CN103009241A - A glass substrate lamination tool, a glass substrate end surface polishing method, and a manufacturing method of the glass substrate - Google Patents
A glass substrate lamination tool, a glass substrate end surface polishing method, and a manufacturing method of the glass substrate Download PDFInfo
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- CN103009241A CN103009241A CN2012103648854A CN201210364885A CN103009241A CN 103009241 A CN103009241 A CN 103009241A CN 2012103648854 A CN2012103648854 A CN 2012103648854A CN 201210364885 A CN201210364885 A CN 201210364885A CN 103009241 A CN103009241 A CN 103009241A
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- glass substrate
- end surface
- axle
- magnetic recording
- base plate
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Abstract
The purpose of the invention aims at providing a glass substrate lamination tool, a glass substrate end surface polishing method, and a manufacturing method of the glass substrate. The glass substrate end surface polishing method and the manufacturing method of the glass substrate may increase processing accuracy and productivity in end face polishing step and is easy to manipulate and may polish outer end face and the inner end face while the glass substrate lamination is not disintegrated. The glass substrate lamination tool is used for polishing a disc-shaped magnetic recording media equipped with a circular hole at the central part of the magnetic recording media by using the outer end face and/or the inner end face of the glass substrate lamination laminated by the glass substrates. The glass substrate lamination tool is characterized by comprising a shaft which is inserted into the hole of the glass-substrate-used magnetic recording media, which supports the inner end face of the glass substrate lamination, and which performs counterpoint on the glass-substrate-used magnetic recording media. The shaft comprises locking bolt inlaying portion capable of cooperating with a locking bolt at two ends of the shaft, and a shaft fixing portion which supports the glass substrate lamination round the shaft.
Description
Technical field
The present invention relates to the stacked instrument of glass substrate, used this instrument glass base plate for magnetic recording carrier end surface grinding method and used the manufacture method of the glass base plate for magnetic recording carrier of this end surface grinding method.
Background technology
The disk of the employed disc-shape such as magnetic disc recording device used aluminium alloy base plate in the past.Along with the requirement of high density recording, glass substrate harder than aluminium alloy base plate and flatness and flatness excellence becomes main flow but in recent years.
Glass base plate for magnetic recording carrier has the plane of pair glass substrate and the manufacturing procedure that end face (inner and outer circumferential surfaces) is implemented the processing such as grinding, grinding in its manufacturing process.And, as the method that improves the operating efficiency when the end face to glass substrate grinds, use to form multi-disc the glass substrate overlapping glass substrate laminate that forms and method of simultaneously end face of a plurality of glass substrates being ground on the face direction.
The end surface grinding of glass substrate carries out outer peripheral face and inner peripheral surface two sides.Therefore, when as mentioned above glass substrate laminate being ground, in the past, temporarily at periphery end surface grinding instrument upper strata laminated glass substrate, carry out peripheral end face and grind, afterwards, temporarily glass substrate laminate is disintegrated, interior all end surface grindings with instrument on laminated glass substrate again, then carry out interior all end surface grindings.
Yet, according to the method, between the operation of periphery end surface grinding and interior all end surface grindings, glass laminate need to be disintegrated, the operate miss when having again stacked operation or when laminated glass substrate again owing between glass substrate, accompanying foreign matter to the situation of glass substrate injury.In addition, because operation quantity is more, also have problems on the productivity ratio.
In order to address this problem, can carry out continuously to need not glass substrate laminate disintegrated that peripheral end face grinds and the instrument of interior all end surface grindings is studied (for example patent documentation 1).
The prior art document
Patent documentation
Patent documentation 1: the JP 2003-159639 of Japan communique
But, in patent documentation 1, be bolted glass substrate along plate setting up and down, become the structure of clamping glass substrate, therefore exist to spend assembling device and easily produce the problem of rigging error time.And, because parts are more, on maintainability, also have problems.
And, in patent documentation 1, when the outer end of glass substrate laminate is ground, with the both ends of the first plate contact glass substrate laminate, by inserting the first plate connecting piece of the endoporus that leads to glass substrate laminate, fix the first plate and the clamping glass substrate.Yet because the diameter of the first plate connecting piece is less than the diameter of the endoporus of glass substrate laminate, therefore in grinding step, glass substrate might misplace.The concentricity that at this moment, also might produce the glass substrate that obtains reduces, the problem of the relevant machining accuracies such as circularity reduction of the round hole part (interior perimembranous) of glass substrate or peripheral part.
Summary of the invention
The problem that the present invention has in view of above-mentioned prior art, its purpose is to provide a kind of glass substrate stacked instrument, can improve machining accuracy, productivity ratio in the end surface grinding operation, easily operation, and, need not that the glass substrate laminate disintegration can be carried out peripheral end face and grind and interior all end surface grindings.
