CN102937657B - Real-time correction method and system for high-speed atomic force microscopic imaging - Google Patents
Real-time correction method and system for high-speed atomic force microscopic imaging Download PDFInfo
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Abstract
The invention discloses a real-time correction method and a system for high-speed atomic force microscopic imaging, and belongs to the technical field of high-speed atomic force microscopy. The method comprises that in a real-time phase correction module, one side of a bimorph is used as a test piece, a phase lag angle theta generated during each scan is tested, and acquired data are shifted to correct the phase lag; and in a non-linear correction module, actual space positions of data points acquired by the sinusoid scan are calculated through preset sampling point numbers of each period, and corrected probe deflection signals after correction are obtained through a certain mapping relation. According to the real-time correction method and the system for high-speed atomic force microscopic imaging, images can be processed in a scanning process instead of post processing, and a good real-time property is provided; and LabVIEW software is used for designing, so that the operation process is simple.
Description
Technical field
The present invention relates to scanning microscopy imaging technical field, particularly a kind of real-time image correction system, belong to Fast atom scanning force microscopy field.
Background technology
Along with the development of science and technology, the fields such as biology, chemistry, material and nanosecond science and technology are in the urgent need to realizing the technology of detection or high speed imaging fast at micro-nano-scale.Scanning probe microscopy (SPM) is the important tool of carrying out Nanometer Detection and Indication at present, is one of the major technique realizing micro-nano-scale imaging, detection and processing.
Atomic force microscope belongs to scanning probe microscopy family, is to improve on the basis of scanning tunnel microscope.But the image taking speed of conventional atom force microscope is too slow, limit it to the Detection & Controling of some dynamic processes as biomacromolecule motion etc.Therefore, the sweep velocity how improving conventional atom force microscope becomes the focus of research in recent years.
For high speed atomic force microscope, three-dimensional scanner is the key factor affecting sweep velocity.Scanister adopts piezoceramic material or quartz tuning-fork usually.Piezoceramic material has the advantages such as stable performance, easy to use and very high displacement resolution and dynamic responding speed, has become the main material making three-dimensional scanner at present.Realizing high-velocity scanning, be generally use the very high piezoelectric ceramic stack of fundamental frequency to realize, but the driving circuit of this device is complicated, needs powerful high pressure power amplifier and high-voltage power supply, also there is the problems such as cost is high, sweep limit is little in addition.Another kind method uses quartz tuning-fork to realize high-velocity scanning, is namely subject to realizing high-velocity scanning AC signal encourages and resonance occurs at quartz tuning-fork.But tuning fork is small-sized, lay sample difficulty, and sweep limit is little, load capacity is low.In addition the quality factor due to tuning fork are very high, when its resonance scan very easily by external interference.So based on above analysis, list of references [1] (patent documentation CN101576466A) uses bimorph and piezoelectric ceramic tube, designs a kind of combined three-dimensional high-speed scanning device.In the apparatus, bimorph is used for carrying out rapid scanning in X-direction, and piezoelectric ceramic tube is for regulating Y and Z both direction.Because the drive singal that uses of excitation bimorph is for sinusoidal signal but not triangular signal, so cause the image of collection to present nonlinear geometric distortion.Meanwhile, bimorph realizes rapid scanning under being operated in resonance mode, gathers image generation delayed phase so cause.Therefore, there is delayed phase and nonlinear geometric distortion in the image of the combined three-dimensional high speed device collection that list of references [1] designs, needs correct image.
Summary of the invention
There is delayed phase and nonlinear geometric distortion in the image that the object of the invention is to gather for existing combined three-dimensional high-speed scanning device, develops a kind of realtime graphic bearing calibration and system.The method in whole data acquisition, carry out real time correction, instead of can process to the image gathered the later stage again to image.Realtime graphic corrective system of the present invention mainly comprises two aspects: a real-time phase correction module and a real time nonlinear correction module.These two modules are all based on existing hardware and LabVIEW software simulating.
