CN102985698A - 涡旋泵 - Google Patents

涡旋泵 Download PDF

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CN102985698A
CN102985698A CN2011800213483A CN201180021348A CN102985698A CN 102985698 A CN102985698 A CN 102985698A CN 2011800213483 A CN2011800213483 A CN 2011800213483A CN 201180021348 A CN201180021348 A CN 201180021348A CN 102985698 A CN102985698 A CN 102985698A
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orbiting scroll
movable orbiting
pump
scroll
rotation
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CN102985698B (zh
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N.P.肖菲尔德
M.C.K.刘
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BOC Group Ltd
Edwards Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F01C17/06—Arrangements for drive of co-operating members, e.g. for rotary piston and casing using cranks, universal joints or similar elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F01C17/06—Arrangements for drive of co-operating members, e.g. for rotary piston and casing using cranks, universal joints or similar elements
    • F01C17/066—Arrangements for drive of co-operating members, e.g. for rotary piston and casing using cranks, universal joints or similar elements with an intermediate piece sliding along perpendicular axes, e.g. Oldham coupling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
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    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F04C14/08—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/04—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents of internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/356—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the outer member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/12—Vibration

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

本发明涉及一种涡旋泵（10），所述涡旋泵包括泵壳体（12），具有同心轴部分（14）和与动涡盘相连的偏心轴部分（16）的驱动轴。所述轴被布置以受到马达（18）的驱动，从而使得在使用过程中，所述轴的旋转将轨道旋转运动传递给相对于静涡盘（22）的动涡盘，用以在所述压缩机的所述泵入口（24）与所述泵出口（26）之间泵送流体。所述静涡盘包括开口，所述轴延伸穿过所述开口并且在静涡盘的与马达相反的相对侧上被连接到动涡盘上面。高真空区被设置所述涡盘布置的动涡盘侧上面并且低真空区大体上被设置在所述涡盘布置的静涡盘侧上面。不带润滑剂的防旋转装置（52）被设置在所述高真空区中，用于阻止所述动涡盘发生转动并且允许进行所述轨道旋转运动，并且用于支持所述同心轴部分和所述偏心轴部分的旋转的轴承装置（34，36）被设置在低真空区中。

