CN102981676A - Manufacturing method of touch device - Google Patents
Manufacturing method of touch device Download PDFInfo
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- CN102981676A CN102981676A CN2012105278160A CN201210527816A CN102981676A CN 102981676 A CN102981676 A CN 102981676A CN 2012105278160 A CN2012105278160 A CN 2012105278160A CN 201210527816 A CN201210527816 A CN 201210527816A CN 102981676 A CN102981676 A CN 102981676A
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Abstract
The invention discloses a method for manufacturing a touch device, which comprises the steps of providing a substrate with a first transparent conducting layer, patterning the first transparent conducting layer to form a lower touch sensing layer, forming a first protective layer and a first photoresist layer on the substrate, patterning the first photoresist layer by using a photomask to form a first opening with different thicknesses, removing the part with smaller thickness to form a second opening, and patterning the exposed first protective layer to form an opening and a contact hole. And removing the first photoresist layer, sequentially forming a second transparent conductive layer and a second photoresist layer, patterning the second photoresist layer by using the same photomask to enable the second photoresist layer to be provided with a third opening corresponding to the first protective layer opening hole to expose the second transparent conductive layer, and removing the exposed second transparent conductive layer to form the upper touch sensing layer.
Description
Technical field
The present invention relates to a kind of method for making of touch control display apparatus, especially relate to a kind of method for making of making the touch control display apparatus of touch-control sensing element with less photomask quantity.
Background technology
Because contactor control device has the characteristic of human-computer interaction, has been widely used on the outport inputting interface of instrument.In recent years, along with the application surface development of consumption electronic products is more and more wider, touch controllable function is combined with display and to form the application product of touch control display apparatus also more and more, comprise mobile phone (mobile phone), satellite navigation system (GPS navigator system), panel computer, personal digital assistant (personal digital assistant, PDA) and notebook computer etc.
Generally speaking, the contact panel in the contactor control device can be divided into electric resistance touch-control panel, capacitance type touch-control panel, optical touch control panel, sound wave type contact panel and electromagnetic touch-control panel according to the difference of its sensing mode.Since capacitance type touch-control panel have the reaction time fast, fiduciary level is good and the durability advantages of higher, therefore, capacitance type touch-control panel is widely used in electronic product.According to the difference of structure and manufacture, capacitance type touch-control panel can be divided into again three kinds of external labeling type (out-cell), external hanging type (on-cell) and in-building types (in-cell).The capacitance type touch-control panel of external labeling type normally is made in sensing serials first on one transparency carrier, this transparency carrier that has been manufactured with sensing serials is attached on the outside surface of display panel again.External hanging touch panel is the outside that directly the touch-control sensing element is made in display panel.The in-building type contact panel is that the touch-control sensing element is made in the upper substrate of display panel or the inside surface of infrabasal plate, and by connecting wire the touch-control sensing element is electrically connected to the outside.
Touch-control sensing element in the contact panel is many to be made of multi-layered patterned film, when forming each layer pattern film, all need to make the photomask of apparatus certain thin films pattern with patterned film, yet, along with element design is more accurate, the photomask cost also all the more improves, therefore, how by the improvement manufacture craft to reduce manufacturing cost still as one of important topic of contactor control device related industry.
Summary of the invention
One of the object of the invention is to provide a kind of method for making of contactor control device, is compared to traditional manufacturing technique, and method provided by the invention can use less photomask quantity just to produce the contactor control device with good sensing usefulness.
For reaching above-mentioned purpose; the present invention discloses a kind of method for making of contactor control device; comprise the following steps: at first to provide the surface to have the substrate of the first transparency conducting layer; follow patterning the first transparency conducting layer; so that the first transparency conducting layer forms bottom touch-control sensing layer; sequentially on the touch-control sensing layer of bottom, form again the first protective seam and the first photoresist layer; then utilize a photomask with patterning the first photoresist layer; make the first photoresist layer have at least one the first opening and expose the first protective seam; and make the first photoresist layer have the first thickness and the second thickness, wherein the second thickness is less than the first thickness.Then; remove part the first photoresist layer with second thickness; in the first photoresist layer, to form a plurality of the second openings; expose the first protective seam; follow patterning the first protective seam; remove part the first protective seam that is exposed by the first photoresist layer, in the first protective seam, to form at least one perforate and a plurality of holes that contact, remove afterwards the first photoresist layer.Then; sequentially on the first protective seam, form the second transparency conducting layer and the second photoresist layer; then utilize same photomask with patterning the second photoresist layer; make the second photoresist layer have at least one the 3rd opening corresponding to the perforate of the first protective seam and expose the second transparency conducting layer; patterning the second transparency conducting layer again; remove part the second transparency conducting layer that is exposed by the second photoresist layer; so that the second transparency conducting layer forms top touch-control sensing layer, remove again at last the second photoresist layer.
