CN103013345B - Oily diamond grinding liquid and preparation method thereof - Google Patents
Oily diamond grinding liquid and preparation method thereof Download PDFInfo
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- CN103013345B CN103013345B CN201210560797.1A CN201210560797A CN103013345B CN 103013345 B CN103013345 B CN 103013345B CN 201210560797 A CN201210560797 A CN 201210560797A CN 103013345 B CN103013345 B CN 103013345B
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- Prior art keywords
- acid
- sodium
- oil
- polishing
- polyoxyethylene
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- 238000000227 grinding Methods 0.000 title claims abstract description 36
- 239000007788 liquid Substances 0.000 title claims abstract description 36
- 239000010432 diamond Substances 0.000 title claims abstract description 34
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 34
- 238000002360 preparation method Methods 0.000 title claims abstract description 8
- 238000005498 polishing Methods 0.000 claims abstract description 39
- -1 dies Substances 0.000 claims abstract description 26
- 239000003921 oil Substances 0.000 claims abstract description 18
- 239000000080 wetting agent Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 239000000843 powder Substances 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims abstract description 3
- 150000001875 compounds Chemical class 0.000 claims abstract description 3
- 239000013307 optical fiber Substances 0.000 claims abstract description 3
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 3
- 239000010980 sapphire Substances 0.000 claims abstract description 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 3
- 239000012530 fluid Substances 0.000 claims description 21
- 235000019198 oils Nutrition 0.000 claims description 17
- 239000013543 active substance Substances 0.000 claims description 16
- 238000003756 stirring Methods 0.000 claims description 14
- 239000006185 dispersion Substances 0.000 claims description 12
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 claims description 12
- 239000011734 sodium Substances 0.000 claims description 12
- 229910052708 sodium Inorganic materials 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 8
- 150000002148 esters Chemical class 0.000 claims description 8
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 8
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 8
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 7
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 7
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 7
- 239000000194 fatty acid Substances 0.000 claims description 7
- 229930195729 fatty acid Natural products 0.000 claims description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000005639 Lauric acid Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 5
- 241000282326 Felis catus Species 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- 239000003945 anionic surfactant Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 4
- 150000004665 fatty acids Chemical class 0.000 claims description 4
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 235000019832 sodium triphosphate Nutrition 0.000 claims description 4
- 239000004711 α-olefin Substances 0.000 claims description 4
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 3
- 239000003208 petroleum Substances 0.000 claims description 3
- 229960004418 trolamine Drugs 0.000 claims description 3
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 claims description 2
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 claims description 2
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 claims description 2
- RFVNOJDQRGSOEL-UHFFFAOYSA-N 2-hydroxyethyl octadecanoate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCCO RFVNOJDQRGSOEL-UHFFFAOYSA-N 0.000 claims description 2
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 claims description 2
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 claims description 2
- 244000215068 Acacia senegal Species 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 claims description 2
- YKEQBQVVQRWASN-UHFFFAOYSA-M C(C)OS(=O)(=O)O.C(CCCCCCCCCCC)(=O)N[Na] Chemical compound C(C)OS(=O)(=O)O.C(CCCCCCCCCCC)(=O)N[Na] YKEQBQVVQRWASN-UHFFFAOYSA-M 0.000 claims description 2
- 244000060011 Cocos nucifera Species 0.000 claims description 2
- 235000013162 Cocos nucifera Nutrition 0.000 claims description 2
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims description 2
- 229920000084 Gum arabic Polymers 0.000 claims description 2
- 229920001732 Lignosulfonate Polymers 0.000 claims description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 2