In order to solve above-mentioned problem, the invention provides the stacked instrument of a kind of glass substrate, peripheral end face for the glass substrate laminate that will be laminated at the glass base plate for magnetic recording carrier of the round-meshed disc-shape of central part tool grinds and/or interior all end surface grindings, it is characterized in that, has axle, described axle is inserted into the circular hole of described glass base plate for magnetic recording carrier, support interior all end faces of described glass substrate laminate, carry out the contraposition of described glass base plate for magnetic recording carrier, described axle possesses: the tight fixed bolt fitting portion, and can be at the chimeric tight fixed bolt in the two ends of axle; And the axle fixed part, at the peripheral support glass substrate laminate of axle.
The invention effect
All end faces in the present invention supports by axle when forming glass substrate laminate, thus can arrange accurately, fixing glass base plate for magnetic recording carrier (following also referred to as " glass substrate ").Therefore, machining accuracy can be improved, concentricity and the circularity of the glass substrate that obtains can be improved.And, because the number of packages of parts is less, therefore be difficult for producing rigging error, maintainability is improved.And, even when internal all end faces and peripheral end face grind, can glass substrate laminate not disintegrated and carry out continuously yet, even therefore when both ends of the surface are ground, can prevent from glass substrate is produced damage, improve yield rate and productivity ratio yet.
Description of drawings
Fig. 1 is the key diagram of axle involved in the present invention.
Fig. 2 is the structure key diagram of the peripheral end face in first embodiment involved in the present invention when grinding.
Fig. 3 is the key diagram of the tight fixed bolt in first embodiment involved in the present invention.
Fig. 4 is the key diagram about the interior all end surface grinding instruments in first embodiment involved in the present invention.
Fig. 5 is the key diagram about the interior all end surface grinding instruments in first embodiment involved in the present invention.
Fig. 6 (A) and 6(B) be key diagram about the glass substrate laminate in first embodiment involved in the present invention.
Reference numeral
10 axles
12 axle fixed parts
13 tight fixed bolt fitting portions
25 glass substrate laminates
26 tight fixed bolts
60 glass substrates
61 pads
The specific embodiment
Below, describe being used for implementing mode of the present invention with reference to accompanying drawing, but the present invention is not defined in following embodiment, without departing from the scope of the invention can be to the in addition various distortion and substituting of following embodiment.
The first embodiment
In the present embodiment, the stacked instrument of glass substrate of the present invention is described.
The stacked instrument of glass substrate of the present invention that uses when the peripheral end face grinding of carrying out glass substrate laminate and/or interior all end surface grindings has following structure, and wherein said glass substrate laminate is for being laminated for the glass substrate at the round-meshed disc-shape of central part tool of magnetic recording media.
At first, the stacked instrument of glass substrate of the present invention has axle, and described axle is inserted into the circular hole of glass base plate for magnetic recording carrier, supports interior all end faces of described glass base plate for magnetic recording carrier duplexer, carries out the contraposition of glass base plate for magnetic recording carrier.And described axle is formed with respectively at the tight fixed bolt fitting portion of the chimeric tight fixed bolt in the two ends of axle with at the axle fixed part of the peripheral support glass substrate laminate of axle.
Below, the stacked instrument of above-mentioned glass substrate is described.
Fig. 1 represents to consist of the axle of the stacked instrument of glass substrate of the present invention.Axle 10 has interior all support portions (axial region) 11, be arranged at the axle fixed part (glass substrate laminate maintaining part) 12 on the axle and be arranged at the tight fixed bolt fitting portion 13 at the two ends of interior all support portions.
Herein, although the material of axle 10 and being not particularly limited in order to keep glass substrate laminate in the end surface grinding operation, preferably has certain intensity.For example, can suit to use the various metals such as stainless steel, iron and steel, aluminium, but the material that preferably is difficult for getting rusty, having intensity more preferably uses stainless steel.
As diaphragm, can use ceramic membrane, the diamond-like carbon film-coating (being designated hereinafter simply as the DLC film) etc. such as metal (plating) film, chromium oxide of hard chrome plating etc., but particularly preferably use the DLC film from the difficulty or ease of film strength and film thickness monitoring.In addition; to the thickness of diaphragm and be not particularly limited, can consider the frequency of utilization of film strength, mar proof, parts or cost etc. and select, but preferred thicker from this purpose; for example preferred thickness is more than the 2 μ m when selecting the DLC film, more preferably more than the 4 μ m.