Because the present invention utilizes same photomask to come respectively patterning the first photoresist layer and the second photoresist layer; and the first photoresist layer by patterning and the second photoresist layer are used as mask and further patterning the first protective seam and the second transparency conducting layer; to form required photo-sensitive cell pattern; therefore photomask quantity be can reduce, and then expensive photomask cost and process for integrally manufacturing cost saved.
Description of drawings
Fig. 1 be contactor control device of the present invention the first embodiment on look synoptic diagram;
Fig. 2 is the diagrammatic cross-section of the first embodiment of contactor control device of the present invention;
Fig. 3 to Figure 13 is the manufacture craft synoptic diagram of the first embodiment of contactor control device method for making of the present invention, and wherein Fig. 3, Fig. 5 to Fig. 8 and Figure 10 to Figure 12 are diagrammatic cross-section, and Fig. 4, Fig. 9 and Figure 13 are vertical view;
Figure 14 is the diagrammatic cross-section of the second embodiment of contactor control device method for making of the present invention;
Figure 15 is the schematic top plan view of touch-control sensing element of the second embodiment of contactor control device method for making of the present invention;
Figure 16 is the schematic top plan view of touch-control sensing element of the 3rd embodiment of contactor control device method for making of the present invention.
The main element symbol description
100 touch control displays, 101 contactor control devices
102 first substrate 102a first substrate inside surfaces
102b Touch Zone 102c frame Jiao Qu
102d bonding pad 102e first substrate outside surface
104 second substrates, 106 display dielectric layers
108 touch-control sensing elements, 110 wires
112 first top sensing serials 112a the first top touch-control sensing pad
114 second top sensing serials 114a the second top touch-control sensing pad
114b the second top connecting line 116 connection gaskets
118 first transparency conducting layers, 118 ' bottom touch-control sensing layer
120 first bottom sensing serials 120a the first bottom touch-control sensing pad
120b the first bottom connecting line 122 second bottom sensing serials
122a the second bottom touch-control sensing pad 124 first protective seams
The vertical coupling part of 124a 126 frame glue
128 first photoresist layer 128a the first opening
128b contact hole predetermined pattern 128b ' the second opening
The full photic zone of 130 photomask 130a
The light tight district of 130b semi-opaque region 130c
132 perforates, 134 contact holes
136 second transparency conducting layers, 136 ' top touch-control sensing layer
138 second photoresist layers 140 the 3rd opening
142 perforates, 144 second protective seams
H
1The first thickness of the first photoresist layer
H
2The second thickness of the second photoresist layer
Embodiment
For making the general technology person who is familiar with the technical field of the invention further understand the present invention, hereinafter the spy enumerates embodiments of the invention, and cooperates appended accompanying drawing, describe in detail constitution content of the present invention and the effect wanting to reach.
Please refer to Fig. 1 and Fig. 2, Fig. 1 be contactor control device of the present invention the first embodiment on look synoptic diagram, and Fig. 2 is the diagrammatic cross-section of the first embodiment of contactor control device of the present invention.In the present embodiment, contactor control device 101 of the present invention is located in the touch control display 100, the contactor control device 101(that touch control display 100 comprises first substrate 102, second substrate 104, display dielectric layer 106, frame glue 126 and comprises touch-control sensing element 108 in Fig. 2 only with one deck structural representation).First substrate 102 is oppositely arranged with second substrate 104, and second substrate 104 is in the face of the inside surface 102a of first substrate 102.First substrate 102 has Touch Zone 102b, centers on frame glue district 102c and the bonding pad 102d of Touch Zone 102b.Touch Zone 102b is as allowing the zone of user's touch-control, frame glue district 102c is provided with in conjunction with the frame glue 126 of first substrate 102 with second substrate 104, and bonding pad 102d is used for touch-control sensing element 108 is electrically connected to the peripheral circuit (not being shown in Fig. 1 and Fig. 2) that is arranged on the second substrate 104, for example utilize wire 110 with the sensing signal transmission of touch-control sensing element 108 to the 102d of bonding pad, again via connection gasket 116 to transmit signals on the second substrate 104.In the present embodiment, bonding pad 102d is arranged in the frame glue district 102c, but is not limited to this.Contactor control device of the present invention also optionally is arranged on the bonding pad between Touch Zone and the frame glue district or is arranged on the outside of frame Jiao Qu.Perhaps, the touch-control sensing element of contactor control device can directly be electrically connected to the external world from first substrate, and does not need to arrange in addition the bonding pad.Display dielectric layer 106 is arranged between the first substrate 102 and second substrate 104 of Touch Zone 102b, allows the user carry out touch controllable function in the 102b of Touch Zone according to display dielectric layer 106 shown pictures.