- REYJJPSVUYRZGE-UHFFFAOYSA-N Octadecylamine Chemical compound CCCCCCCCCCCCCCCCCCN REYJJPSVUYRZGE-UHFFFAOYSA-N 0.000 claims description 2
- 239000005642 Oleic acid Substances 0.000 claims description 2
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 claims description 2
- 229920001214 Polysorbate 60 Polymers 0.000 claims description 2
- 101710194948 Protein phosphatase PhpP Proteins 0.000 claims description 2
- 239000004115 Sodium Silicate Substances 0.000 claims description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 claims description 2
- BCKXLBQYZLBQEK-KVVVOXFISA-M Sodium oleate Chemical compound [Na+].CCCCCCCC\C=C/CCCCCCCC([O-])=O BCKXLBQYZLBQEK-KVVVOXFISA-M 0.000 claims description 2
- 235000021355 Stearic acid Nutrition 0.000 claims description 2
- 229930006000 Sucrose Natural products 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 2
- 239000000205 acacia gum Substances 0.000 claims description 2
- 235000010489 acacia gum Nutrition 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- 150000001413 amino acids Chemical class 0.000 claims description 2
- 239000002199 base oil Substances 0.000 claims description 2
- 229940077388 benzenesulfonate Drugs 0.000 claims description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims description 2
- CUBCNYWQJHBXIY-UHFFFAOYSA-N benzoic acid;2-hydroxybenzoic acid Chemical compound OC(=O)C1=CC=CC=C1.OC(=O)C1=CC=CC=C1O CUBCNYWQJHBXIY-UHFFFAOYSA-N 0.000 claims description 2
- 230000033228 biological regulation Effects 0.000 claims description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 2
- 239000004327 boric acid Substances 0.000 claims description 2
- HGWAKQDTQVDVRP-OKULMJQMSA-N butyl (z,12r)-12-hydroxyoctadec-9-enoate Chemical compound CCCCCC[C@@H](O)C\C=C/CCCCCCCC(=O)OCCCC HGWAKQDTQVDVRP-OKULMJQMSA-N 0.000 claims description 2
- 239000004359 castor oil Substances 0.000 claims description 2
- 235000019438 castor oil Nutrition 0.000 claims description 2
- 239000003240 coconut oil Substances 0.000 claims description 2
- 235000019864 coconut oil Nutrition 0.000 claims description 2
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims description 2
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 claims description 2
- DDXLVDQZPFLQMZ-UHFFFAOYSA-M dodecyl(trimethyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)C DDXLVDQZPFLQMZ-UHFFFAOYSA-M 0.000 claims description 2
- XJWSAJYUBXQQDR-UHFFFAOYSA-M dodecyltrimethylammonium bromide Chemical compound [Br-].CCCCCCCCCCCC[N+](C)(C)C XJWSAJYUBXQQDR-UHFFFAOYSA-M 0.000 claims description 2
- 150000002191 fatty alcohols Chemical class 0.000 claims description 2
- 229940074391 gallic acid Drugs 0.000 claims description 2
- 235000004515 gallic acid Nutrition 0.000 claims description 2
- ZEMPKEQAKRGZGQ-XOQCFJPHSA-N glycerol triricinoleate Natural products CCCCCC[C@@H](O)CC=CCCCCCCCC(=O)OC[C@@H](COC(=O)CCCCCCCC=CC[C@@H](O)CCCCCC)OC(=O)CCCCCCCC=CC[C@H](O)CCCCCC ZEMPKEQAKRGZGQ-XOQCFJPHSA-N 0.000 claims description 2
- 229930182470 glycoside Natural products 0.000 claims description 2
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 claims description 2
- 235000019357 lignosulphonate Nutrition 0.000 claims description 2
- 239000002480 mineral oil Substances 0.000 claims description 2
- 235000010446 mineral oil Nutrition 0.000 claims description 2
- MWKFXSUHUHTGQN-UHFFFAOYSA-N n-decyl alcohol Natural products CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 claims description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 2
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims description 2
- 125000002811 oleoyl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])/C([H])=C([H])\C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- HWGNBUXHKFFFIH-UHFFFAOYSA-I pentasodium;[oxido(phosphonatooxy)phosphoryl] phosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])(=O)OP([O-])([O-])=O HWGNBUXHKFFFIH-UHFFFAOYSA-I 0.000 claims description 2
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 claims description 2
- 229920001451 polypropylene glycol Polymers 0.000 claims description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims description 2
- WXMKPNITSTVMEF-UHFFFAOYSA-M sodium benzoate Chemical compound [Na+].[O-]C(=O)C1=CC=CC=C1 WXMKPNITSTVMEF-UHFFFAOYSA-M 0.000 claims description 2
- 239000004299 sodium benzoate Substances 0.000 claims description 2
- 235000010234 sodium benzoate Nutrition 0.000 claims description 2
- 235000019982 sodium hexametaphosphate Nutrition 0.000 claims description 2
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 claims description 2
- 239000001488 sodium phosphate Substances 0.000 claims description 2
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 claims description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 2
