CN103008203A - Film curing device - Google Patents
Film curing device Download PDFInfo
- Publication number
- CN103008203A CN103008203A CN2012105404888A CN201210540488A CN103008203A CN 103008203 A CN103008203 A CN 103008203A CN 2012105404888 A CN2012105404888 A CN 2012105404888A CN 201210540488 A CN201210540488 A CN 201210540488A CN 103008203 A CN103008203 A CN 103008203A
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- furnace chamber
- solidification equipment
- heating
- microwave
- film
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- 238000010438 heat treatment Methods 0.000 claims abstract description 74
- 238000007711 solidification Methods 0.000 claims description 38
- 230000008023 solidification Effects 0.000 claims description 38
- 239000011521 glass Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 14
- 238000001816 cooling Methods 0.000 abstract description 8
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000001351 cycling effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 230000016507 interphase Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000005917 acylation reaction Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229920005575 poly(amic acid) Polymers 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000000112 cooling gas Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 241000276425 Xiphophorus maculatus Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
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- Constitution Of High-Frequency Heating (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
Abstract
The invention relates to the technical field of the manufacturing of liquid crystal display, in particular to a film curing device, which is used for improving the film curing efficiency. The invention discloses a film curing device, which comprises a furnace body with a furnace chamber, a furnace door which is arranged on the furnace body, a microwave heating unit which is arranged inside the furnace chamber, a control unit which is connected with the microwave heating unit through a signal and used for controlling the microwave intensity and heating time and an intake and exhaust unit which is arranged inside the furnace chamber. By adopting a microwave heating way, when a heated material is cured and heated, the heated material can reach a set heating temperature within a short time; in addition, the film curing device also can be used for cooling after the heating and temperature increase, so that the cycling time from a heating furnace to a cooling furnace can be reduced; and therefore, when the film curing device is used for curing the film, the film curing efficiency can be increased.
Description
Technical field
The present invention relates to liquid crystal display manufacturing technology field, particularly a kind of film solidification equipment.
Background technology
Film solidifies the process refer to heating such as being coated in photoresist on the substrate or alignment films is occured chemical reaction, comprises two stages of heating and cooling, finishes in heating furnace and cool furnace respectively; Particularly, the substrate that at first will be coated with photoresist or alignment films is placed in the heating furnace and heats, and photoresist or alignment films is reacted, and then this substrate is placed on cooling curing in the cool furnace.
But, existing heating furnace adopts heat conducting mode to heat, and is heated to 230 ℃ and will needs about 25 minutes, and heat time heating time is longer, and finish heating in heating furnace after, also will put cool furnace into and cool off, and needs certain turnaround time; Therefore, utilize heating furnace and cool furnace to carry out the process length consuming time that film solidifies, the efficient that film solidifies is low.
Summary of the invention
The object of the present invention is to provide a kind of film solidification equipment, be used for improving the efficient that film solidifies.
To achieve these goals, the invention provides following technical scheme:
A kind of film solidification equipment comprises: the body of heater with furnace chamber; Be arranged on the fire door on the described body of heater; Be arranged on the microwave heating unit in the described furnace chamber; Be connected with described microwave heating unit signal, be used for control microwave intensity and the control module of heat time heating time; And be arranged on intake and exhaust unit in the described furnace chamber.
Preferably, described intake and exhaust unit comprises:
Be fixedly mounted on described furnace chamber top, be used for making gas to enter the interior air inlet subelement of described furnace chamber;
And be fixedly mounted on described furnace chamber top, be used for entering the exhaust subelement that the gas in the described furnace chamber is discharged.
Preferably, described control module is programmable logic controller (PLC).
Preferably, described microwave heating unit is fixedly mounted on described furnace chamber top.
Further, above-mentioned film solidification equipment also comprises: the support unit that is fixedly mounted on described furnace chamber bottom.
Preferably, described support unit is a plurality of glass support pipes or a plurality of ceramic support pipe.
Preferably, the height of described stay pipe is less than 5cm.