For the thickness of interior all support portions 11 of axle, preferably roughly the same with the internal diameter of glass substrate laminate.This be because, glass substrate laminate is stacked, be supported in interior all support portions, so by the interval between the interior perimembranous that reduces interior all support portions and glass substrate laminate, so that the positioning accuracy of glass substrate improves the machining accuracy raising.Yet, when the interval too small of the interior perimembranous of glass substrate and interior all support portions, when the loading and unloading glass substrate laminate, might bring damage to glass substrate, therefore preferably consider that the performance accuracy etc. when the loading and unloading glass substrate selects this interval.In addition, the diameter of the axial region of said axle also comprises the thickness of diaphragm interior in the situation that this surface has diaphragm herein.
And the axle fixed part 12 that consists of axle is the parts with cylindrical shape that are fixed on the axle of axle, has the effect of the bottom of supporting the glass substrate laminate that is inserted into interior all support portions 11.Therefore, the external diameter of preferred axes fixed part 12 consists of with and the mode less than the external diameter of glass substrate larger than the internal diameter of the glass substrate that consists of glass substrate laminate.And the upper surface of preferred axes fixed part 12 is that at least a portion of the face of support glass substrate duplexer one side consists of in the mode vertical with interior all support portion 11.By having this structure, can firmly fix glass substrate laminate, therefore can or in grinding step, prevent the glass substrate laminate damage when mobile, improve machining accuracy.
And preferred axes fixed part 12 is consisting of in the mode that the axle of axle is adjusted its position.This is owing to the position by the axle fixed part changes, and can be corresponding with the glass substrate laminate 25 of various thickness, thereby improves versatility.
Be provided with tight fixed bolt fitting portion 13 at the two ends of axle 10.Tight fixed bolt fitting portion 13 is for chimeric, employed tight fixed bolt and the parts that arrange have the shape of the recess corresponding with the shape of tight fixed bolt when being installed in the periphery of carrying out glass substrate laminate and grinding.
Can use the stacked instrument of the glass substrate with axle described above to carry out peripheral end face grinds and interior all end surface grindings.At first, the situation of periphery end surface grinding described.
The peripheral end face of glass substrate laminate grinds and can tight fixed bolt is installed and carry out at the tight fixed bolt fitting portion of axle.Use Fig. 2 that its concrete structure is described.
In Fig. 2, interior all support portions 11 are inserted in the circular hole of glass substrate laminate 25 that its two ends dispose pad 20 ~ 22, the interior perimembranous of support glass substrate duplexer 25.And glass substrate laminate 25 is supported by axle fixed part 12 via pad 22 in its bottom, and then is supported by tight fixed bolt via pad 23,24, and the tight fixed bolt 26 that arranges in the upper end of opposite side between clamp and fix from above-below direction.
Therefore, during periphery end surface grinding operation, can displacement and can accurately keep in the position of glass substrate laminate, can improve machining accuracy.
Herein, for tight fixed bolt 26, if be not particularly limited consisting of then from the mode that above-below direction vertically keeps glass substrate laminate 25 also can be arranged on the peripheral end face milling tool.For example, can be for such as Fig. 2, shape shown in Figure 3.Fig. 3 that the clamp screw spigot has been amplified in use describes this structure.
The washer portion 32 that tight fixed bolt 26 used in the present invention preferably has bolt part 31 and do not engage with bolt part 31.Bolt part 31 is arranged at the center of washer portion 32 with perforation the mode in hole consists of, and has roughly clavate shape.
Therefore, the shape of bolt part 31 is that a side end consists of in the mode that can be connected with the peripheral end face milling tool, and the opposing party's end consists of in the mode that can be fixed in axle.
Herein, the end that namely is fixed on the side on the axle of bolt part 31 in a side's of tight fixed bolt end is protruded and (formation) is set the axle fitting portion is arranged, and described axle fitting portion preferably begins to have successively convex cylindrical portion 33 and the threaded portion 34 that does not form ridge from leading section.At this moment, it is spill cylindrical portion and threaded portion that the tight fixed bolt fitting portion of axle forms the concave shape corresponding with the shape of axle fitting portion, and described convex cylindrical portion 33 consists of in mutually chimeric mode with described matrix cylindrical portion.
Because the axle fitting portion of tight fixed bolt and the tight fixed bolt fitting portion of axle have this structure, thus the recess of the correspondence of the tight fixed bolt fitting portion of the matrix cylindrical portion of the leading section of tight fixed bolt and axle (matrix cylindrical portion) become so-called tube-in-tube structure (Yin ?Agencies make) (cylinder is chimeric).Therefore, when when axle is installed tight fixed bolt, can be not do not fix with accurately position and angle prejudicially, machining accuracy is improved.
Therefore washer portion 32 has the effect that prevents that when set bolt section 31 its rotation from propagating to glass substrate laminate owing to being the parts that do not engage with bolt part 31.And washer portion 32 preferably has the large shape of area of the face 36 that the Area Ratio of the face 35 that contacts with glass substrate laminate contacts with bolt part 31.By having this shape, can disperse to give the pressure of glass substrate laminate, thereby at larger scope support glass substrate duplexer.
