CN102892553B - 用于化学机械平面化的具有表面活性剂的固定磨料垫片 - Google Patents

用于化学机械平面化的具有表面活性剂的固定磨料垫片 Download PDF

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Publication number
CN102892553B
CN102892553B CN201180023624.XA CN201180023624A CN102892553B CN 102892553 B CN102892553 B CN 102892553B CN 201180023624 A CN201180023624 A CN 201180023624A CN 102892553 B CN102892553 B CN 102892553B
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CN
China
Prior art keywords
abrasive
structured abrasive
structured
meth
abrasive article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN201180023624.XA
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English (en)
Chinese (zh)
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CN102892553A (zh
Inventor
朱莉·Y·乾
小吉米·R·巴兰
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN102892553A publication Critical patent/CN102892553A/zh
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN201180023624.XA 2010-05-11 2011-04-29 用于化学机械平面化的具有表面活性剂的固定磨料垫片 Expired - Fee Related CN102892553B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US33335110P 2010-05-11 2010-05-11
US61/333,351 2010-05-11
PCT/US2011/034439 WO2011142986A1 (en) 2010-05-11 2011-04-29 Fixed abrasive pad with surfactant for chemical mechanical planarization

Publications (2)

Publication Number Publication Date
CN102892553A CN102892553A (zh) 2013-01-23
CN102892553B true CN102892553B (zh) 2016-04-27

Family

ID=44383031

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180023624.XA Expired - Fee Related CN102892553B (zh) 2010-05-11 2011-04-29 用于化学机械平面化的具有表面活性剂的固定磨料垫片

Country Status (7)

Country Link
US (1) US20130059506A1 (enExample)
JP (1) JP2013526777A (enExample)
KR (1) KR20130081229A (enExample)
CN (1) CN102892553B (enExample)
SG (1) SG185523A1 (enExample)
TW (1) TWI532597B (enExample)
WO (1) WO2011142986A1 (enExample)

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KR20150058302A (ko) * 2012-09-21 2015-05-28 쓰리엠 이노베이티브 프로퍼티즈 컴파니 개선된 cmp 성능을 위한 고정 연마 웹으로의 첨가제의 혼입
WO2014189086A1 (ja) * 2013-05-24 2014-11-27 Jsr株式会社 化学機械研磨パッドおよびそれを用いた化学機械研磨方法
US20150104940A1 (en) * 2013-10-11 2015-04-16 Air Products And Chemicals Inc. Barrier chemical mechanical planarization composition and method thereof
US9873180B2 (en) * 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
CN107078048B (zh) 2014-10-17 2021-08-13 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US10399201B2 (en) 2014-10-17 2019-09-03 Applied Materials, Inc. Advanced polishing pads having compositional gradients by use of an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10875145B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US10821573B2 (en) 2014-10-17 2020-11-03 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
EP3224000B1 (en) * 2014-11-26 2020-11-04 3M Innovative Properties Company Abrasive articles, assemblies, and methods with gripping material
EP3237147B1 (en) * 2014-12-23 2020-02-19 Saint-Gobain Ceramics&Plastics, Inc. Shaped abrasive particles and method of forming same
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US10632585B2 (en) 2015-04-23 2020-04-28 University Of Florida Research Foundation, Inc. Hybrid tool with both fixed-abrasive and loose-abrasive phases
JP6940495B2 (ja) 2015-10-30 2021-09-29 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
USD850041S1 (en) * 2017-07-31 2019-05-28 3M Innovative Properties Company Scouring pad
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
KR20220062419A (ko) 2017-10-04 2022-05-16 생-고뱅 어브레이시브즈, 인코포레이티드 연마 물품 및 이의 형성 방법
KR20210042171A (ko) 2018-09-04 2021-04-16 어플라이드 머티어리얼스, 인코포레이티드 진보한 폴리싱 패드들을 위한 제형들
US11331767B2 (en) 2019-02-01 2022-05-17 Micron Technology, Inc. Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
MX2021011834A (es) 2019-03-29 2022-02-22 Saint Gobain Abrasives Inc Soluciones de rectificación de rendimiento.
US12226876B2 (en) 2019-04-03 2025-02-18 Saint-Gobain Abrasives, Inc. Abrasive article, abrasive system and method for using and forming same
US11851570B2 (en) * 2019-04-12 2023-12-26 Applied Materials, Inc. Anionic polishing pads formed by printing processes
USD934573S1 (en) * 2019-12-19 2021-11-02 3M Innovative Properties Company Sponge with surface pattern
US11813712B2 (en) 2019-12-20 2023-11-14 Applied Materials, Inc. Polishing pads having selectively arranged porosity
US11806829B2 (en) 2020-06-19 2023-11-07 Applied Materials, Inc. Advanced polishing pads and related polishing pad manufacturing methods
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
CN117327450A (zh) * 2023-09-21 2024-01-02 浙江芯秦微电子科技有限公司 一种抛光液的制备方法