Touch-control sensing element 108 is arranged on the inside surface 102a of first substrate 102 of Touch Zone 102b, and is positioned at Touch Zone 102b, is used for the position of sensing user touch-control.Hence one can see that, and the contactor control device 101 of present embodiment is an in-building type contactor control device, but is not limited to this.In other embodiments, contactor control device 101 of the present invention also can be an external hanging type contactor control device, for example its touch-control sensing element 108 is made on the outside surface 102e of first substrate 102, perhaps, contactor control device 101 also can be an external labeling type contactor control device, its touch-control sensing element 108 is made on the substrate in addition, is attached on the outside surface 102e of first substrate 102 again.The type of the display panel of touch control display 100 can decide according to the material of display dielectric layer 106.For example, in the present embodiment, display dielectric layer 106 can comprise a liquid crystal layer, and namely touch control display 100 is touch control liquid crystal display device, but is not limited to this.Moreover, first substrate 102 can be made of transparency carrier with second substrate 104, for example: glass substrate, hardened glass substrate, quartz base plate, sapphire substrate, plastic substrate or flexible base plate, polyethylene terephthalate (polyethylene terephthalate for example, PET) film, but be not limited to this.In other embodiments of the invention, display dielectric layer 106 also can comprise an organic luminous layer, an inorganic light-emitting layer, an electrophoretic display materials layer, electric moistening display material layer, electric dust display material layer, a Field Emission Display material layer or a plasma display material layer, and also can be provided with chromatic filter layer and black-matrix layer according to design requirement between touch-control sensing element and the display dielectric layer, but that the present invention is not limited to is above-mentioned.
In the present embodiment, touch-control sensing element 108 is better but to be not limited to be capacitive touch sensing component, such as projective capacitive touch sensing element, surface capacitance type touch-control sensing element etc.Take the projective capacitive touch sensing element as example, can comprise a plurality of sensing serials, in Fig. 1, only show the first top sensing serials 112 and the second top sensing serials 114 so that it to be described.As shown in Figure 1, touch-control sensing element 108 can comprise a plurality of the first top sensing serials 112 parallel to each other and a plurality of the second top sensing serials 114 that is parallel to each other.Each first top sensing serials 112 can comprise a plurality of the first top touch-control sensing pad 112a, and is separated from one another on the first top touch-control sensing pad 112a entity.Each second top sensing serials 114 can comprise a plurality of the second top touch-control sensing pad 114a and a plurality of the second top connecting line 114b, two the second adjacent top touch-control sensing pad 114a are connected by one second top connecting line 114b in same the second top sensing serials 114, and the second top touch-control sensing pad 114a of each second top sensing serials 114 is electrically connected to each other.And, each first top sensing serials 112 is extended along a first direction (for example horizontal direction shown in Figure 1) substantially, each second top sensing serials 114 is along substantially second direction (for example vertical direction shown in Figure 1) extension of vertical first direction, make the first top sensing serials 112 and the second top sensing serials 114 interlaced substantially, to form the sensing cell of a plurality of arrayed.When inputting touching signals when carrying out control mode touch mode, user's finger or other input media can form extra capacitor generation capacitance variations with corresponding part the first top touch-control sensing pad 112a and the second top touch-control sensing pad 114a, and reach the required signal difference effect of touch control integrated circuit.Touch-control sensing element of the present invention is not limited to above-mentioned connection and configuration mode.