Further, above-mentioned film solidification equipment also comprises: be arranged on around the described fire door, be used for absorbing the gasket from the microwave of the slot leakage between described fire door and the described body of heater.
Preferably, described gasket is the silicon rubber gasket.
Further, above-mentioned film solidification equipment also comprises: be arranged on the interlocking microswitch on the fire door.
Film solidification equipment provided by the invention, adopt the mode of heating using microwave to heat, to utilize microwave to the unique effect of molecule Semi-polarity group, be that microwave penetrates to be heated in the material and is converted into heat energy with the polar molecule interphase interaction that is heated in the material, make to be heated the material each several part with obtaining heat in a flash and heating up, need not any heat transfer process and just can make and be heated the inside and outside simultaneously heating of material, simultaneously intensification; Compare with existing employing heat conduction mode of heating, can make in the short period of time to be heated the temperature that material reaches setting; In addition, film solidification equipment provided by the invention can also cool off fast to being heated material, has reduced the turnaround time that forwards cool furnace from heating furnace week to; Therefore, compared with prior art, utilize film solidification equipment provided by the invention to carry out film and solidify, reduce heat time heating time and turnaround time, thereby improved the efficient that film solidifies.
Description of drawings
The structural representation of a kind of film solidification equipment that Fig. 1 provides for the embodiment of the invention;
The microwave heating time that Fig. 2 provides for the embodiment of the invention and the graph of a relation of inferior acidylate degree.
The specific embodiment
Existing film solidification process, the heat conducting mode of heating of general employing carries out film and solidifies, heat time heating time is longer, and, after heating is finished, also in cool furnace, cool off, need certain turnaround time, therefore, utilize heating furnace and cool furnace to carry out the process length consuming time that film solidifies, the film curing efficiency is low.
In view of this, the invention provides a kind of improved technical scheme, adopt the mode of heating using microwave to carry out film curing, will shorten the time of heating; And heating and cooling are arranged in the same device, reduce the turnaround time, thereby improved the efficient that film solidifies.
In order to make those skilled in the art better understand technical scheme of the present invention, below in conjunction with Figure of description the embodiment of the invention is described in detail.
At first statement, in liquid crystal display manufacturing technology field, film curing comprises: photoresist curing, alignment films curing and sealed plastic box curing etc. for convenience, hereinafter will be cured as example with alignment films and describe.
As shown in Figure 1, a kind of film solidification equipment provided by the invention comprises: have the body of heater 10 of furnace chamber, be arranged on the fire door 11 on the body of heater 10, be arranged on the microwave heating unit 13 in the furnace chamber; Be connected with microwave heating unit 13 signals, be used for control microwave intensity and the control module of heat time heating time (not shown in FIG.); And be arranged on intake and exhaust unit 14 in the furnace chamber.
Particularly, adopt the mode of heating using microwave, to utilize microwave to the unique effect of molecule Semi-polarity group, be that microwave penetrates in the alignment films and the polar molecule interphase interaction of alignment films is converted into heat energy, the alignment films each several part all heated up obtaining heat in a flash together finish the inferior acylation reaction of polyamic acid; As shown in Figure 2; in the inferior acylation reaction of polyamic acid; inferior acidylate degree can reach 91% in the microwave heating time 7min; and 5 hours inferior acidylate degree of conventional heating just can reach 57%; as seen, adopt the mode of heating using microwave to carry out film curing, firing rate is fast; the inferior acylation reaction of polyamic acid is complete, thereby has significantly improved the efficient that film solidifies.
In addition, in large scale liquid crystal panel production process, when alignment films is carried out film curing, adopt the mode of heating using microwave to carry out film curing, the film solidification equipment is to the inside and outside simultaneously heating of alignment films, simultaneously intensification, homogeneous heating alignment films uneven thickness one can not occur, thereby guarantees the picture disply quality of liquid crystal panel.
