CN102928919B - Track-shaped structure terahertz wave polarization beam splitter - Google Patents

Track-shaped structure terahertz wave polarization beam splitter Download PDF

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CN102928919B
CN102928919B CN201210449911.3A CN201210449911A CN102928919B CN 102928919 B CN102928919 B CN 102928919B CN 201210449911 A CN201210449911 A CN 201210449911A CN 102928919 B CN102928919 B CN 102928919B
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waveguide
track type
polarization beam
beam splitter
type structure
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CN102928919A (en
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李九生
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China Jiliang University
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China Jiliang University
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Abstract

The invention discloses a track-shaped structure terahertz wave polarization beam splitter which comprises a terahertz wave input end, a first signal output end, a second signal output end, a base, a left side n-shaped waveguide, an intermediate coupling area and a right side spiral waveguide. The left side n-shaped waveguide, the intermediate coupling area and the right spiral waveguide are arranged on the base body. The left side n-shaped waveguide is of a longitudinal symmetry structure, the intermediate coupling area is composed of four longitudinal-symmetry and bilateral-symmetry track-shaped structures, terahertz wave can be input from the terahertz wave input end, transverse magnetic (TM) wave is directly output from the first signal output end through the left side n-shaped waveguide, and the transverse electrical (TE) wave can be output from the second signal output end to obtain the polarization beam splitting function through the coupling function of the intermediate coupling area. The track-shaped structure terahertz wave polarization beam splitter has the advantages of being simple and compact in structure, small in size, high in beam splitting rate, convenient to manufacture, easy to integrate and the like, and meeting requirements of fields of medical detection, non-destructive detection, terahertz wave imaging and the like.

Description

The terahertz polarization beam splitter of track type structure
Technical field
The present invention relates to beam splitter, relate in particular to a kind of terahertz polarization beam splitter of track type structure.
Background technology
Along with the fast development of modern science and technology,, the aggravation of international competition and social informatization process are constantly accelerated, various new technologies, new thought emerge in multitude out, and THz wave technology is one of them.Terahertz (Terahertz, THz) typically refers to frequency at the electromagnetic wave of 0.1THz ~ 10THz.Its long-wave band and millimeter wave (submillimeter wave) coincide, the main electronics technology that relies on of its development; And its short-wave band and infrared ray coincide, the main photonics technology that relies on of its development, visible THz wave be macroelectronics to the frequency range of microcosmic photonics transition, in electromagnetic spectrum, occupy very special position.It has a lot of superior characteristics, has very important science and using value, makes THz be subject to the support of whole world national governments, and gives great concern.Because Terahertz wave frequency is very high, so its spatial resolution is also very high; Again because its pulse is very short, so there is very high temporal resolution.Thus, THz imaging technology and THz wave spectral technology have formed two main gordian techniquies of Terahertz application.The special performance of Terahertz brings far-reaching influence to fields such as environment detection, biomedicine, communications.For example, THz technology can be studied electricity, acoustic properties and the chemical composition of the media such as solid, gas, liquid and flame.Scientific research personnel can utilize THz to penetrate smog and detect the poisonous or harmful molecule in atmosphere, therefore can be used for the pollution detection of environment.Biosome has unique response to THz ripple, and a lot of biomacromolecule is if the rotation of DNA molecular and vibrational energy level many places are in THz wave band, so THz has very important effect in protein and other no marks identification application.Because THz has the penetration capacity of similar X ray, and its photon energy is little, can not cause the light ionization of biological tissue, thus very safe aspect biomedical imaging, be suitable for biomedical imaging.Except fields such as biomedicine, environmental monitorings, Terahertz Technology is also having its wide application prospect aspect high bandwidth wireless communication system.
The application of THz wave technology be unable to do without the guarantee of THz wave function element.But existing THz wave function element often complex structure, volume large, be not easy to integratedly and expensive, so miniaturization, THz devices becomes the key of THz wave application cheaply.Terahertz polarization beam splitter is a kind of very important THz wave function element, is applied in THz wave system, realizes the polarization beam splitting of THz wave is controlled.Lot of domestic and international scientific research institution is all devoted to the research of this respect at present, but relevant research report is seldom, be therefore necessary to design a kind of simple and compact for structure, be easy to the needs that terahertz polarization beam splitter integrated, that beam splitting efficiency is high meets following THz wave technology application.