The manufacture craft of the method for making of contactor control device of the present invention please refer to Fig. 3 to Figure 13, and wherein Fig. 3, Fig. 5 to Fig. 8 and Figure 10 to Figure 12 are diagrammatic cross-section, and Fig. 4, Fig. 9 and Figure 13 are schematic top plan view.At first, please refer to Fig. 3, transparent first substrate 102 is provided first, form the first transparency conducting layer 118 of whole at the inside surface 102a of first substrate 102.Then please refer to Fig. 4 and Fig. 5, carry out the manufacture craft of patterning the first transparency conducting layer 118, for example can carry out a photoetching and etching process and remove part the first transparency conducting layer 118, to form bottom touch-control sensing layer 118 '.Bottom touch-control sensing layer 118 ' overlook pattern as shown in Figure 4, and Fig. 5 is the amplification profile synoptic diagram along tangent line 5-5 ' among Fig. 4.Bottom touch-control sensing layer 118 ' comprises a plurality of the first bottom sensing serials 120 and a plurality of the second bottom sensing serials 122, wherein the first bottom sensing serials 120 substantially in the figure directions X (horizontal direction) extend and be arranged in parallel with each other, and the second bottom sensing serials 122 substantially in the figure Y-direction (vertical direction) extend and be arranged in parallel with each other, therefore the first bottom sensing serials 120 is interlocked each other substantially with the second bottom sensing serials 122 and is arrayed.Each first bottom sensing serials 120 comprises a plurality of the first bottom touch-control sensing pad 120a and a plurality of the first bottom connecting line 120b, and each first bottom connecting line 120b connects respectively the first adjacent in same the first bottom sensing serials 120 bottom touch-control sensing pad 120a.Each second bottom sensing serials 122 then comprises a plurality of the second bottom touch-control sensing pad 122a, the second adjacent bottom touch-control sensing pad 122a is positioned at the both sides of one first bottom connecting line 120b substantially in same the second bottom sensing serials 122, is not connected each other on the entity.Because Fig. 5 has only illustrated the cut-away section synoptic diagram of bottom touch-control sensing layer 118 ', therefore do not show the second bottom sensing serials 122.
Then please refer to Fig. 6, on substrate 102, sequentially form the first protective seam 124 and the first photoresist layer 128, cover the surface of bottom touch-control sensing layer 118 '.Then as shown in Figure 7, utilize 130 pairs of the first photoresist layers 128 of a photomask to carry out patterned process.Control the exposure of the first photoresist layer 128 being carried out photoetching making technique by photomask 130, so that the first photoresist layer 128 has the first opening 128a behind exposure imaging, and the first photoresist layer 128 after developing has different thickness.Wherein, photomask 130 can be half mode (halftone) photomask or a GTG photomask, and present embodiment illustrates take semi-modulation type photomask and the first photoresist layer 128 as positive light anti-etching agent.Photomask 130 has full photic zone 130a, semi-opaque region 130b and light tight district 130c.The step of patterning the first photoresist layer 128 is to make semi-opaque region 130b corresponding to the part of wanting to form the contact hole in the first protective seam 124, and full photic zone 130a is corresponding to the zone of wanting to form perforate in the first protective seam 124.After the exposure imaging manufacture craft, because the zone of corresponding light tight district 130c can not be subject to illumination in the first photoresist floor 128, therefore can stay more complete the first photoresist layer 128, it has thickness H
1Regional exposure amount corresponding to semi-opaque region 130 in the first photoresist layer 128 is less, only can form in the surface of the first photoresist layer 128 more small pattern after development, i.e. contact hole predetermined pattern 128b among the figure, its thickness H
2Be smaller than the thickness H of the first photoresist floor 128 of corresponding light tight district 130c
1Exposure corresponding to the first photoresist layer 128 of full photic zone 130a is maximum, and the first photoresist layer 128 of this part can all be removed and form the first opening 128a after development, exposes the first protective seam 124.It should be noted that in other embodiments if the first photoresist layer 128 is the minus photomask, then the full photic zone of photomask 130 must be opposite with the design of above-described embodiment or complementary with patterns such as light tight districts, repeats no more.Moreover, in other alternate embodiment, photomask 130 also can be a phase shift (phase shift) photomask, perhaps, and also can be via two photomask manufacture crafts adjusting different exposure energies so that the first photoresist layer 128 behind the patterning has different thickness.