And, for glass substrate laminate 25, laminated glass substrate only, but preferred alternately laminated glass substrate and pad.By between glass substrate, configuring pad, can prevent from the principal plane of glass substrate is produced damage.In addition, be not particularly limited for the shape of pad, so long as do not hinder the shape of grinding to get final product, for example can be made as the disc-shape identical with glass substrate.And when carrying out the peripheral end face grinding, the external diameter of preferred at least pad is less than the external diameter of glass substrate.
To have the stacked instrument setting of glass substrate of above structure and be fixed in the peripheral end face lapping device, abrasive brush or grinding pad will be attached to the peripheral part of glass substrate laminate 25, supply with the lapping liquid that contain abrasive particle on one side, carry out the grinding of peripheral end face on one side.
The situation of following internal all end surface grindings describes.
As the stacked instrument of employed glass substrate when carrying out interior all end surface grindings, except described axle, when carrying out interior all end surface grindings of glass substrate laminate, also have and glass substrate laminate can be fixed in the namely interior all end surface grinding instruments of inner structure.Interior all end surface grinding instruments can be fixed in inside with glass substrate laminate, after glass substrate laminate is fixed in the inside of interior all end surface grinding instruments, so long as can extract the instrument of axle out, with regard to need not to limit its shape, structure and use.
For example, as interior all end surface grinding instruments, can enumerate have need not with glass substrate laminate disintegrate can insert stacked and be fixed with the axle of glass substrate laminate peristome, fixing glass substrate duplexer fixed part and can take out the instrument of the axle conveying end of axle.
Herein, peristome preferably has the opening diameter roughly the same with the external diameter of the glass substrate that consists of glass substrate laminate.When the external diameter of glass substrate is identical with peristome, when inserting glass substrate laminate, might sustain damage, consider that therefore performance accuracy etc., preferred above-mentioned opening diameter are provided with the gap of degree injury-free when glass substrate laminate is inserted into instrument.
As fixed part, can enumerate by the upper and lower surface from glass substrate laminate and clamp the parts that are fixed.Such as following method: press the fixing plate of using of the upper and lower surface that is arranged at glass substrate laminate by bolt etc. from above-below direction, thereby press glass substrate laminate.
Yet for internal all end faces grind, preferred describedly fixingly have peristome with the part corresponding with round hole part glass substrate laminate plate.This peristome also can double as the axle conveying end.And, preferably when clamping, by the roughly whole surface of the glass substrate of the upper and lower surface of glass substrate laminate is pressed pressure is disperseed, thereby prevent the damage of glass substrate.
The axle conveying end preferably have with axle in the external diameter the best part be the roughly the same opening diameter of the external diameter of axle fixed part.This is because by having this structure, can take out axle behind fixed axis and the glass substrate laminate accurately on interior all end surface grinding instruments.
Use the concrete structure example of the internal all end surface grinding instruments of Fig. 4, Fig. 5 to describe, but be not defined in this structure.Herein, Fig. 4 is the stereogram of interior all end surface grinding instruments, and Fig. 5 is axle that expression will keep, the be fixed with glass substrate laminate cutaway view when being arranged at inside.
As shown in Figure 4, interior all end surface grinding instruments 40 are preferably included in retainer main body 41, its upside maintaining part 42, the location division 43 that upper surface has peristome.
Retainer main body 41 is made of lower frame 44, side frame section 45 and upper frame 46.
Herein, preferably with the chimeric mode of the axle fixed part 12 of the through hole of the axle fixed part 12 that is arranged at lower frame and fixed axis 10 and axle 10 (mode that reduces with the interval (gap) of axle fixed part 12 and through hole), i.e. through hole and axle fixed part 12 formation tube-in-tube structures.By having this structure, can make axle vertically not be fixed in prejudicially interior all end surface grinding instruments 40, machining accuracy is improved.
And lower frame 44, side frame section 45, upper frame 46 are fixed and are assemblied in retainer main body 41.The fixed cell of these parts does not limit, and can be fixed by screw thread etc., but the reduction of the machining accuracy that causes for the lax grade that prevents screw thread preferably is fixed by welding yet.
For upside maintaining part 42 being fixed in the method for retainer main body 41 and being not particularly limited, so long as the method that can fix accurately in place just all can adopt.For example, as shown in Figure 4, also can a plurality of bolts hole 49 be set in upside maintaining part 42, be fixed in the retainer main body by bolt 50 from upper surface side.And, also can at upside maintaining part and retainer main body corresponding position tapping, by being screwed into the retainer main body, the upside maintaining part be fixed.