Description

涡旋泵
本发明涉及通常被称作涡旋压缩机的涡旋泵。
图3中示出了现有技术的涡旋压缩机或涡旋泵100。泵100包括泵壳体102和具有偏心轴部分106的驱动轴104。轴104受到马达108的驱动并且该偏心轴部分被连接至动涡盘（orbiting scroll）110，从而使得在使用过程中，该轴的旋转将轨道旋转运动传递给相对于静涡盘（fixed scroll）112的动涡盘，用以沿压缩机的泵入口114与泵出口116之间的流体流动路径泵送流体。
动静涡盘之间的径向间隙受到精确地控制，从而使得在该涡盘布置中通常不需要使用润滑剂。所述涡盘之间的轴向间隙使用顶端密封件（tip seal）进行密封。该布置意味着：动涡盘适于泵送干燥或洁净的环境例如半导体加工工具。然而，同心轴104和偏心轴106受到通常需要进行润滑的轴承118和120的支承。波纹管装置122被设置在该涡盘装置的动涡盘侧上面，并且将入口114处来自高真空区124的所述轴承与典型地处于大气环境下或者处于接近大气环境的条件下的包括所述轴承的区域隔离开来。按照这种方式，该波纹管装置防止高真空区124被润滑剂和其它污染物污染。该波纹管装置还起到防止动涡盘转动，但是具有足够大的柔性从而允许动涡盘进行轨道旋转运动的作用。设置配重128用于平衡该泵的轨道旋转运动部件的重量。
在如图4所示的另一涡旋泵150中，代替波纹管装置的是，防旋转装置152阻止动涡盘相对于固定或壳体部分154发生转动。该装置152通过固定构件156被固定到该壳体部分和该动涡盘上面并且产生弯曲从而允许该动涡盘进行轨道旋转运动。然而，特别是由于在所述轴承上面存在从高真空到低真空的压差，在没有波纹管装置122的条件下，来自轴承118，120或者马达108的润滑剂可能会泄漏进入到泵送气体的流动路径中，从而导致产生污染。因此，即便是防旋转装置152不带有润滑剂，轴密封件158，160也必须被设置，从而将所述轴承与所述泵的高真空区124密封隔离开。鉴于在所述轴承上面存在较大的压差，因此依然会发生一些进入到所述泵的高真空区中的泄漏情形。
本发明提供了一种经过改进的涡旋泵，至少在下文中详细讨论的实例中，所述涡旋泵比已公知的涡旋泵更为紧凑。
本发明提供了一种涡旋泵，所述涡旋泵包括泵壳体，具有同心轴部分和与涡盘相连的偏心轴部分的驱动轴，所述轴被布置以受到马达的驱动，从而使得在使用过程中，所述轴的旋转将轨道旋转运动传递给相对于静涡盘的动涡盘，用以在所述压缩机的所述泵入口与所述泵出口之间泵送流体，所述静涡盘包括开口，所述轴延伸穿过所述开口并且在静涡盘的与马达相反的相对侧上被连接到动涡盘上面，高真空区被设置所述涡盘装置的动涡盘侧上面并且低真空区大体上被设置在所述涡盘装置的静涡盘侧上面，其中不带润滑剂的防旋转装置被设置在所述高真空区中，用于阻止所述动涡盘发生转动并且允许进行所述轨道旋转运动，并且用于支持所述同心轴部分和所述偏心轴部分的旋转的轴承装置被设置在低真空区中。
在本申请后附的权利要求书中限定了本发明的多个其它优选和/或可选的方面。
为了使本发明更好地被本领域的技术人员理解，下面结合附图并通过列举实例的方式对本发明的实施例进行进一步详细地描述，在所述附图中：
图1示意性地示出了一种涡旋泵；
图2示出了图1所示涡旋泵中的防旋转装置；和
图3示出了第一现有技术的涡旋泵；和
图4示出了第二现有技术的涡旋泵。
图1中示出了涡旋压缩机或涡旋泵10。泵10包括泵壳体12和具有偏心轴部分16的驱动轴14。轴14受到马达18的驱动并且该偏心轴部分被连接至动涡盘（orbiting scroll）20，从而使得在使用过程中，该轴的旋转将轨道旋转运动传递给相对于静涡盘（fixed scroll）22的动涡盘，用以沿压缩机的泵入口24与泵出口26之间的流体流动路径泵送流体。图1中示出该静涡盘大致位于左侧并且图中示出该动涡盘大致位于右侧。在该布置中，静涡盘包括开口28，轴14，16延伸穿过所述开口并且在静涡盘的与马达18相反的相对侧上被连接到动涡盘20上面。高真空区30被设置在入口24处，并且低真空或者大气区32被设置在出口26处。按照这种方式，与图3和图4中所示的布置相比较，该涡盘布置是反向的。
第一轴承34支承驱动轴14的同心部分用于进行旋转。轴承34相对于壳体或者如图中示出的静涡盘22而言是固定的。第二轴承36将驱动轴的偏心部分16连接到动涡盘20上面，从而允许动涡盘相对于所述偏心部分产生角移动。第一轴密封件38阻挡润滑剂从第一轴承34朝向动涡盘20与静涡盘22之间的界面进行流动，且第二轴密封件42阻挡润滑剂从第二轴承36流至所述界面。由于所述轴承装置当前被设置在低真空区中，因此在所述轴承上存在相对较小的压差，且因此能够通过轴密封件38，42有效地防止发生泄漏。进一步地，不含润滑剂的防旋转装置可被设置在高真空区中，而不存在产生污染的风险。尽管反向涡盘布置是已公知的，但是由于这些布置先前采用经过润滑的装置，从而使得这些布置不适于在洁净环境中进行泵送。
配重44平衡该泵的轨道旋转运动部件的重量，所述轨道旋转运动部件包括动涡盘20、第二轴承36和驱动轴的偏心部分16。动涡盘20构成所述轨道旋转运动部件的重量的主要部分并且其质心位于相对靠近动涡盘的涡盘（scroll plate）的位置处。罩盖46被固定在动涡盘的凸起的承座48上面，并且密封低真空区，所述低真空区包含配重和来自高真空区30的轴承34，36 ，所述轴承通常处于大气环境下或者接近大气环境的条件下。
防旋转装置50被设置在所述泵的高真空区30中并且被连接到动涡盘20和壳体12上面。所述防旋转装置阻止动涡盘的转动，但是允许所述动涡盘进行轨道旋转运动。所述防旋转装置是不带润滑剂的并且在该实例中，所述防旋转装置由塑料材料制成并且可以是一件式聚合物部件。
图2中更详细地示出了该防旋转装置50。该装置包括中心本体部分52，所述中心本体部分具有从所述本体延伸出的多个臂54，56。所述臂中的每一条臂在其端部处具有连接部分58。所述臂呈两个相对的配对进行布置。所述配对54，56中的一个被连接到壳体12上面并且所述配对中的另一个被连接到动涡盘20上面。在图1中，第一对54通过紧固件58被连接到壳体12上面，并且第二对56通过紧固件60被连接到动涡盘上面。从图1中不能看到第二对臂56，但是在图1中用虚线示出了紧固件60。臂54弯曲从而允许动涡盘在方向“y”上进行移动并且臂56弯曲从而允许在方向“x”上进行移动。
防旋转装置50是不含润滑剂的并且因此能够被设置在高真空区中，而不会对通过所述涡盘布置的流动路径造成污染或者导致所述泵上游的润滑剂迁移至加工工具处。轴承36被设置在低真空区中，并且因此所述轴承和轴密封件42上的压差为最小，由此减少润滑剂向所述流动路径的下游部分中的泄漏。配重44被设置在靠近动涡盘的涡盘的位置处并且因此在轴向方向上接近质心。因此，与已公知的泵相比，所述偏心轴部分16的直径可减小，因此泵10更加紧凑。