Summary of the invention
The object of the invention is in order to overcome prior art beam splitting rate lower, complex structure, actual fabrication process difficulty, is difficult to integrated deficiency, and a kind of terahertz polarization beam splitter of track type structure of beam splitting rate simple in structure, high is provided.
In order to achieve the above object, technical scheme of the present invention is as follows:
The terahertz polarization beam splitter of track type structure comprises THz wave input end, first signal output terminal, secondary signal output terminal, matrix, left side n shape waveguide, intermediate coupling region, right side spirality waveguide, matrix is provided with left side n shape waveguide, intermediate coupling region, right side spirality waveguide, left side n shape waveguide is upper and lower symmetrical structure, left side n shape waveguide comprises and connects in turn L shaped waveguide, semicircular ring waveguide and inverted L-shaped waveguide, L shaped waveguide is by the longitudinal waveguide of upside, the waveguide of upside quadrant arc, upside transversal waveguides is connected in sequence, and inverted L-shaped waveguide is by the longitudinal waveguide of downside, the waveguide of downside quadrant arc, downside transversal waveguides is connected in sequence, intermediate coupling region is comprised of four symmetrical up and down track type structures, wherein two track type structure longitudinal arrangements are in the centre position in intermediate coupling region, and two remaining track type structures are horizontally arranged in respectively the upper of centre position, lower both sides, track type structure is comprised of the track type waveguide in outside and the track type cylinder of inner side, and right side spirality waveguide is by second longitudinal waveguide of arranging in turn from right to left, the second quadrant arc waveguide, the second transversal waveguides, the second semicircular ring waveguide, the waveguide of four/three-arc is formed by connecting, and the second semicircular ring waveguide and the waveguide of four/three-arc form a structure to inside spin, THz wave is from the input of THz wave input end, and TM ripple is directly exported from first signal output terminal through left side n shape waveguide, and by the coupling in intermediate coupling region, TE ripple, from the output of secondary signal output terminal, obtains the function of polarization beam splitting.
The material of described matrix is silicon dioxide, and length is 2900 μ m ~ 3000 μ m, and width is 1880 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m.The material of described waveguide is silicon, and width is 50 μ m ~ 80 μ m, and thickness is 30 μ m ~ 40 μ m.The longitudinal waveguide length of upside of described left side n shape waveguide is 400 μ m ~ 500 μ m, the exradius r1 of upside quadrant arc waveguide is 100 μ m ~ 120 μ m, upper cross is 300 μ m ~ 400 μ m to waveguide length, and the exradius r2 of semicircular ring waveguide is 400 μ m ~ 450 μ m.Distance between described intermediate coupling region and left side n shape waveguide and right side spirality waveguide is 20 μ m ~ 30 μ m; In intermediate coupling region, the track type spacing structure of two longitudinal arrangements distance is 10 μ m ~ 20 μ m, and the distance between the track type structure that upper and lower both sides are transversely arranged and the track type structure of two longitudinal arrangements is 20 μ m ~ 30 μ m.The exradius of described track type waveguide is 200 μ m ~ 250 μ m, and the horizontal linear waveguide length of track type waveguide is 300 μ m ~ 400 μ m; Described track type cylinder length is 560 μ m ~ 580 μ m, and width is 140 μ m ~ 160 μ m.The length of second longitudinal waveguide of described right side spirality waveguide is 1040 μ m ~ 1100 μ m, the exradius r3 of the second quadrant arc waveguide is 300 μ m ~ 350 μ m, the length of the second transversal waveguides is 300 μ m ~ 400 μ m, the exradius r4 of the second semicircular ring waveguide is 400 μ m ~ 450 μ m, and the exradius r5 of four/three-arc waveguide is 250 μ m ~ 300 μ m.
