CN102967632B - 用电导率指导抛光粉生产和产品质量控制的方法 - Google Patents
用电导率指导抛光粉生产和产品质量控制的方法 Download PDFInfo
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- CN102967632B CN102967632B CN201210507466.1A CN201210507466A CN102967632B CN 102967632 B CN102967632 B CN 102967632B CN 201210507466 A CN201210507466 A CN 201210507466A CN 102967632 B CN102967632 B CN 102967632B
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- conductivity
- burnishing powder
- burnishing
- powder
- production
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- 239000000843 powder Substances 0.000 title claims abstract description 82
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000003908 quality control method Methods 0.000 title claims abstract description 8
- 238000005299 abrasion Methods 0.000 claims abstract description 24
- 238000005498 polishing Methods 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 230000010355 oscillation Effects 0.000 claims abstract description 6
- 238000005520 cutting process Methods 0.000 abstract description 6
- 239000011521 glass Substances 0.000 description 22
- 238000001514 detection method Methods 0.000 description 8
- 239000002002 slurry Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (1)
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CN201210507466.1A CN102967632B (zh) | 2012-11-30 | 2012-11-30 | 用电导率指导抛光粉生产和产品质量控制的方法 |
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CN201210507466.1A CN102967632B (zh) | 2012-11-30 | 2012-11-30 | 用电导率指导抛光粉生产和产品质量控制的方法 |
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CN102967632A CN102967632A (zh) | 2013-03-13 |
CN102967632B true CN102967632B (zh) | 2016-01-20 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1185471A (zh) * | 1996-12-05 | 1998-06-24 | 不二见株式会社 | 抛光剂组合物 |
CN1457506A (zh) * | 2001-02-20 | 2003-11-19 | 日立化成工业株式会社 | 抛光剂及基片的抛光方法 |
CN1668714A (zh) * | 2002-07-19 | 2005-09-14 | 卡伯特微电子公司 | 含导电聚合物的抛光组合物 |
CN101092543A (zh) * | 2004-07-28 | 2007-12-26 | K.C.科技股份有限公司 | 抛光浆料及其制备方法和抛光基板的方法 |
CN101186804A (zh) * | 2007-11-21 | 2008-05-28 | 北京国瑞升科技有限公司 | 水性金刚石研磨液及其制备方法和用途 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2501781B2 (ja) * | 1982-03-30 | 1996-05-29 | 日立マクセル株式会社 | 導電性研磨用部材 |
-
2012
- 2012-11-30 CN CN201210507466.1A patent/CN102967632B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1185471A (zh) * | 1996-12-05 | 1998-06-24 | 不二见株式会社 | 抛光剂组合物 |
CN1457506A (zh) * | 2001-02-20 | 2003-11-19 | 日立化成工业株式会社 | 抛光剂及基片的抛光方法 |
CN1668714A (zh) * | 2002-07-19 | 2005-09-14 | 卡伯特微电子公司 | 含导电聚合物的抛光组合物 |
CN101092543A (zh) * | 2004-07-28 | 2007-12-26 | K.C.科技股份有限公司 | 抛光浆料及其制备方法和抛光基板的方法 |
CN101186804A (zh) * | 2007-11-21 | 2008-05-28 | 北京国瑞升科技有限公司 | 水性金刚石研磨液及其制备方法和用途 |
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CN102967632A (zh) | 2013-03-13 |
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GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: The method of using electrical conductivity to guide polishing powder production and product quality control Effective date of registration: 20201217 Granted publication date: 20160120 Pledgee: Zibo Linzi sub branch of Bank of Qingdao Co.,Ltd. Pledgor: Zibo Baogang Lingzhi Rare Earth High-Tech Co.,Ltd. Registration number: Y2020980009491 |
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Date of cancellation: 20221026 Granted publication date: 20160120 Pledgee: Zibo Linzi sub branch of Bank of Qingdao Co.,Ltd. Pledgor: Zibo Baogang Lingzhi Rare Earth High-Tech Co.,Ltd. Registration number: Y2020980009491 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Method for guiding the production of polishing powder and product quality control by conductivity Effective date of registration: 20221231 Granted publication date: 20160120 Pledgee: China Construction Bank Corporation Qilu Petrochemical Sub-branch Pledgor: Zibo Baogang Lingzhi Rare Earth High-Tech Co.,Ltd. Registration number: Y2022980029973 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231228 Granted publication date: 20160120 Pledgee: China Construction Bank Corporation Qilu Petrochemical Sub-branch Pledgor: Zibo Baogang Lingzhi Rare Earth High-Tech Co.,Ltd. Registration number: Y2022980029973 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Method of using conductivity to guide polishing powder production and product quality control Effective date of registration: 20231228 Granted publication date: 20160120 Pledgee: China Construction Bank Corporation Qilu Petrochemical Sub-branch Pledgor: Zibo Baogang Lingzhi Rare Earth High-Tech Co.,Ltd. Registration number: Y2023980075492 |