CN102956749A - 一种太阳能电池电极的制备工艺 - Google Patents
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Abstract
本发明公开了一种太阳能电池电极的制备工艺,包括以下步骤:a、在沉积氮化硅薄膜和丝网印刷背电极并且在烧结后的太阳能电池表面利用丝网印刷或者喷涂或者喷墨打印一层含有金属硅化物的腐蚀浆料;b、在一定温度下烘干烧结;c、对烧结完的电池片表面进行清洗,去除腐蚀浆料;d、在清洗后的电池片表面进行光诱导电镀铜,电镀锡;e、将电镀好的电池烘干,制备完成。这种太阳能电池电极的制备工艺避免了高温烧结步骤和银的使用,最大限度的降低了成本并保证了基体和栅线的结合强度。
Description
技术领域
本发明涉及一种太阳能电池领域,尤其涉及一种太阳能电池电极的制备工艺。
背景技术
制作光伏电池电极通常有以下要求:接触电阻小;收集效率高;遮光面积小;能与硅形成牢固的接触;电极金属的稳定性好;易于加工生产,成本低;可焊性强;体电阻小;污染小。目前,传统的丝网印刷前电极工艺的局限在于电极宽度至少为70-90um,具有很大的遮光面积和较高串联电阻,对电池的效率影响很大。而且所用银浆的价格也比较昂贵。为了降低成本和提高效率,目前主要的方向是采用电镀的工艺,其中包括直接电镀和种子层电镀两种工艺。直接电镀法需要在钝化膜表面利用激光开孔,并且栅线和基体的接触牢固程度较低,在后续的串焊过程中容易发生栅线脱落的现象。而采用喷墨打印和丝网印刷种子层的技术,基本上使用的还是银浆料,需要高温烧结的步骤穿透氮化硅层以实现良好的欧姆接触,生产成本高。
发明内容
本发明所要解决的技术问题是,提供一种既降低成本又保证基体和栅线的结合强度一种太阳能电池电极的制备工艺。
为了解决上述技术问题,本发明是通过以下技术方案实现的:一种太阳能电池电极的制备工艺,包括以下步骤:a、在沉积氮化硅薄膜和丝网印刷背电极并且在烧结后的太阳能电池表面利用丝网印刷或者喷涂或者喷墨打印一层含有金属硅化物的腐蚀浆料;b、在一定温度下烘干烧结;c、对烧结完的电池片表面进行清洗,去除腐蚀浆料;d、在清洗后的电池片表面进行光诱导电镀铜,电镀锡;e、将电镀好的电池烘干,制备完成。
进一步地,所述步骤a腐蚀浆料含有硅化镍,硅化钨,硅化钛中的一种或者几种纳米颗粒,其成分包括氢氟酸、磷酸及其相关盐、乙基、羟乙基羟丙基或羧甲基纤维素钠羧甲基淀粉钠、阴离子杂多糖、丙烯酸酯、聚乙烯醇、聚乙烯吡咯烷酮或高度分散硅酸。
进一步地,所述步骤a中印刷的腐蚀浆料宽度为30-40μm,厚度为5-10μm。
再进一步地,所述步骤b中烘干的温度为350-450℃,时间为1-10min,气氛为氮气等保护气氛。
再进一步地,所述步骤b烧结后形成的镍层厚度为200nm-1000nm。
更进一步地,所述步骤d中电镀的铜层厚度为10-25μm,锡层厚度为5-10μm。
与现有技术相比,本发明的有益之处在于:这种太阳能电池电极的制备工艺避免了高温烧结步骤和银的使用,最大限度的降低了成本并保证了基体和栅线的结合强度。
具体实施方式:
下面通过具体实施方式对本发明进行详细描述。
实例一:
在沉积氮化硅薄膜和丝网印刷背电极并且烧结后的太阳能电池表面印刷一层含有镍的腐蚀浆料,栅线宽度为30μm,厚度为10μm;在氮气保护气氛下,350 ℃,烘干烧结3min;然后在纯水中经过清洗,去除腐蚀浆料;在形成的镍硅合金表面电镀一层金属铜,厚度为15μm;之后电镀一层金属锡,厚度为5μm;烘干,制备完毕。