Then please refer to Fig. 8, can utilize an ashing (ash) manufacture craft to remove and have the second less thickness H in the first photoresist layer 128
2Part, namely contact hole predetermined pattern 128b, in the first photoresist layer 128, to form the second opening 128b ', expose the first protective seam 124, wherein ashing manufacture craft can be oxygen gas plasma ashing manufacture craft.Then; utilize the first photoresist layer 128 to be used as mask; the first protective seam 124 is carried out the patterning manufacture craft; remove part the first protective seam 124 that is exposed by the first opening 128a of the first photoresist layer 128 and the second opening 128b '; in the first protective seam 124, form at least one perforate 132 and a plurality of holes 134 that contact; wherein perforate 132 is corresponding to the first opening 128a of the first photoresist layer 128, and contact hole 134 is corresponding to the second opening 128b ' of the first photoresist layer 128.The pattern of the first protective seam 124 of patterning can be with reference to figure 9; perforate 132 has separated shape into similar the first bottom touch-control sensing pad 120a and the second bottom touch-control sensing pad 122a with the first protective seam 124; cover the first bottom touch-control sensing pad 120a and the second bottom touch-control sensing pad 122a surface; yet; the first protective seam 124 of patterning is connected to each other by the vertical coupling part 124a perpendicular to the first bottom connecting line 120b in the part that covers the second bottom touch-control sensing pad 122a, and exposes part the first bottom connecting line 120b.The manufacture craft of above-mentioned patterning the first protective seam 124 can be an etching process for example, for example is a dry ecthing manufacture craft.Preferably, when this etching process was the dry ecthing manufacture craft, therewith dry ecthing manufacture craft of aforesaid oxygen gas plasma ashing manufacture craft can sequentially be carried out in same reaction chamber.
It should be noted that in other embodiments, utilize 130 pairs of the first photoresist layers 128 of photomask to carry out after the patterned process, can remove this first protective seam 124 of part that is exposed by this first opening 128a in advance, and form perforate 132.Then, can utilize an ashing manufacture craft to remove and have the second less thickness H in the first photoresist layer 128
2Part to form the second opening 128b ' in the first photoresist layer 128, then, is carried out the patterning manufacture craft to the first protective seam 124, removes part the first protective seam 124 that is exposed by the second opening 128b ', and forms a plurality of contacts hole 134.
Then as shown in figure 10, remove the first photoresist layer 128, sequentially form the second transparency conducting layer 136 and the second photoresist layer 138 again on the first protective seam 124, wherein the second transparency conducting layer 136 can form by sputtering way.Then; please refer to Figure 11; come patterning the second photoresist layer 138 with being used for before the same photomask 130 of patterning the first photoresist layer 128; make the second photoresist layer 138 have at least one the 3rd opening 140 corresponding to the perforate 132 of the first protective seam 124, and expose part the second transparency conducting layer 136.Wherein, the full photic zone 130a of photomask 130 is corresponding to the perforate 132 of the first protective seam 124 and the 3rd opening 140 of the second transparency conducting layer 138, and semi-opaque region 130b is corresponding to contact hole 134.
Please refer to Figure 12 and Figure 13; then utilize the second photoresist layer 138 behind the patterning to be used as mask; remove part the second transparency conducting layer 136 that is exposed by the second photoresist layer 138; and formation top touch-control sensing layer 136 '; it has at least one perforate 142, substantially corresponding to the perforate 132 of the first protective seam 124.The pattern of top thoughts and feelings control sensed layer 136 ' as shown in figure 13, thoughts and feelings control sensed layer 136 ' in top is separated out by perforate 142 and comprises a plurality of the first top sensing serials 112 and a plurality of the second top sensing serials 114, both intermesh substantially and are arrayed.Each second top sensing serials 114 comprises a plurality of the second top touch-control sensing pad 114a and a plurality of the second top connecting line 114b, and wherein the second top connecting line 114b connects respectively the second adjacent in same the second top sensing serials 114 top touch-control sensing pad 114a.And each first top sensing serials 112 comprises a plurality of the first top touch-control sensing pad 112a, the first adjacent top touch-control sensing pad 112a is positioned at the both sides of the second top connecting line 114b substantially in same the first top sensing serials 112, is not connected each other on the entity.Then; refer again to Figure 12; after forming top touch-control sensing layer 136 '; remove the second photoresist layer 138; then optionally on substrate 102, form the second protective seam 144; cover top touch-control sensing layer 136 ', the first protective seam 124 and bottom touch-control sensing layer 118 ', namely finish the making of contactor control device 101.The touch-control sensing element 108 of present embodiment contactor control device 101 mainly is made of top touch-control sensing layer 136 ' and bottom touch-control sensing layer 118 ', and by the contact hole 134 in the first protective seam 124 counter element in top touch-control sensing layer 136 ' and the bottom touch-control sensing layer 118 ' is electrically connected.