- 229910052938 sodium sulfate Inorganic materials 0.000 claims description 2
- 235000011152 sodium sulphate Nutrition 0.000 claims description 2
- 239000008117 stearic acid Substances 0.000 claims description 2
- 239000005720 sucrose Substances 0.000 claims description 2
- 229910021653 sulphate ion Inorganic materials 0.000 claims description 2
- 229940095064 tartrate Drugs 0.000 claims description 2
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 claims description 2
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 claims description 2
- UWSCPROMPSAQOL-UHFFFAOYSA-N trimethylazanium;sulfate Chemical compound CN(C)C.CN(C)C.OS(O)(=O)=O UWSCPROMPSAQOL-UHFFFAOYSA-N 0.000 claims description 2
- UNXRWKVEANCORM-UHFFFAOYSA-I triphosphate(5-) Chemical compound [O-]P([O-])(=O)OP([O-])(=O)OP([O-])([O-])=O UNXRWKVEANCORM-UHFFFAOYSA-I 0.000 claims description 2
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 claims description 2
- 235000019801 trisodium phosphate Nutrition 0.000 claims description 2
- 229910000406 trisodium phosphate Inorganic materials 0.000 claims description 2
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- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
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Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses an oily diamond grinding liquid and a preparation method thereof, and belongs to the technical field of surface superfine grinding. The grinding liquid comprises the following components by weight percent: 0.001%-10% of diamond micro powder, 0.001%-20% of surface active agent, 0-20% of dispersant, 0-10% of pH value regulator, 0-10% of wetting agent and oil in balancing amount. The oily diamond grinding liquid is mainly applied to surface grinding and polishing of silicon carbide wafers, LED sapphire substrate slices, ceramic, optical fiber, dies, semi-conductor compound wafers and the like. By the use of the oily diamond grinding liquid provided by the invention, the polishing efficiency can be greatly improved; the dispersing performance is good; a uniform and stable state can be kept for a long time; the degree of finish of products polished with the oily diamond grinding liquid is high; the polishing effect is good; no ingredient harmful to human body is contained; the cleaning is easy; and the environmental protection is facilitated.
Description
Technical field
The present invention relates to a kind of for grinding, the polishing fluid, particularly a kind of oiliness diamond grinding fluid and preparation method thereof of polishing, belong to superfinish grinding and polishing technical field.
Background technology
Diadust is a kind of ultra-fine abrasive material with high rigidity and good mechanical physicals, its profile is spherical or elliposoidal, polished body can not be scratched for grinding and polishing, therefore be widely used in different processing polished fields, particularly ultra-precision surface polishing field at present.Diadust is the desirable polishing material of one of the hard material such as Wimet, pottery, jewel, opticglass, artificial lens, unicircuit, the polished product of paste, aerosol, membranaceous, oiliness or waterborne liquid can be made, diamond paste, aerosol disperse due to precipitation of easily stammering, difficulty and waste the shortcomings such as larger, limit its range of application.Oiliness lapping liquid is compared with aqueous polishing liquid, oiliness lapping liquid lubricity is good, grinding speed is fast, rate stabilization also has cooling down effect, and aqueous polishing liquid easily causes workpiece to occur large cut in process of lapping, suspension stability is poor, therefore, the application of oiliness lapping liquid is relatively extensive, but traditional oiliness lapping liquid easily precipitates, polishing efficiency is low, have corrodibility and non-easy cleaning, do not meet the shortcomings such as the requirement of environmental protection.Current research is mainly for water diamond lapping liquid, and the research also rarely seen report to oiliness diamond grinding fluid.
Summary of the invention
The object of the invention is the weak point in order to overcome prior art, proposing a kind of oiliness diamond grinding fluid and preparation method thereof.Oiliness diamond grinding fluid provided by the invention is applied to the grinding and polishing of superfinish, polishing efficiency can be improved greatly, dispersing property is good, long-term storage can there is not sedimentation, high by product glossiness after its polishing, polishing effect is good and not containing harmful composition, not etching apparatus, be easy to cleaning, be conducive to environmental protection.