Claims (4)

1.一种涡旋泵，所述涡旋泵包括泵壳体、具有同心轴部分和与动涡盘相连的偏心轴部分的驱动轴，所述轴被布置以受到马达的驱动，从而使得在使用过程中，所述轴的旋转将轨道旋转运动传递给相对于静涡盘的动涡盘，用以在所述压缩机的所述泵入口与所述泵出口之间泵送流体，所述静涡盘包括开口，所述轴延伸穿过所述开口并且在静涡盘的与马达相反的相对侧上被连接到动涡盘上面，高真空区被设置所述涡盘装置的动涡盘侧上面并且低真空区大体上被设置在所述涡盘装置的静涡盘侧上面，其中不带润滑剂的防旋转装置被设置在所述高真空区中，用于阻止所述动涡盘发生转动并且允许进行所述轨道旋转运动，并且用于支持所述同心轴部分和所述偏心轴部分的旋转的轴承布置被设置在所述低真空区中。
2.根据权利要求1所述的涡旋泵，其中所述涡旋泵包括用于平衡所述泵的轨道旋转运动部件的重量的配重，其中所述配重被设置在所述低真空区中并且位于靠近所述动涡盘的涡盘的位置处。
3.根据权利要求2所述的涡旋泵，其中所述防旋转装置由柔性塑料材料制成。
4.根据权利要求3所述的涡旋泵，其中所述防旋转装置包括中心本体部分，两对相对的臂从所述中心本体部分中延伸出来，第一对被连接到壳体上面并且第二对被连接到动涡盘上面，其中所述第一对弯曲从而允许所述动涡盘相对于所述壳体在第一方向上进行移动，并且所述第二对弯曲从而允许所述动涡盘相对于所述壳体在大体上与所述第一方向正交的第二方向上进行移动。
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