And, in order accurately to stipulate the position of axle, preferably use positioning element 43.For example positioning element 43 comprises having by the upper end of axle and inserts the bearing portion 52 of the drum of logical axis hole 51, compares to the outstanding a pair of arm 53 of radial direction with bearing portion 52 and connect the alignment pin 54 of each arm.And, insert axises 10 by the axis hole 51 at positioning element, and alignment pin 54 is inserted into be arranged at the pin insertion hole 55,56 of upside maintaining part, retainer main body, the position that can accurately stipulate axle.By using this parts, when axle is fixed in interior all end surface grinding instruments, can carry out exactly this location, machining accuracy is improved.
Preferably with the chimeric mode of the axis hole 51 of positioning element 43 and axle 10 (mode that reduces with gap when embedding both), namely form so-called tube-in-tube structure (cylinder is chimeric) herein.By having this structure, can make axle 10 vertically not be fixed in prejudicially interior all end surface grinding instruments 40, machining accuracy is improved.
And, also be preferably formed tube-in-tube structure for alignment pin 54 and pin insertion hole 56.By having this structure, can be not when positioning element 43 is installed on interior all end surface grinding instruments 40 be fixed with accurately position, angle prejudicially, machining accuracy is improved.
And, for glass substrate laminate 25, also in the explanation to the periphery end surface grinding, be illustrated, although laminated glass substrate only, preferred alternately laminated glass base plate for magnetic recording carrier and pad.In addition, for the shape of pad equally also and be not particularly limited, so long as do not hinder the shape of grinding to get final product, for example can be made as the disc-shape identical with glass substrate.And when carrying out interior all end surface grindings, the internal diameter of preferred at least pad is larger than the internal diameter of glass substrate.
Be arranged on stacked glass substrate laminate 25 on interior all support portions 11 of described axle at the internal end surface milling tool 40 with above structure, glass substrate laminate is fixed in interior all end surface grinding instruments.After this, can extract described axle 10 out in order to carry out interior all end surface grinding operations.
The concrete step that internal all end faces grind as being used for fixing glass substrate duplexer on the internal end surface milling tool for example can be undertaken by the method with following operation.(A) circular open of stacked, as to be fixed with glass substrate laminate 25 axle 10 by upper frame is inserted in the retainer main body 41 of workpiece retainer.At this moment, utilize the through hole on the lower frame 44 be arranged at retainer main body 41 that the axle fixed part 12 of axle is fixed (axle is fixed).
At this moment, preferably stipulate through hole, the shape of axle fixed part 12, size, to become tube-in-tube structure when the through hole that as mentioned above the axle fixed part 12 of axle is inserted on the lower frame 44 that is arranged at retainer main body 41.By said structure, the axle fixed part that can make axle is not eccentric and perpendicularity is fixed in the lower frame of retainer main body than the highland, and machining accuracy is improved.
(B) pad 21 and upside maintaining part 42, positioning element 43 are installed in the upper end of retainer main body, glass substrate laminate is fixed in the retainer.
For alignment pin 54 and pin insertion hole 56, also preferred orientation pin 54, pin insertion hole 56 have corresponding shape, size, make it to become above-mentioned tube-in-tube structure (cylinder is chimeric).By having such structure, can when axle 10 is fixed in retainer main body 41, improve its perpendicularity, thereby can improve the machining accuracy when grinding.
For axis hole 51 and the axle 10 of positioning element, also the axis hole 51 of preferred orientation parts, axle 10 become corresponding shape, size, make it to become aforesaid tube-in-tube structure (cylinder is chimeric).By having such structure, can improve the positioning accuracy of axle 10, improve the perpendicularity of axle, thereby can improve the machining accuracy when grinding.
In addition, although as mentioned above axle fixed part 12 and through hole, alignment pin 54 and the patchhole 56 of retainer main body 41, the axis hole 51 of positioning element and the content that axle 10 is so-called tube-in-tube structure of preferred axes are illustrated, preferred three parts have tube-in-tube structure simultaneously when the special requirement high manufacturing accuracy.This be because, by having this structure, can more improve positioning accuracy, the perpendicularity of axle, can improve positioning accuracy fixing at interior all end surface grinding instruments, when keeping glass substrate laminate, improve the machining accuracy when grinding.
(C) through hole from the lower frame 44 that is arranged at the retainer main body is axially extracted out the below, when having used positioning element 43 in (B) operation positioning element is also unloaded.
(D) abrasive brush is inserted into the medium pore of glass substrate laminate from the top, lapping liquid is supplied with from the top in the limit, the limit makes workbench and the abrasive brush rotation that is fixed with the retainer main body, and makes it simultaneously to move reciprocatingly at direction of principal axis, thereby carries out interior all end surface grindings of glass substrate laminate 25.