By Figure 12 and Figure 13 as can be known, each first top touch-control sensing pad 112a is located at respectively on the corresponding wherein one first bottom touch-control sensing pad 120a, and each second top touch-control sensing pad 114a is located at respectively on the corresponding wherein one second bottom touch-control sensing pad 122a.In addition, each first top touch-control sensing pad 112a is electrically connected on the first bottom touch-control sensing pad 120a that is located at its below by at least one contact hole 134 respectively, each second top touch-control sensing pad 114a also is electrically connected on the second bottom touch-control sensing pad 122a that is located at its below by at least one contact hole 134 respectively, and the second top connecting line 114b of the first bottom connecting line 120b in the first bottom sensing serials 120 and the second top sensing serials 114 orthogonal being crisscross arranged substantially.
In addition, the bottom touch-control sensing layer 118 ' of contactor control device of the present invention also can be considered and comprises one first bottom sensing serials 120 and a plurality of the second bottom touch-control sensing pad 122a that are not connected each other, and top touch-control sensing layer 136 ' comprises a plurality of the first top touch-control sensing pad 112a and one second top sensing serials 114 that are not connected each other, wherein the first bottom sensing serials 120 is electrically connected on the first top touch-control sensing pad 112a by contact hole 134, and the second top sensing serials 114 also is electrically connected on the second bottom touch-control sensing pad 122a by contact hole 134.
Touch sensing device of the present invention is not limited with above-described embodiment, below will introduce other embodiment of contactor control device of the present invention, for convenience of explanation, hereinafter use the identical element of same-sign mark, only to explaining with the different place of previous embodiment, no longer repeating part is given unnecessary details.
Please refer to Figure 14 and Figure 15, Figure 14 is the section enlarged diagram of the second embodiment of contactor control device method for making of the present invention, and Figure 15 is the part schematic top plan view of the touch-control sensing element 108 of contactor control device of the present invention.Such as Figure 14 and shown in Figure 15; in the present embodiment; the contact hole 134 of the first protective seam 124 is greater than the contact hole of made among the first embodiment; therefore top touch-control sensing layer 136 ' has the larger area contact with the second bottom touch-control sensing layer 118 ' in contacting hole 134; that is most the first top touch-control sensing pad 112a is in contact with one another via contacting hole 134 with most the first bottom touch-control sensing pad 120a; and most the second top touch-control sensing pad 114a is in contact with one another via contacting hole 134 with most the second bottom touch-control sensing pad 122a; under this situation; essence has increased and has been used for the conductive material area of transmission of signal in each touch-control sensing pad, can Effective Raise signal conduction of velocity.Therefore; though the manufacture craft of present embodiment contactor control device 101 is similar to the first embodiment; but the semi-opaque region 130b of the photomask 130 of present embodiment is greater than the user of institute among the first embodiment; when patterning the first photoresist layer 128; the contact hole predetermined pattern 128b that produces the less thickness H2 of tool has larger area; so that the first protective seam 124 behind the patterning can form larger contact hole 134, as shown in figure 14.It should be noted that contact hole 134 is not limited to shown in Figure 15.
Please refer to Figure 16, Figure 16 is the part schematic top plan view of the touch-control sensing element of contactor control device the 3rd embodiment of the present invention.In the third embodiment of the present invention, the corresponding contact of touch-control sensing pad hole quantity can have a plurality of, is not limited in the previous embodiment touch-control sensing pad only corresponding to a contact hole.As shown in figure 16, the first top touch-control sensing pad 112a is electrically connected with the first bottom touch-control sensing pad 120a by four contact holes 134 respectively, and the second top touch-control sensing pad 114a also is electrically connected with the second bottom touch-control sensing pad 122a by four contact holes respectively.The method for making flow process of present embodiment contactor control device is identical with previous embodiment, only the design of the semi-opaque region 130b of photomask 130 is slightly different, so that a plurality of (for example four) semi-opaque region 130b respectively is set among the light tight district 130c corresponding to each first top touch-control sensing pad 112a and the second top touch-control sensing pad 114a.
As previously mentioned; because the method that the present invention makes contactor control device can utilize single photo mask to define respectively the pattern of the first protective seam and the second transparency conducting layer, therefore, compared to traditional manufacturing technique; can reduce photomask quantity, reduce the process for integrally manufacturing cost.In addition, by the area that increases the contact hole or the quantity that increases the contact hole, can improve the contact area of top touch-control sensing pad and bottom touch-control sensing pad, can improve signal and transmit quality and speed.