The tip deflection signal that described realtime graphic bearing calibration and system are used for offset of sinusoidal scanning acquisition carries out real-time phase correction and real time nonlinear correction, its principle of work is: in real-time phase correction module, use the side of bimorph as detection lug, detecting the delayed phase angle θ that each scanning produces, then realizing the correction of delayed phase by being shifted to the data gathered; In real time nonlinear correction module, by each cycle sampling number of setting, first calculate the true spatial location at each data point place that sine sweep gathers, then by certain mapping relations, obtain real sample message.
Specifically, described realtime graphic bearing calibration comprises carries out real-time phase correction to tip deflection signal and real time nonlinear corrects two parts, described real-time phase corrects and carries out in real-time phase correction module, be specially: by the detection signal of bimorph, obtain the delayed phase angle θ of bimorph, utilize delayed phase angle θ and each cycle sampling number N, obtain the k that counts of delayed phase, finally the data sequence of collection is moved k position, correction initial acquisition data being carried out to delayed phase can be realized.The described k that counts is obtained by following formulae discovery:
k＝(θ/180)*N/2
Described real time nonlinear corrects, and carries out, be specially in real time nonlinear correction module: first set each cycle sampling number N, determine the locus i at each sampled point place.Secondly, determine the mapping relations between the locus i of each sampled point and real sample message (i.e. tip deflection signal), this wherein comprises three kinds of relations mapped: many-one mapping, one to one mapping and cannot map.
The invention has the advantages that:
(1) real-time: can process instead of post-processed image in scanning process;
(2) simplification: use LabVIEW Software for Design, operating process is simple.
Accompanying drawing explanation
Fig. 1 is the hardware structure diagram of realtime graphic corrective system provided by the invention;
Fig. 2 is the process flow diagram carrying out real-time phase correction in the present invention;
Fig. 3 is the process flow diagram carrying out real time nonlinear correction in the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
The present invention is a kind of realtime graphic bearing calibration and system, and described corrective system comprises real-time phase correction module and real time nonlinear correction module.Described real-time phase correction module is used for carrying out delayed phase correction to tip deflection signal, and the signal that described real time nonlinear correction module is used for real-time phase correction module exports carries out gamma correction.The specific implementation of described System with Real-Time is as follows:
As shown in Figure 1, high-speed data acquisition card can gather the detection signal of bimorph and the tip deflection signal of probe deflection detection system, and these two kinds of signals are flowed to the PC installing LabVIEW by pci bus, in described PC, include realtime graphic corrective system provided by the invention, for correcting described tip deflection signal.For real-time phase correction module, as shown in Figure 2, its course of work is: first by the detection signal of bimorph, obtain the delayed phase angle θ of bimorph, utilize delayed phase angle θ and each cycle sampling number N, obtain the k that counts of delayed phase, finally the data sequence of collection is moved k position, correction initial acquisition data being carried out to delayed phase can be realized.The described k that counts is rounded by following formulae discovery and obtains:
k＝(θ/180)*N/2
For real time nonlinear correction module, be carry out on the basis of carrying out delayed phase correction, its course of work as shown in Figure 3, first, for sine sweep, by each cycle sampling number N of setting, determines the locus i at each sampled point place.Secondly, determine the mapping relations between the locus i of each sampled point and real sample message (i.e. tip deflection signal), this wherein comprises three kinds of relations mapped: many-one mapping, one to one mapping and cannot map.
For the situation that many-one maps, the numerical value of collection identical for locus is averaged, as the data after correction; For situation about mapping one to one, using the numerical value on this locus directly as the data after correction; For the situation that cannot map, maximal rate due to sine sweep can not exceed the twice of linear scanning velocity, so, only there will be at most the situation that a region cannot be corresponding between adjacent area, therefore, we using adjacent for this region two numerical value average as correct after data.Whole image correction process with data acquisition, store and carry out simultaneously, do not need to carry out the process in later stage to the data gathered.
Embodiment:
A real-time image correction system is based on existing hardware and LabVIEW software simulating.Hardware is formed as shown in Figure 1, high-speed data acquisition card DA exports sinusoidal drive signals and drives bimorph resonance, the detection signal of synchronous acquisition bimorph and the tip deflection signal of probe deflection detection system, high-speed data acquisition card is connected with the PC that LabVIEW is housed by pci bus.Use LabVIEW software, design real-time phase correction module and real time nonlinear correction module.