By above operation, can carry out the grinding of interior all end faces.Also can be from being arranged at that through hole on the lower frame inserts axle 10 after grind finishing and take out with the state of glass substrate laminate, also glass substrate laminate can be disintegrated and single taking-up glass substrate.
Above, the method that the peripheral end face that has used the stacked instrument of glass substrate of the present invention is ground and the method for interior all end surface grindings are illustrated, but can either only carry out any one party in peripheral end face grinding and the interior all end surface grindings, also can carry out continuously the grinding step of two methods.
When carrying out continuously, as long as will finish a side's of peripheral end face grinding step or interior all end surface grinding operations glass substrate laminate offers the opposing party with the state that is fixed in axle grinding step.
In addition, when grinding continuously, glass substrate laminate 25 is laminated glass substrate only also, but preferably uses the structure of alternately laminated glass substrate and pad.
For the shape of pad and be not particularly limited, so long as do not hinder the shape of grinding to get final product, for example preferably be made as the disc-shape identical with glass substrate.
Use Fig. 6 that glass substrate laminate is described herein.Fig. 6 (A) is the transverse sectional view that schematically shows the glass substrate laminate on the A-A ' line of Fig. 6 (B), and Fig. 6 (B) is the figure that expression is observed from the bottom surface side of the glass substrate laminate of Fig. 6 (A).Dotted line among Fig. 6 (A) represents the round hole part of glass substrate central authorities.
As pad, for example shown in Fig. 6 (B), preferably use the pad 61 of external diameter and disc-shape that internal diameter than the Circularhole diameter of glass base plate for magnetic recording carrier 60 large less than the external diameter of glass base plate for magnetic recording carrier 60.This shape can be used in the operation when carrying out continuously peripheral end face grinding step and interior all end surface grinding operations especially aptly, but also can use when only the end face of one party being ground.Why pad being made as shape as described above, size, is because preferably by grinding when the peripheral end face of glass substrate and interior all end faces ground, configure with the mode that abrasive brush or grinding pad etc. contacts to avoid pad.Therefore particularly preferably for example as shown in Figure 6, the gap a of the glass substrate of outer circumferential side and pad 61 is larger than the width that carries out end surface grinding (surplus) at least respectively with the gap b of the glass substrate of interior all sides and pad 61.
As described above, in the present invention, in the situation of the either party in carrying out peripheral end face grinding, interior all end surface grindings, because the parts number of packages is less, therefore can both easily grind, can boost productivity.And, also can make the maintainability of instrument than improved in the past.
Particularly carrying out continuously that peripheral end face grinds and need not glass substrate laminate is disintegrated and can implement during interior all end surface grindings, the concentricity of glass substrate is improved, prevent or reduce the damage to glass substrate in operation.And, because operation is easier than instrument in the past, so can easily realize the raising of productivity ratio.
The second embodiment
Present embodiment describes the end surface grinding method of the glass base plate for magnetic recording carrier that used the stacked instrument of glass substrate that has illustrated in the first embodiment.
The peripheral end face that has used the glass base plate for magnetic recording carrier of the stacked instrument of glass substrate that has illustrated in the first embodiment, the Ginding process of interior all end faces specifically.
Tight fixed bolt fitting portion at the axle that maintains glass substrate laminate is installed tight fixed bolt, and the peripheral end face of glass substrate laminate is ground.
The axle that maintains glass substrate laminate is fixed in interior all end surface grinding instruments, after making interior all end surface grinding instruments fix (clamping) glass substrate laminate, extracts axle out, interior all end faces of glass substrate laminate are ground.
Herein, the end surface grinding method of glass base plate for magnetic recording carrier is also as the explanation of the first embodiment, and be not particularly limited external all end faces, interior all end faces which grind first, but preferably carrying out carrying out interior all end surface grindings after peripheral end face grinds.
This is that fixing glass substrate duplexer is so might produce damage by internal all end faces owing to when peripheral end face is ground, inserting axis to the round hole part of the central part that is arranged at glass substrate laminate.Therefore, by after carrying out the peripheral end face grinding step, carrying out interior all end surface grinding operations, even in the situation that when carrying out the peripheral end face grinding step internal all end faces produce damage, also can remove damage, thereby preferably grind with said sequence.
And in this case, glass substrate laminate also preferably uses the alternately laminated structure that glass base plate for magnetic recording carrier and pad are arranged as illustrating in the first embodiment.And, for pad also as illustrating in the first embodiment, the preferred pad that uses as shown in Figure 6 external diameter and disc-shape that internal diameter than glass base plate for magnetic recording carrier Circularhole diameter large less than glass base plate for magnetic recording carrier external diameter.