The above only is preferred embodiment of the present invention, and all equalizations of doing according to claim of the present invention change and modify, and all should belong to covering scope of the present invention.
Claims (17)
1. the method for making of a contactor control device comprises:
One substrate is provided, and this substrate surface has one first transparency conducting layer;
This first transparency conducting layer of patterning is so that this first transparency conducting layer forms a bottom touch-control sensing layer;
Sequentially on this bottom touch-control sensing layer, form one first protective seam and one first photoresist layer;
Utilize a photomask with this first photoresist layer of patterning, make this first photoresist layer have at least one the first opening and expose this first protective seam, and make this first photoresist layer have one first thickness and one second thickness, wherein this second thickness is less than this first thickness;
Remove this first photoresist layer of part with this second thickness, in this first photoresist layer, to form a plurality of the second openings, expose this first protective seam;
This first protective seam of patterning removes this first protective seam of part that is exposed by this first photoresist layer, to form at least one perforate and a plurality of holes that contact in this first protective seam;
Remove this first photoresist layer;
Sequentially on this first protective seam, form one second transparency conducting layer and one second photoresist layer;
Utilize this photomask with this second photoresist layer of patterning, make this second photoresist layer have at least one the 3rd opening corresponding to this perforate of this first protective seam and expose this second transparency conducting layer;
This second transparency conducting layer of patterning removes this second transparency conducting layer of part that is exposed by this second photoresist layer, so that this second transparency conducting layer forms a top touch-control sensing layer; And
Remove this second photoresist layer.
2. method for making as claimed in claim 1, wherein this photomask comprises a semi-modulation type photomask (halftone mask).
3. method for making as claimed in claim 2 wherein has this photoresist layer of part of this second thickness corresponding to a semi-opaque region of this half tone photomask.
4. method for making as claimed in claim 1, the step that wherein removes this first photoresist layer of part with this second thickness is to be undertaken by oxygen gas plasma ashing (ash) manufacture craft.
5. method for making as claimed in claim 4, wherein the step of this first protective seam of this patterning is a dry ecthing manufacture craft, and this dry ecthing manufacture craft and this oxygen gas plasma ashing manufacture craft are sequentially carried out in same reaction chamber.
6. method for making as claimed in claim 1, wherein this bottom touch-control sensing layer comprises a plurality of the first bottom sensing serials and a plurality of the second bottom sensing serials, and these a plurality of first bottom sensing serials intermesh with these a plurality of second bottom sensing serials and are arrayed.
7. method for making as claimed in claim 6, wherein respectively this first bottom sensing serials comprises a plurality of the first bottom touch-control sensing pads and a plurality of the first bottom connecting line, these a plurality of first bottom connecting lines connect respectively these adjacent in this same first bottom sensing serials a plurality of first bottom touch-control sensing pads, and respectively this second bottom sensing serials comprises a plurality of the second bottom touch-control sensing pads.
8. method for making as claimed in claim 7, wherein this top touch-control sensing layer comprises a plurality of the first top sensing serials and a plurality of the second top sensing serials, and these a plurality of first top sensing serials intermesh with these a plurality of second top sensing serials and are arrayed.
9. method for making as claimed in claim 8, wherein respectively this first top sensing serials comprises a plurality of the first top touch-control sensing pads, and respectively this second top sensing serials comprises a plurality of the second top touch-control sensing pads and a plurality of the second top connecting line, and these a plurality of second top connecting lines connect respectively these adjacent in this same second top sensing serials a plurality of second top touch-control sensing pads.
10. method for making as claimed in claim 9, wherein respectively this first top touch-control sensing pad is located at respectively on this corresponding one of them first bottom touch-control sensing pad, and respectively this second top touch-control sensing pad is located at respectively on this corresponding one of them second bottom touch-control sensing pad.
11. method for making as claimed in claim 10, wherein respectively this first top touch-control sensing pad respectively by this a plurality of contacts hole at least one of them be electrically connected on be located at its below this first bottom touch-control sensing pad, and respectively this second top touch-control sensing pad respectively by this a plurality of contacts hole at least one of them be electrically connected on be located at its below this second bottom touch-control sensing pad.
12. method for making as claimed in claim 9, wherein these a plurality of second top connecting lines are to be crisscross arranged with these a plurality of first bottom connecting lines.