In real-time phase correction module, as shown in Figure 2, for bimorph detection signal, utilize the extraction simple signal module in LabVIEW, the angle θ (degree) of the detection signal delayed phase described in detection, utilize formula k=(θ/180) × N/2, round the number k calculating data and need be shifted.Wherein, N is each cycle sampling number.Then utilize the one-dimension array shift module in LabVIEW, the tip deflection signal data of collection are moved k position successively, the correction to described detection signal delayed phase can be realized.
In real time nonlinear correction module, as shown in Figure 3.
The first step, utilizes formula
n=0 ~ (N/2-1), n is integer, rounds the locus i calculated in sine sweep corresponding to the n-th sampled point, wherein, N is each cycle sampling number, and all locus i are formed an one-dimension array, and described one-dimension array has N/2 element.
Second step, the number m of each locus i in the array that the calculating first step obtains, the i.e. number of the tip deflection signal data that each locus i is corresponding.Specifically can be realized by While circulation nested in the For circulation in software, the counting terminal count of While circulation then exports the number m of each locus i: utilize the search one-dimension array module in software, in the retrieval first step in the one-dimension array that obtains element i from 0 to the position at the place of (N/2-1) each i, if do not find element i, then the counting terminal of While circulation is counted as 0, While circulates stopping, retrieving next element i+1; If have found element i, then the counting terminal count accumulative 1 of While circulation, continues the next position finding element i, until search out last position of i, the counting terminal of While circulation is counted as m, and While circulates stopping, retrieving next element i+1.Finally obtain the one-dimension array of N/2 element.
3rd step, the number m of each locus i determined by second step, is determined which kind of mapping relations is the corresponding tip deflection signal data of each locus i are, then processes respectively.At For circulation nested inside construction of condition, the "True" "false" branched structure of construction of condition is utilized to adopt diverse ways to carry out Data correction.First, utilize array of indexes module, return the element m of the one-dimension array index position i that second step obtains respectively.
As shown in Figure 3, if m>0, then that many-one maps (m>1, the corresponding multiple tip deflection signal data in same locus) or map (m=1) one to one, then utilize the embedded For circulation of the "True" branched structure of construction of condition, utilize the array of indexes module in software, m the tip deflection signal data retrieving the same space position i get average, obtain the size of data after this locus corrects (include m=1 here, be equivalent to directly the data corresponding to locus be exported).
If m=0, it is then the situation (i place, locus does not have corresponding tip deflection signal data) that cannot map, then utilize the "false" branched structure of construction of condition, utilize the array of indexes module in software to retrieve the tip deflection signal data of this locus i previous some i-1 and rear 1 i+1, the mean value then getting these two data values is as the last correction data of this locus i.
Tip deflection signal after the correction so just obtained.
It should be noted that, above-described embodiment is only used to technical characteristic of the present invention is described, is not used to limit patent claim of the present invention, but its theory and structure still belongs to patented claim category of the present invention.
Claims (5)
1. for a real-time correction method for Fast atom power micro-imaging, it is characterized in that: the tip deflection signal comprising offset of sinusoidal scanning acquisition carries out real-time phase and corrects and real time nonlinear correction;
Described real-time phase corrects and is specially: by the detection signal of bimorph, obtain the delayed phase angle θ of bimorph, utilize delayed phase angle θ and each cycle sampling number N, obtain the k that counts of delayed phase, finally the data sequence of collection is moved k position, namely realize correction initial acquisition data being carried out to delayed phase; The k that counts of described delayed phase is obtained by following formulae discovery:
k＝(θ/180)×N/2
Described real time nonlinear corrects and is specially: first set each cycle sampling number N, determine the locus i at each sampled point place; Secondly, determine the mapping relations between the locus i of each sampled point and tip deflection signal, according to described mapping relations, tip deflection signal is corrected; Described locus i, utilizes formula
n=0 ~ (N/2-1), n is integer, rounds the locus i calculated in sine sweep corresponding to the n-th sampled point.