In order to realize above-mentioned target, present invention utilizes tensio-active agent and modification is carried out to particle, make diamond particles can keep good dispersion state in oil, there is good stability and not easily scratch polishing sample again.Add the synergistic function with some additives, improve the polishing speed of oiliness diamond grinding fluid and obtain good polishing effect.
Oiliness diamond grinding fluid provided by the invention, is characterized in that, this lapping liquid is made up of diadust, tensio-active agent, dispersion agent, pH value regulator, wetting agent and oil, and the weight percentage (wt.%) of each composition is:
Diadust: 0.001%-10%;
Tensio-active agent: 0.001%-20%;
Dispersion agent: 0%-20%;
PH value regulator: 0%-10%;
Wetting agent: 0%-10%;
All the other are oil;
Wherein, described tensio-active agent is nonionogenic tenside, one or more in anion surfactant or cats product, described nonionogenic tenside is castor oil polyoxyethylene ether (preferred EL-n, n=10-90 and HEL-20, HEL-40, HEL-60), lauric acid polyoxyethylene ester, polyoxyethylene oleic acid ester, polyoxyethylene stearic acid ester, aliphatic amine polyoxyethylene ether, Block polyoxyethylene-polyethenoxy ether, fatty alcohol-polyoxyethylene ether, alkylol amide polyethylene oxide ether, alkyl glycoside, coconut oil fatty acid monoethanolamide, cocoanut fatty acid diethanolamide, ethylene glycol monostearate, Triglycol distearate, Zerol, Polyglycerine monostearate, sucrose fatty ester, sorbitan fatty acid ester, one or more in polyoxyethylene sorbitan fatty acid ester, described anion surfactant is one or more in C12-16 sodium alkyl benzene sulfonate, sulfonated alkyl naphathalene, C12-16 alkyl sodium sulfonate, alpha-olefin sodium sulfonate, sulfonated lignin, sulfonated petro-leum, C12-16 alkyl-sulphate, ricinolic acid butyl ester sodium sulfate, fatty alcohol polyoxyethylene ether sulfate, lauramide sodium ethyl sulfate, oleoyl amino acid sodium, N-acyl amino hydrochlorate, aliphatic alcohol polyethenoxy ether carboxylate, described cats product is one or more in tetrahydroglyoxaline, Dodecyl trimethyl ammonium chloride, Trimethyllaurylammonium bromide, 4 bromide, trimethyl ammonium sulfate.The preferred 0.01-10% of weight percentage of tensio-active agent, more preferably 0.1-7%.
Described dispersion agent is one or more in polyoxyethylene glycol, ethylene glycol, polypropylene glycol, hexyl decyl alcohol, Sodium hexametaphosphate 99, tripoly phosphate sodium STPP, trisodium phosphate, sodium polyacrylate, polyacrylic acid, gum arabic powder, hydroxypropylcellulose, Vltra tears, Natvosol, carboxymethyl cellulose, HYDROXY PROPYL METHYLCELLULOSE, methylcellulose gum, N-Methyl pyrrolidone, polyvinylpyrrolidone, sodium silicate, silane coupling agent.The preferred 0.01-10% of weight percentage of dispersion agent, more preferably 0.01-1%.
Described diadust is diamond single crystal body or polycrystal, and diamond crystal particle diameter is 1-9 micron.The preferred 0.01-5% of weight percentage of diadust, more preferably 0.05-2%.
PH value regulator can also be comprised in lapping liquid, described pH value regulator is one or more in potassium hydroxide, sodium hydroxide, ammoniacal liquor, thanomin, trolamine, stearylamine, α-amino isopropyl alcohol, hydrochloric acid, sulfuric acid, nitric acid, boric acid, acetic acid, stearic acid, phenylformic acid, Sodium Benzoate, oleic acid, sodium oleate, Whitfield's ointment, lauric acid, vinylformic acid, tartrate, gallic acid, and the pH value regulation range of lapping liquid is 3-11.
Wetting agent can also be comprised in lapping liquid, described wetting agent is glycerine, ethyl acetate, 1,2-PD, 1,3-PD, glycerol, 1, one or more in 3-butyleneglycol, BDO, lauryl alcohol, trolamine, AMONYL 380LC.The preferred 0.01-6% of weight percentage of wetting agent, more preferably 0.5-2%.