According to this end surface grinding method, need not the concentricity of glass substrate is improved the disintegrate grinding of peripheral end face and the interior all end faces can implement continuously glass substrate of glass substrate laminate, prevent or reduce to operate in to the damage of glass substrate.And, because operation becomes easily, therefore easily realize the raising of productivity ratio.
The 3rd embodiment
In the present embodiment, the manufacture method of glass base plate for magnetic recording carrier described.
Particularly, the manufacture method of this glass base plate for magnetic recording carrier comprises: to interior all end faces of the glass base plate for magnetic recording carrier of disc-shape and the end surface grinding operation that peripheral end face grinds; The principal plane grinding step that the principal plane of described glass base plate for magnetic recording carrier is ground; And the matting of described glass base plate for magnetic recording carrier.And described end surface grinding operation is the operation of carrying out the end surface grinding method that illustrated in the second embodiment.
In addition, the operation (shape is given operation) that glass element substrate is processed as disc-shape also can be set before the end surface grinding operation.For the glass element substrate that uses this moment and be not particularly limited, can use various glass substrates, for example, can be non-crystalline glass or glass ceramics, also can be the tempered glass (for example chemically reinforced glass) that has strengthening layer on the top layer of glass substrate.And also limit for its manufacturing process, can with utilize float glass process, fusion process, pressure forming method, glass substrate after daraf(reciprocal of farad) is shaped again.
For peripheral end face grinding step and interior all end surface grinding operations, can adopt the method identical with the method that illustrates in the second embodiment.
For the principal plane grinding step, exactly the up and down principal plane of glass base plate for magnetic recording carrier is carried out the operation of attrition process, for example can pass through the two sides lapping device, carry out as milling tool with grinding pad and the lapping liquid that contains abrasive particle.The principal plane grinding step can only once grind, and also can once grind and regrind, also can carry out three times and grind after regrind.
Matting is that glass base plate for magnetic recording carrier is carried out precision cleaning and dry operation.
Make glass base plate for magnetic recording carrier through these operations.And the film that forms magnetosphere etc. above glass base plate for magnetic recording carrier is made disk.
In addition, in the manufacturing process of above-mentioned glass base plate for magnetic recording carrier and disk, also can implement at each inter process the etching (inter process etching) of cleaning glass substrate (inter process cleaning) or glass baseplate surface.
And, also can implement the principal plane grinding process, this principal plane grinding process carries out grinding to up and down two principal planes of glass substrate, adjusts flatness or the thickness of slab of glass substrate.Grinding is to be undertaken by the bonded-abrasive grinding of using free abrasive to carry out the free abrasive grinding of grinding or to use the bonded-abrasive instrument to carry out grinding.The principal plane grinding process is as long as implemented before the principal plane grinding step, can be before or after shape be given operation, before or after the peripheral end face grinding step, the arbitrary time enforcement before or after interior all end surface grinding operations.
And, when glass base plate for magnetic recording carrier is had relatively high expectations mechanical strength, the reinforcement operation (for example chemical enhanced operation) that forms strengthening layer on the top layer of glass substrate is implemented before grinding step or behind the grinding step or during the grinding step.
According to the manufacture method of above-mentioned glass base plate for magnetic recording carrier, in the end surface grinding operation, need not glass substrate laminate is disintegrated and can implement, thereby the concentricity of glass substrate is improved, prevent or reduce to operate in to the damage of glass substrate.And, because operation becomes easily, therefore easily realize the raising of productivity ratio.
The Japanese patent application 2011-209927 that the application proposed based on September 26th, 2011 has introduced its content as reference in this application.
Claims (10)
1. stacked instrument of glass substrate, the peripheral end face that is used for the glass substrate laminate that will be laminated at the glass base plate for magnetic recording carrier of the round-meshed disc-shape of central part tool grinds and/or interior all end surface grindings, it is characterized in that,
Have axle, described axle is inserted into the circular hole of described glass base plate for magnetic recording carrier, supports interior all end faces of described glass substrate laminate, carries out the contraposition of described glass base plate for magnetic recording carrier,
Described axle possesses: the tight fixed bolt fitting portion, and can be at the chimeric tight fixed bolt in the two ends of axle; And the axle fixed part, at the peripheral support glass substrate laminate of axle.
2. the stacked instrument of glass substrate according to claim 1, wherein,
The stacked instrument of described glass substrate when the peripheral end face that carries out described glass substrate laminate grinds, have can be chimeric with described tight fixed bolt fitting portion tight fixed bolt.
3. the stacked instrument of glass substrate according to claim 1 and 2, wherein,
The stacked instrument of described glass substrate also has interior all end surface grinding instruments when carrying out interior all end surface grindings of described glass substrate laminate, all end surface grinding instruments are described glass substrate laminate to be fixed on inner structure in this,
Described interior all end surface grinding instruments can be extracted described axle out behind the inside that described glass substrate laminate is fixed on described interior all end surface grinding instruments.