实例二:
在沉积氮化硅薄膜和丝网印刷背电极并且烧结后的太阳能电池表面印刷一层含有镍的腐蚀浆料,栅线宽度为35μm,厚度为5μm;在氮气保护气氛下,450 ℃,烘干烧结1min;然后在纯水中经过清洗,去除腐蚀浆料;在形成的镍硅合金表面电镀一层金属铜,厚度为10μm;之后电镀一层金属锡,厚度为10μm;烘干,制备完毕。
实例三:
在沉积氮化硅薄膜和丝网印刷背电极并且烧结后的太阳能电池表面喷墨打印一层含有镍的腐蚀浆料,栅线宽度为40μm,厚度为8μm;在氮气保护气氛下,370 ℃,烘干烧结5min;然后在纯水中经过清洗,去除腐蚀浆料;在形成的镍硅合金表面电镀一层金属铜,厚度为12μm;之后电镀一层金属锡,厚度为5μm;烘干,制备完毕。
实例四:
在沉积氮化硅薄膜和丝网印刷背电极并且烧结后的太阳能电池表面喷墨打印一层含有镍的腐蚀浆料,栅线宽度为40μm,厚度为10μm;在氮气保护气氛下,400 ℃,烘干烧结3min;然后在纯水中经过清洗,去除腐蚀浆料;在形成的镍硅合金表面电镀一层金属铜,厚度为20μm;之后电镀一层金属锡,厚度为10μm;烘干,制备完毕。
需要强调的是:以上仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,凡是依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。
Claims (6)
1.一种太阳能电池电极的制备工艺,其特征是,包括以下步骤:
a、在沉积氮化硅薄膜和丝网印刷背电极并且在烧结后的太阳能电池表面利用丝网印刷或者喷涂或者喷墨打印一层含有金属硅化物的腐蚀浆料;
b、在一定温度下烘干烧结;
c、对烧结完的电池片表面进行清洗,去除腐蚀浆料;
d、在清洗后的电池片表面进行光诱导电镀铜,电镀锡;
e、将电镀好的电池烘干,制备完成。
2.根据权利要求1所述的太阳能电池电极的制备工艺,其特征是,所述步骤a腐蚀浆料含有硅化镍, 硅化钨, 硅化钛中的一种或者几种纳米颗粒,其成分包括氢氟酸、磷酸及其相关盐、乙基、羟乙基羟丙基或羧甲基纤维素钠羧甲基淀粉钠、阴离子杂多糖、丙烯酸酯、聚乙烯醇、聚乙烯吡咯烷酮或高度分散硅酸。
3.根据权利要求1所述的太阳能电池电极的制备工艺,其特征是,所述步骤a中印刷的腐蚀浆料宽度为30-40μm,厚度为5-10μm。
4.根据权利要求1所述的太阳能电池电极的制备工艺,其特征是,所述步骤b中烘干的温度为350-450℃,时间为1-10min,气氛为氮气等保护气氛。
5.根据权利要求1所述的太阳能电池电极的制备工艺,其特征是,所述步骤b烧结后形成的镍层厚度为200nm-1000nm。
6.根据权利要求1所述的太阳能电池电极的制备工艺,其特征是,所述步骤d中电镀的铜层厚度为10-25μm,锡层厚度为5-10μm。
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CN113943955A (zh) * | 2021-11-26 | 2022-01-18 | 苏州昶明微电子科技合伙企业(有限合伙) | 一种铜电镀设备及方法 |
CN113943955B (zh) * | 2021-11-26 | 2023-01-03 | 苏州昶明微电子科技合伙企业(有限合伙) | 一种铜电镀设备及方法 |
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