μ m, and the length of side of going to the bottom is 800 μ m ~ 1000 μ m, and height is 300 μ m ~ 500 μ m.The upper bottom side length of described short trapezoidal polarization silicon waveguide 11 is 200 μ m ~ 250 μ m, and the length of side of going to the bottom is 300 μ m ~ 400 μ m, and height is 200 μ m ~ 300 μ m.
Frame loads the terahertz polarization beam splitter of trapezium structure:
The length of signal input part is 500 μ m, and wide is 200 μ m, and thickness is 150 μ m.The length of first signal output terminal, secondary signal output terminal is 500 μ m, the wide 200 μ m that are, and thickness is 150 μ m.The length of far infrared quartz glass basis is 2000 μ m, and wide is 1600 μ m, and thickness is 500 μ m.The thickness of polarization beam splitter is 150 μ m.The width of left side narrow rectangle polarization silicon waveguide is 300 μ m, and length is 500 μ m; The width of right side wide rectangle polarization silicon waveguide is 400 μ m, and length is 500 μ m.The width of upside rectangle polarization silicon waveguide is 300 μ m, and length is 800 μ m; The width of downside rectangle polarization silicon waveguide is 300 μ m, and length is 800 μ m.The upper bottom side length of long trapezoidal polarization silicon waveguide is 600 μ m, and the length of side of going to the bottom is 800 μ m, and height is 300 μ m.The upper bottom side length of short trapezoidal polarization silicon waveguide is 200 μ m, and the length of side of going to the bottom is 300 μ m, and height is 200 μ m.As shown in Figure 3, TE ripple minimum transmittance is that 99.62%, TM ripple maximum transmission rate is 0.14% for the terahertz polarization beam splitter first signal output terminal TE of frame loading trapezium structure, TM ripple transmittance graph.As shown in Figure 4, TE ripple maximum transmission rate is that 0.13%, TM ripple minimum transmittance is 99.57% for the terahertz polarization beam splitter secondary signal output terminal TM of frame loading trapezium structure, TE ripple transmittance graph.
Claims (9)
1. a frame loads the terahertz polarization beam splitter of trapezium structure, comprise signal input part (1), first signal output terminal (2), secondary signal output terminal (3), characterized by further comprising far infrared quartz glass basis (4), polarization beam splitter (5), far infrared quartz glass basis (4) is provided with polarization beam splitter (5), polarization beam splitter (5) comprises left side narrow rectangle polarization silicon waveguide (6), right side wide rectangle polarization silicon waveguide (7), upside rectangle polarization silicon waveguide (8), downside rectangle polarization silicon waveguide (9), long trapezoidal polarization silicon waveguide (10), short trapezoidal polarization silicon waveguide (11), left side narrow rectangle polarization silicon waveguide (6), right side wide rectangle polarization silicon waveguide (7), upside rectangle polarization silicon waveguide (8) and downside rectangle polarization silicon waveguide (9) form asymmetric rectangle frame, upside rectangle polarization silicon waveguide (8) upper, lower both sides connect respectively the bottom of long trapezoidal polarization silicon waveguide (10), downside rectangle polarization silicon waveguide (9) upper, lower both sides connect respectively the bottom of short trapezoidal polarization silicon waveguide (11), signal passes through polarization beam splitter (5) from signal input part (1) with vertical incidence, first signal output terminal (2) output TE ripple, secondary signal output terminal (3) output TM ripple, obtain the polarization beam splitting performance.
2. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, and the length that it is characterized in that described signal input part (1) is 500 μ m～650 μ m, and wide is 200 μ m～450 μ m, and thickness is 150 μ m～200 μ m.
3. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, the length that it is characterized in that described first signal output terminal (2), secondary signal output terminal (3) is 500 μ m～650 μ m, the wide 200 μ m～450 μ m that are, thickness is 150 μ m～200 μ m.
4. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, the length that it is characterized in that described far infrared quartz glass basis (4) is 2000 μ m～3000 μ m, wide is 1600 μ m～1800 μ m, and thickness is 500 μ m～950 μ m.
5. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, and the thickness that it is characterized in that described polarization beam splitter (5) is 150 μ m～200 μ m.
6. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, and the width that it is characterized in that described left side narrow rectangle polarization silicon waveguide (6) is 300 μ m～600 μ m, and length is 500 μ m～800 μ m; The width of described right side wide rectangle polarization silicon waveguide (7) is 400 μ m～800 μ m, and length is 500 μ m～800 μ m.
7. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, and the width that it is characterized in that described upside rectangle polarization silicon waveguide (8) is 300 μ m～600 μ m, and length is 800 μ m～1000 μ m; The width of described downside rectangle polarization silicon waveguide (9) is 300 μ m～600 μ m, and length is 800 μ m～1000 μ m.
8. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, the upper bottom side length that it is characterized in that the trapezoidal polarization silicon of described length waveguide (10) is 600 μ m～800 μ m, the length of side of going to the bottom is 800 μ m～1000 μ m, and height is 300 μ m～500 μ m.
9. a kind of frame according to claim 1 loads the terahertz polarization beam splitter of trapezium structure, the upper bottom side length that it is characterized in that described short trapezoidal polarization silicon waveguide (11) is 200 μ m～250 μ m, the length of side of going to the bottom is 300 μ m～400 μ m, and height is 200 μ m～300 μ m.
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| CN103675998B (en) * | 2013-11-25 | 2015-11-18 | 中国计量学院 | Ginseng shape terahertz polarization beam splitter |
| CN111239936B (en) * | 2020-03-20 | 2021-10-15 | 青岛海信宽带多媒体技术有限公司 | Optical module |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050058386A1 (en) * | 2003-09-15 | 2005-03-17 | Little Brent Everett | Integrated optics polarization beam splitter using form birefringence |
| CN102156327A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Terahertz wave polarizing beam splitter with dual resonance cavity structure |
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| JP4923234B2 (en) * | 2004-12-28 | 2012-04-25 | 国立大学法人京都大学 | Two-dimensional photonic crystal and optical device using the same |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050058386A1 (en) * | 2003-09-15 | 2005-03-17 | Little Brent Everett | Integrated optics polarization beam splitter using form birefringence |
| CN102156327A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Terahertz wave polarizing beam splitter with dual resonance cavity structure |
Non-Patent Citations (5)
| Title |
|---|
| Compact terahertz wave polarizing beam splitter;Jiu-Sheng Li etc.;《APPLIED OPTICS》;20100820;第49卷(第24期);全文 * |
| Jiu-Sheng Li etc..Compact terahertz wave polarizing beam splitter.《APPLIED OPTICS》.2010,第49卷(第24期), |
| JP特开2006-184617A 2006.07.13 |
| 太赫兹通信技术的研究和展望;姚建栓 等;《中国激光》;20090930;第36卷(第9期);全文 * |
| 姚建栓 等.太赫兹通信技术的研究和展望.《中国激光》.2009,第36卷(第9期), |
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