When the film solidification equipment that uses the embodiment of the invention to provide carries out alignment films curing, the substrate 1 that is coated with alignment films is placed in the furnace chamber, open microwave heating unit 13 and intake and exhaust unit 14, utilize microwave to the unique effect of molecule Semi-polarity group, be microwave penetrate in the alignment films with alignment films in the polar molecule interphase interaction and be converted into heat energy, the alignment films each several part is being heated up with obtaining heat in a flash, need not any heat transfer process and just can make the inside and outside simultaneously heating of alignment films, heat up simultaneously.In the heating period, in furnace chamber, supply gas at normal temperature by intake and exhaust unit 14, the solvent and the foreign matter that volatilize in the film solidification process are discharged furnace chamber by exhaust outlet; After heating is finished, in furnace chamber, supply cooling gas by intake and exhaust unit 14, accelerate the alignment films cooling; Therefore, compared with prior art, the film solidification equipment that adopts the embodiment of the invention to provide can be finished in the short period of time film and solidify, and reduce the turnaround time that forwards cool furnace from heating furnace week to, thereby has improved the efficient that film solidifies.
Continuation is referring to Fig. 1, and preferably, above-mentioned intake and exhaust unit 14 comprises: be fixedly mounted on the furnace chamber top, be used for making gas to enter the interior air inlet subelement 141 of furnace chamber; And be fixedly mounted on the furnace chamber top, be used for entering the exhaust subelement 142 that the gas in the furnace chamber is discharged.Wherein, air inlet subelement 141 respectively with for gas at normal temperature pipeline and refrigerating gas pipeline connection, be used in the furnace chamber for gas at normal temperature and refrigerating gas; Exhaust subelement 142 is communicated with gas exhaust piping, discharges furnace chamber with entering the gas that has absorbed the solvent that volatilizees in the film solidification process and foreign matter in the furnace chamber.Particularly, when opening microwave heating unit 13, also open simultaneously the gas at normal temperature pipeline, by air inlet subelement 141 gas at normal temperature is sent in the furnace chamber, the gas that enters in the furnace chamber flows on substrate 1 surface, exhaust subelement 142 will enter the gas in the furnace chamber, and the solvent that volatilizees in the film solidification process and foreign matter discharge furnace chamber; After heating is finished, close microwave heating unit 13, close the gas at normal temperature pipeline, open the cooling gas piping, cooling-air is entered in the furnace chamber alignment films is cooled off.Compared with prior art, the film solidification equipment that adopts present embodiment to provide, heating and cooling are carried out at same device, have reduced the turnaround time of substrate being transferred to cool furnace, thereby have improved the efficient that film solidifies.
Preferably, above-mentioned control module is programmable logic controller (PLC), can write control microwave intensity and the program of heat time heating time in programmable logic controller (PLC), so that control microwave intensity and heat time heating time.By setting microwave intensity and heat time heating time, control microwave heating unit 13 is sent the microwave of preset strength, and finishes heating in Preset Time.Preferably, in the specific implementation, in programmable logic controller (PLC), set and send the microwave that frequency is fixed on the 915MHZ wavelength, the microwave of this frequency is corresponding with the dielectric constant of orientation liquid, can make the microwave of microwave heating unit emission have the effect of selective heating, namely only heat for orientation liquid, so can reduce energy consumption, thereby save cost.
In the specific implementation, above-mentioned microwave heating unit 13 is platy structure, is fixedly mounted on top, bottom or the sidewall of furnace chamber; Preferably, microwave heating unit 13 is fixedly mounted on the top of furnace chamber.
Continuation is referring to Fig. 1, and above-mentioned film solidification equipment also comprises: the support unit 12 that is fixedly mounted on the furnace chamber bottom; So arrange and be beneficial to circulation of air, accelerate cooling effectiveness.
Preferably, above-mentioned support unit 12 is a plurality of glass support pipes or a plurality of ceramic support pipe; Microwave so is set can penetrates glass or pottery, microwave just can come back reflective in furnace chamber like this, improves the microwave utilization rate, treats simultaneously the curing alignment films and heats more homogeneous.
Preferably, the height of above-mentioned stay pipe is less than 5cm.