That the terahertz polarization beam splitter of track type structure of the present invention has is simple and compact for structure, size is little, beam splitting rate is high, be convenient to make, be easy to the advantages such as integrated.Meet the demand in fields such as medical science detection, lossless detection, THz wave imagings.
Accompanying drawing explanation:
Fig. 1 is the terahertz polarization beam splitter structural representation of track type structure;
Fig. 2 is the composition structural representation of right side spirality waveguide;
Fig. 3 is the terahertz polarization beam splitter size marking schematic diagram of track type structure;
Fig. 4 is TM ripple, the TE ripple transmission curve of first signal output terminal;
Fig. 5 is TE ripple, the TM ripple transmission curve of secondary signal output terminal.
Embodiment
As shown in Fig. 1 ~ 3, the terahertz polarization beam splitter of track type structure comprises THz wave input end 1, first signal output terminal 2, secondary signal output terminal 3, matrix 4, left side n shape waveguide 5, intermediate coupling region 6, right side spirality waveguide 7, matrix 4 is provided with left side n shape waveguide 5, intermediate coupling region 6, right side spirality waveguide 7, left side n shape waveguide 5 is upper and lower symmetrical structure, left side n shape waveguide 5 comprises and connects in turn L shaped waveguide, semicircular ring waveguide and inverted L-shaped waveguide, L shaped waveguide is by the longitudinal waveguide of upside, the waveguide of upside quadrant arc, upside transversal waveguides is connected in sequence, and inverted L-shaped waveguide is by the longitudinal waveguide of downside, the waveguide of downside quadrant arc, downside transversal waveguides is connected in sequence, intermediate coupling region 6 is comprised of four symmetrical up and down track type structures 8, wherein two track type structure 8 longitudinal arrangements are in the centre position in intermediate coupling region 6, and two remaining track type structures 8 are horizontally arranged in respectively the upper of centre position, lower both sides, track type structure 8 is comprised of the track type waveguide 9 in outside and the track type cylinder 10 of inner side, and right side spirality waveguide 7 is by second longitudinal waveguide 11 of arranging in turn from right to left, the second quadrant arc waveguide 12, the second transversal waveguides 13, the second semicircular ring waveguide 14, four/three-arc waveguide 15 is formed by connecting, and the second semicircular ring waveguide 14 and four/three-arc waveguide 15 form a structure to inside spin, THz wave is from 1 input of THz wave input end, and TM ripple is directly exported from first signal output terminal 2 through left side n shape waveguide 5, and by the coupling in intermediate coupling region 6, TE ripple, from 3 outputs of secondary signal output terminal, obtains the function of polarization beam splitting.
The material of described matrix 4 is silicon dioxide, and length is 2900 μ m ~ 3000 μ m, and width is 1880 μ m ~ 2000 μ m, and thickness is 300 μ m ~ 400 μ m.The material of described waveguide is silicon, and width is 50 μ m ~ 80 μ m, and thickness is 30 μ m ~ 40 μ m.The longitudinal waveguide length of upside of described left side n shape waveguide 5 is 400 μ m ~ 500 μ m, the exradius r1 of upside quadrant arc waveguide is 100 μ m ~ 120 μ m, upper cross is 300 μ m ~ 400 μ m to waveguide length, and the exradius r2 of semicircular ring waveguide is 400 μ m ~ 450 μ m.Distance between described intermediate coupling region 6 and left side n shape waveguide 5 and right side spirality waveguide 7 is 20 μ m ~ 30 μ m; In intermediate coupling region 6, track type structure 8 spacing distances of two longitudinal arrangements are 10 μ m ~ 20 μ m, and the distance between the track type structure 8 that upper and lower both sides are transversely arranged and the track type structure 8 of two longitudinal arrangements is 20 μ m ~ 30 μ m.The exradius of described track type waveguide 9 is 200 μ m ~ 250 μ m, and the horizontal linear waveguide length of track type waveguide 9 is 300 μ m ~ 400 μ m; Described track type cylinder 10 length are 560 μ m ~ 580 μ m, and width is 140 μ m ~ 160 μ m.The length of second longitudinal waveguide 11 of described right side spirality waveguide 7 is 1040 μ m ~ 1100 μ m, the exradius r3 of the second quadrant arc waveguide 12 is 300 μ m ~ 350 μ m, the length of the second transversal waveguides 13 is 300 μ m ~ 400 μ m, the exradius r4 of the second semicircular ring waveguide 14 is 400 μ m ~ 450 μ m, and the exradius r5 of four/three-arc waveguide 15 is 250 μ m ~ 300 μ m.