Described oil is one or more in white oil, petroleum naphtha, mineral oil, synthetic oil, base oil, rapeseed oil, Viscotrol C, sweet oil, whiteruss.
A kind of oiliness diamond grinding fluid that the present invention proposes, its component and proportioning are:
The invention provides a kind of preparation method of above-mentioned oiliness diamond grinding fluid, concrete steps are:
1) wetting agent, tensio-active agent and oil are mixed in proportion, fully stir 5-30 minute.
2) diadust is mixed with above-mentioned oily liquid, fully stir and ultrasonic 5-30 minute.
3) in above-mentioned oily liquid, add dispersion agent, fully stir and ultrasonic disperse 5-30 minute.
4) in above-mentioned scattered oily liquid, add pH value regulator, fully stir, adjust ph is 3-11, is namely prepared into oiliness lapping liquid.
The present invention compared with prior art has the following advantages:
1) diamond grinding fluid of the present invention can realize mechanical effect and the good matching of chemical action, and make polishing efficiency high, quality of finish is good.Diamond grinding fluid of the present invention can be applicable to the thinning grinding of LED Sapphire Substrate sheet and silicon carbide wafer, also may be used for the grinding and polishing on the surfaces such as high technology ceramics, precision compression molds, optical fiber and semiconductor compound wafer.
2) diamond grinding fluid dispersing property of the present invention is good, can long-term storage keep uniform and stable state sedimentation not to occur.
3) high by product glossiness after its polishing, polishing effect is good, and diamond grinding fluid of the present invention, not containing harmful composition, is easy to cleaning, is conducive to environmental protection.
Embodiment
Below by embodiment, the invention will be further elaborated, certainly in no case should be construed as limiting the scope of the invention.
(embodiment)
For specific embodiment 1:
Embodiment 1:(prepares the oiliness diamond grinding fluid of 1000 grams)
In the present embodiment each component of lapping liquid and weight percent as follows:
3 micron diamond polycrystalline powders 0.1%
Tensio-active agent lauric acid polyoxyethylene ester 1%
Tensio-active agent alpha-olefin sodium sulfonate 1%
All the other are 3# industrial grade white oil, the place of production: Maoming Petrochemical.
Get 10 grams of tensio-active agent lauric acid polyoxyethylene ester and 10 grams of tensio-active agent alpha-olefin sodium sulfonates add in the white oil of 979 grams, fully stir 5 minutes.
Getting 1 gram particle degree is that the polycrystalline diamond micro mist of 3 microns mixes with above-mentioned oily liquid, stirs and ultrasonic 15 minutes, and fully wetting diadust surface, is namely prepared into oiliness lapping liquid.
The preparation method of the oiliness diamond grinding fluid of embodiment 2-6, concrete steps are:
1) wetting agent, tensio-active agent and oil are mixed in proportion, fully stir 5 minutes;
2) diadust is mixed with above-mentioned oily liquid, fully stir and ultrasonic 15 minutes;
3) in above-mentioned oily liquid, add dispersion agent, fully stir and ultrasonic disperse 15 minutes;
4) in above-mentioned scattered oily liquid, add pH value regulator, fully stir, adjust ph is 3-11, is namely prepared into oiliness lapping liquid.
Glossing: polishing machine used is single side polishing machine, use polishing disk is copper dish, and pressure is 5kgf, and rotating speed is 80rpm/min, and polishing time is 10min, and polishing fluid flow is 2ml/min.
Polishing speed: polish removal rate is obtained by the change calculations of LED substrate slice thickness before and after polishing, five-spot measurement is adopted to average, before and after the polishing of test LED substrate slice, the available milscale of change of thickness records, and polishing speed is the ratio that variation in thickness and polishing time are removed in polishing.
Under above-mentioned polishing technological conditions, this lapping liquid is used to process the LED substrate slice of 2 cun, polishing front surface roughness value (Ra) is 27.546nm, and surface of polished roughness value (Ra) reaches 4.642nm, and polishing speed reaches 1.25 [mu.
The above is only wherein a kind of embodiment of the present invention; it should be noted that the those skilled in the art for the art; under the prerequisite not departing from the technology of the present invention principle; can also make corresponding adjustment and improve, these adjustment and improvement also should be considered as protection scope of the present invention.