13. method for making as claimed in claim 9, wherein these a plurality of second bottom touch-control sensings pad on the body separated from one anotherly, and these a plurality of first top touch-control sensings pad on the body separated from one another.
14. method for making as claimed in claim 1 also is included in and utilizes after the step of this photomask with this first photoresist layer of patterning, removes this first protective seam of part that is exposed by this first opening in advance.
15. method for making as claimed in claim 1, wherein the step of this first protective seam of this patterning removes this first protective seam of part that is exposed by these a plurality of the first openings and the second opening simultaneously.
16. method for making as claimed in claim 1, wherein this bottom touch-control sensing layer comprises one first bottom sensing serials and a plurality of the second bottom touch-control sensing pad, this top touch-control sensing layer comprises a plurality of the first top touch-control sensing pads and one second top sensing serials, wherein this first bottom sensing serials is electrically connected on this a plurality of the first top touch-control sensing pads by this a plurality of contacts hole, and this second top sensing serials is electrically connected on this a plurality of two bottom touch-control sensing pads by this a plurality of contacts hole.
17. method for making as claimed in claim 1, it is included in addition and removes after this second photoresist layer, forms one second protective seam and covers this top touch-control sensing layer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101137315A TWI472998B (en) | 2012-10-09 | 2012-10-09 | Manufacturing method of touch control device |
| TW101137315 | 2012-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102981676A true CN102981676A (en) | 2013-03-20 |
| CN102981676B CN102981676B (en) | 2015-10-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210527816.0A Expired - Fee Related CN102981676B (en) | 2012-10-09 | 2012-12-10 | Manufacturing method of touch device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102981676B (en) |
| TW (1) | TWI472998B (en) |
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| CN104571672A (en) * | 2013-11-27 | 2015-04-29 | 北京京东方光电科技有限公司 | Touch screen and manufacturing method thereof |
| TWI507940B (en) * | 2013-07-17 | 2015-11-11 | Au Optronics Corp | Touch panel and touch display panel |
| CN105278765A (en) * | 2014-06-25 | 2016-01-27 | 深圳业际光电股份有限公司 | Manufacturing method for narrow-frame single-layer multipoint touch screen, and product thereof |
| CN105431797A (en) * | 2013-04-30 | 2016-03-23 | 应用材料公司 | Multilevel mask circuit fabrication and multilayer circuit |
| CN106406592A (en) * | 2015-08-13 | 2017-02-15 | 深圳业际光电有限公司 | Fabrication method for narrow bezel type touch screen |
| CN113867043A (en) * | 2020-06-30 | 2021-12-31 | 京东方科技集团股份有限公司 | Light-emitting substrate, preparation method thereof and display device |
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| CN101859213A (en) * | 2009-04-13 | 2010-10-13 | 群康科技(深圳)有限公司 | Making method of capacitor-type touch panel |
| TW201131243A (en) * | 2010-03-02 | 2011-09-16 | Eturbotouch Technology Inc | Seamless capacitance touch panel |
| US20120139866A1 (en) * | 2010-12-02 | 2012-06-07 | Suk-Won Jung | Display substrate, method of manufacturing the same and touch-detecting display apparatus having the same |
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| CN105431797A (en) * | 2013-04-30 | 2016-03-23 | 应用材料公司 | Multilevel mask circuit fabrication and multilayer circuit |
| CN105431797B (en) * | 2013-04-30 | 2019-01-15 | 应用材料公司 | Multistage mask circuit manufacture and multilayer circuit |
| TWI507940B (en) * | 2013-07-17 | 2015-11-11 | Au Optronics Corp | Touch panel and touch display panel |
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| CN105278765A (en) * | 2014-06-25 | 2016-01-27 | 深圳业际光电股份有限公司 | Manufacturing method for narrow-frame single-layer multipoint touch screen, and product thereof |
| CN106406592A (en) * | 2015-08-13 | 2017-02-15 | 深圳业际光电有限公司 | Fabrication method for narrow bezel type touch screen |
| CN113867043A (en) * | 2020-06-30 | 2021-12-31 | 京东方科技集团股份有限公司 | Light-emitting substrate, preparation method thereof and display device |
| CN113867043B (en) * | 2020-06-30 | 2023-01-10 | 京东方科技集团股份有限公司 | Light-emitting substrate, preparation method thereof and display device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102981676B (en) | 2015-10-28 |
| TWI472998B (en) | 2015-02-11 |
| TW201415336A (en) | 2014-04-16 |
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