Further, above-mentioned film solidification equipment also comprises: be arranged on around the described fire door 11, be used for absorbing the gasket from the microwave of the slot leakage between fire door 11 and the body of heater 10.
Preferably, gasket is the silicon rubber gasket.So arrange, a small amount of microwave absorption that goes out from slot leakage between fire door 11 and the body of heater 10 can be fallen, reduce microwave to operator's infringement, improve the processing safety of film solidification equipment.
Further, above-mentioned film solidification equipment also comprises the interlocking microswitch that is arranged on the fire door; When fire door did not shut or opens fire door, powered-down further improved the processing safety of film solidification equipment.
In sum, film solidification equipment provided by the invention, adopt the mode of heating using microwave to heat, to utilize microwave to the unique effect of molecule Semi-polarity group, be that microwave penetrates to be heated in the material and is converted into heat energy with the polar molecule interphase interaction that is heated in the material, make to be heated the material each several part with obtaining heat in a flash and heating up, need not any heat transfer process and just can make and be heated the inside and outside simultaneously heating of material, simultaneously intensification; Compare with existing employing heat conduction mode of heating, can make in the short period of time to be heated the temperature that material reaches setting; In addition, film solidification equipment provided by the invention can also cool off fast to being heated material, and reducing knows clearly forwards the turnaround time of cool furnace to from heating furnace week; Therefore, compared with prior art, utilize film solidification equipment provided by the invention to carry out film and solidify, reduce heat time heating time and turnaround time, thereby improved the efficient that film solidifies.
In addition, adopt the mode of heating using microwave to carry out film curing, alignment films uneven thickness one situation can not appear in homogeneous heating, thereby improves the liquid crystal panel display quality.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (10)
1. a film solidification equipment comprises: have the body of heater of furnace chamber, be arranged on the fire door on the described body of heater; It is characterized in that, also comprise:
Be arranged on the microwave heating unit in the described furnace chamber;
Be connected with described microwave heating unit signal, be used for control microwave intensity and the control module of heat time heating time;
And be arranged on intake and exhaust unit in the described furnace chamber.
2. film solidification equipment as claimed in claim 1 is characterized in that, described intake and exhaust unit comprises:
Be fixedly mounted on described furnace chamber top, be used for making gas to enter the interior air inlet subelement of described furnace chamber;
And be fixedly mounted on described furnace chamber top, be used for entering the exhaust subelement that the gas in the described furnace chamber is discharged.
3. film solidification equipment as claimed in claim 1 is characterized in that, described control module is programmable logic controller (PLC).
4. such as the arbitrary described film solidification equipment of claim 1-3, it is characterized in that described microwave heating unit is fixedly mounted on described furnace chamber top.
5. film solidification equipment as claimed in claim 4 is characterized in that, also comprises: the support unit that is fixedly mounted on described furnace chamber bottom.
6. film solidification equipment as claimed in claim 5 is characterized in that, described support unit is a plurality of glass support pipes or a plurality of ceramic support pipe.
7. film solidification equipment as claimed in claim 6 is characterized in that, the height of described stay pipe is less than 5cm.
8. film solidification equipment as claimed in claim 1 is characterized in that, also comprises: be arranged on around the described fire door, be used for absorbing the gasket from the microwave of the slot leakage between described fire door and the described body of heater.
9. film solidification equipment as claimed in claim 8 is characterized in that, described gasket is the silicon rubber gasket.