4. the stacked instrument of the described glass substrate of any one according to claim 1 ~ 3, wherein,
Protrude in a side's of described tight fixed bolt end and to be provided with the axle fitting portion,
Described axle fitting portion begins to have successively convex cylindrical portion and the threaded portion that does not form ridge from leading section,
Described tight fixed bolt fitting portion has matrix cylindrical portion and the threaded portion corresponding with the shape of axle fitting portion,
Described convex cylindrical portion and described matrix cylindrical portion consist of in mutual chimeric mode.
5. the stacked instrument of the described glass substrate of any one according to claim 1 ~ 4, wherein,
At least the part that contacts with glass base plate for magnetic recording carrier of described axle is carried out coating by the diaphragm that is made of diamond-like carbon film-coating.
6. the end surface grinding method of a glass base plate for magnetic recording carrier has used the stacked instrument of the described glass substrate of any one in the claim 1 ~ 5, wherein,
Described tight fixed bolt fitting portion at the described axle that maintains glass substrate laminate is installed tight fixed bolt, the peripheral end face of described glass substrate laminate ground,
The described axle that maintains glass substrate laminate is fixed in interior all end surface grinding instruments, after described glass substrate laminate being fixed in interior all end surface grinding instruments, extracts described axle out, interior all end faces of described glass substrate laminate are ground.
7. the end surface grinding method of glass base plate for magnetic recording carrier according to claim 6, wherein,
Described glass substrate laminate is alternately laminated glass base plate for magnetic recording carrier and pad.
8. the end surface grinding method of glass base plate for magnetic recording carrier according to claim 7, wherein,
Described pad is that external diameter is than the disc-shape that external diameter is little and internal diameter is larger than the Circularhole diameter of described glass base plate for magnetic recording carrier of described glass base plate for magnetic recording carrier.
9. the end surface grinding method of the described glass base plate for magnetic recording carrier of any one according to claim 6 ~ 8, wherein,
After carrying out the peripheral end face grinding, carry out interior all end surface grindings.
10. the manufacture method of a glass base plate for magnetic recording carrier comprises:
The end surface grinding operation is ground interior all end faces and the peripheral end face of glass base plate for magnetic recording carrier;
The principal plane grinding step grinds the principal plane of glass base plate for magnetic recording carrier; And
The matting of glass base plate for magnetic recording carrier; Wherein,
Described end surface grinding operation right to use requires the end surface grinding method of the described glass base plate for magnetic recording carrier of any one in 6 ~ 9 to come glass base plate for magnetic recording carrier is carried out end surface grinding.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011209927A JP5842505B2 (en) | 2011-09-26 | 2011-09-26 | Glass substrate lamination jig, method for polishing end surface of glass substrate for magnetic recording medium using the jig, and method for manufacturing glass substrate for magnetic recording medium using the end surface polishing method |
| JP2011-209927 | 2011-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103009241A true CN103009241A (en) | 2013-04-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012103648854A Pending CN103009241A (en) | 2011-09-26 | 2012-09-26 | A glass substrate lamination tool, a glass substrate end surface polishing method, and a manufacturing method of the glass substrate |
Country Status (2)
| Country | Link |
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| JP (1) | JP5842505B2 (en) |
| CN (1) | CN103009241A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5774078B2 (en) * | 2013-11-29 | 2015-09-02 | ショーダテクトロン株式会社 | Laminated glass block holder |
| WO2019172456A1 (en) | 2018-03-09 | 2019-09-12 | Hoya株式会社 | Spacer, laminate of substrates, substrate production method, and method for producing substrate for magnetic disk |
| CN110125742A (en) * | 2019-05-21 | 2019-08-16 | 浙江隆中机械股份有限公司 | A kind of processing technology of brake disc |
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| JP2000024906A (en) * | 1998-07-08 | 2000-01-25 | U T K Syst:Kk | Glass disk grinding apparatus |
| JP4600931B2 (en) * | 2006-02-10 | 2010-12-22 | Ｈｏｙａ株式会社 | Manufacturing method of glass substrate for magnetic disk |
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- 2011-09-26 JP JP2011209927A patent/JP5842505B2/en not_active Expired - Fee Related
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| US20030082999A1 (en) * | 2001-09-10 | 2003-05-01 | Nippon Sheet Glass Co., Ltd. | Clamping jig for glass substrate, buffer sheet, method for processing glass substrate, and glass substrate |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5842505B2 (en) | 2016-01-13 |
| JP2013073636A (en) | 2013-04-22 |
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Application publication date: 20130403 |