Following table is component and the content of the medium oil diamond grinding fluid of each embodiment and is carried out the LED substrate slice surfaceness after polishing by it, removed speed.
Claims (4)
1. an application method for oiliness diamond grinding fluid, is characterized in that, this lapping liquid is made up of diadust, tensio-active agent, dispersion agent, pH value regulator, wetting agent and oil, and the weight percentage of each composition is:
Diadust: 0.001%-10%;
Tensio-active agent: 0.001%-20%;
Dispersion agent: 0.01%-10%;
PH value regulator: 0-10%;
Wetting agent: 0.01%-6%;
All the other are oil;
The preparation method of described oiliness diamond grinding fluid is as follows:
1) wetting agent, tensio-active agent and oil are mixed in proportion, fully stir 5-30 minute;
2) diadust is mixed with above-mentioned oily liquid, fully stir and ultrasonic 5-30 minute;
3) in above-mentioned oily liquid, add dispersion agent, fully stir and ultrasonic disperse 5-30 minute;
4) in above-mentioned scattered oily liquid, add pH value regulator, fully stir, adjust ph is 3-11, is namely prepared into oiliness lapping liquid;
Wherein,
Described tensio-active agent is nonionogenic tenside, one or more in anion surfactant or cats product, described nonionogenic tenside is castor oil polyoxyethylene ether, lauric acid polyoxyethylene ester, polyoxyethylene oleic acid ester, polyoxyethylene stearic acid ester, aliphatic amine polyoxyethylene ether, Block polyoxyethylene-polyethenoxy ether, fatty alcohol-polyoxyethylene ether, alkylol amide polyethylene oxide ether, alkyl glycoside, coconut oil fatty acid monoethanolamide, cocoanut fatty acid diethanolamide, ethylene glycol monostearate, Triglycol distearate, Zerol, Polyglycerine monostearate, sucrose fatty ester, one or more in polyoxyethylene sorbitan fatty acid ester, described anion surfactant is one or more in C12-16 sodium alkyl benzene sulfonate, sulfonated alkyl naphathalene, C12-16 alkyl sodium sulfonate, alpha-olefin sodium sulfonate, sulfonated lignin, sulfonated petro-leum, C12-16 alkyl-sulphate, ricinolic acid butyl ester sodium sulfate, fatty alcohol polyoxyethylene ether sulfate, lauramide sodium ethyl sulfate, oleoyl amino acid sodium, N-acyl amino hydrochlorate, aliphatic alcohol polyethenoxy ether carboxylate, described cats product is one or more in tetrahydroglyoxaline, Dodecyl trimethyl ammonium chloride, Trimethyllaurylammonium bromide, 4 bromide, trimethyl ammonium sulfate,
Described dispersion agent is one or more in ethylene glycol, polypropylene glycol, hexyl decyl alcohol, Sodium hexametaphosphate 99, tripoly phosphate sodium STPP, trisodium phosphate, sodium polyacrylate, gum arabic powder, N-Methyl pyrrolidone, polyvinylpyrrolidone, sodium silicate;
Described pH value regulator is one or more in stearylamine, α-amino isopropyl alcohol, boric acid, acetic acid, stearic acid, phenylformic acid, Sodium Benzoate, oleic acid, sodium oleate, Whitfield's ointment, lauric acid, vinylformic acid, tartrate, gallic acid, and the pH value regulation range of lapping liquid is 3-11;
Described wetting agent is one or more in ethyl acetate, lauryl alcohol, trolamine, AMONYL 380LC;
Described oiliness diamond grinding fluid is used for the thinning grinding of LED Sapphire Substrate sheet and silicon carbide wafer, or for the grinding and polishing of high technology ceramics, precision compression molds, optical fiber and semiconductor compound wafer surface.
2. application method according to claim 1, it is characterized in that, the weight percentage of diadust is 0.05-2%, and the weight percentage of wetting agent is 0.5-2%, the weight percentage of tensio-active agent is 0.1-7%, and the weight percentage of dispersion agent is 0.01-1%.
3. application method according to claim 1, is characterized in that, diadust is diamond single crystal body or polycrystal, and diamond crystal particle diameter is 1-9 micron.
4. application method according to claim 1, is characterized in that, described oil is one or more in mineral oil, synthetic oil, base oil.
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