10. film solidification equipment as claimed in claim 1 is characterized in that, also comprises: be arranged on the interlocking microswitch on the described fire door.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210540488.8A CN103008203B (en) | 2012-12-13 | 2012-12-13 | Film curing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210540488.8A CN103008203B (en) | 2012-12-13 | 2012-12-13 | Film curing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103008203A true CN103008203A (en) | 2013-04-03 |
| CN103008203B CN103008203B (en) | 2015-07-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210540488.8A Expired - Fee Related CN103008203B (en) | 2012-12-13 | 2012-12-13 | Film curing device |
Country Status (1)
| Country | Link |
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| CN (1) | CN103008203B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280943A (en) * | 2014-10-31 | 2015-01-14 | 合肥鑫晟光电科技有限公司 | Heating cavity and thermosetting device |
| CN104312478A (en) * | 2014-10-31 | 2015-01-28 | 合肥鑫晟光电科技有限公司 | Frame sealing glue composition, display device, heating chamber and thermocuring device |
| CN105271792A (en) * | 2015-09-24 | 2016-01-27 | 京东方科技集团股份有限公司 | Solidification apparatus and solidification method |
| CN110296583A (en) * | 2018-03-21 | 2019-10-01 | 安徽瑞科玛电池有限公司 | A kind of lithium battery drying unit |
| CN113406821A (en) * | 2021-06-18 | 2021-09-17 | 深圳市华星光电半导体显示技术有限公司 | Baking device for liquid crystal alignment film |
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| CN102059214A (en) * | 2010-12-06 | 2011-05-18 | 惠州市德赛聚能电池有限公司 | Coating drying technology and device thereof |
| CN102468158A (en) * | 2010-10-28 | 2012-05-23 | 株式会社日立国际电气 | Substrate processing apparatus and method of manufacturing a semiconductor device |
| CN102651923A (en) * | 2011-02-23 | 2012-08-29 | 东京毅力科创株式会社 | Microwave irradiation apparatus |
| CN102806188A (en) * | 2011-05-30 | 2012-12-05 | 张家港市佳龙真空浸漆设备制造厂 | Continuous microwave curing equipment for vacuum pressure paint impregnation electrical equipment |
-
2012
- 2012-12-13 CN CN201210540488.8A patent/CN103008203B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102468158A (en) * | 2010-10-28 | 2012-05-23 | 株式会社日立国际电气 | Substrate processing apparatus and method of manufacturing a semiconductor device |
| CN102059214A (en) * | 2010-12-06 | 2011-05-18 | 惠州市德赛聚能电池有限公司 | Coating drying technology and device thereof |
| CN102651923A (en) * | 2011-02-23 | 2012-08-29 | 东京毅力科创株式会社 | Microwave irradiation apparatus |
| CN102806188A (en) * | 2011-05-30 | 2012-12-05 | 张家港市佳龙真空浸漆设备制造厂 | Continuous microwave curing equipment for vacuum pressure paint impregnation electrical equipment |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280943A (en) * | 2014-10-31 | 2015-01-14 | 合肥鑫晟光电科技有限公司 | Heating cavity and thermosetting device |
| CN104312478A (en) * | 2014-10-31 | 2015-01-28 | 合肥鑫晟光电科技有限公司 | Frame sealing glue composition, display device, heating chamber and thermocuring device |
| CN104280943B (en) * | 2014-10-31 | 2017-03-29 | 合肥鑫晟光电科技有限公司 | Heating chamber and thermal-curable system |
| CN104312478B (en) * | 2014-10-31 | 2017-08-25 | 合肥鑫晟光电科技有限公司 | Sealant composition, display device, heating chamber and thermal-curable system |
| CN105271792A (en) * | 2015-09-24 | 2016-01-27 | 京东方科技集团股份有限公司 | Solidification apparatus and solidification method |
| CN105271792B (en) * | 2015-09-24 | 2018-03-27 | 京东方科技集团股份有限公司 | Solidification equipment and curing |
| US10406557B2 (en) | 2015-09-24 | 2019-09-10 | Boe Technology Group Co., Ltd. | Curing apparatus and curing method |
| CN110296583A (en) * | 2018-03-21 | 2019-10-01 | 安徽瑞科玛电池有限公司 | A kind of lithium battery drying unit |
| CN113406821A (en) * | 2021-06-18 | 2021-09-17 | 深圳市华星光电半导体显示技术有限公司 | Baking device for liquid crystal alignment film |
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| Publication number | Publication date |
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| CN103008203B (en) | 2015-07-15 |
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