Citations (5)

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US5152917A (en) * 1991-02-06 1992-10-06 Minnesota Mining And Manufacturing Company Structured abrasive article
CN1210752A (zh) * 1997-07-18 1999-03-17 可泰克斯股份有限公司 具有表面活性结构的共聚物作为分散剂和/或磨料的应用
CN1266392A (zh) * 1997-09-11 2000-09-13 诺顿公司 含有粘附的功能粉末的结构磨料
US6139594A (en) * 1998-04-13 2000-10-31 3M Innovative Properties Company Abrasive article with tie coat and method
CN101175608A (zh) * 2005-04-14 2008-05-07 圣戈本磨料股份有限公司 用于形成结构研磨制品的方法

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US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
RU2124978C1 (ru) 1993-09-13 1999-01-20 Миннесота Майнинг Энд Мэнюфекчуринг Компани Абразивное изделие, способ его производства, способ его использования для чистовой обработки и рабочий инструмент для его производства
US5454844A (en) 1993-10-29 1995-10-03 Minnesota Mining And Manufacturing Company Abrasive article, a process of making same, and a method of using same to finish a workpiece surface
WO1995022436A1 (en) 1994-02-22 1995-08-24 Minnesota Mining And Manufacturing Company Abrasive article, a method of making same, and a method of using same for finishing
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
JP3732267B2 (ja) * 1996-01-29 2006-01-05 大日本印刷株式会社 研磨テープの製造方法
US5692950A (en) 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US6475253B2 (en) * 1996-09-11 2002-11-05 3M Innovative Properties Company Abrasive article and method of making
US5876268A (en) * 1997-01-03 1999-03-02 Minnesota Mining And Manufacturing Company Method and article for the production of optical quality surfaces on glass
US5851247A (en) 1997-02-24 1998-12-22 Minnesota Mining & Manufacturing Company Structured abrasive article adapted to abrade a mild steel workpiece
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
US20030017797A1 (en) * 2001-03-28 2003-01-23 Kendall Philip E. Dual cured abrasive articles
US7150771B2 (en) * 2004-06-18 2006-12-19 3M Innovative Properties Company Coated abrasive article with composite tie layer, and method of making and using the same
US7497885B2 (en) 2006-12-22 2009-03-03 3M Innovative Properties Company Abrasive articles with nanoparticulate fillers and method for making and using them
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
US8348723B2 (en) * 2009-09-16 2013-01-08 3M Innovative Properties Company Structured abrasive article and method of using the same

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US5152917A (en) * 1991-02-06 1992-10-06 Minnesota Mining And Manufacturing Company Structured abrasive article
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
CN1210752A (zh) * 1997-07-18 1999-03-17 可泰克斯股份有限公司 具有表面活性结构的共聚物作为分散剂和/或磨料的应用
CN1266392A (zh) * 1997-09-11 2000-09-13 诺顿公司 含有粘附的功能粉末的结构磨料
US6139594A (en) * 1998-04-13 2000-10-31 3M Innovative Properties Company Abrasive article with tie coat and method
CN101175608A (zh) * 2005-04-14 2008-05-07 圣戈本磨料股份有限公司 用于形成结构研磨制品的方法

Also Published As

Publication number Publication date
SG185523A1 (en) 2012-12-28
WO2011142986A1 (en) 2011-11-17
CN102892553A (zh) 2013-01-23
TWI532597B (zh) 2016-05-11
US20130059506A1 (en) 2013-03-07
TW201213121A (en) 2012-04-01
KR20130081229A (ko) 2013-07-16
JP2013526777A (ja) 2013-06-24

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160427

Termination date: 20180429

CF01 Termination of patent right due to non-payment of annual fee