embodiment 1
The terahertz polarization beam splitter of track type structure:
The material of matrix is silicon dioxide, and length is 2900 μ m, and width is 1880 μ m, and thickness is 400 μ m.The material of waveguide is silicon, and width is 80 μ m, and thickness is 40 μ m.The longitudinal waveguide length of upside of left side n shape waveguide is 500 μ m, and the exradius r1 of upside quadrant arc waveguide is 120 μ m, and upper cross is 300 μ m to waveguide length, and the exradius r2 of semicircular ring waveguide is 400 μ m.Distance between intermediate coupling region and left side n shape waveguide and right side spirality waveguide is 20 μ m; In intermediate coupling region, the track type spacing structure of two longitudinal arrangements distance is 10 μ m, and the distance between the track type structure that upper and lower both sides are transversely arranged and the track type structure of two longitudinal arrangements is 20 μ m.The exradius of track type waveguide is 200 μ m, and the horizontal linear waveguide length of track type waveguide is 400 μ m; Track type cylinder length is 560 μ m, and width is 160 μ m.The length of second longitudinal waveguide of right side spirality waveguide is 1040 μ m, the exradius r3 of the second quadrant arc waveguide is 300 μ m, the length of the second transversal waveguides is 400 μ m, the exradius r4 of the second semicircular ring waveguide is 400 μ m, and the exradius r5 of four/three-arc waveguide is 250 μ m.
THz wave is from the input of THz wave input end, and TM ripple is directly exported from first signal output terminal through left side n shape waveguide, and by the coupling in intermediate coupling region, TE ripple, from the output of secondary signal output terminal, obtains the function of polarization beam splitting.As shown in Figure 4, in 0.70 ~ 1.10THz band limits, TM ripple minimum transfer rate is that 0.987, TE ripple maximum transfer rate is 0.015 for the TM ripple of first signal output terminal, TE wave-wave transmission curve, and this explanation TM ripple is exported from first signal output terminal.As shown in Figure 5, in 0.70 ~ 1.10THz band limits, TE minimum transfer rate is that 0.990, TM ripple maximum transfer rate is 0.018 for the TE ripple of secondary signal output terminal, TM transmission curve, and this explanation TE ripple is exported from secondary signal output terminal.

Claims (7)

1. the terahertz polarization beam splitter of a track type structure, comprise THz wave input end (1), first signal output terminal (2), secondary signal output terminal (3), characterized by further comprising matrix (4), left side n shape waveguide (5), intermediate coupling region (6), right side spirality waveguide (7), matrix (4) is provided with left side n shape waveguide (5), intermediate coupling region (6), right side spirality waveguide (7), left side n shape waveguide (5) is upper and lower symmetrical structure, left side n shape waveguide (5) comprises and connects in turn L shaped waveguide, semicircular ring waveguide and inverted L-shaped waveguide, L shaped waveguide is by the longitudinal waveguide of upside, the waveguide of upside quadrant arc, upside transversal waveguides is connected in sequence, inverted L-shaped waveguide is by the longitudinal waveguide of downside, the waveguide of downside quadrant arc, downside transversal waveguides is connected in sequence, intermediate coupling region (6) is comprised of symmetrical up and down four track type structures (8), wherein two track type structures (8) longitudinal arrangement is in the centre position of intermediate coupling region (6), remaining two track type structures (8) are horizontally arranged in respectively the upper of centre position, lower both sides, track type structure (8) is comprised of the track type waveguide (9) in outside and the track type cylinder (10) of inner side, right side spirality waveguide (7) is by second longitudinal waveguide (11) of arranging in turn from right to left, the second quadrant arc waveguide (12), the second transversal waveguides (13), the second semicircular ring waveguide (14), four/three-arc waveguide (15) is formed by connecting, the second semicircular ring waveguide (14) and four/three-arc waveguide (15) form one to the structure of inside spin, THz wave is inputted from THz wave input end (1), TM ripple is directly exported from first signal output terminal (2) through left side n shape waveguide (5), by the coupling of intermediate coupling region (6), TE ripple, from secondary signal output terminal (3) output, obtains the function of polarization beam splitting.