2. a kind of real-time correction method for Fast atom power micro-imaging according to claim 1, is characterized in that: the relation of described mapping comprises:
Many-one maps: the corresponding multiple tip deflection signal in same locus;
Map one to one: a corresponding tip deflection signal in locus;
Cannot map: certain locus place does not have corresponding tip deflection signal.
3. a kind of real-time correction method for Fast atom power micro-imaging according to claim 1 and 2, is characterized in that:
For the situation that many-one maps, the numerical value of collection identical for locus is averaged, as the data after correction;
For situation about mapping one to one, using the numerical value on this locus directly as the data after correction;
For the situation that cannot map, using adjacent for locus two numerical value average as correct after data.
4. for a System with Real-Time for Fast atom power micro-imaging, it is characterized in that: comprise real-time phase correction module and real time nonlinear correction module; Described real-time phase correction module is used for carrying out delayed phase correction to tip deflection signal, and the signal that described real time nonlinear correction module is used for real-time phase correction module exports carries out gamma correction;
The specific implementation of described real-time phase correction module is as follows:
First by the detection signal of bimorph, obtain the delayed phase angle θ of bimorph, utilize delayed phase angle and each cycle sampling number N, obtain the k that counts of delayed phase, finally the data sequence of collection is moved k position, correction initial acquisition data being carried out to delayed phase can be realized; The described k that counts is obtained by following formulae discovery:
k＝(θ/180)*N/2
For real time nonlinear correction module, be carry out on the basis of carrying out delayed phase correction, its course of work is: first, for sine sweep, by each cycle sampling number N of setting, determines the locus i at each sampled point place; Secondly, determine the mapping relations between the locus i of each sampled point and tip deflection signal, this wherein comprises three kinds of relations mapped: many-one maps, map one to one and cannot map;
For the situation that many-one maps, the numerical value of collection identical for locus is averaged, as the data after correction;
For situation about mapping one to one, using the numerical value on this locus directly as the data after correction;
For the situation that cannot map, using adjacent for this locus two numerical value average as correct after data.
5. a kind of System with Real-Time for Fast atom power micro-imaging according to claim 4, is characterized in that: described real-time phase correction module and real time nonlinear correction module use LabVIEW software simulating.
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| CN110082014B (en) * | 2013-12-07 | 2021-08-03 | 布鲁克公司 | Atomic force microscope with probe for interacting with a sample |
| CN107451032B (en) * | 2017-07-31 | 2020-06-23 | 哈尔滨电机厂有限责任公司 | Data storage method of high-voltage frequency converter data acquisition system based on controller local area network interface card |
| CN109917407A (en) * | 2019-03-22 | 2019-06-21 | 中国科学院重庆绿色智能技术研究院 | A kind of near field probe distance measuring method and device based on laser reflection |
| CN113554067B (en) * | 2021-07-01 | 2023-06-16 | 清华大学深圳国际研究生院 | Optical fiber winding defect detection method and device based on ensemble learning |
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| CN1300562C (en) * | 2004-02-26 | 2007-02-14 | 上海大学 | Model parameter calibrating and nontinear correcting method of piezoelectric actuator in scanning probe microscope |
| CN100547344C (en) * | 2007-02-07 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Sine phase modulation interferometer for real-time measurement of surface topography |
| CN100578680C (en) * | 2007-06-01 | 2010-01-06 | 天津大学 | X-Y two-dimensional plane scan driving system for piezoelectric sweep tube of scanning probe microscope |
| CN100559135C (en) * | 2007-11-05 | 2009-11-11 | 北京航空航天大学 | Integral aperture phase measurement and compensation method and system |
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| CN101576466B (en) * | 2009-05-31 | 2011-01-12 | 北京航空航天大学 | Combined three-dimensional high-speed scanning device |
| US8654439B2 (en) * | 2010-08-20 | 2014-02-18 | Nec Laboratories America, Inc. | Look-up table and digital transmitter based architecture for fiber nonlinearity compensation |
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