2. the terahertz polarization beam splitter of a kind of track type structure according to claim 1, the material that it is characterized in that described matrix (4) is silicon dioxide, length is 2900 μ m~3000 μ m, and width is 1880 μ m~2000 μ m, and thickness is 300 μ m~400 μ m.
3. the terahertz polarization beam splitter of a kind of track type structure according to claim 1, is characterized in that the material of described waveguide is silicon, and width is 50 μ m~80 μ m, and thickness is 30 μ m~40 μ m.
4. the terahertz polarization beam splitter of a kind of track type structure according to claim 1, the longitudinal waveguide length of upside that it is characterized in that described left side n shape waveguide (5) is 400 μ m~500 μ m, the exradius r1 of upside quadrant arc waveguide is 100 μ m~120 μ m, upper cross is 300 μ m~400 μ m to waveguide length, and the exradius r2 of semicircular ring waveguide is 400 μ m~450 μ m.
5. the terahertz polarization beam splitter of a kind of track type structure according to claim 1, is characterized in that described intermediate coupling region (6) and the distance between left side n shape waveguide (5) and right side spirality waveguide (7) are 20 μ m~30 μ m; In intermediate coupling region (6), track type structure (8) spacing distance of two longitudinal arrangements is 10 μ m~20 μ m, and the distance between the track type structure (8) that upper and lower both sides are transversely arranged and the track type structure (8) of two longitudinal arrangements is 20 μ m~30 μ m.
6. the terahertz polarization beam splitter of a kind of track type structure according to claim 1, the exradius that it is characterized in that described track type waveguide (9) is 200 μ m~250 μ m, and the horizontal linear waveguide length of track type waveguide (9) is 300 μ m~400 μ m; Described track type cylinder (10) length is 560 μ m~580 μ m, and width is 140 μ m~160 μ m.
7. the terahertz polarization beam splitter of a kind of track type structure according to claim 1, the length that it is characterized in that second longitudinal waveguide (11) of described right side spirality waveguide (7) is 1040 μ m~1100 μ m, the exradius r3 of the second quadrant arc waveguide (12) is 300 μ m~350 μ m, the length of the second transversal waveguides (13) is 300 μ m~400 μ m, the exradius r4 of the second semicircular ring waveguide (14) is 400 μ m~450 μ m, and the exradius r5 of four/three-arc waveguide (15) is 250 μ m~300 μ m.
CN201210449911.3A 2012-11-12 2012-11-12 Track-shaped structure terahertz wave polarization beam splitter Expired - Fee Related CN102928919B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050058386A1 (en) * 2003-09-15 2005-03-17 Little Brent Everett Integrated optics polarization beam splitter using form birefringence
JP2006184617A (en) * 2004-12-28 2006-07-13 Kyoto Univ Two-dimensional photonic crystal and optical device using the same
CN102156327A (en) * 2011-04-11 2011-08-17 中国计量学院 Terahertz wave polarizing beam splitter with dual resonance cavity structure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050058386A1 (en) * 2003-09-15 2005-03-17 Little Brent Everett Integrated optics polarization beam splitter using form birefringence
JP2006184617A (en) * 2004-12-28 2006-07-13 Kyoto Univ Two-dimensional photonic crystal and optical device using the same
CN102156327A (en) * 2011-04-11 2011-08-17 中国计量学院 Terahertz wave polarizing beam splitter with dual resonance cavity structure

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Jiu-Sheng Li,etc..Compact terahertz wave polarizing beam splitter.《APPLIED OPTICS》.2010,第49卷(第24期), *
JP特开2006184617A 2006.07.13
太赫兹通信技术的研究与展望;姚建栓 等;《中国激光》;20090930;第3 6 卷(第9 期);全文 *
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